Target material component detection auxiliary tool

Abstract

The utility model relates to the technical field of target material inspection, in particular to a target material component detection auxiliary tool which comprises a fixing device and a supporting frame, the fixing device and the supporting frame are both installed on an inspection platform, and the fixing device and the supporting frame are arranged adjacently; the fixing device is used for fixing the alloy analyzer, and the alloy analyzer can be reversely placed on the fixing device; the support frame is used for placing a target material, and the detection window of the alloy analyzer can extend into the support frame and is in contact with the detection surface of the target material. The method has the effect that the process of holding the alloy analyzer by hand can be omitted, so that the detection efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of target inspection technologies, and particularly to an auxiliary tool for detecting the composition of a target. Background Art

[0002] Due to the large-scale development and application of electronic thin films, optical thin films, optoelectronic thin films, magnetic thin films, superconducting thin films, etc. in high-tech and industry, targets have gradually developed into a specialized industry. With the continuous development of thin film technology, the target market will further expand.

[0003] A target is a sputtering source that forms various functional thin films by magnetron sputtering, multi-arc ion plating, or other types of coating equipment on a substrate under appropriate process conditions, also known as a sputtering target. There are various types of target products, including metal targets, alloy targets, ceramic targets, etc., which are widely used in fields such as semiconductors, thin film solar energy, magnetic storage, glass coating, new energy, hard coatings, decoration, etc. Due to the high degree of specialization, they are usually customized according to the specific requirements of customers, with relatively small production volumes, belonging to a small-batch production mode. The composition range of target products is wide. During the finished product processing, several types of target products are often processed simultaneously at the same process station, so there is a risk of material mixing.

[0004] To strengthen control, during the inspection of target finished products, it is required to weigh each piece one by one, and judge and prevent material mixing through strict weight range requirements. However, for different types of target products with similar densities, they cannot be distinguished by weighing, and at this time, the composition of each target must be detected one by one. The detection method recorded in the related technology is: placing the target finished product on the inspection platform, using a handheld X-ray fluorescence spectrometer (referred to as an alloy analyzer), aligning the test window of the analyzer with and contacting the surface of the target, and analyzing each piece one by one. However, when detecting the composition of batch products, the staff needs to move the alloy analyzer again and again, and the inspection efficiency is relatively low. Utility Model Content

[0005] In order to be able to omit the process of holding the alloy analyzer to improve the inspection efficiency, this application provides an auxiliary tool for detecting the composition of a target.

[0006] An auxiliary tool for detecting the composition of a target provided by this application adopts the following technical solution:

[0007] An auxiliary tool for detecting the composition of a target includes a fixing device and a support frame. Both the fixing device and the support frame are installed on the inspection platform, and the fixing device and the support frame are arranged adjacent to each other;

[0008] The fixing device is used to fix the alloy analyzer, and the alloy analyzer can be placed upside down on the fixing device;

[0009] The support frame is used to place the target, and the detection window of the alloy analyzer can extend into the support frame and contact the detection surface of the target.

[0010] By adopting the above technical solution, during operation, the alloy analyzer is fixed upside down through the fixing device, the target is placed on the support frame, and the detection window of the alloy analyzer extends into the support frame to ensure that the detection window contacts the surface of the target, so that the alloy analyzer can inspect the target; in this way, the inspection platform and the support frame are respectively used to support and fix the alloy analyzer and the target, and manual holding operation is no longer required. After one product is detected, the target product is manually removed and another product is placed, improving the inspection efficiency.

[0011] Optionally, the support frame includes a frame body, a placement plate and a height adjustment mechanism. The placement plate is slidably connected to the frame body, the height adjustment mechanism is installed on the frame body, and the height adjustment mechanism drives the placement plate to move along the height direction of the frame body.

[0012] By adopting the above technical solution, the height adjustment mechanism is used to adjust the height of the placement plate to meet different types of alloy analyzers, ensuring that in each working condition, the detection window of the alloy analyzer contacts the detection surface of the target and ensuring the accuracy of the detection results.

[0013] Optionally, the support frame further includes a scale, the scale is arranged on the frame body and along the length direction of the frame body, and the scale is located on one side of the placement plate.

[0014] By adopting the above technical solution, the scale can improve the accuracy.

[0015] Optionally, positioning grooves are formed on the placement plate.

[0016] By adopting the above technical solution, the accuracy of the placement position of the target can be ensured.

[0017] Optionally, the frame body and the inspection platform are detachably connected.

[0018] By adopting the above technical solution, the installation and disassembly of the frame body are facilitated.

[0019] Optionally, the support frame includes a bottom plate and a support portion. The bottom plate is installed on the inspection platform, and the support portion is arranged on the bottom plate. The support portion is used to fix the alloy analyzer.

[0020] By adopting the above technical solution, the rapid fixation of the alloy analyzer can be achieved, and the operation is simple and convenient.

[0021] Optionally, the support portion includes a first support plate and a second support plate, and the first support plate and the second support plate are spaced apart.

[0022] By adopting the above technical solution, the cooperation of the first support plate and the second support plate is utilized to improve the stability.

[0023] Optionally, the support portion further includes a third support plate, and the third support plate is disposed between the first support plate and the second support plate.

[0024] By adopting the above technical solution, the use of the third support plate further improves the stability.

[0025] Optionally, a protective layer is coated on each of the first support plate, the second support plate, and the third support plate.

[0026] By adopting the above technical solution, damage to the alloy analyzer is avoided during installation and fixation.

[0027] Optionally, the bottom plate and the inspection platform are detachably connected.

[0028] By adopting the above technical solution, the installation and disassembly of the fixing device are facilitated.

[0029] In summary, the present application includes at least one of the following beneficial technical effects:

[0030] 1. In the present application, an auxiliary tool for detecting the composition of a target material is provided, which includes an inspection platform and a support frame. The inspection platform is used to fixedly hold an alloy analyzer upside down, and the support frame is used to place the target material. During operation, the alloy analyzer is fixed on the inspection platform, and the target material is placed on the support frame, so that the alloy analyzer can inspect the target material. In this way, the alloy analyzer and the target material are respectively supported by using the inspection platform and the support frame, and manual holding operation is no longer required. After one product is detected, the target material product is manually removed and another product is placed, improving the inspection efficiency.

[0031] 2. In the present application, the support frame includes a placement plate and a height adjustment mechanism. The height adjustment mechanism is used to adjust the height of the placement plate to meet different types of alloy analyzers, ensuring that in each working condition, the detection window of the alloy analyzer contacts the detection surface of the target material, ensuring the accuracy of the detection result;

[0032] 3. In the present application, the inspection platform includes a first support plate, a second support plate, and a third support plate. The first support plate, the second support plate, and the third support plate are arranged at intervals in sequence. There is a height difference between the first support plate and the second support plate, which is used to support the alloy analyzer. The second support plate and the alloy analyzer can be tied together, thereby realizing the stable fixation of the alloy analyzer. Description of the Drawings

[0033] Figure 1 is an axonometric view of the auxiliary tool for detecting the composition of the target material in the present application;

[0034] Figure 2 It is the front view of the auxiliary tooling for detecting the target material components in the present application.

[0035] Explanation of the reference numerals in the drawings: 1. Fixing device; 11. Base plate; 12. Supporting part; 121. First supporting plate; 122. Second supporting plate; 123. Third supporting plate; 2. Support frame; 21. Frame body; 22. Placing plate; 23. Height adjusting mechanism; 24. Scale; 3. Positioning groove. Detailed implementation manners

[0036] The following further elaborates on the present application in conjunction with the attached Figure 1-2 drawings.

[0037] An embodiment of the present application discloses an auxiliary tooling for detecting the target material components. Referring to Figure 1 and Figure 2 , the auxiliary tooling for detecting the target material components includes a fixing device 1 and a support frame 2. Both the fixing device 1 and the support frame 2 are installed on the inspection platform, and the fixing device 1 and the support frame 2 are arranged adjacent to each other. The fixing device 1 is used to fix the alloy analyzer, and the alloy analyzer can be placed upside down on the fixing device 1; the support frame 2 is used to place the target material, and the detection window of the alloy analyzer can extend into the support frame 2 and contact the detection surface of the target material.

[0038] During operation, the alloy analyzer is fixed upside down through the fixing device 1, the target material is placed on the support frame 2, and the detection window of the alloy analyzer extends into the support frame 2 to ensure that the detection window contacts the surface of the target material. Then the alloy analyzer can inspect the target material. In this way, by using the inspection platform and the support frame 2 respectively, the support and fixation of the alloy analyzer and the target material are realized, and manual holding operation is no longer required. After one product is detected, the target material product is manually removed and another product is placed, improving the inspection efficiency.

[0039] Specifically, referring to Figure 1 and Figure 2 , the support frame 2 includes a base plate 11 and a supporting part 12. The base plate 11 is installed on the inspection platform, and the supporting part 12 is arranged on the base plate 11. The supporting part 12 is used to fix the alloy analyzer. During installation, the alloy analyzer is fixed through the supporting part 12, which is convenient and fast.

[0040] Referring to Figure 1 and Figure 2, the support part 12 includes a first support plate 121 and a second support plate 122, and the first support plate 121 and the second support plate 122 are distributed at intervals. The first support plate 121 and the second support plate 122 are used to support the alloy analyzer, and the alloy analyzer and the second support plate 122 can be fixed by tying. Of course, according to the external shape structure of the alloy analyzer, there is a height difference between the first support plate 121 and the second support plate 122 to meet the support requirements.

[0041] Further, referring to Figure 1 and Figure 2 , the support part 12 further includes a third support plate 123, and the third support plate 123 is arranged between the first support plate 121 and the second support plate 122. Preferably, the third support plate 123 is located at the middle of the first support plate 121 and the second support plate 122, which plays a role in strengthening the support and further improves the stability.

[0042] A protective layer (not shown in the figure) is coated on the first support plate 121, the second support plate 122 and the third support plate 123. When fixing the alloy analyzer, the protective layer can prevent the surface of the alloy analyzer from being damaged. The protective layer can be a rubber layer, a resin layer or a sponge, etc.

[0043] Referring to Figure 1 and Figure 2 , the support frame 2 includes a frame body 21, a placement plate 22 and a height adjustment mechanism 23. The placement plate 22 is slidably connected to the frame body 21, and the height adjustment mechanism 23 is installed on the frame body 21. The height adjustment mechanism 23 drives the placement plate 22 to move along the height direction of the frame body 21. The height adjustment mechanism 23 is used to adjust the height of the placement plate 22 to meet different types of alloy analyzers, ensure that the detection window of the alloy analyzer contacts the detection surface of the target material under each working condition, and ensure the accuracy of the detection results.

[0044] In this embodiment, the height adjustment mechanism 23 can be a manual adjustment type or an automatic adjustment type. Specifically, the height adjustment mechanism 23 can be a lead screw nut mechanism, a belt drive, a chain drive, etc., or a linear motor, an electric push rod, etc. are directly used. In this embodiment, it is not limited.

[0045] Referring to Figure 1 and Figure 2 , the support frame 2 further includes a scale 24, and the scale 24 is arranged on the frame body 21 and along the length direction of the frame body 21. The scale 24 is located on one side of the placement plate 22. The scale 24 can accurately determine the height of the placement plate 22 and improve the accuracy of the operation.

[0046] Referring to Figure 1 and Figure 2, a positioning groove 3 is formed on the placement plate 22. In this embodiment, multiple placement grooves can be provided. Through the placement grooves, the placement position of the target can be determined, improving the accuracy during inspection.

[0047] In this embodiment, the frame 21 and the inspection platform are preferably detachably connected, and the bottom plate 11 and the support plate are preferably detachably connected. By means of detachable connection, the convenience during installation is improved. The detachable connection method can adopt screw connection, bolt connection, snap connection, etc.

[0048] The implementation principle of an auxiliary tooling for detecting the composition of a target in an embodiment of the present application is as follows: The alloy analyzer is fixed on the inspection platform through the first support plate 121, the second support plate 122, and the third support plate 123. Then, according to the height of the probe of the alloy analyzer, the target is placed on the support frame 2, the height of the support frame 2 is adjusted, and the detection window of the alloy analyzer is extended into the support frame 2 to ensure that the detection window is in contact with the surface of the target. Press the detection button to perform composition detection. After one product is detected, manually remove the target product and place another product, and so on to detect the composition of each piece one by one. In this way, the process of holding the alloy analyzer by hand can be omitted, improving the inspection efficiency.

[0049] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application should be covered within the protection scope of the present application.

Claims

1. An auxiliary tooling for detecting the composition of a target, characterized in that: It includes a fixing device (1) and a support frame (2). Both the fixing device (1) and the support frame (2) are installed on the inspection platform, and the fixing device (1) and the support frame (2) are arranged adjacent to each other. The fixing device (1) is used to fix the alloy analyzer, and the alloy analyzer can be placed upside down on the fixing device (1). The support frame (2) is used to place the target. The detection window of the alloy analyzer can extend into the support frame (2) and contact the detection surface of the target.

2. The auxiliary tooling for detecting the target material composition according to claim 1, characterized in that: The support frame (2) includes a frame body (21), a placement plate (22) and a height adjustment mechanism (23). The placement plate (22) is slidably connected to the frame body (21). The height adjustment mechanism (23) is installed on the frame body (21), and the height adjustment mechanism (23) drives the placement plate (22) to move along the height direction of the frame body (21).

3. The auxiliary tooling for detecting the target material composition according to claim 2, wherein: The support frame (2) further includes a scale (24). The scale (24) is arranged on the frame body (21) and along the length direction of the frame body (21). The scale (24) is located on one side of the placement plate (22).

4. The auxiliary tooling for detecting the target material composition according to claim 2, characterized in that: A positioning groove (3) is formed on the placement plate (22).

5. The auxiliary tooling for detecting the target material composition according to claim 2, wherein: The frame body (21) and the inspection platform are detachably connected.

6. The auxiliary tooling for detecting the target material composition according to claim 1, wherein: The support frame (2) includes a bottom plate (11) and a support portion (12). The bottom plate (11) is installed on the inspection platform, and the support portion (12) is arranged on the bottom plate (11). The support portion (12) is used to fix the alloy analyzer.

7. The auxiliary tool for detecting the target material composition according to claim 6, wherein: The support portion (12) includes a first support plate (121) and a second support plate (122). The first support plate (121) and the second support plate (122) are spaced apart.

8. The auxiliary tooling for detecting the target material composition according to claim 7, wherein: The support portion (12) further includes a third support plate (123). The third support plate (123) is arranged between the first support plate (121) and the second support plate (122).

9. The auxiliary tool for detecting the target material composition according to claim 8, wherein: A protective layer is coated on the first support plate (121), the second support plate (122) and the third support plate (123).

10. The auxiliary tooling for detecting the target material composition according to claim 6, characterized in that: The bottom plate (11) and the inspection platform are detachably connected.

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