Cleaning tank and cleaning machine with same

Abstract

The utility model provides a rinse tank and a cleaning machine with the rinse tank, and relates to the technical field of silicon wafer cleaning, the rinse tank comprises an inner tank body, an outer tank body, a uniform flow pipe and a circulating return pipe, the bottom of the inner tank body is obliquely arranged, and the top of the inner tank body is provided with an overflow port; the outer tank body is located on the outer side of the inner tank body, the outer tank body is communicated with the inner tank body through an overflow port, and a drainage groove is formed in the bottom of the outer tank body; the flow uniformizing pipe is arranged in the inner tank body, and flow uniformizing holes are formed in the flow uniformizing pipe; one end of the circulation backflow pipe is connected with the flow uniformizing pipe, and the other end of the circulation backflow pipe can be connected with the liquid discharging groove through a connecting pipeline, so that a circulation loop is formed between the inner groove body and the outer groove body, and the ultrasonic cleaning device has the advantages of being higher in cleanliness, better in liquid discharging efficiency, better in circulation stability and uniformity and better in ultrasonic cleaning effect when used in cooperation with ultrasonic waves.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer cleaning, in particular to a cleaning tank and a cleaning machine with the cleaning tank. Background Art

[0002] In the semiconductor industry, silicon wafer cleaning is a very important process. The main purpose of silicon wafer cleaning is to remove particles, organic contamination and metal contamination on its surface. Through the combination of chemical cleaning and water washing, accompanied by physical measures such as ultrasonic, heating, and vacuum pumping, the impurities and oil adsorbed on the surface of the object to be cleaned are removed, so that the impurities are desorbed from the surface of the object to be removed, and then rinsed with a large amount of high-purity water and cold deionized water to obtain a clean surface. It is very important to ensure a constant temperature, a clean cleaning tank, a constant concentration of the cleaning solution, and a stable ultrasonic wave during the cleaning process. To ensure these processes, the container for holding the cleaning solution is crucial.

[0003] Currently, the cleaning tank body of the cleaning machine on the market usually has an inner tank and an outer tank sleeved outside the inner tank. The outer tank completely wraps the inner tank, and a liquid discharge port is provided on the side wall of the outer tank. There are problems such as incomplete liquid discharge, unstable cleaning liquid circulation, and poor ultrasonic effect, and the production process cannot reach the optimal effect.

[0004] Therefore, there is an urgent need for a cleaning tank that ensures stable circulation and uniform ultrasonic intensity, and a cleaning machine with the cleaning tank. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a cleaning tank and a cleaning machine with the cleaning tank to solve the technical problems of incomplete liquid discharge, unstable cleaning liquid circulation, and poor ultrasonic effect in the prior art, which cannot make the production process reach the optimal effect. The preferred technical solutions provided by the utility model can produce many technical effects as described below.

[0006] To achieve the above purpose, the utility model provides the following technical solutions:

[0007] A cleaning tank provided by the utility model includes:

[0008] An inner tank body, the bottom of the inner tank body is inclined, and an overflow port is provided at the top of the inner tank body;

[0009] An outer tank body, located outside the inner tank body, the outer tank body is communicated with the inner tank body through the overflow port, and a liquid discharge groove is provided at the bottom of the outer tank body;

[0010] A flow equalizing pipe, arranged inside the inner tank body, and flow equalizing holes are provided on the flow equalizing pipe;

[0011] The circulating return pipe is connected to the flow equalizing pipe at one end and can be connected to the liquid discharge groove through a connecting pipe at the other end, so as to form a circulating loop between the inner tank body and the outer tank body.

[0012] Preferably, the outer tank body is connected to the outer wall of the inner tank body, the bottom of the outer tank body is inclined, and the liquid discharge groove is arranged on the deeper side of the outer tank body.

[0013] Preferably, the outer tank body includes a return cavity and a liquid discharge cavity which are communicated, and the return cavity and the liquid discharge cavity are in an "L" shape, wherein:

[0014] The cross-section of the return cavity is in the shape of a right trapezoid, and the bottom of the return cavity is inclinedly arranged on the outer wall of the inner tank body;

[0015] The cross-section of the liquid discharge cavity is rectangular, and is arranged on the deeper side of the return cavity. Moreover, the depth of the liquid discharge cavity is greater than the depth of the return cavity, and the liquid discharge groove is arranged at the bottom of the liquid discharge cavity;

[0016] The liquid discharge groove is located above the flow equalizing pipe.

[0017] Preferably, the flow equalizing pipe adopts a "U" - shaped structure, and includes a first flow equalizing pipe and a second flow equalizing pipe which are parallel to each other, and a third flow equalizing pipe which is perpendicular to the first flow equalizing pipe and the second flow equalizing pipe respectively, wherein:

[0018] Both the first flow equalizing pipe and the second flow equalizing pipe are arranged to be connected to the inner side of the inner tank body at one end;

[0019] Both ends of the third flow equalizing pipe are respectively connected to the other end of the first flow equalizing pipe and the other end of the second flow equalizing pipe;

[0020] The circulating return pipe is connected to the third flow equalizing pipe.

[0021] Preferably, flow equalizing holes are arranged on both the first flow equalizing pipe and the second flow equalizing pipe. At least two rows of flow equalizing holes are arranged on each flow equalizing pipe, and at least two rows of flow equalizing holes are all located at the bottom of the flow equalizing pipe.

[0022] Preferably, the included angle between the liquid outlet direction of the flow equalizing hole and the flow equalizing pipe is set as an acute angle.

[0023] Preferably, a circulating pump, a filtering device and a heater are sequentially arranged on the connecting pipe, and the heater is close to the circulating return pipe.

[0024] Preferably, the cleaning tank further includes a base, and the base is arranged at the bottom of the inner tank body.

[0025] Preferably, a liquid discharge pipe is further provided on the side wall of the inner tank body.

[0026] A cleaning machine includes a cleaning machine body and the above-mentioned cleaning tank, and the cleaning tank is installed on the cleaning machine body.

[0027] A cleaning tank and a cleaning machine having the same provided by the present utility model include an inner tank body, an outer tank body, a flow equalizing pipe, and a circulating return pipe. An overflow port is provided at the top of the inner tank body. The outer tank body is located outside the inner tank body, and the outer tank body is communicated with the inner tank body through the overflow port. A liquid discharge groove is provided at the bottom of the outer tank body. A flow equalizing pipe is installed inside the inner tank body. One end of the circulating return pipe is connected to the flow equalizing pipe, and the other end can be connected to the liquid discharge groove through a connecting pipeline, so as to form a circulating loop between the inner tank body and the outer tank body to ensure the circulation of the liquid medicine. And the bottom of the inner tank body is inclined to prevent the ultrasonic wave from hitting the bottom of the inner tank body vertically, which can ensure the ultrasonic effect. By providing an overflow port at the top of the inner tank body, the circulation of the liquid medicine can be ensured to be sufficient and the overflow to be uniform. The flow equalizing pipe can ensure the stable flow rate of the liquid medicine circulation. By providing a liquid discharge groove at the bottom of the outer tank body, the liquid medicine can automatically enter the liquid discharge groove located at its bottom, which can ensure that the liquid medicine can be drained clean and ensure the stable circulation of the liquid medicine. Description of the Drawings

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0029] Figure 1 is a schematic structural diagram of an embodiment of the cleaning tank of the present utility model;

[0030] Figure 2 is Figure 1 the front view structural diagram of;

[0031] Figure 3 is Figure 1 the left view structural diagram of;

[0032] Figure 4 is Figure 1 the top view structural diagram of.

[0033] In the figure: 1, inner tank body; 10, overflow port; 2, outer tank body; 20, liquid discharge groove; 21, return cavity; 22, liquid discharge cavity; 3, flow equalizing pipe; 30, flow equalizing hole; 31, first flow equalizing pipeline; 32, second flow equalizing pipeline; 33, third flow equalizing pipeline; 4, circulating return pipe; 5, base; 6, liquid discharge pipe. Detailed Embodiments

[0034] To make the objectives, technical solutions, and advantages of the present utility model clearer, the technical solutions of the present utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other implementation manners obtained by those of ordinary skill in the art without creative efforts fall within the scope protected by the present utility model.

[0035] Figure 1 is the structural schematic diagram of this embodiment. As Figure 1 shown, this embodiment provides a cleaning tank, which includes an inner tank body 1, an outer tank body 2, a flow equalizing pipe 3, and a circulating return pipe 4. Among them, the inner tank body 1, the outer tank body 2, the flow equalizing pipe 3, and the circulating return pipe 4 are made of an integrated quartz material. The quartz material has the advantages of high temperature resistance, corrosion resistance, and easy cleaning, and is the preferred material for this cleaning tank. The cleaning tank made of quartz material is suitable for chemical liquids such as hydrochloric acid, ammonia water, and hydrogen peroxide, and can be used as the cleaning tank of a cleaning machine in the semiconductor industry.

[0036] Specifically, Figure 2 is the front view structural schematic diagram of this embodiment. As Figure 2 shown, both the inner tank body 1 and the outer tank body 2 adopt a rectangular tank structure. The bottom of the inner tank body 1 is inclined, and the left side of the inner tank body 1 is shallower and the right side is deeper. When this cleaning tank is used to clean silicon wafers, in order to ensure the cleaning effect, an ultrasonic device needs to be installed at the bottom of the inner tank body 1. To ensure that no metal or impurities are introduced, the ultrasonic vibration plate needs to be installed outside the inner tank body 1, and the sound wave is transmitted to the inside of the inner tank body 1 through water. To ensure the ultrasonic effect, the bottom of the inner tank body 1 in this embodiment is set to be inclined to avoid the ultrasonic wave hitting the bottom of the inner tank body 1 vertically and ensure the ultrasonic effect.

[0037] An overflow port 10 is provided at the top of the inner tank body 1 in this embodiment. Specifically, the overflow port 10 is a serrated groove structure opened at the top of the side wall of the inner tank body 1. Compared with the prior art in which an overflow pipeline communicating with the outer tank body 2 is designed on the side wall of the inner tank body 1, the overflow port 10 in this embodiment can avoid problems such as uneven overflow when the chemical liquid in the inner tank body 1 overflows back to the outer tank body 2 during the circulation process, and avoid insufficient circulation of the chemical liquid.

[0038] Figure 3 is the left view structural schematic diagram of this embodiment. As Figure 3 shown, the outer tank body 2 is located outside the inner tank body 1. The outer tank body 2 is communicated with the inner tank body 1 through the overflow port 10, and a liquid discharge groove 20 is provided at the bottom of the outer tank body 2. By providing the liquid discharge groove 20 at the bottom of the outer tank body 2, the chemical liquid can automatically enter the liquid discharge groove 20 located at its bottom, which can ensure that the chemical liquid is drained cleanly and ensure the stable circulation of the chemical liquid.

[0039] Optionally, a conical structure or an arc-shaped side wall is provided at the liquid drainage groove 20 in this embodiment to ensure complete liquid drainage.

[0040] To further ensure that the liquid medicine can be drained completely and circulated stably, the outer tank body 2 in this embodiment is connected to the outer wall of the inner tank body 1, and the bottom of the outer tank body 2 is inclined.

[0041] As Figure 2 shown, the left side of the outer tank body 2 is shallower and the right side is deeper, forming a slope from left to right, and the liquid drainage groove 20 is arranged on the deeper side of the outer tank body 2. With this arrangement, it can be ensured that when draining the liquid, the liquid medicine in the outer tank body 2 can all gather in the liquid drainage groove 20 and then be discharged, ensuring that the liquid medicine can be completely emptied.

[0042] To ensure the stable circulation flow rate of the liquid medicine, a flow equalizing pipe 3 is installed inside the inner tank body 1 in this embodiment. The flow equalizing pipe 3 is installed at the bottom of the inner tank body 1, and flow equalizing holes 30 are provided on the flow equalizing pipe 3. One end of the circulating return pipe 4 is connected to the flow equalizing pipe 3, and the other end can be connected to the liquid drainage groove 20 through a connecting pipeline, forming a circulation loop between the inner tank body 1 and the outer tank body 2.

[0043] To ensure the stable circulation and use of the liquid medicine, a circulation pump, a filtering device, and a heater are sequentially arranged on the connecting pipeline in this embodiment, and the heater is close to the circulating return pipe 4.

[0044] The liquid medicine circulation principle in this embodiment is as follows: During use, the circulating return pipe 4 and the liquid drainage groove 20 are connected through a connecting pipeline with a circulation pump, a filtering device, and a heater. The circulation pump is started to pump the liquid medicine out of the outer tank body 2, and after passing through the circulation pump, the filtering device, and the heater, it flows back to the circulating return pipe 4. Then, through the connection between the circulating return pipe 4 and the flow equalizing pipe 3, the liquid medicine enters the inner tank body 1 through the flow equalizing holes 30 of the flow equalizing pipe 3. The liquid medicine in the inner tank body 1 flows back into the outer tank body 2 again through the overflow port 10, achieving the purpose of circulating the liquid medicine.

[0045] As an optional implementation manner, the outer tank body 2 includes a communicating return cavity 21 and a liquid drainage cavity 22, and the return cavity 21 and the liquid drainage cavity 22 are in an "L" shape.

[0046] Among them, the cross-section of the return cavity 21 is a right trapezoid, and the bottom of the return cavity 21 is inclinedly arranged on the outer wall of the inner tank body 1; the cross-section of the liquid drainage cavity 22 is a rectangle, which is arranged on the deeper side of the return cavity 21, and the depth of the liquid drainage cavity 22 is greater than the depth of the return cavity 21. The bottom of the liquid drainage cavity 22 is provided with a liquid drainage groove 20; the liquid drainage groove 20 is located above the flow equalizing pipe 3 to ensure that the liquid medicine can be drained completely and circulated stably.

[0047] As an alternative embodiment, the flow equalizing pipe 3 adopts a "U" - shaped structure, including a first flow equalizing pipeline 31 and a second flow equalizing pipeline 32 that are parallel to each other, and a third flow equalizing pipeline 33 that is perpendicular to the first flow equalizing pipeline 31 and the second flow equalizing pipeline 32 respectively.

[0048] Among them, both the first flow equalizing pipeline 31 and the second flow equalizing pipeline 32 are arranged such that one end is connected to the inner side of the inner tank body 1; both ends of the third flow equalizing pipeline 33 are respectively connected to the other end of the first flow equalizing pipeline 31 and the other end of the second flow equalizing pipeline 32. The circulating return pipe 4 is connected to the third flow equalizing pipeline 33.

[0049] That is, the third flow equalizing pipeline 33 is used to connect with the circulating return pipe 4, and both the first flow equalizing pipeline 31 and the second flow equalizing pipeline 32 are connected to the third flow equalizing pipeline 33. Two groups of flow equalizing pipelines, namely the first flow equalizing pipeline 31 and the second flow equalizing pipeline 32, are arranged in parallel in the width direction of the inner tank body 1, which can further ensure the stability of the liquid medicine reflux.

[0050] Specifically, in this embodiment, flow equalizing holes 30 are provided on both the first flow equalizing pipeline 31 and the second flow equalizing pipeline 32. Figure 4 This is the top - view structural schematic diagram of this embodiment. As Figure 4 shown, at least two rows of flow equalizing holes 30 are provided on each flow equalizing pipeline, and at least two rows of flow equalizing holes 30 are all located at the bottom of the flow equalizing pipeline.

[0051] Optionally, the angle between the liquid - discharging direction of the flow equalizing hole 30 and the flow equalizing pipeline is set as an acute angle. Setting the flow equalizing hole 30 at a certain downward angle can ensure that the refluxed liquid medicine enters the inner tank body 1 from the lower end of the flow equalizing pipe 3, ensuring that the impact of the refluxed liquid medicine on the silicon wafer at the upper end of the flow equalizing pipe 3 is minimized, and ensuring that the silicon wafer reacts uniformly in the tank body.

[0052] As an alternative embodiment, the cleaning tank further includes a base 5, and the base 5 is arranged at the bottom of the inner tank body 1. On the one hand, the base 5 plays a role in supporting the entire cleaning tank. On the other hand, by arranging the base 5 obliquely, an inclined effect can be generated at the bottom of the inner tank body 1.

[0053] As an alternative embodiment, a drain pipe 6 is further provided on the side wall of the inner tank body 1, and the liquid medicine in the inner tank body 1 can be discharged through the drain pipe 6 to clean the inner tank body.

[0054] This embodiment also provides a cleaning machine, including a cleaning machine body and the above - mentioned cleaning tank, and the cleaning tank is installed on the cleaning machine body. By adopting this cleaning tank, the cleaning machine has a higher cleaning cleanliness, better liquid - discharging efficiency, better circulation stability and uniformity. When used in combination with ultrasonic waves, the ultrasonic cleaning effect is also better, and the ultrasonic intensity tested by an ultrasonic sound pressure meter is increased by 20% compared with the cleaning tank using the existing technology.

[0055] The above are only the specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of changes or substitutions, which should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the said claims.

Claims

1. A cleaning tank, characterized in that, Comprising: An inner tank body, the bottom of the inner tank body is inclined, and an overflow port is arranged at the top of the inner tank body; An outer tank body, located outside the inner tank body, the outer tank body is communicated with the inner tank body through the overflow port, and a liquid discharge groove is arranged at the bottom of the outer tank body; A flow equalizing pipe, arranged inside the inner tank body, and flow equalizing holes are arranged on the flow equalizing pipe; A circulating return pipe, one end is connected to the flow equalizing pipe, and the other end can be connected to the liquid discharge groove through a connecting pipeline, so as to form a circulating loop between the inner tank body and the outer tank body.

2. The cleaning tank according to claim 1, wherein: The outer tank body is connected to the outer wall of the inner tank body, the bottom of the outer tank body is inclined, and the liquid discharge groove is arranged on the deeper side of the outer tank body.

3. The cleaning tank according to claim 2, characterized in that: The outer tank body includes a communicating return cavity and a liquid discharge cavity, the return cavity and the liquid discharge cavity are in an "L" shape, wherein: The cross section of the return cavity is a right trapezoid, and the bottom of the return cavity is inclinedly arranged on the outer wall of the inner tank body; The cross section of the liquid discharge cavity is rectangular, arranged on the deeper side of the return cavity, and the depth of the liquid discharge cavity is greater than the depth of the return cavity, and the liquid discharge groove is arranged at the bottom of the liquid discharge cavity; The liquid discharge groove is located above the flow equalizing pipe.

4. The cleaning tank according to any one of claims 1 to 3, characterized in that: The flow equalizing pipe adopts a "U" type structure, including a first flow equalizing pipeline and a second flow equalizing pipeline that are parallel to each other, and a third flow equalizing pipeline that is perpendicular to the first flow equalizing pipeline and the second flow equalizing pipeline respectively, wherein: Both the first flow equalizing pipeline and the second flow equalizing pipeline are arranged to be connected to the inner side of the inner tank body at one end; Both ends of the third flow equalizing pipeline are respectively connected to the other end of the first flow equalizing pipeline and the other end of the second flow equalizing pipeline; The circulating return pipe is connected to the third flow equalizing pipeline.

5. The cleaning tank according to claim 4, wherein: Flow equalizing holes are arranged on both the first flow equalizing pipeline and the second flow equalizing pipeline, at least two rows of flow equalizing holes are arranged on each flow equalizing pipeline, and at least two rows of flow equalizing holes are all located at the bottom of the flow equalizing pipeline.

6. The cleaning tank according to claim 5, wherein: The included angle between the liquid discharge direction of the flow equalizing hole and the flow equalizing pipeline is set as an acute angle.

7. The cleaning tank according to any one of claims 1-3, 5-6, characterized in that: A circulating pump, a filtering device and a heater are sequentially arranged on the connecting pipeline, and the heater is close to the circulating return pipe.

8. The cleaning tank according to any one of claims 1-3, 5-6, characterized in that: The cleaning tank further includes a base, and the base is arranged at the bottom of the inner tank body.

9. The cleaning tank according to any one of claims 1-3, 5-6, characterized in that: A liquid discharge pipe is further arranged on the side wall of the inner tank body.

10. A cleaning machine, characterized in that: Comprising a cleaning machine body and the cleaning tank according to any one of claims 1-9, and the cleaning tank is installed on the cleaning machine body.

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