Composite polishing device for coupling laser and plasma

Abstract

The utility model discloses a laser and plasma coupling composite polishing device which comprises an argon sealing chamber, and a three-axis system composed of an X-axis guide rail, a Y-axis guide rail, a Z-axis guide rail and a rotating disc is arranged in the argon sealing chamber. A replaceable clamping platform used for clamping a workpiece to be polished is installed on the rotating disc. An air pressure sensor and an argon concentration sensor are arranged in the argon sealing chamber; the infrared fiber laser, the collimator, the beam expander and the galvanometer are coaxially arranged, and the field lens is arranged below the galvanometer; a plasma polishing device is further arranged in the argon sealing chamber, and the field lens and the plasma polishing device are right opposite to the clamping platform by adjusting the three-axis system. The surface roughness of the material is reduced through cooperative polishing of the coupled laser and the plasma, on one hand, secondary reconstruction can be conducted on the surface of the material through the synergistic effect of the plasma and the infrared laser, and therefore the surface quality after polishing is improved; and on the other hand, surface polishing machining of the complex curved surface workpiece can be completed in combination with a controllable moving three-axis system, synchronous and large-breadth machining is achieved by adjusting machining parameters of related infrared laser and laser excited plasma and motion parameters of the clamping platform, and the adaptability of workpiece machining materials is improved. In combination with motion control, on the premise that the surface quality after polishing is guaranteed, the polishing efficiency is greatly improved through automation, and the application scene and marketization development of laser polishing are further widened.

Description

Technical Field

[0001] The utility model belongs to the technical field of laser polishing, and in particular relates to a composite polishing device for coupling laser and plasma. Background Art

[0002] With the development of the times, industrial manufacturing has increasingly higher requirements for the surface roughness of materials, and laser polishing technology has been invented. As a new type of polishing process, laser polishing technology has the characteristics of high precision and fast processing. Laser polishing uses a highly focused laser beam to polish the surfaces of different materials, making it easier to meet the strict requirements of modern manufacturing processes for roughness. Laser polishing technology is a non-contact polishing technology that can automate the polishing process, so it has extremely high industrial application value. In addition, laser polishing does not require the use of mechanical abrasives or surface polishing tools. This polishing technology can not only be used for non-spherical and non-rotating optical polishing surfaces, but also for polishing surfaces with complex morphologies, which has very obvious advantages over traditional polishing. Laser polishing technology is favored by researchers because of its higher efficiency and faster speed when polishing the surfaces of different materials. Therefore, this technology is also increasingly widely used in the surface treatment of various materials.

[0003] Plasma polishing technology is an advanced technology that uses a plasma system to polish and treat the surface of materials. In the plasma polishing process, by introducing an ion system on the surface of the workpiece and utilizing the high energy and high efficiency of plasma, the surface of the material can be improved and optimized. With the continuous improvement of material surface quality requirements and the continuous emergence of new materials, plasma polishing technology has important application prospects in modern manufacturing. So far, plasma polishing technology has been widely used in the polishing and surface modification of metals, ceramics, semiconductors, glass and other materials.

[0004] Plasma polishing and laser polishing have been gradually used in the polishing field, but they both have corresponding disadvantages.

[0005] For plasma polishing:

[0006] 1. Due to the material properties, different materials may respond differently to plasma. Some materials are not sensitive to plasma polishing, which can result in unclear polishing effects or difficulty in processing. Therefore, plasma polishing technology is limited in the selection of applicable materials.

[0007] 2. Processing speed and efficiency: Plasma polishing has requirements on the initial condition of the material surface and often requires mechanical polishing in advance, which has low removal efficiency. In comparison, laser polishing is faster and more efficient.

[0008] For laser polishing:

[0009] Limited processing accuracy: When the laser polishing technology is processing workpieces with complex textures and irregular shapes, if the laser treatment is too fast, the accuracy will be reduced. For such workpieces, additional processing steps may be required to achieve the desired surface quality. Compared with plasma polishing, the accuracy of laser polishing is limited. Summary of the Invention

[0010] In order to solve the problems existing in the above-mentioned prior art, the purpose of the present utility model is to provide a composite polishing device that couples laser and plasma. The composite polishing of laser and plasma is completed by exciting plasma with laser, which improves the polishing accuracy, can quickly remove dirt and oxide layers on the material surface, and at the same time forms a plasma gas-phase reaction layer on the surface to further improve the surface quality. The device of the present utility model is applicable to the surface treatment of a variety of different materials, including metals, ceramics, plastics, etc., and has a wider scope of application.

[0011] To achieve the above object, the present utility model adopts the following technical solutions:

[0012] A composite polishing device that couples laser and plasma, including an argon gas sealing chamber 2. Inside the argon gas sealing chamber 2, there is a three-axis system composed of an X-axis guide rail 3, a Y-axis guide rail 4, a Z-axis guide rail 5 and a rotating disk 6; a replaceable clamping platform 18 for clamping the workpiece to be polished is installed on the rotating disk 6; a pressure sensor 8 and an argon gas concentration sensor 9 are arranged inside the argon gas sealing chamber 2; an infrared fiber laser 26, a collimator 25, a beam expander 24, and a galvanometer 21 are coaxially arranged, and a field lens 22 is arranged below the galvanometer 21; a plasma polishing device is also arranged inside the argon gas sealing chamber. The plasma polishing device includes a support shaft 7 and a plasma generator 16; the support shaft 7 is installed inside the argon gas sealing chamber 2 and is fixedly connected to the plasma generator 16; by adjusting the three-axis system, the nozzle 19 of the field lens 22 and the plasma generator 16 is aligned with the clamping platform 18.

[0013] Furthermore, the infrared fiber laser 26, the collimator 25, and the beam expander 24 are coaxially arranged inside a housing 10 on the outer side wall of the argon gas sealing chamber 2. The housing 10 is supported by a column 20. The galvanometer 21 located inside the argon gas sealing chamber 2 is arranged at a position coaxial with the beam expander 24 through an adapter neck 23 to ensure its concentricity.

[0014] Furthermore, the base 1 and the argon gas sealing chamber 2 are connected by bolts. The four sides of the argon gas sealing chamber 2 are fixed by fixing plates 11. The fixing plates 11 and the base 1 are fixedly connected by bolts to ensure its stability.

[0015] Further, the X-axis guide rail 3 is fixedly connected to the base 1 by bolts, and an X-axis direction slider 12 is slidably arranged on the X-axis guide rail 3; the Y-axis guide rail 4 is mounted on the X-axis direction slider 12 and fixedly connected by bolts, and a Y-axis direction slider 13 is slidably arranged on the Y-axis guide rail 4; the Z-axis guide rail 5 is mounted on the Y-axis direction slider 13 and fixedly connected by bolts, and a Z-axis direction slider 15 is slidably arranged on the Z-axis guide rail 5; the X-axis direction slider 12, the Y-axis direction slider 13 and the Z-axis direction slider 15 are driven by a servo motor through a worm 14; the rotating disk 6 is mounted on the Z-axis direction slider 15 and fixedly connected by bolts.

[0016] Further, the clamping platform 18 is connected to the rotating disk 6 through a screw.

[0017] Further, the column 20 is fixedly connected to the base 1 by bolts, the housing 10 is connected to the column 20 by bolts, the infrared fiber laser 26, the collimator 25, and the beam expander 24 are fixedly connected to the housing 10 through latches, the adapter neck 23 is fixedly connected to the end of the housing 10, and the galvanometer 21 is fixedly connected to the other end of the adapter neck 23 by bolts.

[0018] Further, the galvanometer 21 is threadedly connected to the field lens 22 through an adapter ring.

[0019] Further, the adapter neck 23 is installed inside the argon sealing chamber 2, and the adapter neck 23 is sealed with the side wall of the argon sealing chamber through sealant, ensuring the airtightness of the device.

[0020] Further, the air pressure sensor 8 is adhesively bonded to the side wall of the argon sealing chamber 2, and the argon concentration sensor 9 is adhesively bonded to the side wall of the argon sealing chamber 2.

[0021] Further, the argon switch 17 is installed outside the argon sealing chamber 2 for filling argon into the argon sealing chamber 2.

[0022] Compared with the prior art, the present utility model has the following advantages:

[0023] Compared with a single laser polishing device, the present utility model uses the technology of coupling laser and plasma for polishing, which can effectively improve the polishing speed and the surface precision of the polished surface. If an infrared laser of about 1064 nm is used to process the material, a surface deep melting mechanism will occur, which will generate Marangoni convection and form microstructures on the surface. Therefore, polishing with a low roughness cannot be achieved. If an ultraviolet laser of about 355 nm is used to process the material, the cost is high and the efficiency is low. The present utility model integrates the plasma emitter and the laser emitter into one. First, the laser is used for pre-polishing to quickly polish the surface, and then the high-energy laser and the plasma beam are jointly focused on the workpiece to form metal plasma. Thus, laser-plasma coupling polishing is carried out, saving space, ensuring that the influence areas of the plasma and the laser are the same, further improving the surface quality, and enhancing the smoothness and adhesion. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a side view of the composite polishing device of the present utility model.

[0025] Figure 2 This is an internal view of the infrared fiber laser of the composite polishing device of the present utility model.

[0026] Figure 3 This is a front view of the composite polishing device of the present utility model.

[0027] In the drawings: 1. Base, 2. Argon sealing chamber, 3. X-axis guide rail, 4. Y-axis guide rail, 5. Z-axis guide rail, 6. Rotating disk, 7. Support shaft, 8. Pressure sensor, 9. Argon concentration sensor, 10. Housing, 11. Fixed plate, 12. X-axis direction slider, 13. Y-axis direction slider, 14. Worm, 15. Z-axis direction slider, 16. Plasma emitter, 17. Argon switch, 18. Clamping platform, 19. Nozzle, 20. Column, 21. Galvo scanner, 22. Field lens, 23. Adapter neck, 24. Beam expander, 25. Collimator, 26. Infrared fiber laser. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] In order to make the objectives and technical solutions of the present utility model clearer and easier to understand, the present utility model will be further described in detail below with reference to the drawings and embodiments. The specific embodiments described herein are only used to explain the present utility model and are not intended to limit the present utility model.

[0029] Refer to Figures 1 to 3, a composite polishing device for coupling laser and plasma, comprising a base 1. The base 1 should be a sufficiently large rectangle capable of accommodating the column 20 and the argon sealing chamber 2. An argon sealing chamber 2 is provided on the base 1, and an X-axis guide rail 3, a Y-axis guide rail 4, and a Z-axis guide rail 5 are arranged inside. The power is provided by a guide rail motor and transmitted by a transmission worm 14. Among them: The X-axis guide rail 3 is fixedly connected to the base 1 by bolts, and an X-axis direction slider 12 is slidably arranged on the X-axis guide rail 3; the Y-axis guide rail 4 is mounted on the X-axis direction slider 12 and fixedly connected by bolts, and a Y-axis direction slider 13 is slidably arranged on the Y-axis guide rail 4; the Z-axis guide rail 5 is mounted on the Y-axis direction slider 13 and fixedly connected by bolts, and a Z-axis direction slider 15 is slidably arranged on the Z-axis guide rail 5; the X-axis direction slider 12, the Y-axis direction slider 13, and the Z-axis direction slider 15 are driven by a servo motor through the worm 14; a rotating disk 6 is mounted on the Z-axis direction slider 15 and fixedly connected by bolts. The rotating disk 6 is connected to the Z-axis guide rail 5 through the vertical Z-axis direction slider 15, so that the rotating disk 6 can slide along the Z-axis direction. The workpiece to be polished is horizontally placed on the clamping platform 18 and clamped by a fixture. The moving speed of the moving guide rails of the three-axis system can reach 200 mm / s, the working accuracy is ±0.02 mm, the vertical load can reach 30 kg, and the perpendicular load can reach 20 kg. A pressure sensor 8 and an argon concentration sensor 9 are arranged inside the argon sealing chamber 2. The housing 10 is supported on the outer side wall of the argon sealing chamber 2 through the column 20. A laser generating module is installed on the housing 10, and an infrared fiber laser 26, a collimator 25, and a beam expander 24 are installed in sequence. The transfer neck 23 fixes the galvanometer 21 at a position coaxial with the beam expander 24, and a field lens 22 is arranged below the galvanometer 21. A plasma polishing device is also arranged inside the argon sealing chamber. The plasma polishing device includes a support shaft 7 and a plasma generator 16; the support shaft 7 is installed inside the argon sealing chamber 2 and fixedly connected to the plasma generator 16; by adjusting the three-axis system, the field lens 22 and the nozzle 19 of the plasma generator 16 are aligned with the clamping platform 18.

[0030] The base 1 is provided with a vertical column 20, on which an infrared laser optical path is installed. The direction of the optical path is perpendicular to the vertical column 20 and parallel to the bottom surface of the base 1. In the optical path, an infrared fiber laser 26, a collimator 25, a beam expander 24 of the infrared laser, an adapter neck 23 of the infrared laser, a galvanometer scanner 22 of the infrared laser, and a field lens 21 of the infrared laser are installed in sequence. Among them, the power of the infrared fiber laser 26 is 100W. The beam expander 24 of the infrared laser is an adjustable magnification beam expander, and the magnification is adjustable between 1 and 1.3 times. The galvanometer scanner 22 of the infrared laser is connected into the optical path through the adapter neck 23 of the infrared laser, and the field lens 21 of the infrared laser is installed below the galvanometer scanner 22 of the infrared laser. Among them, the spot size acceptable by the lens of the galvanometer scanner 22 of the infrared laser is 6 - 10mm, the working area size of the field lens 21 of the infrared laser is 110mm × 110mm, and the focal length is 160mm, ensuring moderate laser precision, a suitable working range, and full utilization of energy.

[0031] The working method of a composite polishing device for coupling laser and plasma of the present utility model includes the following steps:

[0032] Step 1: Adjust the X-axis guide rail 3, Y-axis guide rail 4, and Z-axis guide rail 5 to make the clamping plate 18 located at the focal plane of the infrared fiber laser 26;

[0033] Step 2: Clamp the workpiece to be polished at the clamping plate 18;

[0034] Step 3: Adjust the Z-axis guide rail 5 to make the surface of the workpiece to be polished coincide with the focal plane of the infrared fiber laser 26; display the contour on the surface of the workpiece to be polished through infrared light;

[0035] Step 4: Close the argon gas seal chamber door, press the argon gas switch, and fill the argon gas seal chamber 2 with argon until the reading of the argon gas concentration sensor meets the requirements;

[0036] Step 5: Turn on the infrared fiber laser 26 for rapid preliminary polishing, adjust the positions of the X-axis direction slider, Y-axis direction slider, and Z-axis direction slider to process different areas on the surface of the workpiece to be polished; adjust the angle of the rotating disk and the position of the Z-axis direction slider to process the area with a certain curvature on the surface of the workpiece to be polished; then turn off the infrared fiber laser 26;

[0037] Step 6: Turn on the infrared fiber laser 26, and high-energy laser is focused on the workpiece to be polished to form a metal laser beam action area;

[0038] Step 7: Turn on the plasma generator 16 of the plasma polishing device to generate an atmospheric pressure plasma beam to impact the workpiece to be polished, forming a plasma action area;

[0039] Step 8: Adjust the positions of the two action areas to overlap, forming a laser-plasma composite action area;

[0040] Step 9: Adjust the positions of the slider 12 in the X-axis direction, the slider 13 in the Y-axis direction and the slider 15 in the Z-axis direction to machine different areas of the surface of the workpiece to be polished; adjust the angle of the rotating disc and the position of the slider in the Z-axis direction to machine the area with a certain curvature on the surface of the workpiece to be polished;

[0041] Step 10: Set the positions of the slider in the X-axis direction, the slider in the Y-axis direction, the slider in the Z-axis direction and the rotating disc to zero, turn on the exhaust switch, and discharge the argon gas in the chamber;

[0042] Step 11: When the value of the argon gas concentration sensor drops to a specified level, open the hatch, loosen the clamping platform, and take out the polished workpiece.

[0043] Adopt the method of combined laser and plasma polishing compound processing. First, compared with the traditional single laser beam processing and polishing system, the utility model can greatly improve the surface quality of the workpiece after polishing, and avoid the large energy loss and reflection caused by using the infrared laser of about 1064nm alone, which may lead to the damage of the laser, the reduction of the surface polishing processing efficiency and the increase of the polishing cost. The controllable moving three-axis system can complete the surface polishing processing of the workpiece with a certain curvature. And by adjusting the processing parameters of the relevant infrared laser and ultraviolet laser and the motion parameters of the clamping platform, synchronous and large-area processing can be realized, and the adaptability of the workpiece processing material can be improved. At the same time, the three-dimensional galvanometer in the utility model can further increase the processing depth of the workpiece surface, so as to realize the surface polishing of more complex curved surfaces such as engine turbine blades, worm gears, large curvature molds, etc., further improve the types of processed materials and the polishing efficiency, and broaden its market application.

[0044] The above content is only to illustrate the technical idea of the utility model, and the protection scope of the utility model cannot be limited thereby. Any modification made on the basis of the technical solution according to the technical idea proposed by the utility model falls within the protection scope of the claims of the utility model.

Claims

1. A composite polishing device for coupling a laser and a plasma, characterized in that It includes an argon-sealed chamber (2), inside which there is a three-axis system composed of an X-axis guide rail (3), a Y-axis guide rail (4), a Z-axis guide rail (5) and a rotating disk (6); a replaceable clamping platform (18) for clamping the workpiece to be polished is installed on the rotating disk (6); a pressure sensor (8) and an argon concentration sensor (9) are arranged inside the argon-sealed chamber (2); an infrared fiber laser (26), a collimator (25), a beam expander (24), and a galvanometer (21) are coaxially arranged, and a field lens (22) is arranged below the galvanometer (21); a plasma polishing device is also arranged inside the argon-sealed chamber, and the plasma polishing device includes a support shaft (7) and a plasma generator (16); the support shaft (7) is installed inside the argon-sealed chamber (2) and is fixedly connected to the plasma generator (16); by adjusting the three-axis system, the field lens (22) and the nozzle (19) of the plasma generator (16) are aligned with the clamping platform (18).

2. The composite polishing device for coupling laser and plasma according to claim 1, characterized in that, The infrared fiber laser (26), the collimator (25), and the beam expander (24) are coaxially arranged inside a housing (10) on the outer side wall of the argon-sealed chamber (2). The housing (10) is supported by a column (20), and the galvanometer (21) located inside the argon-sealed chamber (2) is arranged at a position coaxial with the beam expander (24) through an adapter neck (23).

3. The composite polishing device for coupling laser and plasma according to claim 1, characterized in that, The base (1) is bolted to the argon-sealed chamber (2), and the argon-sealed chamber (2) is fixed around by fixing plates (11), and the fixing plates (11) are bolted to the base (1).

4. The composite polishing device for coupling laser and plasma according to claim 1, characterized in that, The X-axis guide rail (3) is bolted to the base (1), and an X-axis direction slider (12) is slidably arranged on the X-axis guide rail (3); the Y-axis guide rail (4) is mounted on the X-axis direction slider (12) and bolted, and a Y-axis direction slider (13) is slidably arranged on the Y-axis guide rail (4); the Z-axis guide rail (5) is mounted on the Y-axis direction slider (13) and bolted, and a Z-axis direction slider (15) is slidably arranged on the Z-axis guide rail (5); the X-axis direction slider (12), the Y-axis direction slider (13), and the Z-axis direction slider (15) are driven by a servo motor through a worm (14); the rotating disk (6) is mounted on the Z-axis direction slider (15) and bolted.

5. The composite polishing device for coupling laser and plasma according to claim 1, wherein, The clamping platform (18) is connected to the rotating disk (6) through a screw.

6. The composite polishing device for coupling laser and plasma according to claim 1, wherein, The column (20) is bolted to the base, the housing (10) is bolted to the column (20), the infrared fiber laser (26), the collimator (25), and the beam expander (24) are fixedly connected to the housing (10) through latches, the adapter neck (23) is fixedly connected to the end of the housing (10), and the galvanometer (21) is bolted to the other end of the adapter neck (23).

7. A composite polishing device for coupling laser and plasma according to claim 1, characterized in that, The galvanometer (21) and the field lens (22) are connected through an adapter ring.

8. The composite polishing device for coupling laser and plasma according to claim 1, characterized in that, The adapter neck (23) is installed inside the argon-sealed chamber (2), and the adapter neck (23) is sealed with the side wall of the argon-sealed chamber by a sealant.

9. The composite polishing device for coupling laser and plasma according to claim 1, wherein, The pressure sensor (8) is glued to the side wall of the argon-sealed chamber (2), and the argon concentration sensor (9) is glued to the side wall of the argon-sealed chamber (2).

10. The composite polishing device for coupling laser and plasma according to claim 1, characterized in that, An argon switch (17) is installed outside the argon sealing chamber (2) for filling argon into the argon sealing chamber (2).

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