Mask transfer mechanism and mask transfer system

Abstract

The utility model provides a mask transfer mechanism and a mask transfer system, and relates to the technical field of photoetching equipment. The mask transfer mechanism comprises a sliding assembly and a taking and placing assembly which are in sliding connection, and the taking and placing assembly can move in the two directions perpendicular to each other in the extending direction of the sliding assembly; the taking and placing assembly comprises a mechanical arm used for taking and placing the mask plate. And the manipulator can rotate along the axis in the vertical direction. According to the mask transfer mechanism, the size of the overall structure is reduced through relative movement of all the components, meanwhile, the mask can be driven to flexibly move and rotate in multiple directions, and therefore accurate, stable and efficient transfer of the mask is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography equipment, in particular to a mask transfer mechanism and a mask transfer system. Background Art

[0002] The mask is an indispensable part of the photolithography process. In the photolithography process, the pattern on the mask needs to be transferred to the wafer through exposure. As a precision original, the mask is very sensitive to particles or contaminants, so it is stored in a dedicated mask box. During the exposure process, the mask is taken out of the mask box by a robot and transported to be placed on the mask stage for exposure.

[0003] Since there is a certain distance between the mask box and the mask stage, and the mask needs to be aligned and other actions during the transportation process, and the space inside the lithography machine is limited, how to make full use of the internal space of the lithography machine while ensuring the accurate, stable and efficient transportation of the mask is a technical problem that needs to be urgently solved in this field. Utility Model Content

[0004] The utility model aims to provide a mask plate transfer mechanism, which is small in size and can enable a manipulator to drive the mask plate to flexibly displace and rotate in multiple directions, so as to achieve accurate, stable and efficient transfer of the mask plate.

[0005] The embodiment of the utility model is achieved as follows:

[0006] One aspect of the utility model provides a mask transfer mechanism, including a sliding assembly and a pick-and-place assembly that are slidably connected, the pick-and-place assembly can move in two directions perpendicular to each other along the extension direction of the sliding assembly; the pick-and-place assembly includes a manipulator, the manipulator is used to pick up and place the mask; the manipulator can rotate along the vertical axis.

[0007] Optionally, the sliding assembly includes a first slide rail and a second slide rail arranged perpendicular to each other, the first slide rail is slidably provided with a first slider, the end of the second slide rail is fixedly connected to the first slider and can move in a horizontal direction along the extension direction of the first slide rail; the pick-and-place assembly is slidably connected to the second slide rail and can move in a vertical direction along the extension direction of the second slide rail.

[0008] Optionally, the pick-and-place assembly also includes a supporting part, the manipulator includes a main body and a fixed seat, one side of the supporting part is slidably connected to the second slide rail, and the fixed seat is fixedly connected to the side of the supporting part away from the second slide rail; the main body is hinged on the end face of the fixed seat, and can rotate with the axis of the fixed seat along the vertical direction as the rotating axis.

[0009] Optionally, the support part includes a connected support base and a spacer; a second slider is slidably disposed on the second slide rail, one side of the spacer is fixedly connected to the second slider, and the other side is fixedly connected to the spacer; the fixed seat of the manipulator is fixedly connected to the side of the support base away from the spacer.

[0010] Optionally, the main body includes a robotic arm, one end of the robotic arm is hinged to the end face of the fixed seat, and the robotic arm can rotate about the axis of the fixed seat in the vertical direction.

[0011] Optionally, there are multiple robotic arms, and adjacent robotic arms are hinged end to end; one end of the robotic arm close to the fixed seat is hinged to the end face of the fixed seat, and the robotic arm can rotate about the axis of the fixed seat in the vertical direction.

[0012] Optionally, the main body further includes a fork plate structure, and the fork plate structure is arranged at the end of the robotic arm away from the fixed seat; the robotic arm can drive the fork plate structure to rotate to pick up and place the mask plate.

[0013] Optionally, the fork plate structure includes a mounting part and fork rods, the mounting part is installed at the end of the robotic arm away from the fixed seat, and the two fork rods are arranged at opposite sides of one end of the mounting part at intervals; the vacuum suction nozzle can adsorb the mask plate.

[0014] Optionally, a reinforcing plate is arranged on the side of the second slide rail away from the picking and placing component, one side of the reinforcing plate is fixedly connected to the first slider, and the other side is fixedly connected to the second slide rail.

[0015] On the other hand, the present utility model provides a mask plate transfer system, including the above-mentioned mask plate transfer mechanism.

[0016] The beneficial effects of the present utility model include:

[0017] The present application provides a mask plate transfer mechanism, including a sliding component and a picking and placing component connected in a sliding manner, and the picking and placing component can move in two mutually perpendicular directions along the extending direction of the sliding component; the picking and placing component includes a manipulator for picking and placing the mask plate; the manipulator can rotate about the axis in the vertical direction. The mask plate transfer mechanism obtained by the above design reduces the volume of the overall structure through the relative movement of each component, can be arranged in the gap between the mask table and the mask plate storage library, and can complete the transfer of the mask plate between the mask plate storage library and the mask table or from the mask table to the mask plate storage library in this narrow gap. At the same time, it can drive the mask plate to displace and rotate flexibly in multiple directions to achieve accurate, stable and efficient transfer of the mask plate. Description of the Drawings

[0018] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the attached drawings required for use in the embodiments. It should be understood that the following attached drawings only show some embodiments of the present utility model and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related attached drawings can also be obtained based on these attached drawings.

[0019] Figure 1 One of the schematic structural diagrams of the mask transfer mechanism provided by the embodiment of the present utility model;

[0020] Figure 2 Another schematic structural diagram of the mask transfer mechanism provided by the embodiment of the present utility model;

[0021] Figure 3 Another schematic structural diagram of the mask transfer mechanism provided by the embodiment of the present utility model;

[0022] Figure 4 Another schematic structural diagram of the mask transfer mechanism provided by the embodiment of the present utility model;

[0023] Figure 5 Schematic diagram of the fork plate structure provided by the embodiment of the present utility model.

[0024] Icon: 100 - mask transfer mechanism; 110 - sliding component; 111 - first slide rail; 1111 - first slider; 112 - second slide rail; 1121 - second slider; 1122 - reinforcement plate; 120 - pick-and-place component; 121 - manipulator; 1211 - body; 1211a - robotic arm; 1211b - fork plate structure; 1211c - mounting part; 1211d - fork rod; 1212 - fixed seat; 1213 - vacuum suction nozzle; 122 - support part; 1221 - support seat; 1221a - first support plate; 1221b - second support plate; 1221c - reinforcement plate; 1222 - spacer plate. Specific embodiments

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the attached drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and shown in the attached drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0027] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be construed as indicating or implying relative importance.

[0028] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0029] Please refer to Figure 1 , this embodiment provides a mask transfer mechanism 100, which includes a sliding assembly 110 and a picking and placing assembly 120 that are slidably connected. The picking and placing assembly 120 can move in two mutually perpendicular directions along the extension direction of the sliding assembly 110; the picking and placing assembly 120 includes a manipulator 121, and the manipulator 121 is used to pick and place the mask; the manipulator 121 can rotate around the vertical axis.

[0030] Specifically, the present application provides a mask transfer mechanism 100 for transferring and moving the mask. It includes a sliding assembly 110 and a picking and placing assembly 120. The picking and placing assembly 120 includes a manipulator 121, and the manipulator 121 can pick up or put down the mask.

[0031] The picking and placing assembly 120 can move in two mutually perpendicular directions along the extension direction of the sliding assembly 110. At the same time, the manipulator 121 can rotate around the vertical axis, so that the mask can be displaced in multiple directions and rotated in multiple orientations, and the mask can be accurately transferred to the area to be placed.

[0032] Existing mask transfer mechanisms are usually installed inside the lithography machine. Due to the small internal space of the lithography machine, the moving space of the mask transfer mechanism is limited, resulting in a decrease in the accuracy when the mask transfer mechanism places the mask in the area to be placed, and a large offset of the mask. The mask transfer mechanism provided in this application reduces the volume of the overall structure through the relative movement of various components, can be installed in the gap between the mask stage and the mask storage library, and complete the transfer of the mask between the mask storage library and the mask stage or from the mask stage to the mask storage library in this narrow gap. At the same time, it can drive the mask to flexibly displace and rotate in multiple directions, and can accurately place the mask in the area to be placed through displacement and rotation even in a relatively limited space, improving the accuracy of the transfer process.

[0033] In an implementable manner of this application, as Figure 1 shown, the sliding component 110 includes a first slide rail 111 and a second slide rail 112 that are perpendicularly arranged. A first slider 1111 is slidably arranged on the first slide rail 111. The lower end of the second slide rail 112 is fixedly connected to the first slider 1111 and is perpendicularly arranged. The second slide rail 112 can move horizontally along the extension direction of the first slide rail 111; the picking and placing component 120 is slidably connected to the second slide rail 112 and can move vertically along the extension direction of the second slide rail 112.

[0034] Specifically, as Figure 1 shown, the sliding component 110 includes a first slide rail 111 and a second slide rail 112. A first slider 1111 is arranged on the first slide rail 111. The first slider 1111 can move horizontally along the extension direction of the first slide rail 111. According to the setting orientation of the first slide rail 111, the first slider 1111 can move in the horizontal direction along a first direction or along a second direction, where the first direction and the second direction are perpendicular to each other;

[0035] One end of the second slide rail 112 is fixedly connected to the first slider 1111, so that the second slide rail 112 can move horizontally along the extension direction of the first slide rail 111 through the first slider 1111; a second slider 1121 is arranged on the second slide rail 112. The second slider 1121 can move vertically along the extension direction of the second slide rail 112; one side of the picking and placing component 120 is fixedly connected to the second slider 1121, so that the picking and placing component 120 can move vertically. Therefore, the picking and placing component 120 can realize movement in the horizontal and vertical directions through the settings of the first slide rail 111 and the second slide rail 112. Through the relative movement of the first slide rail 111, the second slide rail 112 and the picking and placing component 120, the volume of the overall structure is reduced, and at the same time, the mask can be driven to flexibly displace in multiple directions, improving the transfer accuracy.

[0036] For example, Figure 2 As shown, the pick-and-place assembly 120 also includes a support portion 122, and the manipulator 121 includes a main body 1211 and a fixed seat 1212. One side of the support portion 122 is slidably connected to the second slide rail 112, and the fixed seat 1212 is fixedly connected to the side of the support portion 122 away from the second slide rail 112; the main body 1211 is hinged on the end face of the fixed seat 1212, and can rotate with the fixed seat 1212 as the axis of rotation along the vertical direction.

[0037] Specifically, the pick-and-place assembly 120 further includes a support portion 122, which is used to be fixedly connected to a second slider 1121 on the second slide rail 112 so as to slide relative to the second slide rail 112; Figure 3 As shown, the support portion 122 includes a support seat 1221, and the support seat 1221 is composed of a first support plate 1221a and a second support plate 1221b arranged vertically, and a reinforcing plate 1221c arranged between the first support plate 1221a and the second support plate 1221b; preferably, the reinforcing plate 1221c is a triangular structure, and its adjacent two sides are fixedly connected to the side edges of the first support plate 1221a and the second support plate 1221b, respectively, to improve the overall strength of the support seat 1221. The manipulator 121 is arranged in the accommodation space formed by the first support plate 1221a, the second support plate 1221b and the reinforcing plate 1221c, and the support seat 1221 can provide a certain supporting force for the manipulator 121.

[0038] The manipulator 121 includes a body 1211 and a fixed seat 1212, wherein the fixed seat 1212 is fixedly disposed in a containing space formed by a first support plate 1221a, a second support plate 1221b and a reinforcing plate 1221c, and the body 1211 is hinged at one end of the fixed seat 1212 away from the support seat 1221, and can rotate 360° with the axis of the fixed seat 1212 along the vertical direction as the rotation axis, wherein the setting direction of the central axis of the fixed seat 1212 is in the same direction as the extension direction of the second slide rail 112. It should be noted that since the manipulator 121 is disposed on the second slide rail 112, in order to avoid collision between the body 1211 and the second slide rail 112 during rotation, preferably, the body 1211 rotates 180° with the axis of the fixed seat 1212 along the vertical direction as the rotation axis.

[0039] By way of example, the support portion 122 includes a support seat 1221 and a partition plate 1222 that are connected to each other; the second slide rail 112 is slidably provided with a second slider 1121, one side of the partition plate 1222 is fixedly connected to the second slider 1121, and the other side is fixedly connected to the partition plate 1222; the fixed seat 1212 of the manipulator 121 is fixedly connected to the side of the support seat 1221 away from the partition plate 1222.

[0040] Specifically, the support plate not only includes the support base 1221, but also includes the spacer plate 1222. As Figure 3 shown, the spacer plate 1222 is disposed between the second slide rail 112 and the support base 1221; one side of the spacer plate 1222 is fixedly connected to the second slider 1121 on the second slide rail 112, and the other side is fixedly connected to the support base 1221. The support base 1221 can slide along the extension direction of the second slide rail 112 through the spacer plate 1222. It should be noted that at least one spacer plate 1222 is provided. Preferably, as Figure 3 shown, in order to improve the stability of the support portion 122, two spacer plates 1222 are provided, and the two spacer plates 1222 are spaced apart on opposite sides of the second slider 1121.

[0041] Through the setting of the spacer plate 1222, it is ensured that there is a sufficient spacing distance between the manipulator 121 and the second slide rail 112, so that the body 1211 of the manipulator 121 does not collide with the second slide rail 112 during the extension and rotation processes, improving the stability and reliability of the photomask transfer structure. It should be noted that the present application does not impose any restrictions on the specific thickness of the spacer plate 1222, as long as it can ensure that there is a sufficient spacing distance between the manipulator 121 and the second slide rail 112, so that the body 1211 of the manipulator 121 does not collide with the second slide rail 112 during the rotation process.

[0042] In an implementable manner of the present application, the body 1211 includes a robotic arm 1211a, one end of the robotic arm 1211a is hinged to the end face of the fixed seat 1212, and the robotic arm 1211a can rotate relative to the sliding assembly 110 with the central axis of the fixed seat 1212 as the rotation axis. In another implementable manner of the present application, as Figure 4 shown, the robotic arm 1211a includes a plurality of them, and adjacent robotic arms 1211a are hinged end to end; one end of the robotic arm 1211a close to the fixed seat 1212 is hinged to the end face of the fixed seat 1212, and the robotic arm 1211a can rotate with the axis of the fixed seat 1212 in the vertical direction as the rotation axis.

[0043] Specifically, the body 1211 includes one or more robotic arms 1211a. When the body 1211 includes a single robotic arm 1211a (not shown in the figure), one end of the robotic arm 1211a is hinged to the end face of the fixed seat 1212, and the robotic arm 1211a can rotate with the axis of the fixed seat 1212 in the vertical direction as the rotation axis; the other end of the robotic arm 1211a, that is, the free end, can pick up and place the photomask; wherein, the setting direction of the central axis of the fixed seat 1212 is the same as the extension direction of the second slide rail 112.

[0044] When the body 1211 includes a plurality of robotic arms 1211a, as Figure 4As shown, any two adjacent robotic arms 1211a are hinged end to end, enabling each robotic arm 1211a to rotate relative to the adjacent robotic arm 1211a; among them, one end of the robotic arm 1211a of the high-level fixing base 1212 is hinged to the end face of the fixing base 1212, enabling this robotic arm 1211a to rotate with the axis of the fixing base 1212 in the vertical direction as the rotation axis.

[0045] Furthermore, the body 1211 further includes a fork plate structure 1211b, and the fork plate structure 1211b is arranged at the end of the robotic arm 1211a away from the fixing base 1212; the robotic arm 1211a can drive the fork plate structure 1211b to rotate to pick up and place the mask plate.

[0046] Specifically, as Figure 4 shown, the body 1211 further includes a fork plate structure 1211b, and the fork plate structure 1211b is arranged at the end of the robotic arm 1211a away from the fixing base 1212, that is, arranged at the free end of the robotic arm 1211a. The fork plate structure 1211b can easily pick up and place the mask plate, and the robotic wall can cooperate with the first slide rail 111 and the second slide rail 112 to realize the displacement and rotation of the fork plate structure 1211b in the horizontal and vertical directions, improving the accuracy of the mask plate transfer process.

[0047] Exemplarily, the fork plate structure 1211b includes a mounting portion 1211c and fork rods 1211d. The mounting portion 1211c is installed at the end of the robotic arm 1211a away from the fixing base 1212, and the two fork rods 1211d are arranged at opposite sides of one end of the mounting portion 1211c at intervals; vacuum suction nozzles 1213 are arranged on the fork rods 1211d, and the vacuum suction nozzles 1213 can adsorb the mask plate.

[0048] Specifically, as Figure 4 and Figure 5 shown, the fork plate structure 1211b includes a mounting portion 1211c and fork rods 1211d. Among them, the mounting portion 1211c is arranged at the end of the robotic arm 1211a away from the fixing base 1212, that is, arranged at the free end of the robotic arm 1211a; there are two fork rods 1211d, and the two fork rods 1211d are arranged at intervals at one end of the mounting portion 1211c facing away from the robotic arm 1211a and on opposite sides of the mounting portion 1211c. Through the fork rods 1211d, it can extend under the mask plate, and then the robotic arm 121 drives the fork rods 1211d to slightly lift upward by a certain height to pick up and place the mask plate;

[0049] One side of the cross bar 1211d in contact with the mask plate is provided with a vacuum suction nozzle 1213. When the cross bar 1211d contacts the mask plate, the vacuum suction nozzle 1213 on the cross plate starts to evacuate, so that the mask plate is adsorbed on the cross bar 1211d and remains fixed, avoiding the situation that the mask plate falls off or is overly deflected due to the rapid movement of the manipulator 121 during transportation, and improving the reliability, accuracy and stability of the mask plate transportation mechanism 100.

[0050] Optionally, a reinforcing plate 1122 is provided on the side of the second slide rail 112 facing away from the picking and placing assembly 120. One side of the reinforcing plate 1122 is fixedly connected to the first slider 1111, and the other side is fixedly connected to the second slide rail 112.

[0051] Specifically, as Figure 2 shown, a reinforcing plate 1122 is provided on the side of the second slide rail 112 facing away from the picking and placing assembly 120. The reinforcing plate 1122 can further improve the overall stability of the sliding assembly 110 and the mask plate transportation mechanism 100. Preferably, there are two reinforcing plates 1122, and the two reinforcing plates 1122 are spaced apart on the opposite sides of the side of the second slide rail 112 facing away from the picking and placing assembly 120. Preferably, the reinforcing plate 1122 is in a triangular structure, and the triangular structure has better stability. As Figure 2 shown, the reinforcing plate 1122 is in a right triangle structure, and its short right-angled side is fixedly connected to the first slider 1111, and its long right-angled side is fixedly connected to the side edge of the second slide rail 112.

[0052] On the other hand, an embodiment of the present application provides a mask plate transportation system, including the above-mentioned mask plate transportation mechanism 100.

[0053] Specifically, the mask plate transportation system includes the above-mentioned mask plate transportation mechanism 100, and further includes a mask plate storage library and a mask table. The mask plate transportation mechanism 100 is arranged in the gap between the mask table and the mask plate storage library, and completes the transportation of the mask plate between the mask plate storage library and the mask table or from the mask table to the mask plate storage library in this narrow gap. During transportation, the mask plate transportation mechanism 100 can drive the mask plate to displace and rotate flexibly in multiple directions to achieve accurate, stable and efficient transportation of the mask plate, so that the mask plate transportation system can transport the mask plate more accurately and efficiently. Among them, the specific structure and beneficial effects of the mask plate transportation mechanism 100 have been introduced in detail above and will not be repeated here.

[0054] The above are only optional embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

[0055] In addition, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction. To avoid unnecessary repetition, the present utility model will not separately describe various possible combination manners.

Claims

1. A mask transfer mechanism, characterized in that The invention comprises a sliding assembly (110) and a pick-and-place assembly (120) which are slidably connected, wherein the pick-and-place assembly (120) can move in two directions perpendicular to each other along the extension direction of the sliding assembly (110); the pick-and-place assembly (120) comprises a manipulator (121), and the manipulator (121) is used for picking up and placing a mask; the manipulator (121) can rotate along a vertical axis.

2. The mask transfer mechanism according to claim 1, wherein, The sliding assembly (110) comprises a first sliding rail (111) and a second sliding rail (112) which are arranged perpendicular to each other, the first sliding rail (111) being slidably provided with a first sliding block (1111), the end of the second sliding rail (112) being fixedly connected to the first sliding block (1111) and being capable of moving in a horizontal direction along the extension direction of the first sliding rail (111); the picking and placing assembly (120) is slidably connected to the second sliding rail (112) and being capable of moving in a vertical direction along the extension direction of the second sliding rail (112).

3. The mask transfer mechanism according to claim 2, wherein, The pick-and-place assembly (120) also includes a support portion (122); the manipulator (121) includes a body (1211) and a fixed seat (1212); one side of the support portion (122) is slidably connected to the second slide rail (112); the fixed seat (1212) is fixedly connected to a side of the support portion (122) that is away from the second slide rail (112); the body (1211) is hinged on an end surface of the fixed seat (1212) and can rotate with the fixed seat (1212) serving as a rotating axis along a vertical direction.

4. The mask transfer mechanism according to claim 3, wherein, The support portion (122) comprises a support seat (1221) and a spacer plate (1222) connected to each other; the second slide rail (112) is slidably provided with a second slider (1121); one side of the spacer plate (1222) is fixedly connected to the second slider (1121) and the other side is fixedly connected to the spacer plate (1222); the fixed seat (1212) of the manipulator (121) is fixedly connected to a side of the support seat (1221) facing away from the spacer plate (1222).

5. The mask transfer mechanism according to claim 3, characterized in that, The body (1211) comprises a mechanical arm (1211a), one end of which is hinged to the end surface of the fixing seat (1212), and the mechanical arm (1211a) can rotate with the axis of the fixing seat (1212) in the vertical direction as the rotation axis.

6. The mask transfer mechanism according to claim 5, wherein The mechanical arms (1211a) include a plurality of mechanical arms (1211a), and two adjacent mechanical arms (1211a) are hinged end to end; one end of the mechanical arm (1211a) close to the fixed seat (1212) is hinged to the end surface of the fixed seat (1212), and the mechanical arm (1211a) can rotate with the axis of the fixed seat (1212) in the vertical direction as the rotation axis.

7. The mask transfer mechanism according to claim 5 or 6, characterized in that The body (1211) further includes a fork plate structure (1211b), and the fork plate structure (1211b) is disposed at the end of the robotic arm (1211a) away from the fixed seat (1212); the robotic arm (1211a) can drive the fork plate structure (1211b) to rotate for picking and placing a mask plate.

8. The mask transfer mechanism according to claim 7, wherein, The fork plate structure (1211b) includes a mounting portion (1211c) and fork rods (1211d), the mounting portion (1211c) is mounted at the end of the robotic arm (1211a) away from the fixed seat (1212), and the two fork rods (1211d) are spaced apart on opposite sides of one end of the mounting portion (1211c); the fork rods (1211d) are provided with vacuum suction nozzles (1213), and the vacuum suction nozzles (1213) can adsorb a mask plate.

9. The mask transfer mechanism according to claim 2, wherein A reinforcing plate (1122) is disposed on a side of the second slide rail (112) facing away from the picking and placing assembly (120), one side of the reinforcing plate (1122) is fixedly connected to the first slider (1111), and the other side is fixedly connected to the second slide rail (112).

10. A mask transfer system, characterized in that, It includes the mask plate transfer mechanism (100) according to any one of claims 1-9.

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