Cover plate assembly for vapor deposition equipment and vapor deposition equipment

Abstract

The utility model provides a cover plate assembly for vapor deposition equipment. The cover plate assembly comprises a side wall plate, a cover plate and a pressing assembly, the pressing assembly comprises a fixed block and a movable block, and the fixed block is connected to the inner wall of the side wall plate; the movable block is arranged on the upper surface of the cover plate and can move relative to the fixed block in the first direction, so that the first contact face and the second contact face are pressed to press the cover plate and the side wall plate or move reversely to loosen the cover plate and the side wall plate, and the included angle between the normal direction of the first contact face and the first direction is an acute angle. According to the cover plate assembly for the vapor deposition equipment and the vapor deposition equipment disclosed by the utility model, the cover plate and the side wall plate are pressed through the pressing assembly, so that the cover plate can expand or contract in the horizontal direction when thermal strain occurs on the premise of ensuring reliable sealing between the cover plate and the side wall plate; the bending deformation of the cover plate caused by thermal strain under the heating condition is reduced, the cover plate releases thermal stress through deformation in the horizontal direction, and meanwhile sealed connection between the cover plate and the side wall plate can be guaranteed.

Description

Technical Field

[0001] The utility model relates to a vapor deposition device, in particular to a cover plate assembly for a vapor deposition device and a vapor deposition device. Background Art

[0002] During the processing of flat panel display devices, many process equipment need to keep the interior of the reaction chamber in a vacuum state, that is, the chamber needs to ensure good sealing performance. In the existing process equipment reaction chamber, a seal is usually installed between the side wall plate and the cover plate at the edge connection, and then bolts are used to connect the cover plate and the side wall plate to seal and connect the cover plate and the side wall plate. With the development of flat panel processing technology, the size of the reaction chamber gradually increases. During the reaction process, the temperature in the reaction chamber can reach above 400°C. The high temperature causes the cover plate and the side wall plate of the chamber to be heated and deformed or have a tendency to deform. Due to the locking effect of the bolts on the cover plate and the side wall plate, the degrees of freedom of movement and rotation in all directions, especially at the connection between the two, are restricted. The cover plate generates thermal strain. Due to the fixing effect of the bolts on the cover plate, the connection between the cover plate and the bolts cannot move, and large thermal stresses will be generated between the bolts, the cover plate and the side wall plate. The cover plate deforms at the non-bolt-fixed part, which is not conducive to the operation of the process components in the reaction chamber, and the deformation of the cover plate causes gaps with the side wall plate, reducing the sealing performance of the reaction chamber. In addition, due to excessive thermal stress between the cover plate and the side wall plate, the cover plate and the side wall plate may crack, shortening the service life. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a cover plate assembly for a vapor deposition device and a vapor deposition device.

[0004] To achieve the above purpose, the utility model provides a cover plate assembly for a vapor deposition device, which comprises:

[0005] A side wall plate;

[0006] A cover plate, which abuts against the receiving part of the side wall plate;

[0007] A pressing component, comprising:

[0008] A fixing block, the fixing block is connected to the inner wall of the side wall plate, and a first contact surface is provided on the fixing block;

[0009] The movable block is provided with a second contact surface on it, and the second contact surface is in a shape matching and oppositely arranged with the first contact surface of the fixed block; the movable block is movably connected to the side wall plate and is arranged above the cover plate, and the movable block can move relative to the fixed block along a first direction, so that the first contact surface and the second contact surface are pressed tightly to press the cover plate and the receiving part tightly or move in the reverse direction to loosen.

[0010] Optionally, the included angle between the normal direction of the first contact surface and the first direction is an acute angle.

[0011] Optionally, the first direction is perpendicular to the vertical surface of the side wall plate.

[0012] Optionally, the range of the included angle between the normal direction of the first contact surface and the first direction is 45° - 85°.

[0013] Optionally, an insulating spacer is further included and is arranged between the movable block and the cover plate.

[0014] Optionally, the insulating spacer covers the movement range of the movable block along the first direction; and / or, the insulating spacer is further arranged vertically between the movable block and the cover plate.

[0015] Optionally, the cover plate assembly further includes a suspension mechanism, the first end of the suspension mechanism is connected to the cover plate, and the second end of the suspension mechanism is for the spray head.

[0016] Optionally, the cover plate assembly further includes a spray head auxiliary hanging plate.

[0017] Optionally, the receiving part of the side wall plate includes a protruding part.

[0018] Optionally, the receiving part of the side wall plate includes a stepped part.

[0019] Optionally, an insulating component is arranged between the side wall plate and the cover plate.

[0020] Optionally, a seal is arranged between the receiving part of the side wall plate and the cover plate.

[0021] Optionally, the movable block and the side wall plate are movably connected by fasteners, and the movable block is moved along the first direction by adjusting the fasteners.

[0022] Optionally, the fixed block and the side wall plate are connected by fasteners.

[0023] Optionally, both the fixed block and the movable block are made of a metal material or a ceramic material.

[0024] Optionally, a plurality of sets of the pressing components are provided at intervals along the circumferential direction of the cover plate.

[0025] The present utility model further provides a chemical vapor deposition device, including:

[0026] A reaction chamber;

[0027] The cover plate assembly for a chemical vapor deposition device as described above, and the cover plate assembly covers the top of the reaction chamber.

[0028] In summary, compared with the prior art, the cover plate assembly and the chemical vapor deposition device provided by the present utility model have the following beneficial effects:

[0029] For the cover plate assembly and the chemical vapor deposition device of the present utility model, the cover plate and the side wall plate are pressed by the pressing component. On the premise of ensuring reliable sealing between the cover plate and the side wall plate, when the cover plate undergoes thermal strain, it can expand or contract in the horizontal direction, reducing the amount of bending deformation caused by thermal strain of the cover plate when heated. The cover plate releases thermal stress through horizontal deformation while ensuring the sealed connection between the cover plate and the side wall plate. Description of the Drawings

[0030] Figure 1 It is a schematic diagram of the overall structure of the cover plate assembly in Embodiment 1 of the present utility model.

[0031] Figure 2 It is a schematic diagram when the pressing component in the cover plate assembly of the present utility model is in a loosened state.

[0032] Figure 3 It is a schematic diagram when the pressing component in the cover plate assembly of the present utility model is in a pressed state.

[0033] Figure 4 It is a partial schematic diagram of the cover plate assembly of the present utility model.

[0034] Figure 5 It is a schematic diagram of the overall structure of the cover plate assembly in Embodiment 2 of the present utility model.

[0035] Description of the Reference Numerals:

[0036] Side wall plate 110

[0037] Protrusion 111

[0038] Spray head auxiliary hanging plate 120

[0039] First insulating baffle 121

[0040] Second insulating baffle 122

[0041] Third insulating baffle 123

[0042] Cover plate 130

[0043] Pressing assembly 140

[0044] Fixed block 141

[0045] First contact surface 1411

[0046] Movable block 142

[0047] Second contact surface 1421

[0048] Insulating spacer 150

[0049] First seal 170

[0050] Second seal 180

[0051] Shielding plate 190

[0052] Spray head 20

[0053] Suspension mechanism 210 Detailed implementation mode

[0054] The following will combine the attached drawings in the embodiments of the present utility model Figure 1 ~Attached drawings Figure 5 to detail the technical solutions, structural features, achieved purposes and effects in the embodiments of the present utility model

[0055] It should be noted that the attached drawings adopt a very simplified form and all use non-precise scales, only for the purpose of conveniently and clearly assisting in explaining the purpose of the implementation mode of the present utility model, and are not used to limit the limited conditions for implementing the present utility model. Therefore, they do not have technical substance significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effects that the present utility model can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed by the present utility model

[0056] It should be noted that in the present utility model, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements clearly listed, but also includes other elements not clearly listed, or also includes elements inherent to such process, method, article or device

[0057] In existing chemical vapor deposition (CVD) equipment, a seal is provided between the top cover plate and the side wall plate. The cover plate and the side wall plate are connected by screws. The screws pass vertically through the through holes in the cover plate and are tightened onto the side wall plate to achieve a sealed connection between the cover plate and the side wall plate. During the processing of wafers inside the CVD equipment, the temperature inside the reaction chamber will rise to several hundred or even thousands of degrees Celsius. As the temperature increases, thermal stress and corresponding thermal strain will be generated in the cover plate inside the reaction chamber. In existing CVD equipment, screws are used to fix the cover plate and the side wall plate, and the degree of freedom of deformation of the cover plate in the horizontal direction is restricted by the screws. When the degree of freedom of the cover plate in the horizontal direction is restricted, bending deformation will occur under the action of thermal stress, and its deformation will be manifested in the vertical direction. Especially when the size of the reaction chamber reaches the meter level, the bending deformation caused by the thermal stress of the corresponding cover plate will also be very large. On the one hand, it will affect the operating accuracy of process components. On the other hand, the sealing performance between the cover plate and the side wall plate will deteriorate, affecting the reaction results inside the reaction chamber. At the same time, excessive deformation will also reduce the service life of the cover plate.

[0058] As Figure 1 shown, the present utility model provides a cover plate assembly for CVD equipment, including a side wall plate 110, a spray head auxiliary hanging plate 120, a cover plate 130, and a pressing assembly 140. The side wall plate 110 is disposed around the upper part of the side wall of the reaction chamber of the CVD equipment. A receiving portion is provided on the side wall plate 110, and the cover plate 130 abuts against the receiving portion of the side wall plate 110. In this embodiment, the receiving portion of the side wall plate 110 is a stepped portion. One end of the spray head auxiliary hanging plate 120 is disposed between the cover plate 130 and the receiving portion of the side wall plate 110, and the end of the spray head auxiliary hanging plate 120 away from the side wall plate 110 is connected to the spray head 20.

[0059] As Figure 2 shown, the pressing assembly 140 includes a fixed block 141 and a movable block 142. The fixed block 141 is fixedly connected to the inner wall of the side wall plate 110, and after the fixed block 141 is fixedly connected to the side wall plate 110, it will not move relative to the side wall plate 110 during use.

[0060] As Figure 2 shown, the fixed block 141 is provided with a first contact surface 1411, the first contact surface 1411 is arranged downward, the movable block 142 is provided with a second contact surface 1421, and the second contact surface 1421 is arranged opposite to and matches the shape of the first contact surface 1411. The matching of the shapes of the second contact surface 1421 and the first contact surface 1411 means that the first contact surface 1411 and the second contact surface 1421 can contact and fit relative to each other.

[0061] The movable block 142 is movably connected to the side wall plate 110 and disposed on the upper surface of the cover plate 130. The movable block 142 can move relative to the fixed block 141 in the first direction, so that the first contact surface 1411 and the second contact surface 1421 come into contact to press the receiving portions of the cover plate 130 and the side wall plate 110 or move in the reverse direction to release. Wherein, the first direction is Figure 2 the x direction indicated by the arrow in Figure 3 As shown, the movable block 142 moves in the first direction towards the fixed block 141 until it is located below the fixed block 141 and cannot continue to move in the first direction. And due to the cooperation of the first contact surface 1411 and the second contact surface 1421, since the distance between the fixed block 141 and the cover plate 130 is determined, as the movable block 142 moves in the first direction below the fixed block 141, the interaction force between the fixed block 141 and the movable block 142 gradually increases, and this interaction force is transmitted downward through the movable block 142 to the receiving portion of the cover plate 130, pressing the receiving portion between the side wall plate 110 and the cover plate 130. The relative arrangement of the second contact surface 1421 and the first contact surface 1411 means that when the movable block 142 moves relative to the fixed block 141 in the first direction, the contact area between the second contact surface 1421 and the first contact surface 1411 gradually increases, and at the same time, the pressing force between the fixed block 141 and the movable block 142 also gradually increases.

[0062] In this embodiment, the first direction x is perpendicular to the vertical surface of the side wall plate 110. In other embodiments, the first direction may also form an angle with the vertical surface of the side wall plate 110. If there is an angle, the angle between the first direction and the horizontal direction is preferably less than 10°.

[0063] Continuing as Figure 2 shown, the angle between the normal direction of the first contact surface 1411 and the first direction is an acute angle. The angle between the normal direction of the first contact surface 1411 and the first direction is Figure 2Angle A shown in the figure, preferably, the value range of angle A is 45° - 85°. When the value of angle A is within this range, during the movement of the movable block 142 in the first direction, as the movable block 142 moves, the contact area between the first contact surface 1411 and the second contact surface 1421 continuously increases. The pressing force exerted by the movable block 142 on the cover plate 130 is proportional to the movement distance between the movable block 142 and the fixed block 141, and the proportional value is appropriate. If this angle is too small, even if the movable block 142 moves a very small distance, as the contact area between the first contact surface 1411 and the second contact surface 1421 increases, the mutual force between the movable block 142 and the fixed block 141 will increase too quickly, making it inconvenient to apply an appropriate pressing force to the cover plate 130 by adjusting the position of the movable block 142. If this angle is too large, even if the movable block 142 moves a large distance, as the contact area between the first contact surface 1411 and the second contact surface 1421 increases, the pressing force applied to the cover plate 130 by the movable block 142 is still too small, making it inconvenient to apply an appropriate pressing force to the cover plate 130 by adjusting the position of the movable block 142.

[0064] As Figure 4 shown, the cover plate assembly further includes an insulating spacer 150 disposed between the movable block 142 and the cover plate 130. The insulating spacer 150 is made of insulating material. The insulating spacer 150 disposed between the movable block 142 and the cover plate 130 can achieve insulation between the pressing assembly 140 and the cover plate 130. At the same time, the pressing assembly 140 is connected to the side wall plate 110, and the insulating spacer 150 can also achieve insulation between the side wall plate 110 and the cover plate 130.

[0065] The insulating spacer 150 covers the movement range of the movable block 142 in the first direction. When the movable block 142 moves in the first direction or in the opposite direction of the first direction, the movable block 142 always moves above the insulating spacer 150. The mutual force between the fixed block 141 and the movable block 142 is transmitted to the cover plate 130 through the insulating spacer 150, increasing the contact area between the movable block 142 and the cover plate 130, and avoiding excessive concentration of force at the contact position between the upper part of the cover plate 130 and the movable block 142, making the force on the upper part of the cover plate 130 more uniform.

[0066] And in this embodiment, the insulating spacer 150 is also disposed between the movable block 142 and the cover plate 130 in the vertical direction to ensure the insulation effect between the movable block 142 and the cover plate 130 in the vertical direction.

[0067] Continue as Figure 1As shown, the sprinkler head auxiliary hanging plate 120 includes a first insulating baffle 121 and a second insulating baffle 122. The first insulating baffle 121 is horizontally arranged between the cover plate 130 and the side wall plate 110. The second insulating baffle 122 is vertically arranged, and one end of the second insulating baffle 122 is connected to the end of the first insulating baffle 121 away from the side wall plate 110. The second insulating baffle 122 is integrally in an "L" shape, the main body part of the second insulating baffle 122 extends vertically downward, and the end of the "L" shape of the second insulating baffle 122 is horizontally arranged for assisting in positioning the sprinkler head 20. Both the first insulating baffle 121 and the second insulating baffle 122 are made of insulating materials to ensure insulation between the cover plate 130 and the side wall plate 110, and between the cover plate 130 and the sprinkler head auxiliary hanging plate 120.

[0068] In addition, a suspension mechanism 210 is further provided between the cover plate 130 and the sprinkler head 20. The top end of the suspension mechanism 210 is connected to the cover plate 130, the bottom end of the suspension mechanism 210 is connected to the sprinkler head 20, and the main load of the sprinkler head 20 is mainly borne by the suspension mechanism 20 below the cover plate 130. The sprinkler head auxiliary hanging plate 120 is used for assisting in positioning and suspending the sprinkler head 20. Only one suspension mechanism 210 arranged between the cover plate 130 and the sprinkler head 20 is shown in the figure as an example. Actually, a plurality of suspension mechanisms 210 are arranged below the cover plate 130 to ensure a stable connection between the sprinkler head 20 and the cover plate 130. In some embodiments, the suspension mechanism can also be an integral structure.

[0069] In this embodiment, the first insulating baffle 121 and the second insulating baffle 122 are of an integral structure to facilitate the installation process of the sprinkler head auxiliary hanging plate 120 without assembling the first insulating baffle 121 and the second insulating baffle 122 during the installation process. In other embodiments, the first insulating baffle 121 and the second insulating baffle 122 can also be of a split structure and be combined at the assembly site.

[0070] The sprinkler head auxiliary hanging plate 120 further includes a third insulating baffle 123. The third insulating baffle 123 is connected to the end of the first insulating baffle 121 close to the side wall plate 110, and the third insulating baffle 123 is vertically arranged between the cover plate assembly and the side wall plate 110. The third insulating baffle 123 is made of insulating materials to ensure insulation between the cover plate 130 and the side wall plate 110 on both sides of the third insulating baffle 123.

[0071] In this embodiment, the first insulating baffle 121 and the third insulating baffle 123 are of an integral structure, so as to simplify the installation process of the spray head auxiliary hanging plate 120, and there is no need to assemble the first insulating baffle 121 and the third insulating baffle 123 during the installation process. During installation, the spray head auxiliary hanging plate 120 can be directly placed on the receiving portion of the side wall plate 110 to complete the positioning installation. In other embodiments, the first insulating baffle 121 and the third insulating baffle 123 can also be of a split structure and be combined at the assembly site.

[0072] In some other embodiments, the first insulating baffle 121, the second insulating baffle 122, the third insulating baffle 123 and the insulating pad 150 can also be of an integral structure.

[0073] A seal is also provided between the receiving portion of the side wall plate 110 and the cover plate 130. Specifically, in this embodiment, the seal includes a first seal 170. The first seal 170 is disposed between the cover plate 130 and the spray head auxiliary hanging plate 120, preferably between the cover plate 130 and the first insulating baffle 121. The first insulating baffle 121 is disposed horizontally, and the lower surface of the cover plate 130 covers above the first insulating baffle 121. In some embodiments, a first seal 170 is disposed along the outer peripheral direction of the cover plate 130 between the contact surfaces of the cover plate 130 and the first insulating baffle 121. When the pressing assembly 140 presses the cover plate 130 and the first insulating baffle 121, the load transmitted by the pressing assembly 140 to the cover plate 130 presses the first seal 170, and the cover plate 130, the first seal 170 and the first insulating baffle 121 are pressed in sequence. The first seal 170 disposed between the cover plate 130 and the first insulating baffle 121 ensures the sealing of the connection between the two, and avoids the leakage of the gas flowing from the spray head 20 into the reaction chamber between the cover plate 130 and the first insulating baffle 121.

[0074] In some embodiments, the seal further includes a second seal 180. A second seal 180 is disposed along the outer peripheral direction of the first insulating baffle 121 between the first insulating baffle 121 and the side wall plate 110. When the pressing assembly 140 presses the first insulating baffle 121 and the side wall plate 110, the second seal 180 disposed between the two ensures the sealed connection between the first insulating baffle 121 and the side wall plate 110, improves the sealing between the first insulating baffle 121 and the side wall plate 110, and avoids the leakage of the gas flowing from the spray head 20 into the reaction chamber between the side wall plate 110 and the first insulating baffle 121.

[0075] The first seal 170 and the second seal 180 work together to achieve a sealed connection between the cover plate 130, the spray head auxiliary hanging plate 120, and the side wall plate 110, preventing gas in the reaction chamber from leaking through the gaps between the cover plate 130, the spray head auxiliary hanging plate 120, and the side wall plate 110, and avoiding the problem of reduced sealing performance between the cover plate 130 and the side wall plate 110 caused by the installation of the spray head auxiliary hanging plate 120.

[0076] Continue as Figure 2 and Figure 3 shown, the movable block 142 is movably connected to the side wall plate 110 through fasteners, and the movable block 142 is moved along the first direction by adjusting the fasteners. In this embodiment, the fasteners are selected as bolts, and the bolts pass through the through holes on the side wall plate 110 and are threadedly connected to the movable block 142. By rotating the bolts, the movable block 142 is driven to move closer to the side wall plate 110 along the first direction or move away from the side wall plate 110 in the opposite direction of the first direction.

[0077] In this embodiment, the fixed block 141 is connected to the side wall plate 110 through fasteners. When installing the fixed block 141, the relative position between the fixed block 141 and the side wall plate 110 can be finely adjusted through the fasteners, improving the flexibility of the position adjustment of the fixed block 141.

[0078] In other embodiments, the fixed block 141 and the side wall plate 110 can also be fixedly connected by other means such as welding.

[0079] Both the fixed block 141 and the movable block 142 are made of metal material or ceramic material. The metal material has better toughness. When the movable block 142 moves relative to the fixed block 141, even if the pressure exerted by the fixed block 141 on the movable block 142 is large, the fixed block 141 and the movable block 142 made of metal material can ensure the reliability of the load transfer between the two. The fixed block 141 and the movable block 142 made of ceramic material have better insulation performance, which can ensure the insulation effect between the fixed block 141, the movable block 142, and the side wall plate 110.

[0080] In some embodiments, multiple sets of pressing components 140 are provided at intervals along the circumferential direction of the cover plate 130. The multiple sets of pressing components 140 uniformly press the cover plate 130 and the side wall plate 110 along the circumferential direction of the cover plate 130, ensuring that the cover plate 130 is tightly sealed with the side wall plate 110 everywhere and improving the sealing performance between the cover plate 130 and the side wall plate 110.

[0081] The present utility model also provides a vapor deposition device. The vapor deposition device includes a reaction chamber and a cover plate assembly for the vapor deposition device as described above. A showerhead 20 and a pedestal for placing wafers are arranged in the reaction chamber. The showerhead 20 is used to introduce reaction gases into the reaction chamber to perform vapor deposition processing on the wafers on the pedestal. The cover plate assembly is covered on the top of the reaction chamber to seal the top of the reaction chamber.

[0082] The following introduces the installation and removal sequences of the vapor deposition device. Taking the Figure 1 shown vapor deposition device as an example, first remove the outermost shielding plate 190, remove the fixing block 141 and the movable block 142, then remove the insulating spacer 150. After removing the cover plate 130 and the showerhead 20 simultaneously, the removal is completed. The installation sequence is opposite to the removal sequence.

[0083] By using the cover plate assembly provided by the present utility model, the pressing assembly 140 only presses the cover plate 130 and the side wall plate 110 in the vertical direction without restricting the freedom of movement of the cover plate 130 in the horizontal direction. During the reaction process, when the temperature rises and the cover plate 130 undergoes thermal strain, the cover plate 130 can deform in the horizontal direction to release thermal stress, avoiding warping deformation of the cover plate 130 due to its inability to deform in the horizontal direction.

[0084] Embodiment 2

[0085] The same parts as those in Embodiment 1 in this Embodiment 2 will not be repeated, and only the different parts will be described. In Embodiment 1, the showerhead auxiliary hanging plate 120 directly abuts against the step of the side wall plate 110. In Embodiment 2, the showerhead auxiliary hanging plate 120 abuts against the side wall plate 110 through the protrusion 111 on the side wall plate 110.

[0086] As Figure 5As shown, the receiving portion of the side wall plate 110 includes a protruding portion 111. The protruding portion 111 and the side wall plate 110 are of an integral structure. The protruding portion 111 is disposed on the inner wall of the side wall plate 110 and protrudes horizontally from the side wall plate 110. The bottom surface of the first insulating baffle 121 abuts against the protruding portion 111. By providing the protruding portion 111 that protrudes horizontally inward from the side wall plate 110, and the lower end surface of the first insulating baffle 121 of the shower head auxiliary hanging plate 120 abuts against the protruding portion 111, there is a larger contact area between the first insulating baffle 121 and the protruding portion 111, enabling the cover plate 130, the first insulating baffle 121, and the protruding portion 111 to withstand greater loads from the fixed block 141 and the movable block 142, and allowing the cover plate 130, the first insulating baffle 121, and the protruding portion 111 to fit more closely, thus improving the connection stability between the first insulating baffle 121 and the protruding portion 111. And a first sealing member 170 is provided between the cover plate 130 and the first insulating baffle 121, further improving the sealing performance between the cover plate 130 and the side wall plate 110, and ensuring that the process gas supplied from the gas source to the gas diffusion region B does not leak out between the cover plate 130 and the side wall plate 110.

[0087] In some embodiments, a second sealing member 180 is provided between the first insulating baffle 121 and the protruding portion 111. The second sealing member 180 is disposed along the outer peripheral direction of the first insulating baffle 121 between the first insulating baffle 121 and the protruding portion 111. When the pressing assembly 140 presses the first insulating baffle 121 and the protruding portion 111 together, the second sealing member 180 can ensure a sealed connection between the first insulating baffle 121 and the protruding portion 111.

[0088] Compared with the solution of Embodiment 1, the solution of Embodiment 2 provides a protruding portion 111 that protrudes horizontally on the side wall plate 110 in the vertical direction, and the protruding portion 111 and the side wall plate 110 are of an integral structure with a reliable connection therebetween. The cover plate 130 abuts against the side wall plate 110 through the protruding portion 111, increasing the contact area between the cover plate 130 and the side wall plate 110, enabling the cover plate 130 and the side wall plate 110 to withstand greater loads from the fixed block 141 and the movable block 142, and allowing the cover plate 130, the shower head auxiliary hanging plate 120, and the side wall plate 110 to fit more closely, having better sealing performance.

[0089] It should be noted that in Figure 5In [the figure], the hatching directions of the protruding portion 111 and the side wall plate 110 are different. However, in this embodiment, the hatching lines with different directions do not indicate that the protruding portion 111 and the side wall plate 110 are two independent components. In this embodiment, the protruding portion 111 belongs to a part of the side wall plate 110. In other words, the protruding portion 111 and the side wall plate 110 are of an integral structure. The protruding portion 111 is a part of the side wall plate 110 protruding in the horizontal direction. The different hatching directions on the protruding portion 111 and the side wall plate 110 are only to emphasize that there is a protruding portion 111 protruding horizontally from the side wall plate 110. The sprinkler head auxiliary hanging plate 120 abuts against the side wall plate 110 through the protruding portion 111, increasing the contact area between the sprinkler head auxiliary hanging plate 120 and the side wall plate 110, making the contact between the sprinkler head auxiliary hanging plate 120 and the side wall plate 110 more stable. The second seal 180 is arranged between the sprinkler head auxiliary hanging plate 120 and the protruding portion 111. The larger contact area between the sprinkler head auxiliary hanging plate 120 and the protruding portion 111 enables the sprinkler head auxiliary hanging plate 120 and the protruding portion 111 to bear a greater load, and in cooperation with the second seal 180, it realizes improving the sealing performance between the cover plate 130 and the protruding portion 111 and reducing the possibility of gas leakage from the reaction chamber between the cover plate 130 and the protruding portion 111.

[0090] In other embodiments, the protruding portion 111 and the side wall plate 110 can also be designed separately, that is, the protruding portion 111 and the side wall plate 110 are used as two independent components, and the protruding portion 111 is snapped into the side wall plate 110.

[0091] Although the content of the present utility model has been introduced in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation to the present utility model. After those skilled in the art have read the above content, various modifications and substitutions to the present utility model will be obvious. Therefore, the protection scope of the present utility model should be defined by the appended claims.

Claims

1. A cover plate assembly for a vapor deposition device, characterized in that, The cover plate assembly includes: Side wall plates; A cover plate that abuts against a receiving portion of the side wall plates; A pressing assembly, including: A fixed block connected to the inner wall of the side wall plates, with a first contact surface provided on the fixed block; A movable block, with a second contact surface provided on the movable block, the second contact surface being matched in shape with and oppositely arranged to the first contact surface of the fixed block; the movable block is movably connected to the side wall plates and is arranged above the cover plate, and the movable block can move relative to the fixed block in a first direction, so that the first contact surface and the second contact surface are pressed to press the cover plate and the receiving portion or move in the reverse direction to loosen.

2. The cover plate assembly according to claim 1, wherein The included angle between the normal direction of the first contact surface and the first direction is an acute angle.

3. The cover plate assembly according to claim 1, wherein The first direction is perpendicular to the vertical surface of the side wall plates.

4. The cover plate assembly according to claim 2, wherein The range of the included angle between the normal direction of the first contact surface and the first direction is 45° - 85°.

5. The cover plate assembly according to claim 1, wherein An insulating spacer is further provided between the movable block and the cover plate.

6. The cover plate assembly according to claim 5, characterized in that, The insulating spacer covers the movement range of the movable block in the first direction; and / or, the insulating spacer is further arranged between the movable block and the cover plate in the vertical direction.

7. The cover plate assembly according to claim 1, characterized in that The cover plate assembly further includes a suspension mechanism, with a first end of the suspension mechanism connected to the cover plate and a second end of the suspension mechanism for a spray head.

8. The cover plate assembly according to claim 7, wherein The cover plate assembly further includes a spray head auxiliary hanging plate.

9. The cover plate assembly according to claim 1, wherein, The receiving portion of the side wall plates includes a protruding portion.

10. The cover plate assembly according to claim 1, wherein, The receiving portion of the side wall plates includes a stepped portion.

11. The cover plate assembly according to claim 1, characterized in that, An insulating component is provided between the side wall plates and the cover plate.

12. The cover plate assembly according to claim 9 or 10, characterized in that, A seal is provided between the receiving portion of the side wall plates and the cover plate.

13. The cover plate assembly according to claim 1, characterized in that, The movable block and the side wall plates are movably connected through fasteners, and the movable block is moved in the first direction by adjusting the fasteners.

14. The cover plate assembly according to claim 1, characterized in that, The fixed block and the side wall plates are connected through fasteners.

15. The cover plate assembly according to claim 1, characterized in that, Both the fixed block and the movable block are made of a metal material or a ceramic material.

16. The cover plate assembly according to claim 1, wherein, Along the circumferential direction of the cover plate, multiple sets of the pressing assemblies are provided at intervals.

17. A vapor deposition device, characterized in that, Including: A reaction chamber; The cover plate assembly for a vapor deposition device according to any one of claims 1 - 16, the cover plate assembly covering the top of the reaction chamber.

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