Gas-liquid separation device

Abstract

The embodiment of the utility model provides a gas-liquid separation device. The gas-liquid separation device comprises a liquid collection chamber for collecting a gas-liquid mixture; the gas-liquid fusion pipe is used for conveying a gas-liquid mixture; the separation cavity is used for separating gas and liquid of the gas-liquid mixture; the gas collecting bin is used for collecting separated gas; the circulating system is used for flowing a gas-liquid mixture among the liquid collection chamber, the separation cavity and the gas collection bin; the separation cavity comprises a plurality of layers of fixed baffles which are connected with the inner wall of the separation cavity and are used for carrying out gas-liquid separation on a gas-liquid mixture flowing to the separation cavity; at least one gas outlet hole for guiding out separated gas upwards and at least one opening for guiding out separated liquid downwards are formed in each layer of fixed baffle; wherein the top-layer fixed baffle in the multiple layers of fixed baffles is connected with the gas collecting bin, and the bottom-layer fixed baffle is connected with the liquid collecting chamber. By adopting the technical scheme, the separation effect of a gas-liquid mixture can be improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, and particularly to a gas-liquid separation device. Background Art

[0002] The semiconductor process refers to a series of complex technical processes for manufacturing semiconductor devices (such as integrated circuits, transistors, diodes, etc.); these process steps usually involve multiple stages, such as cleaning, film formation, lithography, ion implantation, epitaxy, etc. With the increase in the types of chemicals required in the above process stages, gas-liquid mixtures are often generated in the production and manufacturing process of semiconductor devices. In order to better recover and utilize these gas-liquid mixtures, it is necessary to perform separation operations on the gas-liquid mixtures.

[0003] However, in the actual gas-liquid separation operation process, there is a situation where the gas-liquid separation effect is not good. Therefore, how to provide a technical solution to perform gas-liquid separation on the gas-liquid mixture to improve the separation effect of the gas-liquid mixture has become an urgent problem to be solved by those skilled in the art. Summary of the Utility Model

[0004] The technical problem solved by the utility model is to provide a gas-liquid separation device to improve the separation effect of the gas-liquid mixture.

[0005] To solve the above problems, an embodiment of the utility model provides a gas-liquid separation device, including: a liquid collection chamber for collecting the gas-liquid mixture; a gas-liquid fusion pipe for transporting the gas-liquid mixture; a separation chamber for separating the gas and liquid of the gas-liquid mixture; a gas collection chamber for collecting the separated gas; a circulation system for flowing the gas-liquid mixture among the liquid collection chamber, the separation chamber and the gas collection chamber; the separation chamber includes: a plurality of layers of fixed baffles connected to the inner wall of the separation chamber for performing gas-liquid separation on the gas-liquid mixture flowing into the separation chamber; at least one air outlet for upwardly guiding the separated gas and at least one opening for downwardly guiding the separated liquid are provided on each layer of the fixed baffle; wherein, the top fixed baffle in the plurality of layers of fixed baffles is connected to the gas collection chamber, and the bottom fixed baffle is connected to the liquid collection chamber.

[0006] Optionally, the gas-liquid fusion pipe is connected to the liquid collection chamber to transport the gas-liquid mixture to the liquid collection chamber; the circulation system includes a first power system and a first circulation pipeline connecting the liquid collection chamber and the gas collection chamber; the first power system drives the gas-liquid mixture to circulate upwardly in sequence through the liquid collection chamber, the separation chamber, the gas collection chamber and the first circulation pipeline.

[0007] Optionally, the gas-liquid fusion pipe is connected to the gas collection chamber to transport the gas-liquid mixture to the gas collection chamber; the circulation system includes a second power system and a second circulation pipeline connecting the liquid collection chamber and the gas collection chamber; the second power system drives the gas-liquid mixture to circulate downwardly in sequence through the gas collection chamber, the second circulation pipeline, the liquid collection chamber and the separation chamber.

[0008] Optionally, the air outlet holes on the adjacent fixed baffles in the multi-layer fixed baffle are staggered and non-overlapping.

[0009] Optionally, a plurality of first protrusions are provided on the lower surface of each layer of fixed baffle; along the direction away from the air outlet holes, the heights of the plurality of first protrusions on the lower surface of each layer of fixed baffle gradually decrease; the upper surface of each layer of fixed baffle is smooth; the separation cavity is a tapered structure with a narrow upper part and a wide lower part; a second protrusion is provided on the inner wall of the separation cavity.

[0010] Optionally, the opening is located at the contact position between each layer of fixed baffle and the inner wall of the separation cavity; the openings of the adjacent layers of fixed baffles are staggered and non-overlapping.

[0011] Optionally, a sealed state is formed between each layer of fixed baffle and the inner wall of the separation cavity.

[0012] Optionally, the multi-layer fixed baffles are arranged in parallel and at equal intervals; each layer of fixed baffle is inclined towards the bottom of the separation cavity.

[0013] Optionally, it further includes: an exhaust port provided on the gas collection chamber for discharging the gas separated and located in the gas collection chamber; a liquid discharge port provided on the liquid collection chamber for discharging the liquid separated and located in the liquid collection chamber.

[0014] Optionally, it further includes: a negative pressure system provided on the gas collection chamber for exhausting gas; a pneumatic control valve provided on the gas collection chamber and connected to the exhaust port for controlling the exhaust; a concentration measuring instrument provided on the gas collection chamber for monitoring the liquid content in the gas collection chamber; a pressure gauge provided on the liquid collection chamber for detecting the pressure in the liquid collection chamber; a liquid level gauge provided on the liquid collection chamber for detecting the liquid level in the liquid collection chamber; a liquid control valve provided on the liquid collection chamber and connected to the liquid discharge port for controlling the liquid discharge.

[0015] Compared with the prior art, the technical solution of the embodiment of the present utility model has the following advantages:

[0016] In the gas-liquid separation device of the embodiment of the present utility model, at least one air outlet hole for guiding the separated gas upward and at least one opening for guiding the separated liquid downward are provided on each layer of fixed baffle; during the gas-liquid separation operation, under the action of the circulation system, the gas-liquid mixture circulates between the liquid collection chamber, the separation cavity and the gas collection chamber and collides with each layer of fixed baffle in the separation cavity. After colliding with the multi-layer fixed baffles, the gas and liquid in the gas-liquid mixture are separated, the separated gas flows to the gas collection chamber through the air outlet holes, and the separated liquid flows to the liquid collection chamber through the openings, so that the gas-liquid separation device better separates the gas and liquid in the gas-liquid mixture and improves the separation effect of the gas-liquid mixture. Description of the Drawings

[0017] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only the embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on the provided drawings.

[0018] Figure 1 is a schematic structural diagram of a gas-liquid separation device;

[0019] Figure 2 is a schematic structural diagram of a gas-liquid separation device according to an embodiment of the present utility model;

[0020] Figure 3 is an operation method of a gas-liquid separation device corresponding to an embodiment of the present utility model;

[0021] Figure 4 is a schematic structural diagram of a gas-liquid separation device according to another embodiment of the present utility model. Detailed implementation manners

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0023] In the prior art semiconductor device manufacturing process, there is a situation where the separation effect of the gas-liquid mixture is not good. The following will analyze the reasons for the poor gas-liquid separation effect in combination with Figure 1 , analyze the reasons for the poor gas-liquid separation effect.

[0024] Some of the chemicals used in the semiconductor device manufacturing process are prone to volatilization. For example, the concentrated hydrofluoric acid solution used for etching the semiconductor oxide film layer is prone to volatilize into hydrofluoric acid gas Q, and some of the hydrofluoric acid gas is prone to form suspended hydrofluoric acid droplets Y when encountering water vapor in the air. Then, the hydrofluoric acid gas Q and the hydrofluoric acid droplets Y form a gas-liquid mixture H.

[0025] In order to better recycle and utilize these gas-liquid mixtures H, in the prior art, such as Figure 1The gas-liquid separation device shown is used to separate the gas-liquid mixture H composed of hydrofluoric acid gas Q and hydrofluoric acid droplets Y. The gas-liquid separation device includes: a cavity housing 100, an air inlet 101, an exhaust port 102, a drain port 103, and a gas-liquid fusion pipe 104 located on the cavity housing 100; the gas-liquid mixture H composed of hydrofluoric acid gas Q and hydrofluoric acid droplets Y enters the cavity housing 100 through the gas-liquid fusion pipe 104 from the air inlet 101. By utilizing the density difference between the gas and the liquid, after allowing the gas-liquid mixture H to stand still for a period of time in a stationary state, the hydrofluoric acid droplets Y with a larger density will sink to the bottom of the cavity housing 100, while the hydrofluoric acid gas Q with a smaller density will rise to the top of the cavity housing 100. Then, the hydrofluoric acid gas Q is discharged out of the cavity housing 100 through the exhaust port 102; the hydrofluoric acid droplets Y are discharged out of the cavity housing 100 through the drain port 103.

[0026] However, when actually separating the gas-liquid mixture, there are the following disadvantages. First, the separation efficiency of the gas-liquid mixture is low: some hydrofluoric acid droplets Y will be discharged out of the housing through the exhaust port 102 along with the hydrofluoric acid gas Q. Second, the separation period of the gas-liquid mixture is long: due to the size difference of the hydrofluoric acid droplets Y, it is necessary to increase the standing time for separation. Therefore, in the prior art, the separation effect of the gas-liquid mixture is not good.

[0027] In view of the above technical problems, the embodiment of the present invention provides a gas-liquid separation device for a gas-liquid mixture, which can have the characteristics of high separation efficiency and short separation period, and improves the gas-liquid separation effect of the gas-liquid mixture.

[0028] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0029] First Embodiment

[0030] Figure 2It is a schematic structural diagram corresponding to a gas-liquid separation device according to an embodiment of the present utility model. The gas-liquid separation device includes: a liquid collection chamber 200 for collecting a gas-liquid mixture H1; a gas-liquid fusion pipe 201 for transporting the gas-liquid mixture H1; a separation chamber 202 for separating a gas Q1 and a liquid Y1 from the gas-liquid mixture; a gas collection chamber 203 for collecting the separated gas Q1; a circulation system 204 for flowing the gas-liquid mixture H1 among the liquid collection chamber 200, the separation chamber 202 and the gas collection chamber 203; the separation chamber 202 includes: a plurality of layers of fixed baffles connected to the inner wall of the separation chamber 202 for gas-liquid separation of the gas-liquid mixture flowing into the separation chamber 202; at least one air hole for upwardly leading out the separated gas and at least one opening for downwardly leading out the separated liquid are provided on each layer of the fixed baffle; wherein, the top fixed baffle among the plurality of layers of fixed baffles is connected to the gas collection chamber 203, and the bottom fixed baffle is connected to the liquid collection chamber 200.

[0031] With the above gas-liquid separation device, the gas and the liquid in the gas-liquid mixture can be separated in the following manner:

[0032] During the gas-liquid separation operation, the gas-liquid mixture H1 flows among the liquid collection chamber 200, the separation chamber 202 and the gas collection chamber 203 under the drive of the circulation system 204, and collides with each layer of fixed baffle in the separation chamber 202. After colliding with the plurality of layers of fixed baffles, the gas Q1 separated from the gas-liquid mixture H1 flows to the gas collection chamber 203 through the air hole, and the separated liquid Y1 flows to the liquid collection chamber 200 through the opening. The gas-liquid separation device can better separate the gas Q1 and the liquid Y1 in the gas-liquid mixture H1, thereby improving the separation effect of the gas-liquid mixture H1.

[0033] Continue to refer to Figure 2 , in the gas-liquid separation device, the gas-liquid fusion pipe 201 is connected to the liquid collection chamber 200 to transport the gas-liquid mixture H1 to the liquid collection chamber 200; the circulation system 204 includes a first power system 204a and a first circulation pipeline 204b connecting the liquid collection chamber 200 and the gas collection chamber 203; the first power system 204a drives the gas-liquid mixture H1 to circulate upwardly in sequence through the liquid collection chamber 200, the separation chamber 202, the gas collection chamber 203 and the first circulation pipeline 204b.

[0034] Continue to refer to Figure 2 , the gas-liquid separation device may include a liquid collection chamber 200 for collecting the gas-liquid mixture.

[0035] The shape of the liquid collection chamber 200 includes any one of the following: a circular cylinder, an elliptical cylinder, a square cylinder, and a tapered structure with a narrow upper part and a wide lower part; wherein, the cross-sectional shape of the tapered structure with a narrow upper part and a wide lower part includes a circle, an ellipse, a square, and an irregular shape. The material of the liquid collection chamber 200 includes corrosion-resistant materials such as polytetrafluoroethylene, tetrafluoroethylene, polyethylene, Monel alloy, and Hastelloy alloy. In this embodiment, the shape of the liquid collection chamber 200 is a tapered structure with a narrow upper part and a wide lower part and a circular cross-section, and the material of the liquid collection chamber 200 is Monel alloy.

[0036] Continuing to refer to Figure 2 , the gas-liquid separation device may include a gas collection chamber 203 for collecting the separated gas.

[0037] The shape of the gas collection chamber 203 includes any one of the following: a circular cylinder, an elliptical cylinder, a square cylinder, and a tapered structure with a narrow upper part and a wide lower part; the cross-sectional shape of the tapered structure with a narrow upper part and a wide lower part includes a circle, an ellipse, a square, and an irregular shape. The material of the gas collection chamber 203 includes corrosion-resistant materials such as polytetrafluoroethylene, tetrafluoroethylene, polyethylene, Monel alloy, and Hastelloy alloy. In this embodiment, the shape of the gas collection chamber 203 is a tapered structure with a narrow upper part and a wide lower part and a circular cross-section, and the material of the gas collection chamber 203 is Monel alloy.

[0038] Continuing to refer to Figure 2 , the gas-liquid separation device may include a separation chamber 202 for separating the gas and liquid in the gas-liquid mixture.

[0039] The shape of the separation chamber 202 includes any one of the following: a circular cylinder, an elliptical cylinder, a square cylinder, and a tapered structure with a narrow upper part and a wide lower part; wherein, the tapered structure with a narrow upper part and a wide lower part includes a tapered cylinder with a narrow upper part and a wide lower part; the cross-sectional shape of the tapered structure with a narrow upper part and a wide lower part includes a circle, an ellipse, and a square; the material of the separation chamber 202 includes corrosion-resistant materials such as polytetrafluoroethylene, tetrafluoroethylene, polyethylene, Monel alloy, and Hastelloy alloy. In this embodiment, the shape of the separation chamber 202 is a tapered structure with a narrow upper part and a wide lower part and a circular cross-section, and the material of the separation chamber 202 is Monel alloy.

[0040] Continuing to refer to Figure 2 , a first protrusion T1 is provided on the inner wall of the separation chamber 202, and the first protrusion T1 is used to increase the collision area between the gas-liquid mixture H1 and the inner wall of the separation chamber 202 during the gas-liquid separation process, so as to further improve the separation effect of the gas Q1 and the liquid Y1 in the gas-liquid mixture H1.

[0041] The separation chamber 202 includes: a multi-layer fixed baffle connected to the inner wall of the separation chamber 202 for gas-liquid separation of the gas-liquid mixture H1 flowing into the separation chamber 202. Among them, the top fixed baffle in the multi-layer fixed baffle is connected to the gas collecting chamber 203, and the bottom fixed baffle is connected to the liquid collecting chamber 200. The shape of the fixed baffle includes any one of the following: circular, elliptical, square, irregular shape; the material of the fixed baffle includes corrosion-resistant materials such as polytetrafluoroethylene, tetrafluoroethylene, polyethylene, Monel alloy, and Hastelloy alloy, etc.

[0042] Continue to refer to Figure 2 , in this embodiment, the number of the fixed baffles is 3, namely the fixed baffle 205a, the fixed baffle 205b, and the fixed baffle 205c. The top fixed baffle 205a in the separation chamber 202 is connected to the gas collecting chamber 203, and the bottom fixed baffle 205c in the separation chamber 202 is connected to the liquid collecting chamber 200. The shapes of the fixed baffle 205a, the fixed baffle 205b, and the fixed baffle 205c are all circular, and the materials of the fixed baffle 205a, the fixed baffle 205b, and the fixed baffle 205c are all Monel alloy.

[0043] At least one air outlet hole for leading the separated gas upward is provided on each layer of the fixed baffle. The air outlet holes on the adjacent layers of the fixed baffles in the multi-layer fixed baffle are staggeredly distributed without overlap. The advantage is that: after the gas-liquid mixture passes through the staggeredly distributed and non-overlapping air outlet holes, it impacts the lower surface of the adjacent upper fixed baffle, which is beneficial to the separation of gas and liquid in the gas-liquid mixture. The shape of the air outlet hole includes any one of the following: circular, elliptical, square, polygon, irregular shape.

[0044] Continue to refer to Figure 2 , in this embodiment, the number of air outlet holes on each layer of the fixed baffle is one, that is, the air outlet hole c1 of the fixed baffle 205a, the air outlet hole c2 of the fixed baffle 205b, and the air outlet hole c3 of the fixed baffle 205c. The shapes of the air outlet hole c1, the air outlet hole c2, and the air outlet hole c3 are all circular.

[0045] In this embodiment, the air outlet hole c1 of the fixed baffle 205a and the air outlet hole c2 of the fixed baffle 205b are designed to be staggeredly distributed without overlap, and the air outlet hole c2 of the fixed baffle 205b and the air outlet hole c3 of the fixed baffle 205c are designed to be staggeredly distributed without overlap.

[0046] At least one opening for leading the separated liquid downward is provided on each layer of the fixed baffle; the opening is located at any position on each layer of the fixed baffle. The openings on the adjacent layers of the fixed baffles are staggeredly distributed without overlap. The advantage is that: it enables the gas-liquid mixture to better impact the lower surface of each layer of the fixed baffle. The shape of the opening includes any one of the following: circular, elliptical, square, polygon, irregular shape.

[0047] Continue to refer to Figure 2 , in this embodiment, the number of openings on each layer of fixed baffle is one, that is, the opening k1 on the fixed baffle 205a, the opening k2 on the fixed baffle 205b, and the opening k3 on the fixed baffle 205c; the shapes of the openings k1, k2, and k3 are all circular. The openings k1, k2, and k3 are located at the contact positions between each layer of fixed baffle and the inner wall of the separation chamber 202.

[0048] The lower surface of each layer of fixed baffle is provided with a plurality of second protrusions for increasing the collision time of the gas-liquid mixture with each layer of fixed baffle and improving the gas-liquid separation effect. Along the direction away from the air outlet hole, the heights of the plurality of second protrusions on the lower surface of each layer of fixed baffle gradually decrease, for further increasing the collision area of the gas-liquid mixture with each layer of fixed baffle and improving the gas-liquid separation effect; the upper surface of each layer of fixed baffle is smooth, which is beneficial to the separated liquid flowing along the upper surface of each layer of fixed baffle to the opening on each layer of fixed baffle.

[0049] Continue to refer to Figure 2 , in this embodiment, the lower surface of each layer of fixed baffle is provided with a second protrusion T2; on the fixed baffle 205a, along the direction D1 away from the air outlet hole c1, the height of the second protrusion T2 on the lower surface of the fixed baffle 205a gradually decreases; on the fixed baffle 205b, along the direction D2 away from the air outlet hole c2, the height of the second protrusion T2 on the lower surface of the fixed baffle 205b gradually decreases; on the fixed baffle 205c, along the direction D3 away from the air outlet hole c1, the height of the second protrusion T2 on the lower surface of the fixed baffle 205c gradually decreases.

[0050] Continue to refer to Figure 2 , the space between each layer of fixed baffle and the inner wall of the separation chamber 202 is in a sealed state. For example, the spaces between the fixed baffle 205a, the fixed baffle 205b, and the fixed baffle 205c and the inner wall of the separation chamber 202 are all in a sealed state, so that the gas-liquid mixture flows towards the air outlet holes of each layer of fixed baffle.

[0051] The multiple layers of fixed baffles are arranged in parallel and at equal intervals. Each layer of fixed baffle is inclined towards the bottom of the separation chamber, which is convenient for the separated liquid to flow to the opening on the fixed baffle and enter the liquid collection chamber.

[0052] Continue to refer to Figure 2, in this embodiment, the fixed baffles 205a, 205b, and 205c are parallel to each other and equally spaced. In other embodiments, the distances between the fixed baffle 205a and the fixed baffle 205b, and between the fixed baffle 205b and the fixed baffle 205c can be adjusted according to actual needs. In other embodiments, the positional relationships between the fixed baffle 205a and the fixed baffle 205b, and between the fixed baffle 205b and the fixed baffle 205c can be adjusted according to actual needs. For example, the fixed baffles 205a, 205b, and 205c are not parallel to each other; for example, the fixed baffle 205a is parallel to the fixed baffle 205b and not parallel to the fixed baffle 205c; for example, the fixed baffle 205a is parallel to the fixed baffle 205c and not parallel to the fixed baffle 205b; for example, the fixed baffle 205b is parallel to the fixed baffle 205c and not parallel to the fixed baffle 205a.

[0053] Continue to refer to Figure 2 , in this embodiment, the fixed baffles 205a, 205b, and 205c all incline towards the bottom of the separation chamber 202, which is beneficial for the separated liquid to flow towards the openings on each layer of the fixed baffle and thus flow into the liquid collection chamber 200.

[0054] Continue to refer to Figure 2 , the gas-liquid separation device may include a circulation system 204 for flowing the gas-liquid mixture among the liquid collection chamber 200, the separation chamber 202, and the gas collection chamber 203. The circulation system 204 includes a first power system 204a and a first circulation pipeline 204b connecting the liquid collection chamber and the gas collection chamber; the first power system 204a drives the gas-liquid mixture to circulate upward in sequence through the liquid collection chamber 200, the separation chamber 202, the gas collection chamber 203, and the first circulation pipeline 204b, so that the gas-liquid mixture collides with each layer of the fixed baffle to improve the gas-liquid separation effect.

[0055] The first power system 204a includes a pump body (not shown) and a motor (not shown); the motor drives the pump body to drive the gas-liquid mixture H1 to circulate upward in the gas-liquid separation device. The pump body includes: a gas-liquid mixing pump, a vortex pump, and a gas-liquid pump. In this embodiment, the pump body is a gas-liquid mixing pump.

[0056] The material of the first circulation pipeline 204b includes corrosion-resistant materials such as polytetrafluoroethylene, tetrafluoroethylene, polyethylene, Monel alloy, and Hastelloy alloy, etc. The shape of the first circulation pipeline 204b includes any one of the following: a circular cylinder, an elliptical cylinder, and a square cylinder. In this embodiment, the shape of the first circulation pipeline 204b is a circular cylinder; the material of the first circulation pipeline 204b is Monel alloy.

[0057] The gas-liquid separation device may include a gas-liquid fusion pipe for transporting the gas-liquid mixture. The gas-liquid fusion pipe passes through the gas collection chamber, penetrates each layer of fixed baffle, and enters the liquid collection chamber. The gas-liquid mixing pipe is in a sealed state with each layer of fixed baffle, so that the gas-liquid mixture flows towards the air outlet holes of each layer of fixed baffle.

[0058] The shape of the gas-liquid fusion pipe includes any one of the following: circular cylinder, elliptical cylinder, square cylinder, irregular cylinder. The material of the gas-liquid fusion pipe includes corrosion-resistant materials such as polytetrafluoroethylene, tetrafluoroethylene, polyethylene, Monel alloy, and Hastelloy alloy.

[0059] Continue to refer to Figure 2 , in this embodiment, the gas-liquid separation device may include a gas-liquid fusion pipe 201 for transporting the gas-liquid mixture. The gas-liquid fusion pipe 201 passes through the gas collection chamber 203, sequentially penetrates the fixed baffle 205a, the fixed baffle 205b, and the fixed baffle 205c, and enters the liquid collection chamber 200. The gas-liquid fusion pipe 201 obliquely penetrates the fixed baffle 205a, the fixed baffle 205b, and the fixed baffle 205c, or vertically penetrates the fixed baffle 205a, the fixed baffle 205b, and the fixed baffle 205c. The gas-liquid mixing pipe 201 is in a sealed state with the fixed baffle 205a, the fixed baffle 205b, and the fixed baffle 205c, so that the gas-liquid mixture H1 flows towards the air outlet holes of each layer of fixed baffle. In this embodiment, the shape of the gas-liquid fusion pipe 201 is a circular cylinder, and the material of the circular cylinder is Monel alloy.

[0060] It should be noted that in the gas-liquid separation device of this embodiment, the liquid collection chamber 200, the separation chamber 202, the gas collection chamber 203, the fixed baffle 205a, the fixed baffle 205b, the fixed baffle 205c, the gas-liquid fusion pipe 201, and the first circulation pipeline 204b are integrally formed; the side walls of the liquid collection chamber 200, the separation chamber 202, and the gas collection chamber 203 are located on a straight line, so as to have the following effects: First, it can increase the stability and firmness of the gas-liquid separation device; Second, it can increase the sealing performance between the gas-liquid fusion pipe and each layer of fixed baffle, and between each layer of fixed baffle and the side wall of the separation chamber 202; Third, it simplifies the manufacturing process of the gas-liquid separation device; In other embodiments, the liquid collection chamber 200, the separation chamber 202, the gas collection chamber 203, the fixed baffle 205a, the fixed baffle 205b, the fixed baffle 205c, the gas-liquid fusion pipe 201, and the first circulation pipeline 204b are independently formed, and then assembled into a gas-liquid separation device through an installation method.

[0061] Continue to refer to Figure 2, the gas-liquid separation device further includes: an exhaust port 206 provided on the gas collection chamber 203 for discharging the gas separated and located in the gas collection chamber. The exhaust port 206 may be located at the top of the gas collection chamber 203 or on the side wall of the gas collection chamber 203.

[0062] Continue to refer to Figure 2 , the gas-liquid separation device further includes: a liquid discharge port 207 provided on the liquid collection chamber 200 for discharging the liquid separated and located in the liquid collection chamber. The liquid discharge port 207 may be located at the bottom of the liquid collection chamber 200 or on the side wall of the liquid collection chamber 200.

[0063] The gas-liquid separation device further includes: a negative pressure system (not shown) provided on the gas collection chamber 203 for exhausting gas.

[0064] Continue to refer to Figure 2 , the gas-liquid separation device further includes: a pneumatic control valve 208 provided on the gas collection chamber 203 and connected to the exhaust port 206 for controlling gas exhaust; the types of the pneumatic control valve 208 include pneumatic ball valves, pneumatic butterfly valves, pneumatic gate valves, and pneumatic regulating valves. The pneumatic control valve can be manually controlled or automatically controlled. In this embodiment, the pneumatic control valve 208 is a pneumatic regulating valve, and the opening and closing of the pneumatic regulating valve are automatically controlled.

[0065] Continue to refer to Figure 2 , the gas-liquid separation device further includes: a concentration measuring instrument 209 provided on the gas collection chamber 203 for monitoring the liquid content in the gas collection chamber 203. The concentration measuring instrument 209 detects the liquid content in the gas collection chamber 203 in real time. If the liquid content in the gas collection chamber 203 is greater than a certain set concentration, the circulation system continues to work until the liquid content in the gas collection chamber 203 is reduced to a certain set concentration, and then the circulation system stops working.

[0066] Continue to refer to Figure 2 , the gas-liquid separation device further includes: a pressure gauge 210 provided on the liquid collection chamber 200 for detecting the pressure in the liquid collection chamber 200. The pressure gauge 210 detects the pressure in the liquid collection chamber 200 in real time. If the pressure in the liquid collection chamber 200 is greater than a certain set value, the gas-liquid separation device starts to work.

[0067] Continue to refer to Figure 2 , the gas-liquid separation device further includes: a liquid level gauge 211 provided on the liquid collection chamber 200 for detecting the liquid level in the liquid collection chamber 200, and a liquid control valve 212 provided on the liquid collection chamber 200 and connected to the liquid discharge port 207 for controlling liquid discharge. The liquid level gauge 211 detects the liquid level in the liquid collection chamber 200 in real time. If the liquid level in the liquid collection chamber 200 reaches a certain set height, the liquid control valve 212 opens to discharge the separated liquid in the liquid collection chamber 200 out of the separation device.

[0068] Refer toFigure 3 , in combination with Figure 2 , the present utility model provides an operation method for a gas-liquid separation device, comprising the following steps:

[0069] Step S1: The liquid collection chamber collects the gas-liquid mixture.

[0070] The gas-liquid mixture flows through the gas-liquid fusion pipe 201 into the liquid collection chamber 200, and the liquid collection chamber 200 collects the gas-liquid mixture.

[0071] Step S2: Test the pressure in the liquid collection chamber.

[0072] The pressure gauge 210 on the liquid collection chamber 200 detects in real time the pressure of the gas-liquid mixture in the liquid collection chamber 200.

[0073] Step S3: Whether the pressure in the liquid collection chamber reaches the set value; if not, execute Step S4, if so, execute Step S5.

[0074] Step S4: The circulation system does not work.

[0075] Step S5: The circulation system works.

[0076] Step S61: Test the liquid concentration in the gas collection chamber.

[0077] Step S62: Test the liquid level in the liquid collection chamber.

[0078] Step S61 and Step S62 can be executed synchronously.

[0079] When the circulation system is working, the gas-liquid mixture in the liquid collection chamber 200 enters the separation chamber 202 multiple times and collides with each layer of fixed baffles and the second protrusions in the separation chamber 202. During the collision process, the gas and liquid in the gas-liquid mixture are separated. The separated gas enters the gas collection chamber 203 through the air outlet, and the separated liquid enters the liquid collection chamber 200 through the openings on each layer of fixed baffles.

[0080] The concentration measuring instrument 209 for the liquid content in the gas collection chamber 203 tests in real time the liquid concentration in the gas collection chamber 203. At the same time, the liquid level gauge 211 in the liquid collection chamber 200 tests in real time the height of the separated liquid level in the liquid collection chamber 200.

[0081] Step S71: Whether the liquid concentration in the gas collection chamber reaches the set value; if not, return to Step S5, if so, execute Step S81.

[0082] Step S81: The circulation system stops working and the gas collection chamber exhausts.

[0083] Step S72: Whether the liquid level in the liquid collection chamber reaches the set value; if not, return to Step S5, if so, execute Step S82.

[0084] Step S82: The circulation system stops working, and the liquid collection chamber discharges liquid.

[0085] After the circulation system stops working, the pneumatic control valve 208 of the gas collection chamber opens for exhaust, and synchronously the liquid control valve 212 of the liquid collection chamber opens for liquid discharge; or, the exhaust in the gas collection chamber and the liquid discharge in the liquid collection chamber can be carried out asynchronously.

[0086] It should be noted that when the gas-liquid separation device separates the gas-liquid mixture, the air outlet holes of each layer of fixed baffle, the outlets on each layer of fixed baffle, and the gas-liquid fusion pipes are all in an open state. When the gas-liquid separation device exhausts or discharges liquid, the air outlet holes of each layer of fixed baffle, the outlets on each layer of fixed baffle, and the gas-liquid fusion pipes are all in a sealed state, isolating the gas collection chamber, the liquid collection chamber, and the gas-liquid fusion pipeline, preventing the gas in the gas collection chamber from flowing to the liquid collection chamber during liquid discharge, or preventing the gas in the liquid collection chamber from flowing to the gas collection chamber during exhaust.

[0087] Second Embodiment

[0088] For the same parts of the structure corresponding to the second embodiment of the gas-liquid separation device of the present invention and the structure corresponding to the first embodiment of the gas-liquid separation device, reference can be made to the description of Figure 2 In the structure corresponding to the second embodiment of the gas-liquid separation device, the gas-liquid fusion pipe is connected to the gas collection chamber to transport the gas-liquid mixture to the gas collection chamber; the circulation system includes a second power system and a second circulation pipeline connecting the liquid collection chamber and the gas collection chamber; the second power system drives the gas-liquid mixture to circulate downward successively through the gas collection chamber, the second circulation pipeline, the liquid collection chamber, and the separation chamber.

[0089] Figure 4 This is the structure corresponding to the second embodiment of the gas-liquid separation device of the present invention.

[0090] Refer to Figure 4 , the gas-liquid fusion pipe 301 is connected to the gas collection chamber 203 to transport the gas-liquid mixture into the gas collection chamber 203.

[0091] Continue to refer to Figure 4 , the gas-liquid separation device may include a circulation system 302. The circulation system 302 further includes a second circulation pipeline 302b, and the second circulation pipeline 302b is used to connect the liquid collection chamber 200 and the gas collection chamber 203.

[0092] Continue to refer to Figure 4 , the circulation system 302 includes a second power system 302a, and the second power system 302a drives the gas-liquid mixture in the gas collection chamber 203 to circulate downward successively through the gas collection chamber 203, the second circulation pipeline 302b, the liquid collection chamber 200, and the separation chamber 202, so that the gas-liquid mixture collides with each layer of fixed baffle to improve the gas-liquid separation effect.

[0093] For the operation method of the gas-liquid separation device corresponding to the embodiment of the present utility model, reference may be made to the operation method of the foregoing embodiment, and details thereof will not be repeated herein.

[0094] Although the present utility model has been disclosed above with preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make possible changes and modifications to the technical solution of the present utility model by using the methods and technical contents disclosed above without departing from the spirit and scope of the present utility model. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the content of the technical solution of the present utility model all fall within the protection scope of the technical solution of the present utility model.

Claims

1. A gas-liquid separation device, characterized in that, Comprising: A liquid collecting chamber for collecting the gas-liquid mixture; A gas-liquid fusion pipe for transporting the gas-liquid mixture; A separation chamber for separating the gas and liquid of the gas-liquid mixture; A gas collecting bin for collecting the separated gas; A circulation system for flowing the gas-liquid mixture among the liquid collecting chamber, the separation chamber and the gas collecting bin; The separation chamber includes: a plurality of layers of fixed baffles connected to the inner wall of the separation chamber for gas-liquid separation of the gas-liquid mixture flowing into the separation chamber; at least one air outlet for upwardly leading out the separated gas and at least one opening for downwardly leading out the separated liquid are provided on each layer of fixed baffle; wherein, the top fixed baffle among the plurality of layers of fixed baffles is connected to the gas collecting bin, and the bottom fixed baffle is connected to the liquid collecting chamber.

2. The gas-liquid separation device according to claim 1, characterized in that, The gas-liquid fusion pipe is connected to the liquid collecting chamber to transport the gas-liquid mixture to the liquid collecting chamber; the circulation system includes a first power system and a first circulation pipeline connecting the liquid collecting chamber and the gas collecting bin; the first power system drives the gas-liquid mixture to circulate upwardly in sequence through the liquid collecting chamber, the separation chamber, the gas collecting bin and the first circulation pipeline.

3. The gas-liquid separation device according to claim 1, characterized in that, The gas-liquid fusion pipe is connected to the gas collecting bin to transport the gas-liquid mixture to the gas collecting bin; the circulation system includes a second power system and a second circulation pipeline connecting the liquid collecting chamber and the gas collecting bin; the second power system drives the gas-liquid mixture to circulate downwardly in sequence through the gas collecting bin, the second circulation pipeline, the liquid collecting chamber and the separation chamber.

4. The gas-liquid separation device according to claim 1, characterized in that, The air outlets on the adjacent layers of fixed baffles among the plurality of layers of fixed baffles are distributed in a staggered and non-overlapping manner.

5. The gas-liquid separation device according to claim 1, characterized in that The separation chamber is a conical structure that is narrower at the top and wider at the bottom; a first protrusion is provided on the inner wall of the separation chamber; a plurality of second protrusions are provided on the lower surface of each layer of fixed baffle; along the direction away from the air outlet, the heights of the plurality of second protrusions on the lower surface of each layer of fixed baffle gradually decrease; the upper surface of each layer of fixed baffle is smooth.

6. The gas-liquid separation device according to claim 1, wherein The opening is located at the contact position between each layer of fixed baffle and the inner wall of the separation chamber; the openings of the adjacent layers of fixed baffles are distributed in a staggered and non-overlapping manner.

7. The gas-liquid separation device according to claim 1, characterized in that, A sealed state is maintained between each layer of fixed baffle and the inner wall of the separation chamber.

8. The gas-liquid separation device according to claim 1, characterized in that, The plurality of layers of fixed baffles are arranged in parallel and at equal intervals; each layer of fixed baffle is inclined towards the bottom of the separation chamber.

9. The gas-liquid separation device according to claim 1, characterized in that, Further comprising: An exhaust port provided on the gas collecting bin for discharging the gas separated and located in the gas collecting bin; A liquid discharge port provided on the liquid collecting chamber for discharging the liquid separated and located in the liquid collecting chamber.

10. The gas-liquid separation device according to claim 9, characterized in that, Further comprising: A negative pressure system provided on the gas collecting bin for exhausting gas; A pneumatic control valve provided on the gas collecting bin and connected to the exhaust port for controlling the exhaust; A concentration measuring instrument provided on the gas collecting bin for monitoring the liquid content in the gas collecting bin; A pressure gauge provided on the liquid collecting chamber for detecting the pressure in the liquid collecting chamber; A liquid level gauge provided on the liquid collecting chamber for detecting the liquid level in the liquid collecting chamber; A liquid control valve provided on the liquid collecting chamber and connected to the liquid discharge port for controlling the liquid discharge.

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