Dust filtering tank and vacuum deposition equipment

Abstract

The utility model provides a dust filtering tank and vacuum deposition equipment, the dust filtering tank comprises a main body, a filter element and a first end cover, the main body is provided with a first channel, the first channel penetrates through the main body, one side of the main body is provided with an air inlet, the air inlet is communicated with the first channel, and the air inlet allows to-be-filtered gas to enter the first channel; the filter element is arranged in the first channel, the filter element is provided with a cavity, the cavity is provided with an opening, the filter element is used for filtering gas in the first channel, the cavity contains the filtered gas, and the opening is used for outputting the gas in the cavity; the first end cover is connected to one end, far away from the opening, of the main body, the first end cover is provided with a purging opening, sweeping gas blows towards the opening after passing through the purging opening and forms airflow, and the airflow flows through the outer wall of the filter element in the axial direction of the filter element so as to purge dust on the outer wall of the filter element. The blowing opening blows air towards the opening and forms airflow, and the airflow flows through the outer wall of the filter element, so that dust attached to the outer wall of the filter element can be reduced, the gas filtering efficiency of the dust filtering tank is improved, and a large amount of filtered gas is quickly provided for the vacuum pump.

Description

Technical Field

[0001] The present application relates to the field of solar cell manufacturing, and particularly to a dust filter tank and a vacuum deposition device. Background Art

[0002] In the solar cell industry, a large amount of vacuum pumps are required to obtain the required vacuum degree for the reaction to obtain higher quality and higher purity products. In order to prevent the influence of dust on the vacuum pump, a dust filter tank is used to connect to the vacuum pump so that the gas inhaled by the vacuum pump is the gas filtered by the dust filter tank.

[0003] In the related art, as the use time of the dust filter tank increases, a large amount of dust will adhere to the outer wall of the filter element, affecting the passage of gas through the dust filter tank and resulting in low gas filtration efficiency. Utility Model Content

[0004] In view of this, the present application provides a dust filter tank that can reduce the dust adhering to the outer wall of the filter element to quickly filter the dust in the gas.

[0005] An embodiment of the present application provides a dust filter tank. The dust filter tank includes a main body, a filter element, and a first end cap. The main body has a first channel that penetrates the main body. An air inlet is provided on one side of the main body, and the air inlet communicates with the first channel for the gas to be filtered to enter the first channel. The filter element is disposed in the first channel. The filter element has a cavity with an opening. The filter element is used to filter the gas in the first channel. The cavity accommodates the filtered gas, and the opening allows the gas in the cavity to be output. The first end cap is connected to the end of the main body far from the opening. The first end cap is provided with a purge port. The purge gas forms an air flow after passing through the purge port and blowing towards the opening. The air flow flows along the axial direction of the filter element through the outer wall of the filter element to purge the dust on the outer wall of the filter element.

[0006] In some embodiments of the present application, the outer wall of the filter element is cylindrical, and the purge port is annular to blow out an annular air flow along the axial direction of the filter element towards the opening, so that the air flow can purge the dust on the outer wall of the filter element.

[0007] In some embodiments of the present application, the first end cap is further provided with an inlet and a cavity. The cavity communicates the inlet and the purge port. The inlet is in the shape of a hole. The gas enters the cavity from the inlet and forms an air flow through the purge port towards the opening.

[0008] In some embodiments of the present application, the dust filter tank further includes a second end cap. The second end cap includes a first surrounding wall and a first extending wall. The first surrounding wall encloses a second channel. The first extending wall is connected to the end of the first surrounding wall close to the opening. The first extending wall extends radially along the first surrounding wall. The first extending wall is connected to the filter element, so that the cavity communicates with the second channel through the opening, and the filter element is positioned in the first channel and spaced from the side wall of the first channel.

[0009] In some embodiments of the present application, the filter element includes at least one filter layer, and each filter layer includes a second surrounding wall and a second extending wall. The second extending wall is provided at one end of the second surrounding wall close to the opening. The second surrounding wall is used to filter the gas to be filtered, the second extending wall extends along the radial direction of the filter element, and the second extending wall is used to connect the second end cap.

[0010] In some embodiments of the present application, a positioning post is connected to one end of the first extending wall close to the opening, and a positioning groove is provided on the second extending wall. The positioning post can be inserted into the positioning groove to position the filter element by the second end cap. The second extending wall is used to abut against the first extending wall so that the cavity communicates with the second channel through the opening.

[0011] In some embodiments of the present application, a groove is provided at one end of the first extending wall close to the opening. The groove is provided on the outer periphery of the positioning post, and a sealing ring is provided in the groove. The sealing ring abuts against the main body and the first extending wall to seal the main body and the second end cap.

[0012] In some embodiments of the present application, the main body includes a third surrounding wall and a third extending wall. The third surrounding wall is used to enclose the first channel, the third extending wall is connected to one end of the third surrounding wall close to the opening, the third extending wall extends along the radial direction of the third surrounding wall, and a locking member is connected between the third extending wall and the first extending wall to make the third extending wall abut against the first extending wall.

[0013] In some embodiments of the present application, the second end cap is provided with a monitoring joint, the monitoring joint communicates with the second channel, and the monitoring joint is used to connect a pressure monitoring device capable of monitoring the air pressure in the cavity and the second channel.

[0014] An embodiment of the present application further provides a vacuum deposition device, which includes a reaction furnace, a regulating valve, a vacuum pump, and a dust filter tank as described in any of the above embodiments. The reaction furnace is used for the deposition process and provides the gas to be filtered generated by the process to the dust filter tank. The reaction furnace is connected to the regulating valve, the regulating valve is connected to the air inlet, the vacuum pump is connected to the dust filter tank, so that the gas to be filtered enters the first channel from the regulating valve, is filtered by the filter element and then enters the vacuum pump. The purge port is connected to an external gas source, and the external gas source is used to provide a cleaning gas, so that the cleaning gas blows towards the opening through the purge port to form an air flow to purge the outer wall of the filter element, and then enters the vacuum pump after being filtered by the filter element.

[0015] In the embodiments of the present application, an air inlet is connected through a regulating valve, a dust filter tank is connected through a vacuum pump, so that the cavity is communicated with the vacuum pump, a reaction furnace is respectively connected to the regulating valve and provides the gas to be filtered, the gas to be filtered enters the first channel through the regulating valve, enters the cavity after being filtered by the filter element, and enters the vacuum pump from the opening of the cavity, so that the gas received by the vacuum pump is the filtered gas, preventing the dust in the gas from damaging the vacuum pump. An external gas source is connected to the purge port and provides purge gas, so that the purge gas blows out along the axial direction of the filter element from the purge port to purge the dust on the outer wall of the filter element, which can reduce the dust attached to the outer wall of the filter element, prevent the dust from affecting the efficiency of the gas passing through the filter element, quickly filter the dust in the gas, improve the efficiency of the dust filter tank in filtering the gas, and thus quickly provide a large amount of filtered gas for the vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the accompanying drawings in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope.

[0017] Figure 1 Schematic diagram of a vacuum deposition device provided by an embodiment of the present application;

[0018] Figure 2 For Figure 1 Schematic diagram of the structure of the dust filter tank in;

[0019] Figure 3 For Figure 1 Exploded view of the dust filter tank in;

[0020] Figure 4 For Figure 1 Schematic diagram of the first end cap part in;

[0021] Figure 5 For Figure 1 Schematic diagram of the connection part of the main body and the second end cap in;

[0022] Figure 6 For Figure 1 Schematic diagram of the structure of the second end cap in;

[0023] Figure 7 For Figure 1 Schematic diagram of the filter element in.

[0024] MAIN ELEMENT SYMBOL DESCRIPTION:

[0025] 100, Dust filter tank; 200, Vacuum deposition equipment; 2001, Reaction furnace; 2002, Control valve; 2003, Vacuum pump; 2004, Pressure monitoring device; 100, Dust filter tank; 10, Main body; 11, Third surrounding wall; 111, First channel; 112, Air inlet; 12, Third extension wall; 20, Filter element; 21, Filter layer; 211, Second surrounding wall; 212, Second extension wall; 2121, Positioning groove; 201, Cavity; 202, Opening; 30, First end cap; 31, Purge port; 32, Inlet; 33, Chamber; 34, Nozzle; 40, Second end cap; 41, First surrounding wall; 411, Second channel; 412, Groove; 413, Monitoring joint; 42, First extension wall; 421, Positioning post; 50, Locking member; 51, Clamping block; 52, Bolt; 53, Nut. Detailed implementation manners

[0026] The following will describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art belonging to the field of the present application. The terms used in the specification of the present application herein are only for the purpose of describing specific implementation manners, and are not intended to limit the present application.

[0028] In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance.

[0029] The term "vertical" is used to describe an ideal state. In the actual production or use state, there may be a state approximately vertical. The term "parallel" is used to describe an ideal state. In the actual production or use state, there may be a state approximately parallel.

[0030] It should be noted that when an element is referred to as "fixed" to another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. When an element is considered to be "disposed on" another element, it can be directly disposed on the other element or there may be an intermediate element at the same time.

[0031] In the solar cell industry, a large number of vacuum pumps are required to obtain the required vacuum degree for the reaction in order to obtain products of higher quality and higher purity. To prevent dust from clogging or even jamming the vacuum pump, a dust filter tank is connected to the vacuum pump so that the gas inhaled by the vacuum pump is the gas filtered by the dust filter tank. In the related art, as the use time of the dust filter tank increases, a large amount of dust will adhere to the outer wall of the filter element, which is likely to cause the filter element to clog and affect the passage of gas through the dust filter tank, thereby reducing the gas filtration effect.

[0032] An embodiment of the present application provides a dust filter tank that can reduce the dust adhering to the outer wall of the filter element to quickly filter the dust in the gas. The dust filter tank includes a main body, a filter element, and a first end cap. The main body has a first channel that penetrates the main body. An air inlet is provided on one side of the main body, and the air inlet is communicated with the first channel for the gas to be filtered to enter the first channel. The filter element is arranged in the first channel. The filter element has a cavity with an opening. The filter element is used to filter the gas in the first channel. The cavity accommodates the filtered gas, and the opening allows the gas in the cavity to be output. The first end cap is connected to the end of the main body far from the opening. The first end cap is provided with a purging port, and the cleaning gas blows towards the opening after passing through the purging port to form an air flow. The air flow flows along the axial direction of the filter element through the outer wall of the filter element to purge the dust on the outer wall of the filter element.

[0033] In the embodiment of the present application, the air inlet is connected through a regulating valve, the dust filter tank is connected through a vacuum pump so that the cavity is communicated with the vacuum pump, the reaction furnace is respectively connected to the regulating valve to provide the gas to be filtered, the gas to be filtered enters the first channel through the regulating valve, is filtered by the filter element and then enters the cavity, and enters the vacuum pump from the opening of the cavity, so that the gas received by the vacuum pump is the filtered gas, preventing the dust in the gas from damaging the vacuum pump. An external gas source is connected to the purging port to provide the cleaning gas, so that the air flow blown by the cleaning gas towards the opening through the purging port purges the dust on the outer wall of the filter element along the axial direction of the filter element, which can reduce the dust adhering to the outer wall of the filter element, prevent the dust from affecting the efficiency of the gas passing through the filter element, quickly filter the dust in the gas, improve the efficiency of the dust filter tank in filtering the gas, and thus quickly provide a large amount of filtered gas for the vacuum pump.

[0034] The following will describe in detail some embodiments of the present application with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0035] Please refer to Figure 1, an embodiment of the present application provides a vacuum deposition device 200. The vacuum deposition device 200 includes a reaction furnace 2001, a vacuum pump 2003, and a dust filter tank 100. The reaction furnace 2001 is used to provide the gas required by the vacuum pump 2003. A dust filter tank 100 is connected between the reaction furnace 2001 and the vacuum pump 2003. The dust filter tank 100 filters the gas provided by the reaction furnace 2001. The vacuum pump 2003 is used to evacuate the reaction furnace 2001, so that the reaction furnace 2001 performs a deposition process in a vacuum environment. The gas filtered by the dust filter tank 100 is pumped out by the vacuum pump 2003.

[0036] In some embodiments, the gas provided by the reaction furnace 2001 is nitrogen.

[0037] In some embodiments, the vacuum deposition device 200 further includes a regulating valve 2002. The regulating valve 2002 is respectively connected to the reaction furnace 2001 and the dust filter tank 100 to control the gas flow rate entering the dust filter tank 100.

[0038] In some embodiments, the vacuum deposition device 200 further includes a pressure monitoring device 2004. The pressure monitoring device 2004 is connected to the dust filter tank 100, and the pressure monitoring device 2004 is used to monitor the air pressure in the cavity 201. When the pressure monitoring device 2004 detects that the air pressure in the cavity 201 is less than or equal to the set threshold, it is determined that the dust filter tank 100 is not blocked. When the pressure monitoring device 2004 detects that the air pressure in the cavity 201 is greater than the set threshold, it is determined that the dust filter tank 100 is blocked. Therefore, the pressure monitoring device 2004 achieves the effect of monitoring whether the filter element 20 of the dust filter tank 100 is blocked by dust.

[0039] In some embodiments, the pressure monitoring device 2004 is a pressure gauge.

[0040] Please refer to Figures 1 to 4 , in some embodiments, the dust filter tank 100 includes a main body 10, a filter element 20, and a first end cap 30. The main body 10 has a first channel 111, and the first channel 111 penetrates through the main body 10. An air inlet 112 is provided on one side of the main body 10 (see Figure 3) The air inlet 112 communicates with the first channel 111. The air inlet 112 allows the gas to be filtered to enter the first channel 111. The air inlet 112 is connected to a regulating valve 2002 to control the gas flow rate entering the first channel 111 from the air inlet 112. The gas to be filtered is provided by a reaction furnace 2001 connected to the regulating valve 2002. The filter element 20 is disposed in the first channel 111 and is used to filter the gas in the first channel 111. The filter element 20 has a cavity 201, and the cavity 201 accommodates the filtered gas. The cavity 201 has an opening 202, and the opening 202 allows the gas in the cavity 201 to be output. A vacuum pump 2003 communicates with the cavity 201 so that the gas output from the opening 202 can enter the vacuum pump 2003. The first end cap 30 is connected to one end of the main body 10 away from the opening 202. The first end cap 30 is provided with a purge port 31 (see Figure 4 ). The cleaning gas blows towards the opening 202 through the purge port 31 to form an air flow. The air flow flows along the axial direction of the filter element 20 through the outer wall of the filter element 20 to purge the dust on the outer wall of the filter element 20, which can reduce the dust adhering to the outer wall of the filter element 20, prevent the dust from affecting the efficiency of the gas passing through the filter element 20, quickly filter the dust in the gas, and improve the efficiency of the dust filter tank 100 for filtering the gas. After the outer wall of the filter element 20 is purged by the air flow formed by the cleaning gas blowing towards the opening 202 through the purge port 31, the cleaning gas enters the cavity 201 after being filtered by the filter element 20, and then is output from the opening 202 and enters the vacuum pump 2003.

[0041] In some embodiments, the purge port 31 is connected to an external gas source, and the external gas source is used to provide the cleaning gas. The cleaning gas is nitrogen. The external gas source is independent of the reaction furnace 2001.

[0042] In one embodiment, the air inlet 112 and the purge port 31 are supplied with gas by the same reaction furnace 2001.

[0043] In some embodiments, the outer wall of the filter element 20 is cylindrical. The purge port 31 is annular. The cleaning gas can blow out an annular air flow towards the opening 202 through the purge port 31. The annular air flow blown out by the annular purge port 31 fits the shape of the cylindrical filter element 20 and can purge the outer wall of the filter element 20 along the axial direction of the filter element 20 to prevent the dust in the gas from adhering to the outer wall of the filter element 20. The annular purge port 31 is processed according to the shape of the filter element 20, and the structure is simple and convenient for processing.

[0044] Please refer to Figure 3 、 Figure 4 and Figure 7 , in some embodiments, the outer wall of the filter element 20 is cylindrical. The purge port 31 is circular. The inner diameter of the circle is smaller than the diameter of the outer wall of the filter element 20, and the outer diameter of the circle is larger than the diameter of the outer wall of the filter element 20, so that the air flow blown out by the purge port 31 can purge the outer wall of the filter element 20 to reduce the dust adhering to the outer wall of the filter element 20.

[0045] In some embodiments, the purging port 31 is composed of a plurality of air holes, and the plurality of air holes are distributed at intervals along the axial direction of the filter element 20 on the outer wall of the filter element 20. The cleaning gas blows air towards the opening 202 through each air hole and forms an air flow, and the air flows blown out by the plurality of air holes jointly purge the outer wall of the filter element 20.

[0046] In some embodiments, the purging port 31 penetrates through the first end cap 30.

[0047] Please refer to Figure 4 , in some embodiments, the purging port 31 does not penetrate through the first end cap 30. The first end cap 30 is further provided with an inlet 32 and a cavity 33. The cavity 33 communicates with the inlet 32 and the purging port 31. The inlet 32 is in the shape of a hole. The purging port 31 only penetrates through one end of the first end cap 30 close to the opening 202, so that the cleaning gas enters the cavity 33 from the inlet 32 and blows out an air flow towards the opening 202 through the purging port 31.

[0048] The cavity 33 enables the cleaning gas to be blown out according to the shape of the purging port 31, so as to form an air flow that can purge the outer wall of the filter element 20. The cavity 33 can also increase the pressure of the air flow to a certain extent, so as to better purge the outer wall of the filter element 20 and reduce the dust attached to the outer wall of the filter element 20.

[0049] In some embodiments, the inlet 32 is in the shape of a round hole. The inlet 32 can also be in the shapes of a square hole, a special-shaped hole, etc.

[0050] In some embodiments, a nozzle 34 communicating with the inlet 32 is connected to the first end cap 30, and the nozzle 34 is used to connect to the reaction furnace 2001 so that the cleaning gas enters the cavity 33 through the nozzle 34.

[0051] In some embodiments, the extending direction of the first channel 111 is parallel to the axial direction of the filter element 20. There is a gap between the outer wall of the filter element 20 and the side wall of the first channel 111, making the filter element 20 independent of the main body 10, which is convenient for subsequent replacement and disassembly of the filter element 20.

[0052] In some embodiments, the regulating valve 2002 installed at the air inlet 112 controls the gas to enter the first channel 111 along the radial direction of the filter element 20. The air flow continuously purges the outer wall of the filter element 20 along the axial direction of the filter element 20. The axial direction of the filter element 20 is perpendicular to the radial direction of the filter element 20, which can continuously purge the outer wall of the filter element 20 and reduce the dust attached to the outer wall of the filter element 20.

[0053] In some embodiments, the air inlet 112 is located at a position corresponding to the center of the main body 10 and the first channel 111. After the gas enters the first channel 111, it can be more evenly diffused in the first channel 111, and then passes through the filter element 20 and enters the cavity 201.

[0054] Please refer to Figure 1, in some embodiments, the dust filter tank 100 further includes a second end cap 40. The second end cap 40 is connected to one end of the main body 10 near the opening 202, so that the second end cap 40 is fixed relative to the main body 10. The vacuum pump 2003 is connected to the end of the second end cap 40 away from the main body 10, so that the vacuum pump 2003 is connected to the main body 10. Please refer to Figure 5 and Figure 6 , the second end cap 40 includes a first surrounding wall 41 and a first extending wall 42. The first surrounding wall 41 encloses a second channel 411, and the second channel 411 axially penetrates the second end cap 40 along the axis of the filter element 20. The first extending wall 42 is connected to one end of the first surrounding wall 41 near the opening 202, and the first extending wall 42 extends radially along the first surrounding wall 41. Among them, the radial direction of the first surrounding wall 41 is parallel to the radial direction of the filter element 20. The first extending wall 42 is connected to the filter element 20, so that the filter element 20 is positioned in the first channel 111; it also enables the cavity 201 to communicate with the second channel 411 through the opening 202, so that the gas in the cavity 201 can enter the vacuum pump 2003 through the opening 202 and the second channel 411.

[0055] Please refer to Figure 3 and Figure 7 , in some embodiments, the filter element 20 includes at least one filter layer 21. Each filter layer 21 includes a second surrounding wall 211 and a second extending wall 212. The second extending wall 212 is provided at one end of the second surrounding wall 211 near the opening 202. The second surrounding wall 211 is used to filter the gas to be filtered. The second extending wall 212 extends radially along the filter element 20. The second extending wall 212 is used to connect the second end cap 40, so that the second end cap 40 positions each filter layer 21 through the second extending wall 212, thereby positioning the filter element 20 in the first channel 111. Among them, the second surrounding wall 211 of the innermost filter layer 21 encloses the cavity 201. The airflow blown out from the purging port 31 towards the opening 202 flows axially along the filter element 20 through the outermost second surrounding wall 211.

[0056] It can be understood that when there are more filter layers 21, the filter element 20 can filter the dust in the gas more thoroughly. At the same time, the speed of the gas passing through the filter element 20 will slow down. In some embodiments, the filter element 20 includes two filter layers 21, so that the outer filter element 20 can filter larger dust particles, and the inner filter element 20 can filter smaller dust particles, so as to achieve a better dust filtering effect.

[0057] Please refer to Figure 5 and Figure 6, in some embodiments, a positioning post 421 is connected to one end of the first extension wall 42 close to the opening 202. A positioning groove 2121 is provided on the second extension wall 212. The positioning groove 2121 can accommodate the insertion of the positioning post 421, so that the second end cap 40 can position the filter element 20, thereby positioning the filter element 20 in the first channel 111. The second extension wall 212 is used to abut against the first extension wall 42, so that the cavity 201 communicates with the second channel 411 through the opening 202. It can be understood that the first extension wall 42 connects the main body 10 and the second extension wall 212, and the first channel 111 is not communicated with the second channel 411. The gas in the cavity 201 can only enter the second channel 411 after passing through the opening 202, avoiding gas leakage into the first channel 111.

[0058] In some embodiments, a positioning hole into which the positioning post 421 can be inserted is provided on the second extension wall 212. The positioning post 421 is inserted into the positioning hole to position the filter element 20. It can be understood that by matching the recess or notch with the protrusion, the second end cap 40 can be connected to the filter element 20, thereby positioning the filter element 20.

[0059] In some embodiments, a groove 412 is provided at one end of the first extension wall 42 close to the opening 202. The groove 412 is provided on the outer periphery of the positioning post 421. A sealing ring is provided in the groove 412. When the second end cap 40 is connected to the main body 10, the sealing ring abuts between the main body 10 and the first extension wall 42 to seal the main body 10 and the second end cap 40.

[0060] In some embodiments, the main body 10 includes a third surrounding wall 11 and a third extension wall 12. The third surrounding wall 11 is used to enclose the first channel 111. The third extension wall 12 is connected to one end of the third surrounding wall 11 close to the opening 202. The third extension wall 12 extends radially along the third surrounding wall 11. The radial direction of the third surrounding wall 11 is parallel to the radial direction of the filter element 20. A locking member 50 is connected between the third extension wall 12 and the first extension wall 42. The locking member 50 abuts the third extension wall 12 against the first extension wall 42, so that the first extension wall 42 and the third extension wall 12 close the first channel 111.

[0061] In some embodiments, the fastener includes a bolt 52 and a nut 53. The bolt 52 passes through the first extension wall 42 and the third extension wall 12, and the nut 53 is threadedly connected to the bolt 52 to connect the first extension wall 42 and the third extension wall 12.

[0062] Please refer to Figure 5 , in some embodiments, the fastener includes two clamping blocks 51, a bolt 52 and a nut 53. The two clamping blocks 51 are respectively connected to the first extension wall 42 and the third extension wall 12. The bolt 52 passes through the two clamping blocks 51, and the nut 53 is threadedly connected to the bolt 52 to adjust the distance between the two clamping blocks 51, so as to clamp the first extension wall 42 and the third extension wall 12 by the two clamping blocks 51.

[0063] Please refer to Figures 1 to 3 , in some embodiments, the second end cap 40 is provided with a monitoring joint 413. The monitoring joint 413 communicates with the second channel 411. The monitoring joint 413 is used to connect the pressure monitoring device 2004.

[0064] When the pressure monitoring device 2004 determines that the filter element 20 is blocked by dust, the second end cap 40 is separated from the main body 10 by removing the bolts 52, and the filter element 20 connected to the second end cap 40 is taken out, so as to timely maintain or replace the filter element 20.

[0065] In addition, those of ordinary skill in the art of the present technology should recognize that the above embodiments are only used to illustrate the present application, rather than to limit the present application. As long as it is within the scope of the substantial spirit of the present application, appropriate changes and variations made to the above embodiments fall within the scope of the disclosure of the present application.

Claims

1. A dust filter tank, characterized in that, Comprising: A main body having a first passage therethrough. An air inlet is provided on one side of the main body, and the air inlet communicates with the first passage for the gas to be filtered to enter the first passage. A filter element disposed in the first passage. The filter element has a cavity with an opening. The filter element is used to filter the gas in the first passage, the cavity accommodates the filtered gas, and the opening allows the gas in the cavity to be output. A first end cap connected to the end of the main body away from the opening. The first end cap is provided with a purge port, and the purge gas blows towards the opening through the purge port to form an air flow. The air flow flows along the axial direction of the filter element through the outer wall of the filter element to purge the dust on the outer wall of the filter element.

2. The dust filtration tank according to claim 1, wherein: The outer wall of the filter element is cylindrical, and the purge port is annular to blow out an annular air flow towards the opening along the axial direction of the filter element, so that the air flow can purge the dust on the outer wall of the filter element.

3. The dust filtration tank according to claim 2, characterized in that: The first end cap is further provided with an inlet and a cavity. The cavity communicates the inlet and the purge port. The inlet is in the shape of a hole, and the purge gas enters the cavity from the inlet and blows out an air flow through the purge port towards the opening.

4. The dust filtration tank according to any one of claims 1 to 3, characterized in that: The dust filter tank further includes a second end cap. The second end cap includes a first surrounding wall and a first extending wall. The first surrounding wall encloses a second passage. The first extending wall is connected to the first surrounding wall at the end close to the opening. The first extending wall extends radially along the first surrounding wall. The first extending wall connects the filter element, so that the cavity communicates with the second passage through the opening, and also positions the filter element in the first passage and spaces it from the side wall of the first passage.

5. The dust filter tank according to claim 4, characterized in that: The filter element includes at least one filter layer. Each filter layer includes a second surrounding wall and a second extending wall. The second extending wall is disposed at the end of the second surrounding wall close to the opening. The second surrounding wall is used to filter the gas to be filtered. The second extending wall extends radially along the filter element and is used to connect the second end cap.

6. The dust filtration tank according to claim 5, characterized in that: A positioning post is connected to the end of the first extending wall close to the opening. A positioning groove is provided on the second extending wall, and the positioning groove can accommodate the positioning post to insert, so that the second end cap positions the filter element. The second extending wall is used to abut against the first extending wall, so that the cavity communicates with the second passage through the opening.

7. The dust filtering tank according to claim 6, wherein: A groove is provided at the end of the first extending wall close to the opening. The groove is disposed on the outer periphery of the positioning post, and a sealing ring is provided in the groove. The sealing ring abuts against the main body and the first extending wall to seal the main body and the second end cap.

8. The dust filtration tank according to claim 4, wherein, The main body includes a third surrounding wall and a third extending wall. The third surrounding wall is used to enclose the first passage. The third extending wall is connected to the third surrounding wall at the end close to the opening. The third extending wall extends radially along the third surrounding wall. A locking member is connected between the third extending wall and the first extending wall, and the locking member makes the third extending wall abut against the first extending wall.

9. The dust filtration tank according to claim 4, characterized in that: The second end cover is provided with a monitoring joint, the monitoring joint communicates with the second channel, and the monitoring joint is used for connecting a pressure monitoring device capable of monitoring the air pressure in the cavity and the second channel.

10. A vacuum deposition device, characterized in that, Comprising: A reaction furnace, a regulating valve, a vacuum pump, and a dust filter tank according to any one of claims 1 to 9. The reaction furnace is used for a deposition process and provides the to-be-filtered gas generated by the process to the dust filter tank. The reaction furnace is connected to the regulating valve, the regulating valve is connected to the air inlet, the vacuum pump is connected to the dust filter tank, so that the to-be-filtered gas enters the first channel from the regulating valve, passes through the filter element and then enters the vacuum pump. The purging port is connected to an external gas source, and the external gas source is used to provide the purging gas, so that after the purging gas blows towards the opening through the purging port to form an air flow to purge the outer wall of the filter element, it passes through the filter element and then enters the vacuum pump.

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