Connection limiting device and grinding equipment
The coaxial alignment connection between the silicon carbide crystal and the load-bearing tool is achieved through the connection limiting device, which solves the judgment error problem caused by naked eye observation and improves the polishing accuracy.
Patent Information
- Application Number
- CN202421879972.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-05
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-08-05
AI Technical Summary
In the prior art, the relative central judgment between the semi-finished silicon carbide crystal and the bearing tooling relies on naked eye observation, resulting in judgment errors.
The connection limiting device is adopted, including an annular body and multiple limiting parts. Through the combination of limiting holes and limiting parts, the coaxial alignment connection between the silicon carbide crystal and the load-bearing tool is realized to reduce judgment errors.
The coaxial setting of silicon carbide crystal and the load-bearing tool is realized, reducing judgment errors and improving polishing accuracy.
Smart Images
Figure CN223084498U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of semiconductor production, and in particular to a connection limiting device and a grinding device. Background Art
[0002] Silicon carbide crystals have advantages such as a large bandgap width, a high breakdown voltage, a high thermal conductivity, a high electron saturation drift rate, and a small dielectric constant, making silicon carbide crystals suitable for fabricating semiconductor devices.
[0003] In related technologies, a semi-finished silicon carbide crystal needs to be fixed on a carrying tooling of a grinding device, and the center of the fixed semi-finished silicon carbide crystal and the carrying tooling is opposite, and then the edge of the silicon carbide crystal protruding from the carrying tooling is ground to form a finished silicon carbide crystal with a preset shape.
[0004] However, the center alignment between the semi-finished silicon carbide crystal and the carrying tooling is usually determined by visual observation of the staff, resulting in judgment errors. Summary of the Utility Model
[0005] The present disclosure provides a connection limiting device and a grinding device, and a technical problem to be solved is that the center alignment between the semi-finished silicon carbide crystal and the carrying tooling is usually determined by visual observation of the staff, resulting in judgment errors.
[0006] In a first aspect, the present disclosure provides a connection limiting device, which may include: an annular body and a plurality of first limiting members. A first accommodation space and a second accommodation space are axially distributed inside the annular body. The radial dimension of the first accommodation space is greater than or equal to the radial dimension of the second accommodation space. A plurality of first limiting holes are provided in a part of the annular body corresponding to the first accommodation space and are distributed along the circumferential direction of the annular body; the plurality of first limiting members pass through the plurality of first limiting holes correspondingly to define a first limiting space in the first accommodation space, the radial dimension of which is smaller than that of the second accommodation space and is coaxial with the second accommodation space, and have a squeezing force towards the first limiting space, and the plurality of first limiting members can be separated from the annular body.
[0007] In some embodiments, a plurality of second limiting holes are provided in a part of the annular body corresponding to the second accommodation space and are distributed along the circumferential direction of the annular body; the connection limiting device further includes: a plurality of second limiting members, which pass through the plurality of second limiting holes correspondingly to define a second limiting space in the second accommodation space, the radial dimension of which is greater than that of the first limiting space and is concentric with the second accommodation space, and have a squeezing force towards the second limiting space.
[0008] In some embodiments, there is also a third accommodation space between the first accommodation space and the second accommodation space. The radial dimension of the third accommodation space is greater than or equal to the radial dimension of the first accommodation space and less than or equal to the radial dimension of the second accommodation space. And a plurality of third limiting holes distributed along the circumferential direction of the annular body are provided at the part of the annular body corresponding to the third accommodation space; the connection limiting device further includes: a plurality of third limiting members, correspondingly passing through the plurality of third limiting holes to define a third limiting space in the third accommodation space, the radial dimension of which is smaller than the second limiting space and coaxial with the second limiting space, and having a squeezing force towards the third limiting space;
[0009] and / or,
[0010] On the side of the second accommodation space in the annular body away from the first accommodation space, there is also a fourth accommodation space. The radial dimension of the fourth accommodation space is smaller than or equal to the radial dimension of the second accommodation space. And a plurality of fourth limiting holes distributed along the circumferential direction of the annular body are provided at the part of the annular body corresponding to the fourth accommodation space; the connection limiting device further includes: a plurality of fourth limiting members, correspondingly passing through the plurality of fourth limiting holes to define a fourth limiting space in the fourth accommodation space, the radial dimension of which is smaller than the second limiting space and coaxial with the second limiting space, and having a squeezing force towards the fourth limiting space.
[0011] In some embodiments, there are a third accommodation space and a fourth accommodation space on the annular body; the radial dimensions of the first accommodation space, the second accommodation space, the third accommodation space, and the fourth accommodation space are the same, and the thickness at any two positions on the annular body is consistent.
[0012] In some embodiments, the plurality of first limiting holes are equally spaced; the plurality of second limiting holes are in one-to-one correspondence with the plurality of first limiting holes; the plurality of third limiting holes are in one-to-one correspondence with the plurality of first limiting holes; the plurality of fourth limiting holes are in one-to-one correspondence with the plurality of first limiting holes.
[0013] In some embodiments, the limiting member is provided with a limiting portion. When the limiting member passes through the corresponding limiting hole and defines the corresponding limiting space, the limiting portion abuts against the outer surface of the annular body; wherein, the limiting member is the first limiting member, the second limiting member, the third limiting member, and / or the fourth limiting member.
[0014] In some embodiments, the limiting member is provided with a limiting mark. When the limiting member passes through the corresponding limiting hole and defines the corresponding limiting space, the limiting mark coincides with the outer wall of the annular body; wherein, the limiting member is the first limiting member, the second limiting member, the third limiting member, and / or the fourth limiting member.
[0015] In some embodiments, a through slot extending in the thickness direction of the annular body and a limiting slot communicating with the through slot are provided on the inner wall of the limiting hole; the limiting member is provided with a limiting convex portion, and the limiting convex portion can pass through the through slot and enter the limiting slot to define a corresponding limiting space; wherein, the limiting hole is the first limiting hole, the second limiting hole, the third limiting hole, and / or the fourth limiting hole.
[0016] In a second aspect, the present disclosure provides a grinding device, which may include: a grinding table, a carrying tooling, and the connection limiting device according to any one of the embodiments in the first aspect. The carrying tooling may include: a first plate body and a second plate body. The first plate body is disposed on the grinding table, and the second plate body is detachably connected to the first plate body. When the second plate body is connected to the first plate body, the second plate body is stacked on the first plate body, and the central positions of the second plate body and the first plate body are opposite; the size of the first limiting space of the connection limiting device is the same as the size of the second plate body to limit the second plate body separated from the first plate body.
[0017] In some embodiments, the grinding device may further include: a suction device and a moving device. The suction device is used to suck the second plate body in the first limiting space; the moving device is connected to the suction device and can move the suction device between the inner and outer spaces of the annular body.
[0018] Through the above technical solutions, in the connection limiting device and the grinding device provided by the present disclosure, the coaxial alignment connection between the silicon carbide crystal and the second plate body on the carrying tooling can be realized through the connection limiting device, and the second plate body can be connected to the first plate body on the carrying tooling and be coaxial with the first plate body, so that the coaxial setting of the silicon carbide crystal and the carrying tooling can be conveniently realized. At the same time, this process is not completed by the way of visual observation, so as to reduce the judgment error.
[0019] The above description is only an overview of the technical solutions of the present disclosure. In order to understand the technical means of the present disclosure more clearly and implement them according to the content of the specification, the following takes the preferred embodiments of the present disclosure and combines with the drawings to describe in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present disclosure. For those of ordinary skill in the art, other drawings can be obtained according to these drawings without creative efforts.
[0021] Figure 1 It is a partial structural schematic diagram of the connection limiting device provided by the embodiment of the present disclosure;
[0022] Figure 2Schematic cross-sectional structure diagram of the connection limiting device provided by the embodiments of the present disclosure;
[0023] Figure 3 Exploded structure diagram of the first limiting hole and the first limiting member provided by an embodiment of the present disclosure;
[0024] Figure 4 Exploded structure diagram of the first limiting hole and the first limiting member provided by another embodiment of the present disclosure;
[0025] Figure 5 Exploded structure diagram of the carrying tooling, the first glass, the silicon carbide crystal and the second glass provided by the embodiments of the present disclosure.
[0026] Explanation of reference numerals:
[0027] 1. Ring-shaped body; 11. First accommodating space; 111. First limiting space; 12. Second accommodating space; 121. Second limiting space; 13. First limiting hole; 131. Penetrating groove; 132. Limiting groove; 14. Second limiting hole; 15. Third accommodating space; 151. Third limiting space; 16. Third limiting hole; 17. Fourth accommodating space; 171. Fourth limiting space; 18. Fourth limiting hole; 2. First limiting member; 21. Limiting portion; 22. Limiting mark; 23. Limiting convex portion; 3. Silicon carbide crystal; 4. First glass; 5. Second glass; 6. Carrying tooling; 61. First plate body; 62. Second plate body; 63. Connecting column. Detailed implementation manners
[0028] The following further describes in detail the implementation manners of the present disclosure in conjunction with the drawings and embodiments. The detailed descriptions and drawings of the following embodiments are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure. The present disclosure can be implemented in many different forms, is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.
[0029] The present disclosure provides these embodiments to make the present disclosure thorough and complete, and fully convey the scope of the present disclosure to those skilled in the art. It should be noted that: unless otherwise specifically stated, the relative arrangements of the components and steps, the components of the materials, the numerical expressions and numerical values described in these embodiments should be construed as merely exemplary, rather than as limitations.
[0030] It should be noted that in the description of the present disclosure, unless otherwise specified, "a plurality of" means greater than or equal to two; the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "inner", "outer", etc. is only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the present disclosure. When the absolute position of the object being described changes, the relative position relationship may also change accordingly.
[0031] In addition, the "first", "second" and similar terms used in the present disclosure do not denote any order, quantity or importance, but are only used to distinguish different parts. "Vertical" is not strictly vertical, but within the allowable error range. "Parallel" is not strictly parallel, but within the allowable error range. Words such as "including" or "comprising" mean that the elements before the word cover the elements listed after the word, and do not exclude the possibility of also covering other elements.
[0032] It should also be noted that in the description of the present disclosure, unless otherwise clearly specified and limited, the terms "mounted", "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances. When it is described that a specific device is located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.
[0033] All terms used in the present disclosure have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure pertains, unless otherwise specifically defined. It should also be understood that terms defined in a general dictionary, for example, should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and should not be interpreted in an idealized or overly formal sense, unless specifically defined as such here.
[0034] Technologies, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods and devices should be regarded as part of the specification.
[0035] In the connection limiting device and the grinding equipment provided by the present disclosure, the coaxial alignment connection between the silicon carbide crystal 3 and the second plate body 62 on the carrying tooling 6 can be achieved through the connection limiting device. The second plate body 62 can be connected to the first plate body 61 on the carrying tooling 6 and is coaxial with the first plate body 61, so that the coaxial setting of the silicon carbide crystal 3 and the carrying tooling 6 can be conveniently achieved. At the same time, this process is not completed by visual observation, so as to reduce the judgment error.
[0036] The present disclosure provides a connection limiting device. Refer to Figures 1 to 5 As shown, the connection limiting device may include: an annular body 1 and a plurality of first limiting members 2. An axial first accommodation space 11 and a second accommodation space 12 are distributed inside the annular body 1. The radial dimension of the first accommodation space 11 is greater than or equal to the radial dimension of the second accommodation space 12. A plurality of first limiting holes 13 distributed along the circumference of the annular body 1 are provided in the part of the annular body 1 corresponding to the first accommodation space 11; the plurality of first limiting members 2 correspondingly pass through the plurality of first limiting holes 13 to define a first limiting space 111 in the first accommodation space 11 with a radial dimension smaller than that of the second accommodation space 12 and coaxial with the second accommodation space 12, and have a squeezing force towards the first limiting space 111, and the plurality of first limiting members 2 can be separated from the annular body 1.
[0037] Specifically, both ends of the annular body 1 in the axial direction have an opening respectively. The first accommodation space 11 is close to one opening, the second accommodation space 12 is close to the other opening, and the first accommodation space 11 and the second accommodation space 12 communicate with each other. The first limiting member 2 may be a columnar structure. After passing through the first limiting hole 13, it can squeeze the inner wall of the first limiting hole 13 to be fixed relative to the first limiting hole 13, and has a squeezing force towards the first limiting space 111 to squeeze the structure located in the first limiting space 111 (such as: the second plate body 62 in the following text); among them, the first limiting member 2 may also be a limiting column that is in interference fit with the first limiting hole 13, or a screw that can be screwed with the first limiting hole 13.
[0038] In one example, refer to Figure 1 and Figure 5As shown in the figure, a grinding device may include: a grinding table, a carrying tooling 6, and a connecting and limiting device; the carrying tooling 6 may include: a first plate body 61 and a second plate body 62. The first plate body 61 is arranged on the grinding table. The second plate body 62 is detachably connected to the first plate body 61. When the second plate body 62 is connected to the first plate body 61, the second plate body 62 is stacked on the first plate body 61, and the central positions of the second plate body 62 and the first plate body 61 are opposite to each other; the connecting and limiting device may include: an annular body 1 and a plurality of first limiting members 2. An axial first accommodation space 11 and a second accommodation space 12 are distributed inside the annular body 1 along its axis. The radial dimension of the first accommodation space 11 is equal to the radial dimension of the second accommodation space 12. A plurality of first limiting holes 13 distributed along the circumferential direction of the annular body 1 are arranged on the part of the annular body 1 corresponding to the first accommodation space 11; the plurality of first limiting members 2 correspondingly pass through the plurality of first limiting holes 13 to define a first limiting space 111 with a radial dimension smaller than that of the second accommodation space 12 and coaxial with the second accommodation space 12 in the first accommodation space 11, and have a squeezing force towards the first limiting space 111. Wherein, the spatial dimension of the first limiting space 111 is the same as the space occupied by the second plate body 62, so as to be able to squeeze and limit the second plate body 62 separated from the first plate body 61 in the first limiting space 111 under the limiting action of the plurality of first limiting members 2. A usage method of this grinding device may include:
[0039] S101: Feed the silicon carbide crystal 3 into the second accommodation space 12 from the opening of the annular body 1 corresponding to the first accommodation space 11, and the silicon carbide crystal 3 after being fed is fixed in position relative to the second accommodation space 12 and coincides with the center of the second accommodation space 12; a bonding layer (such as: a molten wax layer) is arranged on one side of the silicon carbide crystal 3 corresponding to the first accommodation space 11. Here, the space occupied by the silicon carbide crystal 3 may be the same as that of the second accommodation space 12, so as to abut against the inner wall of the second accommodation space 12 in a circle and coincide with the center of the second accommodation space 12 when in the second accommodation space 12; the space occupied by the silicon carbide crystal 3 may also be smaller than that of the second accommodation space 12 and larger than that of the first limiting space 111. A protective layer (such as: an annular glass) may be sleeved on the circumferential side of the silicon carbide crystal 3, so that when in the second accommodation space 12, the protective layer abuts against the inner wall of the second accommodation space 12 in a circle, and the silicon carbide crystal 3 coincides with the center of the second accommodation space 12.
[0040] S102: After separating the second plate body 62 from the first plate body 61, it is sent into the first accommodation space 11 and bonded to the bonding layer. During the bonding process, the second plate body 62 is limited in the first limiting space 111 by multiple first limiting members 2 correspondingly passing through multiple first limiting holes 13 and pressing the second plate body 62 in the first limiting space 111. Here, since the occupied space of the second plate body 62 is the same as that of the first limiting space 111, the center of the second plate body 62 limited in the first limiting space 111 coincides with the center of the first limiting space 111. The center of the silicon carbide crystal 3 coincides with the center of the second accommodation space 12, and the first limiting space 111 is coaxial with the second accommodation space 12, so that the silicon carbide crystal 3 is coaxial with the second plate body 62.
[0041] S103: Separate the multiple first limiting members 2 from the annular body 1, and take out the silicon carbide crystal 3 and the second plate body 62 from the opening at one end of the annular body 1 corresponding to the first accommodation space 11; then connect the second plate body 62 to the first plate body 61, and polish the edge of the silicon carbide crystal 3 protruding from the second plate body 62 through a polishing device. Here, the central positions of the first plate body 61 and the second plate body 62 are opposite after connection, and the second plate body 62 is coaxial with the silicon carbide crystal 3, so that the center position of the silicon carbide crystal 3 is opposite to that of the carrying tooling 6, so as to reduce the judgment error.
[0042] Here, the above-mentioned bonding layer is a removable bonding layer, so that after the polishing of the silicon carbide crystal 3 is completed, the bonding layer can be removed to obtain a clean silicon carbide crystal 3. For example, the molten wax layer mentioned above can bond the silicon carbide crystal 3 in the molten state. When it solidifies, the positions of the silicon carbide crystal 3 and the solid wax layer are fixed, so that the polishing operation of the silicon carbide crystal 3 can be carried out; then, after the polishing is completed, it can be heated to be in the molten state again, so that the silicon carbide crystal 3 can be separated from it.
[0043] In some embodiments, as shown in Figure 1 As shown, a plurality of second limiting holes 14 distributed along the circumferential direction of the annular body 1 are provided on the part of the annular body 1 corresponding to the second accommodation space 12; the connection limiting device further includes: a plurality of second limiting members, correspondingly passing through the plurality of second limiting holes 14 to define a second limiting space 121 in the second accommodation space 12 with a radial dimension larger than that of the first limiting space 111 and concentric with the second accommodation space 12, and having a pressing force towards the second limiting space 121. In this way, silicon carbide crystals 3 of different sizes can be placed in the second accommodation space 12, and then the positions of the silicon carbide crystals 3 are limited through the plurality of second limiting holes 14, and the limited silicon carbide crystals 3 coincide with the center of the second accommodation space 12. Here, the settings of the second limiting holes 14 and the second limiting members can refer to the settings of the first limiting holes 13 and the first limiting members 2, which will not be elaborated here.
[0044] In some embodiments, referring to Figure 1 and Figure 2 as well as Figure 5 shown in the figure, there is also a third accommodation space 15 between the first accommodation space 11 and the second accommodation space 12. The radial dimension of the third accommodation space 15 is greater than or equal to the radial dimension of the first accommodation space 11 and less than or equal to the radial dimension of the second accommodation space 12. And a plurality of third limiting holes 16 distributed along the circumferential direction of the annular body 1 are provided at the part of the annular body 1 corresponding to the third accommodation space 15; The connecting limiting device further includes: a plurality of third limiting members, correspondingly passing through the plurality of third limiting holes 16 to define a third limiting space 151 in the third accommodation space 15, the radial dimension of which is less than the second limiting space 121 and coaxial with the second limiting space 121, and having an extrusion force towards the third limiting space 151;
[0045] and / or,
[0046] On the side of the second accommodation space 12 in the annular body 1 away from the first accommodation space 11, there is also a fourth accommodation space 17. The radial dimension of the fourth accommodation space 17 is less than or equal to the radial dimension of the second accommodation space 12. And a plurality of fourth limiting holes 18 distributed along the circumferential direction of the annular body 1 are provided at the part of the annular body 1 corresponding to the fourth accommodation space 17; The connecting limiting device further includes: a plurality of fourth limiting members, correspondingly passing through the plurality of fourth limiting holes 18 to define a fourth limiting space 171 in the fourth accommodation space 17, the radial dimension of which is less than the second limiting space 121 and coaxial with the second limiting space 121, and having an extrusion force towards the fourth limiting space 171.
[0047] When the annular body 1 has the third accommodation space 15, between S101 and S102, the first glass 4 can be sent into the third accommodation space 15, and the first glass 4 is limited in the third limiting space 151 coaxial with the silicon carbide crystal 3 through a plurality of third limiting members. Then, an adhesive layer (such as: a molten wax layer) is provided on the side of the first glass 4 close to the first accommodation space 11 to bond the second plate body 62. Here, the first glass 4 and the adhesive layer thereon can block the external force (such as: the unbalanced force generated by the thermal expansion of the carrying tooling 6, the unbalanced force during foreign object impact) that wants to reach the silicon carbide crystal 3 during the later polishing process or equalize the external force, so as to reduce the probability of cracks or even breakage of the silicon carbide crystal 3 when it is subjected to unbalanced force.
[0048] When the annular body 1 has a fourth accommodation space 17, before S101, the second glass 5 can be first sent into the fourth accommodation space 17, and the second glass 5 is limited in a fourth limiting space 171 coaxial with the silicon carbide crystal 3 by a plurality of fourth limiting members, and then an adhesive layer (such as a molten wax layer) is provided on the side of the second glass 5 close to the first accommodation space 11 to bond the silicon carbide crystal 3. Here, the second glass 5 and the adhesive layer thereon can block the external force (such as the unbalanced force generated when the carrying tooling 6 thermally expands, the unbalanced force when a foreign object impacts) that wants to reach the silicon carbide crystal 3 during the later polishing process or equalize the external force, so as to reduce the probability that the silicon carbide crystal 3 cracks or even breaks when subjected to the unbalanced force.
[0049] In some embodiments, referring to Figure 1 As shown, the annular body 1 has a third accommodation space 15 and a fourth accommodation space 17; the radial dimensions of the first accommodation space 11, the second accommodation space 12, the third accommodation space 15, and the fourth accommodation space 17 are the same, and the thickness of any two positions on the annular body 1 is consistent. In this way, the structure of the annular body 1 is simple, and the manufacturing is more convenient and fast.
[0050] In some embodiments, the plurality of first limiting holes 13 are equally spaced; the plurality of second limiting holes 14 are in one-to-one correspondence with the plurality of first limiting holes 13; the plurality of third limiting holes 16 are in one-to-one correspondence with the plurality of first limiting holes 13; the plurality of fourth limiting holes 18 are in one-to-one correspondence with the plurality of first limiting holes 13. In this way, when manufacturing the annular body 1, the first limiting holes 13, the second limiting holes 14, the third limiting holes 16, and the fourth limiting holes 18 can be sequentially manufactured along the axial direction of the annular body 1, making the manufacturing more convenient and fast.
[0051] In some embodiments, referring to Figure 1 As shown, the limiting member is provided with a limiting portion 21. When the limiting member passes through the corresponding limiting hole and defines the corresponding limiting space, the limiting portion 21 abuts against the outer surface of the annular body 1; wherein, the limiting member is the first limiting member 2, the second limiting member, the third limiting member, and / or the fourth limiting member. When the limiting member is the first limiting member 2, its corresponding limiting hole is the first limiting hole 13, and the corresponding limiting space is the first limiting space 111; when the limiting member is the second limiting member, its corresponding limiting hole is the second limiting hole 14, and the corresponding limiting space is the second limiting space 121; when the limiting member is the third limiting member, its corresponding limiting hole is the third limiting hole 16, and the corresponding limiting space is the third limiting space 151; when the limiting member is the fourth limiting member, its corresponding limiting hole is the fourth limiting hole 18, and the corresponding limiting space is the fourth limiting space 171.
[0052] For example, the limiting member is a screw with a nut, and the nut is the limiting portion 21. When the screw passes through the corresponding limiting hole and defines the corresponding limiting space, the nut abuts against the outer surface of the annular body 1. Another example is that the limiting member is a limiting post that is press-fitted into the limiting hole, and the limiting portion 21 is arranged around the surface of the corresponding annular body 1 on the outer side of the limiting member. When the limiting post passes through the corresponding limiting hole and defines the corresponding limiting space, the limiting portion 21 abuts against the outer surface of the annular body 1. In this way, when judging whether the limiting member is inserted in place in the limiting hole, it can be quickly judged by whether the limiting portion 21 abuts against the outer surface of the annular body 1.
[0053] In some embodiments, referring to Figure 3 As shown, the limiting member is provided with a limiting mark 22. When the limiting member passes through the corresponding limiting hole and defines the corresponding limiting space, the limiting mark 22 coincides with the outer wall of the annular body 1. Among them, the limiting member is the first limiting member 2, the second limiting member, the third limiting member, and / or the fourth limiting member. When the limiting member is the first limiting member 2, its corresponding limiting hole is the first limiting hole 13, and the corresponding limiting space is the first limiting space 111; when the limiting member is the second limiting member, its corresponding limiting hole is the second limiting hole 14, and the corresponding limiting space is the second limiting space 121; when the limiting member is the third limiting member, its corresponding limiting hole is the third limiting hole 16, and the corresponding limiting space is the third limiting space 151; when the limiting member is the fourth limiting member, its corresponding limiting hole is the fourth limiting hole 18, and the corresponding limiting space is the fourth limiting space 171.
[0054] The limiting mark 22 can be a color mark different from other positions of the limiting member, or a concave-convex structure different from other positions of the limiting member (such as a wavy concave-convex structure around the side wall of the limiting member for one circle), or other settings. In this way, when judging whether the limiting member is inserted in place in the limiting hole, it can be quickly judged by whether the limiting mark 22 coincides with the outer wall of the annular body 1.
[0055] In some embodiments, referring to Figure 4As shown, a through slot 131 extending in the thickness direction of the annular body 1 and a limiting slot 132 communicating with the through slot 131 are provided on the inner wall of the limiting hole; the limiting member is provided with a limiting convex portion 23, and the limiting convex portion 23 can pass through the through slot 131 and enter the limiting slot 132 to define a corresponding limiting space; wherein, the limiting hole is the first limiting hole 13, the second limiting hole 14, the third limiting hole 16 and / or the fourth limiting hole 18. When the limiting hole is the first limiting hole 13, its corresponding limiting member is the first limiting member 2, and the corresponding limiting space is the first limiting space 111; when the limiting hole is the second limiting hole 14, its corresponding limiting member is the second limiting member, and the corresponding limiting space is the second limiting space 121; when the limiting hole is the third limiting hole 16, its corresponding limiting member is the third limiting member, and the corresponding limiting space is the third limiting space 151; when the limiting hole is the fourth limiting hole 18, its corresponding limiting member is the fourth limiting member, and the corresponding limiting space is the fourth limiting space 171.
[0056] Under the action of a first external force for the limiting member to penetrate into the limiting hole, the limiting convex portion 23 penetrates through the through slot 131. During this process, a second external force for the limiting member to rotate in the direction of the limiting slot 132 can be applied simultaneously, so that when the limiting convex portion 23 penetrates to the position of the through slot 131 corresponding to the limiting slot 132, it can enter the limiting slot 132 under the action of the second external force. Thus, when judging whether the limiting member penetrates into the limiting hole in place, it can be quickly judged by whether the limiting convex portion 23 rotates into the limiting slot 132.
[0057] In a second aspect
[0058] The present disclosure provides a grinding device, see Figure 5 As shown, the grinding device may include: a grinding table, a carrying tooling 6 and the connection and limiting device according to any one of the embodiments in the first aspect; the carrying tooling 6 includes: a first plate body 61 and a second plate body 62, the first plate body 61 is arranged on the grinding table, the second plate body 62 is detachably connected to the first plate body 61, and when the second plate body 62 is connected to the first plate body 61, the second plate body 62 is stacked on the first plate body 61, and the central positions of the second plate body 62 and the first plate body 61 are opposite; the size of the first limiting space 111 of the connection and limiting device is the same as the size of the second plate body 62 to limit the second plate body 62 separated from the first plate body 61.
[0059] The second plate body 62 can be connected to the first plate body 61, or can be separated from the first plate body 61 and be limited in the first limiting space 111 to realize connection with the silicon carbide crystal 3 in the annular body 1 or the first glass 4 connected with the silicon carbide crystal 3. Subsequently, the second plate body 62 can be taken out from the annular body 1 and then connected to the first plate body 61 again for grinding operation. Here, the separable connection between the second plate body 62 and the first plate body 61 can be realized by connecting the two with screws, or by connecting the two with pins passing through each other, or by other connection methods to achieve separability.
[0060] On the side of the first plate body 61 facing away from the second plate body 62, a connecting column 63 as shown in Figure 5 can be vertically connected. The connecting column 63 can be connected to a grinding table. For example, the grinding table is provided with a recess, and the inner wall forming the recess has a plurality of rotatable pressing parts. When the connecting column 63 is located in the recess, the plurality of pressing parts respectively press the circumferential side of the connecting column 63 so that the connecting column 63 is fixedly connected in the pressing space defined by the plurality of pressing parts. And when the plurality of pressing parts rotate simultaneously to make the connecting column 63 rotate itself, a grinding device can be used to grind the edge of a circle of the silicon carbide crystal 3 on the second plate body 62.
[0061] In some embodiments, the grinding device may further include: an adsorption device and a moving device. The adsorption device is used to adsorb the second plate body 62 in the first limiting space 111. The moving device is connected to the adsorption device and can move the adsorption device between the inner and outer spaces of the annular body 1. That is to say, when the second plate body 62 is connected to the silicon carbide crystal 3 or the first glass 4 connected with the silicon carbide crystal 3 in the first limiting space 111, the second plate body 62 can be adsorbed by the adsorption device, and then the second plate body 62 can be moved to the position of the first plate body 61 through the moving device connected to the adsorption device, and then the first plate body 61 and the second plate body 62 are connected. After the grinding of the silicon carbide crystal 3 is completed, the silicon carbide crystal 3 on the second plate body 62 or the first glass 4 connected with the silicon carbide crystal 3 can be separated, and then the second plate body 62 is separated from the first plate body 61. And the adsorption device can be moved again through the moving device to move the second plate body 62 to the first limiting space 111 to connect the silicon carbide crystal 3 or the first glass 4 connected with the silicon carbide crystal 3 again, so as to realize the grinding of different silicon carbide crystals 3.
[0062] So far, the embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concept of the present disclosure, some details well known in the art have not been described. Those skilled in the art can clearly understand how to implement the technical solutions disclosed here based on the above description.
[0063] Although some specific embodiments of the present disclosure have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present disclosure. Those skilled in the art should understand that the above embodiments can be modified or equivalent substitutions can be made for some technical features without departing from the scope and spirit of the present disclosure. In particular, as long as there is no structural conflict, the technical features mentioned in each embodiment can be combined in any way.
Claims
1. A connection limiting device, characterized in that, Comprising: A ring-shaped body (1) having a first accommodation space (11) and a second accommodation space (12) distributed along its axial direction inside. The radial dimension of the first accommodation space (11) is greater than or equal to the radial dimension of the second accommodation space (12). A plurality of first limiting holes (13) distributed along the circumferential direction of the ring-shaped body (1) are provided at the part of the ring-shaped body (1) corresponding to the first accommodation space (11); A plurality of first limiting members (2) correspondingly passing through the plurality of first limiting holes (13) to define a first limiting space (111) in the first accommodation space (11) with a radial dimension smaller than that of the second accommodation space (12) and coaxial with the second accommodation space (12), and having an extrusion force towards the first limiting space (111), and the plurality of first limiting members (2) can be separated from the ring-shaped body (1).
2. The connection limiting device according to claim 1, characterized in that A plurality of second limiting holes (14) distributed along the circumferential direction of the ring-shaped body (1) are provided at the part of the ring-shaped body (1) corresponding to the second accommodation space (12); The connection limiting device further comprises: a plurality of second limiting members correspondingly passing through the plurality of second limiting holes (14) to define a second limiting space (121) in the second accommodation space (12) with a radial dimension greater than that of the first limiting space (111) and concentric with the second accommodation space (12), and having an extrusion force towards the second limiting space (121).
3. The connection limiting device according to claim 2, characterized in that There is also a third accommodation space (15) between the first accommodation space (11) and the second accommodation space (12). The radial dimension of the third accommodation space (15) is greater than or equal to the radial dimension of the first accommodation space (11) and less than or equal to the radial dimension of the second accommodation space (12). A plurality of third limiting holes (16) distributed along the circumferential direction of the ring-shaped body (1) are provided at the part of the ring-shaped body (1) corresponding to the third accommodation space (15); The connection limiting device further comprises: a plurality of third limiting members correspondingly passing through the plurality of third limiting holes (16) to define a third limiting space (151) in the third accommodation space (15) with a radial dimension smaller than that of the second limiting space (121) and coaxial with the second limiting space (121), and having an extrusion force towards the third limiting space (151); And / or, On the side of the second accommodation space (12) in the ring-shaped body (1) away from the first accommodation space (11), there is also a fourth accommodation space (17). The radial dimension of the fourth accommodation space (17) is less than or equal to the radial dimension of the second accommodation space (12). A plurality of fourth limiting holes (18) distributed along the circumferential direction of the ring-shaped body (1) are provided at the part of the ring-shaped body (1) corresponding to the fourth accommodation space (17); The connection limiting device further includes: a plurality of fourth limiting members, which correspondingly pass through the plurality of fourth limiting holes (18) to define a fourth limiting space (171) with a radial dimension smaller than that of the second limiting space (121) and coaxial with the second limiting space (121) within the fourth accommodation space (17), and have a squeezing force towards the direction of the fourth limiting space (171).
4. The connection limiting device according to claim 3, wherein The annular body (1) has a third accommodation space (15) and a fourth accommodation space (17); The radial dimensions of the first accommodation space (11), the second accommodation space (12), the third accommodation space (15), and the fourth accommodation space (17) are the same, and the thickness of any two positions on the annular body is consistent.
5. The connection limiting device according to claim 4, wherein The plurality of first limiting holes (13) are equally spaced; The plurality of second limiting holes (14) are in one-to-one correspondence with the plurality of first limiting holes (13); The plurality of third limiting holes (16) are in one-to-one correspondence with the plurality of first limiting holes (13); The plurality of fourth limiting holes (18) are in one-to-one correspondence with the plurality of first limiting holes (13).
6. The connection limiting device according to claim 4, wherein The limiting member is provided with a limiting portion (21), and when the limiting member passes through the corresponding limiting hole and defines the corresponding limiting space, the limiting portion (21) abuts against the outer surface of the annular body (1); Wherein, the limiting member is the first limiting member (2), the second limiting member, the third limiting member, and / or the fourth limiting member.
7. The connection limiting device according to claim 4, wherein The limiting member is provided with a limiting mark (22), and when the limiting member passes through the corresponding limiting hole and defines the corresponding limiting space, the limiting mark (22) coincides with the outer wall of the annular body (1); Wherein, the limiting member is the first limiting member (2), the second limiting member, the third limiting member, and / or the fourth limiting member.
8. The connection limiting device according to claim 4, wherein The inner wall of the limiting hole is provided with a threading groove (131) extending in the thickness direction of the annular body (1) and a limiting groove (132) communicating with the threading groove (131); The limiting member is provided with a limiting convex portion (23), and the limiting convex portion (23) can pass through along the threading groove (131) and enter the limiting groove (132) to define the corresponding limiting space; Wherein, the limiting hole is the first limiting hole (13), the second limiting hole (14), the third limiting hole (16), and / or the fourth limiting hole (18).
9. A grinding device, characterized in that, Comprising: A grinding table; The carrying tooling (6) includes: a first plate body (61) and a second plate body (62). The first plate body (61) is arranged on the grinding table. The second plate body (62) is detachably connected to the first plate body (61). When the second plate body (62) is connected to the first plate body (61), the second plate body (62) is stacked on the first plate body (61), and the central positions of the second plate body (62) and the first plate body (61) are opposite to each other. The connection limiting device according to any one of claims 1 to 8, wherein the size of the first limiting space (111) of the connection limiting device is the same as the size of the second plate body (62) to limit the second plate body (62) separated from the first plate body (61).
10. The grinding device according to claim 9, wherein It further includes: An adsorption device for adsorbing the second plate body (62) in the first limiting space (111); A moving device, connected to the adsorption device and capable of moving the adsorption device between the inner and outer spaces of the annular body (1).