Adsorption platform for Chiplet process

Abstract

The utility model relates to an adsorption platform for a Chiplet process, and relates to the technical field of Chiplet process equipment.The adsorption platform comprises a mounting base, a jig, vacuum negative pressure equipment, a positioning groove, a supporting column and an edge pressing mechanism, the edge pressing mechanism enables a product to be tightly attached to the interior of the positioning groove in a sealed mode, and the supporting column enables a second vacuum cavity to be formed between the product and the positioning groove; and the vacuum negative pressure equipment controls the negative pressure value in the second vacuum cavity. The product is placed in the positioning groove, the edge pressing mechanism presses the two turnup ends of the product, the multiple sets of supporting columns enable a second vacuum cavity for adsorbing the product to be formed between the product and the bottom of the positioning groove, and the vacuum negative pressure device reduces the negative pressure value in the second vacuum cavity; and the protruding part in the middle of the product is tightly attached to the multiple sets of supporting columns under the negative pressure effect of the second vacuum cavity, then it is guaranteed that the product is smoothly adsorbed in the positioning groove, and the adsorption positioning effect on the high-hardness large-warping plate is improved.

Description

Technical Field

[0001] The present application relates to the technical field of chiplet process equipment, and in particular to an adsorption platform for chiplet process. Background Art

[0002] During the chiplet process, the product needs to be adsorbed and positioned, and ensure that the product remains flat.

[0003] The traditional adsorption platform forms a vacuum cavity in the fixture and opens a vacuum hole on the fixture to adsorb the product. When the product is attached to the fixture, the adsorption surface that can be formed is the sum of the cross-sections of all vacuum holes, and the overall adsorption surface is small. It is mainly used for products with relatively soft materials and can achieve adsorption.

[0004] However, for products with high hardness and large warpage, the adsorption force is insufficient due to the small adsorption surface, and a vacuum cannot be continuously formed between the product and the fixture, and thus it is impossible to adsorb products with large warpage and high hardness. Even if the edge pressing mechanism is used to press the two ends of the product, the middle of the product will bulge, and effective adsorption cannot be achieved. Utility Model Content

[0005] In order to improve the adsorption and positioning effect of high-hardness and large-warping plates, the present application provides an adsorption platform for a chiplet process.

[0006] The present application provides an adsorption platform for chiplet process, which adopts the following technical solution:

[0007] A chiplet adsorption platform comprises a mounting seat, a fixture arranged on the mounting seat, the fixture being connected with a vacuum negative pressure device, a positioning groove for facilitating the placement of a product, a plurality of support columns for supporting the bottom of the product being arranged at the bottom of the positioning groove, a pressing mechanism for pressing the two ends of the product being raised being arranged on the mounting seat, the pressing mechanism making the product tightly sealed in the positioning groove, the support columns forming a second vacuum chamber for adsorbing the product between the product and the positioning groove, the vacuum negative pressure device being connected with the inside of the second vacuum chamber and controlling the negative pressure value inside the second vacuum chamber.

[0008] By adopting the above technical solution, the product is placed in the positioning groove, and the two upturned ends of the product are pressed by the edge pressing mechanism, so that a sealed state is maintained between the product and the positioning groove. At the same time, a certain distance is provided between the product and the bottom of the positioning groove through multiple groups of support columns in the positioning groove, so as to form a second vacuum cavity for adsorbing the product. The negative pressure value in the second vacuum cavity is reduced by a vacuum negative pressure device, so that the bulging part in the middle of the product is closely attached to the multiple groups of support columns under the negative pressure action of the second vacuum cavity, thereby ensuring that the product is adsorbed flat in the positioning groove and improving the adsorption and positioning effect on the high-hardness and large-warpage plate.

[0009] Further, a first vacuum cavity is arranged inside the fixture, the first vacuum cavity is communicated with the vacuum negative pressure device, multiple groups of vacuum holes are arranged on the positioning groove, and the multiple groups of vacuum holes and the multiple groups of support columns are arranged alternately. The multiple groups of vacuum holes are used to communicate the first vacuum cavity and the second vacuum cavity.

[0010] By adopting the above technical solution, the vacuum negative pressure device is used to evacuate the air in the first vacuum cavity and the second vacuum cavity, so as to reduce the negative pressure value in the second vacuum cavity. At the same time, through the multiple groups of alternately arranged vacuum holes and support columns, the adsorption force on the product is relatively uniform, and finally the adsorption effect on the product is ensured.

[0011] Further, the fixture includes:

[0012] A lower plate, and the lower plate is arranged on the mounting seat;

[0013] An upper plate, and the upper plate abuts against one end of the lower plate away from the mounting seat. A first vacuum cavity communicated with the vacuum negative pressure device is formed between the upper plate and the lower plate;

[0014] Fixed bolts, and the fixed bolts pass through the lower plate and are threadedly arranged on the upper plate. The fixed bolts are used to tightly abut and seal the lower plate on the upper plate;

[0015] A sealing strip, and the sealing strip is arranged on the upper plate and abuts against the lower plate to seal the connection between the upper plate and the lower plate.

[0016] By adopting the above technical solution, the fixed bolts fix the upper plate on the lower plate, and the sealing strip is used to make a sealed connection between the upper plate and the lower plate, so as to make the first vacuum cavity between the upper plate and the lower plate have good sealing performance.

[0017] Further, the edge pressing mechanism includes:

[0018] A bracket, and the bracket is arranged on the mounting seat;

[0019] A transverse moving plate, and the transverse moving plate is slidably arranged on the bracket in the horizontal direction;

[0020] A lateral movement driving member, which is arranged on the bracket and is used to drive the lateral movement plate to slide;

[0021] A hemming assembly, which is arranged on the lateral movement plate and presses the two ends of the same side of the product.

[0022] By adopting the above technical solution, after placing the product on the fixture, the lateral movement driving member drives the lateral movement plate to slide horizontally, and finally moves the hemming assembly above the product, and presses the two ends of the same side of the product through the hemming assembly, so that the product is hermetically attached to the positioning groove.

[0023] Furthermore, the hemming assembly includes:

[0024] A sliding plate, which is arranged on the lateral movement plate and slides vertically;

[0025] A sliding driving member, which is arranged on the sliding plate and is used to drive the sliding plate to slide;

[0026] Two hemming blocks, which are arranged at both ends of the sliding plate and press the two ends of the same side of the product tightly in the positioning groove.

[0027] By adopting the above technical solution, the sliding driving member drives the sliding plate to slide downward, and presses the two ends of the same side of the product through the two hemming blocks installed on the sliding plate, so that the product is hermetically attached to the positioning groove.

[0028] Furthermore, multiple locking components for locking the fixture on the mounting seat are arranged on the fixture, and the locking components include:

[0029] A locking bolt, which presses the fixture against the mounting seat;

[0030] A sealing ring, which is sleeved on the locking bolt and presses against the bottom of the first vacuum chamber;

[0031] A locking column, which is arranged in the installation groove and is at the same height as the support column. An installation hole for facilitating the arrangement of the locking bolt on the fixture is provided on the locking column, and the installation hole communicates with the inside of the first vacuum chamber.

[0032] By adopting the above technical solution, the sealing ring is sleeved on the locking bolt, the locking bolt drives the sealing ring to pass through the installation hole and locks the fixture on the mounting seat, wherein the locking column supports the bottom of the product, and at the same time the installation hole can also adsorb the product.

[0033] Furthermore, multiple jacking holes are spaced apart on the upper plate, and a jacking assembly for jacking the product is arranged on the fixture. The jacking assembly includes:

[0034] A lifting plate, the lifting plate is sealingly slidably arranged on the lower plate in a direction close to or away from the upper plate;

[0035] Lifting rods, multiple groups of which are arranged at intervals on the lifting plate, and the lifting rods slide in the lifting holes to lift the bottom of the product;

[0036] A lifting drive component is arranged on the mounting seat and is used to push the lifting plate to slide.

[0037] By adopting the above technical solution, when the product processing is completed, the jacking drive member drives the jacking plate to slide, and the jacking rod pushes the product away from the positioning groove, so as to facilitate the removal of the product.

[0038] Furthermore, a positioning block is provided on the upper plate, and the positioning block is flush with the supporting column. The edge pressing block presses the product against the positioning block and seals the positioning hole on the product.

[0039] By adopting the above technical solution, the edge pressing block presses the product against the positioning hole, thereby sealing the positioning hole on the product and preventing the positioning hole of the product from being connected to the second vacuum chamber and causing air leakage.

[0040] Furthermore, the positioning block is provided with a plurality of groups of positioning recesses which cooperate with the positioning holes for positioning.

[0041] By adopting the above technical solution, the installation position of the product can be determined by detecting the coaxiality between the positioning hole and the positioning groove.

[0042] In summary, the present application includes at least one of the following beneficial technical effects:

[0043] By placing the product in the positioning groove, two groups of edge pressing blocks press down the two raised ends of the product, thereby maintaining a sealed state between the product and the positioning groove. At the same time, multiple groups of support columns in the positioning groove ensure that there is a certain distance between the product and the bottom of the positioning groove, thereby forming a second vacuum chamber for adsorbing the product. The negative pressure value in the second vacuum chamber is jointly reduced by the vacuum negative pressure equipment and the first vacuum chamber, so that the raised part in the middle of the product is tightly attached to the multiple groups of support columns under the negative pressure of the second vacuum chamber, thereby ensuring that the product is flatly adsorbed in the positioning groove, thereby improving the adsorption and positioning effect on high-hardness and large-warping plates. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a schematic diagram of the adsorption platform structure of the present application;

[0045] Figure 2 It is a schematic diagram of the fixture structure of the present application;

[0046] Figure 3 yes Figure 2Schematic diagram of the cross section of AA;

[0047] Figure 4 yes Figure 2 Schematic cross-section of the middle BB;

[0048] Figure 5 yes Figure 2 Enlarged schematic diagram of part C in the middle.

[0049] Figure numerals: 1. fixture; 11. lower plate; 12. upper plate; 121. positioning groove; 122. vacuum hole; 13. fixing bolt; 14. sealing strip; 15. first vacuum chamber; 2. support column; 3. locking assembly; 31. locking bolt; 32. sealing ring; 33. locking column; 331. mounting hole; 4. edge pressing mechanism; 41. bracket; 42. transverse plate; 43. transverse driving member; 44. edge pressing assembly; 441. sliding plate; 442. sliding driving member; 443. edge pressing block; 5. positioning block; 51. positioning trough; 6. lifting assembly; 61. lifting plate; 62. lifting rod; 63. lifting driving member. DETAILED DESCRIPTION

[0050] The following is combined with Figures 1 - 5 This application is described in further detail.

[0051] The embodiment of the present application discloses an adsorption platform for a chiplet process.

[0052] Reference Figure 1 and Figure 2 A chiplet adsorption platform includes a mounting seat, a fixture 1 arranged on the mounting seat, the fixture 1 is connected with a vacuum negative pressure device, a positioning groove 121 for placing a product is provided on the fixture 1, a plurality of support columns 2 for supporting the bottom of the product are arranged at the bottom of the positioning groove 121, a pressing mechanism 4 for pressing the two ends of the product that are raised is arranged on the mounting seat, the pressing mechanism 4 makes the product tightly sealed in the positioning groove 121, the support column 2 forms a second vacuum cavity for adsorbing the product between the product and the positioning groove 121, and the vacuum negative pressure device is connected with the inside of the second vacuum cavity and controls the negative pressure value inside the second vacuum cavity.

[0053] Reference Figure 2 and Figure 3, the fixture 1 includes a lower plate 11, an upper plate 12, fixing bolts 13 and a sealing strip 14. The lower plate 11 is a rectangular plate structure. An annular groove is formed at one end of the upper plate 12 close to the lower plate 11. When the upper plate 12 is pressed tightly against the lower plate 11, a first vacuum chamber 15 is formed between the lower plate 11 and the annular groove. The first vacuum chamber 15 is internally connected to the vacuum negative pressure device, and the negative pressure value in the first vacuum chamber 15 is controlled by the vacuum negative pressure device. A sealing strip 14 is fixedly installed at one end of the upper plate 12 that is pressed tightly against the lower plate 11. The upper plate 12 is pressed tightly against the lower plate 11 through the sealing strip 14, thereby improving the sealing effect between the upper plate 12 and the lower plate 11. The fixing bolts 13 pass through the lower plate 11 and are threadedly installed on the upper plate 12. At the same time, a sealing ring for sealing the first vacuum chamber 15 is sleeved on the fixing bolts 13. The fixing bolts 13 and the sealing ring cooperate with each other, thereby sealingly installing the lower plate 11 on the upper plate 12.

[0054] Refer to Figure 2 and Figure 4 , a positioning groove 121 is formed at one end of the upper plate 12 away from the lower plate 11. The support columns 2 are installed at intervals on the bottom of the positioning groove 121. The support columns 2 support the lower surface of the product, thereby having a certain distance between the product and the positioning groove 121 and forming a second vacuum chamber for adsorbing the product. By increasing the adsorption surface of the product, the adsorption force on the product is finally increased. At the same time, a plurality of groups of vacuum holes 122 are formed at intervals on the bottom of the positioning groove 121. The plurality of groups of vacuum holes 122 connect the second vacuum chamber to the inside of the first vacuum chamber 15, thereby controlling the negative pressure value in the second vacuum chamber through the vacuum negative pressure device. By alternately installing the plurality of groups of vacuum holes 122 and the plurality of groups of support columns 2, the adsorption force on the product is relatively uniform, and finally the adsorption effect on the product is ensured.

[0055] Refer to Figure 2 and Figure 4 , a plurality of locking components 3 for locking the fixture 1 on the mounting base are provided on the fixture 1. The locking component 3 includes a locking bolt 31, a sealing ring 32 and a locking column 33. The locking bolt 31 passes through the bottom of the first vacuum chamber 15 and is threadedly installed on the mounting base. The sealing ring 32 is sleeved on the locking bolt 31 and pressed tightly against the bottom of the first vacuum chamber 15, thereby fixedly installing the fixture 1 on the mounting base. The locking column 33 is fixedly installed on the bottom of the positioning groove 121. The locking column 33 is at the same height as the support column 2. An installation hole 331 for facilitating the passing of the locking bolt 31 is formed on the locking column 33. The installation hole 331 is internally connected to the first vacuum chamber 15. Specifically, the sealing ring 32 is sleeved on the locking bolt 31, and then the locking bolt 31 and the sealing ring 32 are passed through the installation hole 331 and threadedly installed on the mounting base. The locking bolt 31 is screwed, and the sealing ring 32 is pressed tightly against the bottom of the first vacuum chamber 15, thereby fixedly installing the fixture 1 on the mounting base.

[0056] Referring to Figure 1 and Figure 2 Figure 2 , a pressing edge mechanism 4 for pressing the product tightly in the positioning groove 121 is provided on the jig 1. The pressing edge mechanism 4 includes a bracket 41, a transverse moving plate 42, a transverse moving driving member 43 and a pressing edge assembly 44. The bracket 41 is fixedly installed on the mounting seat; the transverse moving plate 42 is slidably installed on the bracket 41 in the horizontal direction, the transverse moving driving member 43 is fixedly installed on the bracket 41, and the transverse moving driving member 43 is used to drive the transverse moving plate 42 to slide; the pressing edge assembly 44 is arranged on the transverse moving plate 42 and presses the two ends on the same side of the product.

[0057] Referring to Figure 1 and Figure 2 Figure 2 , the pressing edge assembly 44 includes a sliding plate 441, a sliding driving member 442 and a pressing edge block 443. The sliding plate 441 is slidably installed on the transverse moving plate 42 in the vertical direction; the sliding driving member 442 is fixedly installed on the transverse moving plate 42, and the sliding driving member 442 is used to drive the sliding plate 441 to slide; there are two groups of pressing edge blocks 443, and the two groups of pressing edge blocks 443 are respectively fixedly installed at both ends of the sliding plate 441. The two groups of pressing edge blocks 443 are used to press the two ends on the same side of the product tightly in the positioning groove 121, so that the end faces of the product with both ends warped are tightly pressed against the positioning groove 121, and the second vacuum chamber is kept sealed; at this time, because the two groups of pressing edge blocks 443 press the two ends of the product tightly in the positioning groove 121, the product deforms correspondingly, and there is a bulge of varying degrees in the middle position. By starting the vacuum negative pressure device, the air in the first vacuum chamber 15 is evacuated and the negative pressure value in the first vacuum chamber 15 is reduced, so that the product is tightly pressed against the multiple support columns 2.

[0058] Referring to Figure 2 and Figure 5 Figure 5 , a positioning block 5 is fixedly installed on the end face of the upper plate 12 far from one end of the lower plate 11. The positioning block 5 is flush with the support column 2. The pressing edge block 443 presses the product tightly against the upper surface of the positioning block 5. The positioning holes on the product are tightly sealed by the positioning block 5 to ensure the sealing performance of the second vacuum chamber; at the same time, a plurality of groups of positioning sinking grooves 51 that cooperate with the positioning block 5 for positioning are spaced apart on the positioning block 5. When the positioning holes and the positioning sinking grooves 51 are coaxial, it indicates that the position of the product is accurate.

[0059] Referring to Figure 2 and Figure 3A plurality of lifting holes are provided on the upper plate 12 at intervals, and a lifting assembly 6 for lifting the product is provided on the fixture 1, and the lifting assembly 6 includes a lifting plate 61, a lifting rod 62 and a lifting driving member 63, and the lifting plate 61 is slidably installed on the lower plate 11 in a direction close to or away from the upper plate 12; a plurality of lifting rods 62 are provided, and a plurality of groups of lifting rods 62 are installed at intervals on one end of the lifting plate 61 close to the upper plate 12, and the lifting rods 62 slide in the lifting holes, and the plurality of groups of lifting rods 62 jointly lift the bottom of the product; the lifting driving member 63 is fixedly installed on the mounting seat, and the lifting driving member 63 is used to drive the lifting plate 61 to slide.

[0060] Reference Figure 1 , Figure 2 and Figure 3 The lifting drive member 63 drives the lifting plate 61 located on one end close to the upper plate 12, and multiple groups of lifting columns extend out of the lifting holes to place the products on the multiple groups of lifting columns. Then the lifting drive member 63 is started to make the lifting columns descend into the lifting holes, so as to place the products on the multiple groups of support columns 2 on the positioning grooves 121; then the transverse driving member 43 drives the transverse plate 42 to slide to the top of the fixture 1, and then the sliding driving member 442 drives the sliding plate 441 to move downward, and presses the two ends of the same side of the product through the edge pressing block 443, and finally presses the product tightly in the positioning groove 121, and the support column 2 makes a certain distance between the product and the bottom of the positioning groove 121, so that a second vacuum chamber for adsorbing the product is formed between the product and the positioning groove 121.

[0061] Reference Figure 2 and Figure 3 When the second vacuum chamber is formed between the product and the positioning groove 121, the vacuum negative pressure device is started to extract the air in the first vacuum chamber 15, and the air in the second vacuum chamber is extracted through the multiple groups of vacuum holes 122, thereby reducing the vacuum value in the second vacuum chamber, so that the product is tightly attached to the multiple groups of support columns 2, so that the product is flatly adsorbed in the positioning groove 121.

[0062] The working principle of the embodiment of the present application is as follows:

[0063] The product is placed in the positioning groove 121, and the two ends of the product are pressed down by two groups of edge pressing blocks 443, so that the product and the positioning groove 121 are kept in a sealed state. At the same time, a certain distance is maintained between the product and the bottom of the positioning groove 121 by multiple groups of support columns 2 in the positioning groove 121, so as to form a second vacuum chamber for adsorbing the product. The negative pressure value in the second vacuum chamber is reduced by the vacuum negative pressure equipment and the first vacuum chamber 15, so that the raised part in the middle of the product is tightly attached to the multiple groups of support columns 2 under the negative pressure of the second vacuum chamber, thereby ensuring that the product is flatly adsorbed in the positioning groove 121, thereby improving the adsorption and positioning effect on high-hardness and large-warping boards.

[0064] The above are all preferred embodiments of the present application, and do not limit the protection scope of the present application accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application shall be covered within the protection scope of the present application.

Claims

1. An adsorption platform for Chiplet process, comprising a mounting base, a jig (1) arranged on the mounting base, and the jig (1) is communicated with a vacuum negative pressure device, characterized in that: The fixture (1) is provided with a positioning groove (121) for facilitating the placement of the product, and a plurality of support columns (2) are provided at the bottom of the positioning groove (121) for supporting the bottom of the product. The mounting seat is provided with a pressing mechanism (4) for pressing the raised ends of the product, and the pressing mechanism (4) enables the product to be tightly sealed in the positioning groove (121). The support columns (2) enable a second vacuum chamber to be formed between the product and the positioning groove (121) for adsorbing the product, and the vacuum negative pressure device is connected to the inside of the second vacuum chamber and controls the negative pressure value inside the second vacuum chamber.

2. The adsorption platform for Chiplet process according to claim 1, characterized in that: A first vacuum chamber (15) is arranged inside the fixture (1), the first vacuum chamber (15) is connected to a vacuum negative pressure device, a plurality of groups of vacuum holes (122) are provided on the positioning groove (121), the plurality of groups of vacuum holes (122) and the plurality of groups of support columns (2) are arranged in an interlaced manner, and the plurality of groups of vacuum holes (122) are used to connect the first vacuum chamber (15) and the second vacuum chamber.

3. The adsorption platform for Chiplet process according to claim 2, wherein: The fixture (1) includes: A lower plate (11), wherein the lower plate (11) is arranged on a mounting seat; An upper plate (12), the upper plate (12) being pressed against an end of the lower plate (11) away from the mounting seat, and a first vacuum chamber (15) communicating with a vacuum negative pressure device is formed between the upper plate (12) and the lower plate (11); A fixing bolt (13), the fixing bolt (13) passing through the lower plate (11) and being threadedly arranged on the upper plate (12), the fixing bolt (13) being used to press the lower plate (11) against the upper plate (12) for sealing; A sealing strip (14), wherein the sealing strip (14) is arranged on the upper plate (12) and is pressed against the lower plate (11) to seal the connection between the upper plate (12) and the lower plate (11).

4. The adsorption platform for Chiplet process according to claim 3, wherein: The edge pressing mechanism (4) comprises: A bracket (41), wherein the bracket (41) is arranged on a mounting seat; A transverse plate (42), wherein the transverse plate (42) is slidably disposed on the bracket (41) in a horizontal direction; A transverse driving member (43), wherein the transverse driving member (43) is arranged on the bracket (41) and is used to drive the transverse plate (42) to slide; A press edge assembly (44), wherein the press edge assembly (44) is arranged on the transverse plate (42) and performs press edge operation on two ends of the same side of the product.

5. The adsorption platform for Chiplet process according to claim 4, wherein: The edge pressing assembly (44) comprises: A sliding plate (441), wherein the sliding plate (441) is slidably disposed on the transverse plate (42) in a vertical direction; A sliding driving member (442), wherein the sliding driving member (442) is arranged on the sliding plate (441) and is used to drive the sliding plate (441) to slide; The edge pressing blocks (443) are arranged in two groups on both ends of the sliding plate (441) and press the two ends of the same side of the product into the positioning groove (121).

6. The adsorption platform for Chiplet process according to claim 3, wherein: The jig (1) is provided with a plurality of locking components (3) for locking the jig (1) on the mounting seat, and the locking components (3) include: A locking bolt (31), wherein the locking bolt (31) presses the fixture (1) against the mounting seat; Sealing ring (32), the sealing ring (32) is sleeved on the locking bolt (31) and abuts against the bottom of the first vacuum chamber (15); Locking column (33), the locking column (33) is arranged in the installation groove and is at the same height as the support column (2). An installation hole (331) for arranging the locking bolt (31) on the fixture (1) is provided on the locking column (33), and the installation hole (331) is internally communicated with the first vacuum chamber (15).

7. The adsorption platform for Chiplet process according to claim 3, characterized in that: Multiple groups of jacking holes are spaced apart on the upper plate (12). A jacking assembly (6) for jacking the product is arranged on the fixture (1). The jacking assembly (6) includes: Jacking plate (61), the jacking plate (61) is hermetically slidably arranged on the lower plate (11) along the direction of approaching or departing from the upper plate (12); Jacking rods (62), multiple groups of the jacking rods (62) are spaced apart on the jacking plate (61), and the jacking rods (62) slide in the jacking holes and jack the bottom of the product; Jacking driving member (63), the jacking driving member (63) is arranged on the mounting seat and is used to push the jacking plate (61) to slide.

8. The adsorption platform for Chiplet process according to claim 5, wherein: A positioning block (5) is arranged on the upper plate (12), and the positioning block (5) is flush with the support column (2). The edge pressing block (443) presses the product against the positioning block (5) and tightly seals the positioning holes on the product.

9. The adsorption platform for Chiplet process according to claim 8, characterized in that: Multiple groups of positioning sinking grooves (51) that cooperate with the positioning holes for positioning are spaced apart on the positioning block (5).

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