Target material turnover device and workbench
Through the coordination of the clamping part and the turntable of the target material, the automatic flip of the target material is achieved, solving the safety and efficiency problems during the flip of the target material, and ensuring operational safety and processing continuity.
Patent Information
- Application Number
- CN202422202387.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-09
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-09-09
AI Technical Summary
In the prior art, there is a risk of rupture, deformation and injury to the operator during the flip of the target material, and manual flip cannot achieve effective changes in the position of the target material.
The target material flip device is adopted, including a clamp and a turntable. Through the cooperation of the lifting part, clamp and turntable, the automatic flip of the target material from the front to the vertical state and then to the reverse side is realized. The slot design of the clamping part ensures the target material is firmly clamped, and the turntable drives the clamp to rotate to achieve position change.
It improves operational safety, reduces target damage and intermediate pauses, realizes continuous processing of target materials, and improves processing efficiency.
Smart Images
Figure CN223087895U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, in particular to a target material rotating device and a workbench. Background Art
[0002] Semiconductor chips are usually made by mounting a target on a sputtering machine and performing processes such as etching, wiring, and hole making on the target surface. Both the front and back sides of the target need to be processed. After processing the front side of the target, the target needs to be removed from the sputtering machine, flipped to the back side manually, and then mounted on the sputtering machine to continue processing the back side.
[0003] However, during the process of manually transporting and flipping the target material, the target material may accidentally slip from the operator's hands, causing the target material to break or deform. At the same time, the target material may fall and injure the operator. If the target material is lifted and flipped by a lifting device, and the operation is only performed by the lifting device itself, even if the lifting device itself can be flipped, the relative position of the target material and the lifting device does not change. Therefore, if only the lifting device is used to lift the target material with the processed front side for flipping, and then the target material is placed on the machine tool, the target material is still facing up and has not been flipped. Utility Model Content
[0004] The utility model aims to provide a target material turning device and a workbench, which can ensure the smooth turning of the target material and improve the work efficiency, while also ensuring the safety of the operator and reducing the uncertainties and risks in manual operation.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] The target turning device is used to turn over the target lifted by the lifting member, and includes:
[0007] A clamping member, the clamping member having a slot, the width of the slot being greater than or equal to the thickness of the target material and less than the outer diameter of the target material, the slot being configured to clamp the upright target material;
[0008] A turntable is provided with the clamping member, and the turntable can drive the clamping member to rotate.
[0009] Furthermore, the clamping member is configured as a fixed stopper, and the fixing slot is provided on a surface of the fixed stopper facing away from the rotating disk.
[0010] Furthermore, the clamping groove penetrates the fixed stopper along the radial direction of the rotating disk.
[0011] Furthermore, the clamping member includes a first stopper and a second stopper. The first stopper and the second stopper are oppositely arranged on the turntable. The first stopper and / or the second stopper can move radially along the turntable so as to form the clamping groove between the first stopper and the second stopper.
[0012] Furthermore, a plurality of limiting holes are formed in the turntable. The plurality of limiting holes are sequentially arranged at intervals along the radial direction of the turntable. Limiting protrusions are arranged on the contact surface between the first stopper and / or the second stopper and the turntable. The limiting protrusions can be inserted into the limiting holes.
[0013] Furthermore, a guide rail and a driving member are arranged on the turntable. The first stopper and / or the second stopper are arranged on the guide rail. The driving member can drive the first stopper and / or the second stopper to move on the guide rail.
[0014] Furthermore, the first stopper and the second stopper are arranged in an L-shaped structure or a block structure.
[0015] Furthermore, an anti-slip member is arranged on the contact surface between the clamping member and the target.
[0016] Furthermore, the clamping member is located at the central position of the turntable.
[0017] A workbench includes a base and any one of the above-mentioned target turnover devices. The turntable is arranged on the base. A rotating shaft is arranged between the turntable and the base. The turntable can rotate on the base through the rotating shaft.
[0018] Advantages of the present utility model:
[0019] The utility model provides a target flipping device and a workbench for flipping a target lifted by a lifting member. The device includes a clamping member and a turntable. Through the mutual cooperation among the lifting member, the clamping member and the turntable, the process of changing the target from the front state to the upright state and then finally flipping it to the reverse state is realized. The lifting member can lift the target upright, avoiding direct contact between the operator and the target, and reducing the risk of injury to the operator during the handling and flipping of the target. The clamping member has a clamping groove, and the width of the clamping groove is greater than or equal to the thickness of the target and less than the outer diameter of the target. The clamping groove can firmly clamp the upright target and ensure that the target is placed upright, preventing the target from slipping due to shaking during the flipping process and improving the operation safety. The turntable drives the clamping member to rotate, flipping the upright target clamped by the clamping member from the front to the reverse. Subsequently, the lifting position between the lifting member and the target is changed, and then the flipped target is placed on the sputtering machine table by the lifting member to continue processing the reverse side of the target, realizing the change of the relative position between the lifting member and the target. Therefore, the target flipping device and the workbench realize the automatic flipping of the target through a mechanical device, reducing the manual operation steps, reducing the possible damage to the target during the processing link. At the same time, the target can be quickly flipped from the front to the reverse, reducing the intermediate pause and realizing continuous processing, thus improving the processing efficiency of the target. Description of the Drawings
[0020] Figure 1 is a schematic structural diagram of the target rotating device and the workbench of the utility model;
[0021] Figure 2 is the first embodiment of the target rotating device of the utility model;
[0022] Figure 3 is the second embodiment of the target rotating device of the utility model.
[0023] In the figure:
[0024] 1. Clamping member; 11. Clamping groove; 12. Fixed stop block; 13. First stop block; 14. Second stop block;
[0025] 2. Turntable; 3. Anti-slip member; 4. Base; 5. Rotating shaft. Detailed Embodiment
[0026] The following further describes the utility model in detail with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, rather than limiting the utility model. In addition, it should be noted that only the parts related to the utility model rather than all the structures are shown in the drawings for the convenience of description.
[0027] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.
[0028] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "beneath", and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.
[0029] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "left", "right", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0030] Please refer to Figures 1 - 3 As shown in the figure, the present utility model provides a target flipping device, which can ensure the smooth flipping of the target, improve work efficiency, and at the same time can ensure the safety of the operator, reducing the uncertain factors and risks in manual operation. The target flipping device is used to flip the target lifted by a hoisting member, and includes a clamping member 1 and a turntable 2; wherein the clamping member 1 has a clamping groove 11, the width of the clamping groove 11 is greater than or equal to the thickness of the target and less than the outer diameter of the target, and the clamping groove 11 is configured to clamp the upright target; the clamping member 1 is arranged on the turntable 2, and the turntable 2 can drive the clamping member 1 to rotate.
[0031] Through the mutual cooperation among the hoisting member, the clamping member 1 and the turntable 2, the process of transforming the target from the front state to the upright state and finally flipping it from the upright state to the reverse state is realized. Among them, the hoisting member can vertically lift the target, avoiding direct contact between the operator and the target, and reducing the risk of injury to the operator during the handling and flipping of the target. The clamping member 1 has a clamping groove 11, and the width of the clamping groove 11 is greater than or equal to the thickness of the target and less than the outer diameter of the target. The clamping groove 11 can firmly clamp the upright target, preventing the target from slipping due to shaking during the flipping process, and improving the operation safety. Among them, the width of the clamping groove 11 is greater than or equal to the thickness of the target, ensuring that the target can be smoothly placed into the clamping groove 11. At the same time, the width of the clamping groove 11 is less than the outer diameter of the target, which can effectively limit the lateral displacement of the target and ensure that the target is placed upright to achieve a successful flip. The turntable 2 drives the clamping member 1 to rotate, flipping the upright target clamped by the clamping member 1 from the front to the reverse. Subsequently, the hoisting position between the hoisting member and the target is changed, and then the flipped target is placed on the sputtering machine table through the hoisting member to continue processing the reverse side of the target, realizing the change of the relative position between the hoisting member and the target. Therefore, the target flipping device realizes the automatic flipping of the target through a mechanical device, reducing the manual operation steps, reducing the possible damage to the target during the processing link. At the same time, the target can be quickly flipped from the front to the reverse, reducing the intermediate pause, realizing continuous processing, and improving the processing efficiency of the target.
[0032] As Figure 1 shown, in some embodiments, to increase the clamping stability, the clamping member 1 is arranged at the central position of the turntable 2. Such a design can reduce the phenomenon that the target on the clamping member 1 is unbalanced or displaced due to the centrifugal force generated by the rotation of the turntable 2, further ensuring that the target on the clamping member 1 is evenly stressed on the turntable 2, thereby improving the stability of the target flipping device. Further, an anti-slip member 3 is arranged on the contact surface between the clamping member 1 and the target. Among them, the anti-slip member 3 can provide additional friction, reducing the relative displacement between the clamping member 1 and the target, and helping to ensure that the target remains in a fixed position during the clamping process. Among them, the anti-slip member 3 can be but is not limited to being set as a silicone pad or anti-slip paint, etc., and no specific limitation is made here.
[0033] As Figure 2As shown, in order to provide a stable placement position for the target, in some embodiments, the clamping member 1 is set as a fixed stop 12. A clamping groove 11 is formed on the side of the fixed stop 12 facing away from the turntable 2. The fixed stop 12 is an integral structure. Only by placing the fixed stop 12 on the turntable 2, no additional assembly steps are required for the fixed stop 12, reducing its production and assembly time. The clamping groove 11 is formed on the side of the fixed stop 12 facing away from the turntable 2. The clamping groove 11 can effectively fix the erected target, providing a stable placement position for the target and preventing it from shifting or falling off during rotation. Further, the clamping groove 11 penetrates the fixed stop 12 along the radial direction of the turntable 2. Through this design of making the clamping groove 11 penetrate the fixed stop 12 along the radial direction of the turntable 2, it is allowed for the target to slide into the clamping groove 11 both from the side and above, making the installation and disassembly of the target more convenient and rapid, simplifying the operation process, and improving the convenience and efficiency of the operation. At the same time, it also increases the contact area between the target and the clamping groove 11, further avoiding the relative displacement between the target and the fixed stop 12 during rotation, which may cause the target to tilt, slide or move.
[0034] As Figure 3 shown, in order to enable the clamping member 1 to be applicable to targets of different specifications, in some embodiments, the clamping member 1 includes a first stop 13 and a second stop 14. The first stop 13 and the second stop 14 are oppositely arranged on the turntable 2, and the first stop 13 and / or the second stop 14 can move along the radial direction of the turntable 2 so as to form a clamping groove 11 between the first stop 13 and the second stop 14. Any one of the first stop 13 and the second stop 14 can move along the radial direction of the turntable 2, or both of them can move relatively along the radial direction of the turntable 2. By adjusting the distance between the first stop 13 and / or the second stop 14, they can clamp targets of different specifications and shapes, and thus the clamping member 1 can be adapted to more usage scenarios, having strong versatility. At the same time, such a design can more accurately adjust the distance between the first stop 13 and the second stop 14, making the distance between them match the thickness of the target to be flipped, ensuring that the target is firmly clamped during the operation, thereby improving the stability of the target flipping device and reducing the shaking and displacement of the target on the turntable 2.
[0035] Specifically, the first stop 13 and the second stop 14 can be designed as an L-shaped structure or a block structure. Both can provide a large clamping surface for the target to be flipped and can evenly distribute the clamping force, effectively avoiding damage to the surface of the target caused by concentrated pressure points. When the first stop 13 and the second stop 14 are L-shaped, the first stop 13 and the second stop 14 are arranged back to back. The L-shaped structure design can better utilize the limited space, providing a large clamping surface while also saving materials. The block structure design is simple, and the manufacturing and installation processes are relatively straightforward.
[0036] In some embodiments, a plurality of limiting holes are formed in the turntable 2, and the plurality of limiting holes are sequentially arranged at intervals along the radial direction of the turntable 2. Limiting protrusions are provided on the contact surfaces of the first stop block 13 and / or the second stop block 14 with the turntable 2, and the limiting protrusions can be inserted into the limiting holes. By inserting the limiting protrusions into different limiting holes, the distance between the first stop block 13 and the second stop block 14 is adjusted to select the optimal position to clamp the erected target. At the same time, the cooperation between the limiting protrusions and the limiting holes can prevent the first stop block 13 and / or the second stop block 14 from sliding on the turntable 2, ensuring that the two remain in the set positions without sliding during the operation process, and preventing the accidental detachment of the target caused by unstable clamping. In addition, the insertion operation of the limiting protrusions and the limiting holes is simple and intuitive, and the operator can quickly achieve different clamping requirements through the insertion positions.
[0037] In other embodiments, a guide rail and a driving member are provided on the turntable 2. The first stop block 13 and / or the second stop block 14 are arranged on the guide rail, and the driving member can drive the first stop block 13 and / or the second stop block 14 to move on the guide rail. The erected target is placed between the first stop block 13 and the second stop block 14 through a hoisting member. The driving member is started, and the driving member drives the first stop block 13 and / or the second stop block 14 to move on the guide rail. When the two clamp the target, the driving member is turned off, the hoisting member is released, and finally the turntable 2 is rotated to realize the flipping of the target. The guide rail provides a stable moving path for the first stop block 13 and the second stop block 14, and the driving member can accurately control the moving distance of the first stop block 13 and / or the second stop block 14 to ensure that the two can stably clamp the erected target. At the same time, the driving member can automatically drive the first stop block 13 and the second stop block 14 to move along the guide rail, which makes the adjustment of their positions more automated and efficient, reducing the manual operation steps. Among them, the driving member can be, but is not limited to, electric drive or lead screw, etc., and no specific limitation is made here.
[0038] Such as Figure 1As shown in the figure, the present utility model also provides a workbench, which includes a base 4 and the target flipping device in any of the above embodiments. A turntable 2 is arranged on the base 4, and a rotating shaft 5 is arranged between the turntable 2 and the base 4. The turntable 2 can rotate on the base 4 through the rotating shaft 5. Through the mutual cooperation among the hoisting member, the clamping member 1 and the turntable 2, this workbench realizes the process of changing the target from the front state to the upright state and then finally flipping it to the back state. Among them, the hoisting member can vertically lift the target, avoiding direct contact between the operator and the target, and reducing the risk of the operator being injured during the handling and flipping of the target. The clamping member 1 can firmly clamp the upright target, preventing the target from slipping due to shaking during the flipping process, and improving the operation safety. The turntable 2 drives the clamping member 1 to rotate, flipping the upright target clamped by the clamping member 1 from the front to the back, and then putting the flipped target onto the sputtering machine table through the hoisting member to continue processing the back of the target, realizing the change of the relative position between the hoisting member and the target. Therefore, the workbench realizes the automatic flipping of the target through a mechanical device, reducing the manual operation steps, reducing the possible damage to the target during the processing link. At the same time, the target can be quickly flipped from the front to the back, reducing the intermediate pause, realizing continuous processing, and improving the processing efficiency of the target.
[0039] The following is the specific operation process of the target rotating device and the workbench:
[0040] First, the hoisting member vertically lifts the target that has been processed on the front from the sputtering machine table, realizing the change of the target from the front state to the upright state.
[0041] Secondly, the hoisting member vertically places the target in the card slot 11 of the clamping member 1, and the card slot 11 of the clamping member 1 clamps the upright target.
[0042] After that, the turntable 2 drives the clamping member 1 to rotate 180°, flipping the upright target from the front to the back.
[0043] Finally, the hoisting member lifts the flipped and upright target and places the flipped and upright target on the sputtering machine table to continue processing the back of the target.
[0044] Obviously, the above embodiments of the present utility model are merely examples for clearly illustrating the present utility model, rather than limiting the implementation manners of the present utility model. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present utility model. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present utility model shall be included in the protection scope of the claims of the present utility model.
Claims
1. A target material turning device for turning a target material lifted by a hoisting member, characterized in that Comprising: A clamping member (1), the clamping member (1) having a clamping groove (11), the width of the clamping groove (11) being greater than or equal to the thickness of the target and less than the outer diameter of the target, the clamping groove (11) being configured to clamp the upright target; A turntable (2), the clamping member (1) being provided on the turntable (2), the turntable (2) being capable of driving the clamping member (1) to rotate.
2. The target flipping device according to claim 1, characterized in that The clamping member (1) is provided as a fixed stop block (12), and the clamping groove (11) is formed on a surface of the fixed stop block (12) facing away from the turntable (2).
3. The target flipping device according to claim 2, wherein The clamping groove (11) penetrates the fixed stop block (12) along the radial direction of the turntable (2).
4. The target flipping device according to claim 1, characterized in that, The clamping member (1) includes a first stop block (13) and a second stop block (14), the first stop block (13) and the second stop block (14) being oppositely arranged on the turntable (2), and the first stop block (13) and / or the second stop block (14) being capable of moving along the radial direction of the turntable (2) so as to form the clamping groove (11) between the first stop block (13) and the second stop block (14).
5. The target flipping device according to claim 4, characterized in that, A plurality of limiting holes are formed in the turntable (2), the plurality of limiting holes being sequentially arranged at intervals along the radial direction of the turntable (2), and limiting protrusions are provided on the contact surfaces of the first stop block (13) and / or the second stop block (14) with the turntable (2), and the limiting protrusions are capable of being inserted into the limiting holes.
6. The target flipping device according to claim 4, characterized in that, A guide rail and a driving member are provided on the turntable (2), the first stop block (13) and / or the second stop block (14) being arranged on the guide rail, and the driving member being capable of driving the first stop block (13) and / or the second stop block (14) to move on the guide rail.
7. The target flipping device according to claim 4, characterized in that, The first stop block (13) and the second stop block (14) are provided as an L-shaped structure or a block structure.
8. The target flipping device according to any one of claims 1-7, characterized in that, An anti-slip member (3) is provided on the contact surface between the clamping member (1) and the target.
9. The target flipping device according to any one of claims 1-7, characterized in that, The clamping member (1) is located at the central position of the turntable (2).
10. Workbench, including a base (4), characterized in that, The workbench further includes a target turning device according to any one of claims 1-9, the turntable (2) being provided on the base (4), and a rotating shaft (5) being provided between the turntable (2) and the base (4), the turntable (2) being capable of rotating on the base (4) through the rotating shaft (5).