Pressure maintaining device for vacuum winding equipment

By setting up a pressure-keeping device in the vacuum winding equipment, the valve body, valve cover, valve core and drive parts can be used to seal the vacuum chamber, which solves the problem of equipment being exposed to the atmosphere when the substrate is replaced, improves coating efficiency and reduces equipment pollution.

CN223089713UActive Publication Date: 2025-07-11KATOP AUTOMATION CO LTD
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Patent Information

Application Number
CN202421771042.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-25
Publication Date
2025-07-11
Estimated Expiration
2034-07-25

AI Technical Summary

Technical Problem

When the existing vacuum winding equipment replaces the substrate, the internal parts and substrates of the equipment are exposed to the atmospheric environment for a long time, which affects the equipment life and coating efficiency, and needs to be re-vacuated after replacement, resulting in inefficiency.

Method used

A pressure-keeping device is designed, including a valve body, valve cover, valve spool and drive member. The valve spool is driven to move back and forth in the inner cavity through the drive member to achieve sealing of the vacuum chamber, maintaining the vacuum degree in the coating chamber, making it convenient to replace the substrate separately, and reducing the vacuum time.

Benefits of technology

It improves coating efficiency, reduces pollution of internal parts and substrates of the equipment, and reduces the time cost of replacing substrates.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a pressure maintaining device for vacuum winding equipment, which is arranged between two vacuum chambers and comprises a valve body, a valve cover, a valve core and a driving piece, the valve cover covers the top of the valve body and enables the inside of the valve body to form an inner cavity, the valve core is movably arranged in the inner cavity, and the driving piece is arranged on the valve body. The driving part is used for driving the valve element to move in the inner cavity in a reciprocating mode, the valve body is provided with a channel allowing a base material to pass through, one end of the inner cavity is communicated with the channel, the two ends of the channel are communicated with the two vacuum chambers respectively, and the inner cavity is perpendicular to the channel. When the driving piece drives the valve element to be close to the channel, the valve element compresses the base material and seals the channel. When the driving piece drives the valve element to be away from the channel, the valve element loosens the base material and opens the channel. According to the utility model, the vacuumizing time can be shortened, the coating efficiency is improved, and the pollution of external atmosphere to parts and base materials in the coating chamber is reduced.
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Description

Technical Field

[0001] The utility model relates to the technical field of vacuum equipment, and particularly relates to a pressure maintaining device for a vacuum winding device. Background Art

[0002] Existing vacuum winding devices are generally box-shaped. The unwinding mechanism, winding mechanism, and vacuum coating mechanism are all arranged in the same chamber. The chamber is provided with a chamber door for workers to take and place the substrate conveniently. When the substrate is coated, the chamber is in a vacuum environment. When the substrate needs to be replaced, the chamber door needs to be opened. Workers take out the substrate in the chamber and put in a new substrate, then close the chamber door and evacuate the inside of the chamber again.

[0003] However, when replacing the substrate in the existing vacuum winding device, the parts and substrate inside the vacuum winding device will be exposed to the atmospheric environment for a long time. When the parts and substrate inside the vacuum winding device are in contact with air for a long time, it will have a more serious impact on the service life of the device and the product quality of the substrate. Moreover, after replacing the substrate, it is necessary to evacuate the vacuum again, resulting in low coating efficiency. Summary of the Utility Model

[0004] In order to overcome the deficiencies of the prior art, the utility model provides a pressure maintaining device for a vacuum winding device, which can reduce the vacuum pumping time, improve the coating efficiency, and reduce the pollution of the parts and substrate inside the coating chamber by the external atmosphere.

[0005] The technical solution adopted by the utility model to solve its technical problems is as follows:

[0006] A pressure maintaining device for a vacuum winding device is arranged between two vacuum chambers and includes a valve body, a valve cover, a valve core, and a driving member. The valve cover covers the top of the valve body and encloses an inner cavity with the valve body. The valve core is movably arranged in the inner cavity. The driving member is used to drive the valve core to reciprocate in the inner cavity. The valve body is provided with a channel for the substrate to pass through. One end of the inner cavity is communicated with the channel. Both ends of the channel are respectively communicated with the two vacuum chambers. The inner cavity and the channel are perpendicular to each other. When the driving member drives the valve core close to the channel, the valve core presses the substrate and closes the channel. When the driving member drives the valve core away from the channel, the valve core releases the substrate and opens the channel.

[0007] As a further improvement of the above technical solution, an elastic pressing strip is arranged on one side of the valve core close to the channel. The driving member drives the valve core close to or away from the channel to drive the elastic pressing strip to press or release the substrate. When the elastic pressing strip presses the substrate, the elastic pressing strip seals the channel.

[0008] As a further improvement of the above technical solution, one side of the cross-section of the elastic pressing strip close to the channel is an arc surface.

[0009] As a further improvement of the above technical solution, the cross-section of the channel is strip-shaped, the width of the inner cavity is greater than the width of the channel, and the bottom of the inner cavity is flush with the bottom of the channel.

[0010] As a further improvement of the above technical solution, an arc transition section is provided between the bottom and the side of the inner cavity.

[0011] As a further improvement of the above technical solution, a first sealing groove and a first sealing ring arranged in the first sealing groove are provided between the valve body and the valve cover.

[0012] As a further improvement of the above technical solution, the driving member includes a cylinder, the cylinder is installed on the top of the valve cover through a cylinder seat, and the telescopic end of the cylinder is connected to the valve core.

[0013] As a further improvement of the above technical solution, a second sealing groove and a second sealing ring arranged in the second sealing groove are provided between the cylinder seat and the valve cover.

[0014] As a further improvement of the above technical solution, the number of the cylinders is two, and the two cylinders are symmetrically arranged along the center line of the valve core.

[0015] As a further improvement of the above technical solution, third sealing grooves are provided on both sides of the valve body, and third sealing rings are provided on the third sealing grooves.

[0016] The beneficial effects of the present utility model are as follows: The present utility model provides a pressure maintaining device for a vacuum winding device. By providing a valve body, a valve cover, a valve core and a driving member, an inner cavity is formed in the valve body, and the valve body is provided with a channel for accommodating the movement of the base material. When it is necessary to replace the base material, the driving member drives the valve core close to the channel, so that the valve core presses the base material and closes the channel, and the vacuum chambers on both sides of the valve body can be sealed, and the vacuum degree in the coating chamber can be maintained within the working pressure, which is convenient for separately opening the winding chamber or the unwinding chamber to realize the replacement of the base material. Thus, the vacuum pumping time is reduced, the coating efficiency is improved, and the parts and the base material inside the coating chamber are less polluted by the external atmosphere. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present utility model will be further described below with reference to the drawings and embodiments.

[0018] Figure 1 is a schematic structural diagram provided by an embodiment of the present utility model;

[0019] Figure 2 is a partial structural diagram of the present utility model;

[0020] Figure 3 is a cross-sectional view of the present utility model;

[0021] Figure 4 is Figure 2 an enlarged view of part A in

[0022] Figure 5 is Figure 3 an enlarged view of part B in

[0023] Reference numerals: 100 - valve body, 110 - valve cover, 120 - valve core, 130 - driving member, 140 - inner cavity, 150 - channel, 160 - elastic pressing strip, 170 - arc transition section, 180 - first sealing groove, 190 - first sealing ring, 200 - cylinder seat, 210 - second sealing groove, 220 - second sealing ring, 230 - third sealing groove, 240 - third sealing ring, 250 - fourth sealing groove, 260 - fourth sealing ring, 270 - convex column, 280 - counterbore. Detailed implementation manners

[0024] The following will clearly and completely describe the concept, specific structure and technical effects generated by the present utility model in combination with the embodiments and the drawings, so as to fully understand the purpose, features and effects of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, other embodiments obtained by those skilled in the art without creative efforts shall fall within the scope of protection of the present utility model. In addition, all the connection / connection relationships involved in the patent do not simply refer to the direct connection of components, but refer to the more excellent connection structure that can be formed by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the present utility model can be combined with each other without conflicting with each other.

[0025] Referring to Figures 1 to 3 , a pressure maintaining device for a vacuum winding device provided by an example of the present utility model is arranged between two vacuum chambers, and includes a valve body 100, a valve cover 110, a valve core 120 and a driving member 130. The valve cover 110 is covered on the top of the valve body 100 and encloses an inner cavity 140 with the valve body 100. The valve core 120 is movably arranged in the inner cavity 140. The driving member 130 is used to drive the valve core 120 to reciprocate in the inner cavity 140. The valve body 100 is provided with a channel 150 for accommodating the substrate to pass through. One end of the inner cavity 140 is communicated with the channel 150. Both ends of the channel 150 are respectively communicated with the two vacuum chambers. The inner cavity 140 and the channel 150 are perpendicular to each other.

[0026] When the substrate needs to be replaced, the winding mechanism and the unwinding mechanism stop working. The driving member 130 drives the valve core 120 to approach the channel 150, so that the valve core 120 presses the substrate and closes the channel 150, sealing the vacuum chambers on both sides of the valve body 100, maintaining the vacuum degree in the coating chamber within the working pressure, facilitating the separate opening of the winding chamber or the unwinding chamber to replace the substrate. Thus, the vacuum pumping time is reduced, the coating efficiency is improved, and the parts and substrates inside the coating chamber are less polluted by the external atmosphere.

[0027] After the substrate replacement is completed, when the driving member 130 drives the valve core 120 away from the channel 150, the valve core 120 releases the substrate and opens the channel 150, and the winding mechanism and the unwinding mechanism work normally, and the substrate moves through the channel 150.

[0028] In some preferred embodiments, an elastic pressing strip 160 is provided on the side of the valve core 120 close to the channel 150. The driving member 130 drives the valve core 120 to approach or move away from the channel 150 to drive the elastic pressing strip 160 to press or release the substrate. When the elastic pressing strip 160 presses the substrate, the elastic pressing strip 160 seals the channel 150.

[0029] It can be understood that when the elastic pressing strip 160 presses the substrate, the elastic pressing strip 160 is in flexible contact with the substrate, thus preventing the substrate from being damaged.

[0030] Furthermore, the cross-section of the elastic pressing strip 160 on the side close to the channel 150 is an arc surface, so that the protruding edge on the side of the elastic pressing strip 160 close to the channel 150 is in flexible contact with the substrate, thus enabling the elastic pressing strip 160 to be in complete contact with the substrate and improving the sealing performance of the vacuum chamber.

[0031] Furthermore, the cross-section of the channel 150 is a long strip structure. The width of the inner cavity 140 and the width of the valve core 120 are both greater than the width of the channel 150. Moreover, the bottom of the inner cavity 140 is flush with the bottom of the channel 150. When the driving member 130 drives the valve core 120 and the elastic pressing strip 160 to descend, both ends of the elastic pressing strip 160 protrude from both sides of the channel 150 in the width direction, thus preventing a gap from being generated between the channel 150 and the elastic pressing strip 160, enabling the elastic pressing strip 160 to completely block the channel 150, and improving the sealing performance of the vacuum chamber.

[0032] Refer to Figure 2 and Figure 4 , furthermore, an arc transition section 170 is provided between the bottom and the side of the inner cavity 140. When the elastic pressing strip 160 is in flexible contact with the substrate, the end of the elastic pressing strip 160 is in flexible contact with the arc transition section 170, thus preventing a gap from being generated between the elastic pressing strip 160 and the corner position of the inner cavity 140 and further improving the sealing performance of the vacuum chamber.

[0033] Refer toFigure 3 and Figure 5 In some preferred embodiments, a first sealing groove 180 is provided between the valve body 100 and the valve cover 110, and a first sealing ring 190 is provided in the first sealing groove 180, thereby ensuring the sealing performance after the valve body 100 and the valve cover 110 are assembled.

[0034] Moreover, the valve body 100 and the valve cover 110 are fixedly connected by bolts.

[0035] It should be noted that the first sealing groove 180 can be provided at the top of the valve body 100 or at the bottom of the valve cover 110.

[0036] For the convenience of installing the first sealing ring 190, the first sealing groove 180 in this embodiment is provided at the top of the valve body 100.

[0037] In some preferred embodiments, the driving member 130 includes a cylinder. The cylinder is installed on the top of the valve cover 110 through a cylinder seat 200, and the telescopic end of the cylinder is connected to the valve core 120. The structure of the cylinder is simple and the installation is convenient, thereby reducing the manufacturing cost of the equipment.

[0038] Specifically, the number of cylinders is two. The two cylinders are symmetrically arranged along the center line of the valve core 120. The two cylinders drive the valve core 120 to approach or move away from the channel 150 simultaneously, thereby enabling the valve core 120 to be evenly stressed and improving the stability of the valve core 120 during movement.

[0039] Furthermore, a second sealing groove 210 is provided between the cylinder seat 200 and the valve cover 110, and a second sealing ring 220 is provided in the second sealing groove 210, thereby ensuring the sealing performance between the cylinder seat 200 and the valve cover 110.

[0040] During assembly, the cylinder seat 200 and the valve cover 110 are fixedly connected by bolts.

[0041] It should be noted that the second sealing groove 210 can be provided at the bottom of the cylinder seat 200 or at the top of the valve cover 110.

[0042] For the convenience of installing the second sealing ring 220, the second sealing groove 210 in this embodiment is provided at the top of the valve cover 110.

[0043] Structurally, a convex column 270 is provided at one end of the cylinder body of the cylinder close to the cylinder seat 200. A counterbore 280 for accommodating the convex column 270 is provided on one side of the cylinder seat 200. A fourth sealing groove 250 is provided on the bottom wall of the counterbore 280, and a fourth sealing ring 260 is provided on the fourth sealing groove 250, thereby ensuring the sealing performance between the cylinder and the cylinder seat 200.

[0044] Moreover, one end of the cylinder block of the cylinder is fixedly connected to the cylinder seat 200 by bolts.

[0045] In some preferred embodiments, third sealing grooves 230 are provided on both sides of the valve body 100. The third sealing grooves 230 are rectangular, and third sealing rings 240 are provided on the third sealing grooves 230. When the valve body 100 is arranged between two vacuum chambers, both sides of the valve body 100 are respectively sealed with the side parts of the two vacuum chambers, thereby preventing external gas from entering the vacuum chambers.

[0046] The above is a specific description of the preferred embodiments of the present invention, but the present invention is not limited to the described embodiments. Those skilled in the art can also make various equivalent deformations or substitutions without departing from the spirit of the present invention, and these equivalent deformations or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A pressure maintaining device for a vacuum winding device, which is arranged between two vacuum chambers, and is characterized in that, It includes a valve body, a valve cover, a valve core and a driving member. The valve cover is arranged on the top of the valve body and encloses an inner cavity with the valve body. The valve core is movably arranged in the inner cavity. The driving member is used to drive the valve core to reciprocate in the inner cavity. The valve body is provided with a channel for the substrate to pass through. One end of the inner cavity is communicated with the channel. Both ends of the channel are respectively communicated with two vacuum chambers. The inner cavity and the channel are perpendicular to each other; When the driving member drives the valve core close to the channel, the valve core presses the substrate and closes the channel; When the driving member drives the valve core away from the channel, the valve core releases the substrate and opens the channel.

2. The pressure-holding device for a vacuum winding device according to claim 1, wherein, An elastic pressing strip is arranged on the side of the valve core close to the channel. The driving member drives the valve core to approach or move away from the channel to drive the elastic pressing strip to press or release the substrate. When the elastic pressing strip presses the substrate, the elastic pressing strip seals the channel.

3. The pressure-holding device for a vacuum winding device according to claim 2, characterized in that, The cross-section of the elastic pressing strip is an arc surface on the side close to the channel.

4. The pressure-holding device for a vacuum winding device according to claim 1, characterized in that, The cross-section of the channel is strip-shaped. The width of the inner cavity is greater than the width of the channel. The bottom of the inner cavity is flush with the bottom of the channel.

5. The pressure maintaining device for a vacuum winding device according to claim 4, characterized in that, An arc transition section is arranged between the bottom and the side of the inner cavity.

6. The pressure-holding device for a vacuum winding device according to claim 1, characterized in that, A first sealing groove and a first sealing ring arranged in the first sealing groove are provided between the valve body and the valve cover.

7. A pressure maintaining device for a vacuum winding device according to claim 1, characterized in that, The driving member includes a cylinder. The cylinder is installed on the top of the valve cover through a cylinder seat. The telescopic end of the cylinder is connected with the valve core.

8. A pressure maintaining device for a vacuum winding device according to claim 7, characterized in that, A second sealing groove and a second sealing ring arranged in the second sealing groove are provided between the cylinder seat and the valve cover.

9. The pressure maintaining device for a vacuum winding device according to claim 7, characterized in that, The number of the cylinders is two. The two cylinders are symmetrically arranged along the center line of the valve core.

10. The pressure-holding device for a vacuum winding device according to claim 1, characterized in that, Third sealing grooves are provided on both sides of the valve body. Third sealing rings are arranged on the third sealing grooves.