Opening and closing mechanism for quick connector and wafer testing device

Abstract

The utility model belongs to the technical field of wafer testing, and discloses an opening and closing mechanism for a quick connector and a wafer testing device. The opening and closing mechanism for the quick connector comprises a fixed seat, a rotating piece and a limiting piece, wherein the fixed seat is configured to be arranged on a machine body; the rotating piece penetrates through the containing cavity of the machine body, the first end of the rotating piece is rotationally connected with the fixing base, and the second end of the rotating piece extends out of the containing cavity; a first through hole is formed in the rotating piece, and an air supply pipe penetrates through the first through hole and is inserted into the quick connector; when the second end of the rotating piece is pressed, the rotating piece rotates and can press a release ring of the quick-plug connector, so that the air pipe is pulled out of the quick-plug connector; the limiting piece is arranged on the machine body, located outside the containing cavity and used for limiting the position of the rotating piece. The opening and closing mechanism for the quick connector is simple in structure, and convenient and quick operation can be realized when the air pipe and the quick connector are assembled and disassembled in a relatively narrow accommodating space in the wafer testing device.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer testing, in particular to an opening and closing mechanism for a quick connector and a wafer testing device. Background Art

[0002] Before cutting, wafers usually need to be tested to pick out defective products and package the qualified products to ensure product quality. During the testing process, the wafers need to be vacuum-adsorbed and the vacuum stress needs to be released after the testing is completed. The wafer testing device includes an air pipe and a quick connector. In the prior art, the air pipe is connected to the quick connector during installation.

[0003] When disassembling the air pipe from the quick connector, generally, the release ring of the quick connector is pressed by hand to achieve disassembly. However, the existing quick connectors are generally arranged in a relatively narrow accommodation space in the wafer testing device, and it is inconvenient for the operator to reach into the accommodation space to press the release ring.

[0004] Therefore, there is an urgent need for an opening and closing mechanism for a quick connector to solve the above technical problems. Summary of the Utility Model

[0005] The purpose of the utility model is to provide an opening and closing mechanism for a quick connector and a wafer testing device. The structure of the opening and closing mechanism for the quick connector is simple, and it can achieve convenient and fast operation when installing and disassembling the air pipe and the quick connector in a relatively narrow accommodation space in the wafer testing device.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] On the one hand, an opening and closing mechanism for a quick connector is provided, including:

[0008] A fixed seat configured to be arranged on the fuselage;

[0009] A rotating member passing through the accommodation cavity of the fuselage, and the first end of the rotating member is rotatably connected to the fixed seat, and the second end of the rotating member extends outside the accommodation cavity; the rotating member is provided with a first through hole for the air pipe to pass through and be inserted into the quick connector; when pressing the second end of the rotating member, the rotating member rotates and can press the release ring of the quick connector to pull out the air pipe from the quick connector;

[0010] A limiting member configured to be arranged on the fuselage and located outside the accommodation cavity for limiting the position of the rotating member.

[0011] In some possible implementation manners, the limiting member is adjustably arranged on the fuselage, and the limiting member is provided with a clamping groove, and the rotating member is clamped with the clamping groove.

[0012] In some possible embodiments, the limiting member is provided with a long hole, and the opening and closing mechanism for the quick connector further includes a first screw, and the first screw passes through the long hole and is threadedly connected to the threaded hole of the fuselage.

[0013] In some possible embodiments, when the rotating member is clamped with the clamping groove, the axis of the first through hole coincides with the axis of the insertion cavity of the release ring.

[0014] In some possible embodiments, a groove is recessed at the bottom of the rotating member, and the groove is located at the bottom opening of the first through hole, and the groove bottom surface is used to abut against the release ring.

[0015] In some possible embodiments, the opening and closing mechanism for the quick connector further includes a trachea guide member, the trachea guide member is arranged on the top of the rotating member, a second through hole is arranged in the trachea guide member, and the second through hole communicates with the first through hole; the second through hole has a trachea inlet and a trachea outlet, one side of the second through hole close to the trachea inlet is a conical hole, and one side of the second through hole close to the trachea outlet is a cylindrical hole.

[0016] In some possible embodiments, the trachea guide member is detachably connected to the rotating member, and the fixed seat is detachably connected to the fuselage.

[0017] In some possible embodiments, the opening and closing mechanism for the quick connector further includes two ferrule and a rotating shaft, the rotating member is rotatably connected to the fixed seat through the rotating shaft, the two ferrule are arranged on both sides of the rotating member and are sleeved on the rotating shaft; the ferrule abuts against the fixed seat and abuts against the rotating member to limit the axial position of the rotating member on the rotating shaft.

[0018] On the other hand, a wafer testing device is provided, including a fuselage, a quick connector, a trachea and the opening and closing mechanism for the quick connector as described in any of the above solutions, the quick connector is fixed to the fuselage; a fixed seat is arranged on the fuselage, the fuselage is provided with a receiving cavity, the rotating member passes through the receiving cavity, and the first end of the rotating member is rotatably connected to the fixed seat, the second end of the rotating member extends outside the receiving cavity; the rotating member is provided with a first through hole, the trachea passes through the first through hole and is inserted into the quick connector; the quick connector includes a release ring, when pressing the second end of the rotating member, the rotating member rotates and can press the release ring to pull out the trachea from the quick connector; a limiting member is arranged on the fuselage and is located outside the receiving cavity.

[0019] In some possible embodiments, the fuselage includes a base, a linear drive assembly, an adapter, a rotary drive assembly, and a suction chuck. The linear drive assembly is fixed on the base, and the output end of the linear drive assembly is drivingly connected to the adapter. The linear drive assembly is configured to drive the adapter to move radially along the suction chuck. An air passage is provided in the adapter, and the quick connector is fixed to the adapter and communicated with the air passage. The rotary drive assembly is fixed on the adapter, the accommodation cavity is arranged in the rotary drive assembly, the output end of the rotary drive assembly is drivingly connected to the suction chuck, and the rotary drive assembly is configured to drive the suction chuck to rotate axially. The suction chuck is used for placing a wafer, and the suction chuck is communicated with the trachea.

[0020] Advantages of the present utility model:

[0021] The opening and closing mechanism for the quick connector provided by the present utility model includes a fixed seat, a rotating member, and a limiting member. When disassembling the trachea and the quick connector in a relatively narrow accommodation cavity in the wafer testing device, the limiting of the rotating member by the limiting member is cancelled, and then by pressing the second end of the rotating member, the rotating member rotates to press the release ring of the quick connector, thereby pulling out the trachea from the quick connector. The second end of the rotating member extends outside the accommodation cavity, facilitating the operator to operate the rotating member. When installing the trachea and the quick connector, the position of the rotating member is restricted by the limiting member to prevent the operator from misoperating and causing the release ring to be pressed and opened. At the same time, restricting the position of the rotating member can also facilitate the insertion of the trachea into the quick connector and prevent the rotating member from shaking when the trachea is inserted. In addition, the limiting member is located outside the accommodation cavity, facilitating the operator to operate the limiting member. Therefore, the structure of the opening and closing mechanism for the quick connector is simple, and when installing and disassembling the trachea and the quick connector in a relatively narrow accommodation space, convenient and fast operation can be achieved. Description of the Drawings

[0022] Figure 1 is a schematic structural view of the first perspective of the wafer testing device when the rotating member is limited according to the present utility model;

[0023] Figure 2 is a schematic structural view of the wafer testing device (the rotary drive assembly is not shown) when the rotating member is limited according to the present utility model;

[0024] Figure 3 is a schematic structural view of the second perspective of the wafer testing device when the rotating member is limited according to the present utility model;

[0025] Figure 4 is Figure 3 the cross-sectional view taken along line A-A in

[0026] Figure 5It is an exploded view of the wafer testing device when the rotating part provided by the present utility model is not limited;

[0027] Figure 6 It is a schematic structural diagram of the rotating part involved in the present utility model;

[0028] Figure 7 It is a schematic structural diagram of the air pipe guiding part involved in the present utility model;

[0029] Figure 8 It is a schematic structural diagram of the quick connector involved in the present utility model;

[0030] Figure 9 It is a schematic assembly structural diagram of the fixed seat, the rotating part and the ferrule involved in the present utility model.

[0031] In the figure:

[0032] 1, fixed seat; 11, second connection hole;

[0033] 2, rotating part; 21, first through hole; 22, groove; 23, first connection hole; 24, pressing hole;

[0034] 3, limiting part; 31, clamping groove; 32, long hole;

[0035] 4, air pipe guiding part; 41, second through hole; 42, air pipe inlet; 43, air pipe outlet;

[0036] 5, ferrule;

[0037] 100, fuselage; 101, accommodation cavity; 102, base; 103, linear drive assembly; 1031, sliding seat; 1032, lead screw; 1033, slide; 104, adapter; 105, rotary drive assembly; 1051, rotary motor; 1052, machine base; 106, suction cup; 107, air source connector; 108, rotary joint; 200, air pipe; 300, quick connector; 301, release ring; 3011, insertion cavity. Specific embodiments

[0038] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the convenience of description, only the parts related to the present utility model rather than all the structures are shown in the drawings.

[0039] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under", and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0041] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "right", etc. are based on the orientation or positional relationship shown in the drawings. It is only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0042] As Figures 1 to 9 shown, the present utility model provides an opening and closing mechanism for a quick connector, including a fixed seat 1, a rotating member 2, and a limiting member 3. The fixed seat 1 is configured to be disposed on the fuselage 100; the rotating member 2 penetrates through the receiving cavity 101 of the fuselage 100, and the first end of the rotating member 2 is rotatably connected to the fixed seat 1, and the second end of the rotating member 2 extends outside the receiving cavity 101; the rotating member 2 is provided with a first through hole 21 for a gas pipe 200 to penetrate through and be inserted into the quick connector 300; when pressing the second end of the rotating member 2, the rotating member 2 rotates and can press the release ring 301 of the quick connector 300 to pull out the gas pipe 200 from the quick connector 300; the limiting member 3 is configured to be disposed on the fuselage 100 and located outside the receiving cavity 101 for limiting the position of the rotating member 2.

[0043] When disassembling the air pipe 200 and the quick connector 300 in the relatively narrow accommodation cavity 101 of the wafer testing device, the limit on the rotating member 2 by the limiting member 3 is cancelled. Then, by pressing the second end of the rotating member 2, the rotating member 2 is rotated to press the release ring 301 of the quick connector 300, and thus the air pipe 200 is pulled out from the quick connector 300. The second end of the rotating member 2 extends outside the accommodation cavity 101, facilitating the operator to operate the rotating member 2. When installing the air pipe 200 and the quick connector 300, the position of the rotating member 2 is restricted by the limiting member 3 to prevent the release ring 301 from being pressed and opened due to the operator's misoperation. At the same time, restricting the position of the rotating member 2 can also facilitate the insertion of the air pipe 200 into the quick connector 300 and prevent the rotating member 2 from shaking when the air pipe 200 is inserted. In addition, the limiting member 3 is located outside the accommodation cavity 101, facilitating the operator to operate the limiting member 3. Therefore, the structure of the opening and closing mechanism for the quick connector is simple, and convenient and quick operation can be achieved when installing and disassembling the air pipe 200 and the quick connector 300 in a relatively narrow accommodation space.

[0044] Optionally, the limiting member 3 is adjustably arranged on the fuselage 100. The limiting member 3 is provided with a clamping groove 31, and the rotating member 2 is clamped with the clamping groove 31. With such a setting, when it is necessary to restrict the position of the rotating member 2, the clamping groove 31 is clamped with the rotating member 2. When it is not necessary to restrict the position of the rotating member 2, the limiting member 3 is in other positions, as long as it does not affect the rotation of the rotating member 2. In this embodiment, the limiting member 3 is provided with a long hole 32, and the long hole 32 can be an oval hole. The opening and closing mechanism for the quick connector further includes a first screw, and the first screw passes through the long hole 32 and is threadedly connected to the threaded hole of the fuselage 100. When restricting the position of the rotating member 2, the clamping groove 31 is clamped with the rotating member 2, and then the first screw is installed. When it is not necessary to restrict the position of the rotating member 2, the first screw is removed or loosened, the position of the limiting member 3 is changed, and then the first screw is installed through the long hole 32. The main purpose of providing the long hole 32 is to facilitate the adjustment of the installation position of the limiting member 3. In other embodiments, the limiting member 3 is slidably connected to the fuselage 100 along the length direction of the long hole 32, and during operation, the limiting member 3 only needs to be reciprocally slid.

[0045] Optionally, as Figure 6 and Figure 8 shown, when the rotating member 2 is clamped with the clamping groove 31, the axis of the first through hole 21 coincides with the axis of the insertion cavity 3011 of the release ring 301. With such a setting, it can be ensured that the air pipe 200 vertically enters the insertion cavity 3011 of the release ring 301 through the first through hole 21.

[0046] Optionally, in this embodiment, a groove 22 is recessed at the bottom of the rotating member 2, and the groove 22 is located at the bottom opening of the first through hole 21. The bottom surface of the groove 22 is used to abut against the release ring 301. With such a setting, the occupation of the space in the accommodation cavity 101 by the opening and closing mechanism of the quick-connect fitting can be reduced, making the structure compact.

[0047] During use, it is necessary to cut the air pipe 200. Since the common air pipe 200 is packaged in a coiled manner, the cut air pipe 200 will naturally curl, and the curled air pipe 200 will affect the docking and installation of the air pipe 200 and the quick-connect fitting 300. Optionally, in this embodiment, the opening and closing mechanism of the quick-connect fitting further includes an air pipe guide member 4. The air pipe guide member 4 is arranged at the top of the rotating member 2. A second through hole 41 is provided in the air pipe guide member 4, and the second through hole 41 communicates with the first through hole 21 for passing through the air pipe 200; the second through hole 41 has an air pipe inlet 42 and an air pipe outlet 43. One side of the second through hole 41 close to the air pipe inlet 42 is a conical hole, and one side of the second through hole 41 close to the air pipe outlet 43 is a cylindrical hole. By providing a conical hole on one side of the air pipe inlet 42, it is convenient to guide the curled air pipe 200 into the quick-connect fitting 300. By providing a cylindrical hole on one side of the air pipe outlet 43, it plays a guiding role when the head of the air pipe 200 is inserted into the quick-connect fitting 300, and the situation where the air pipe 200 cannot be inserted will not occur.

[0048] Optionally, in this embodiment, the air pipe guide member 4 is detachably connected to the rotating member 2. Specifically, the opening and closing mechanism of the quick-connect fitting further includes a second screw. A first connection hole 23 is recessed in the bottom surface of the groove 22. The second screw passes through the first connection hole 23 and is threadedly connected to the bottom of the air pipe guide member 4, making the connection firm and convenient for disassembly.

[0049] Optionally, as Figure 9 shown, in this embodiment, the opening and closing mechanism of the quick-connect fitting further includes two ferrule 5 and a rotating shaft. The rotating member 2 is rotatably connected to the fixed seat 1 through the rotating shaft. The two ferrules 5 are arranged on both sides of the rotating member 2 and are both sleeved on the rotating shaft; the ferrule 5 abuts against the fixed seat 1 and also abuts against the rotating member 2 for restricting the axial position of the rotating member 2 on the rotating shaft. With such a setting, the stability of the rotating member 2 during rotation is ensured, and the reliability of the opening and closing mechanism of the quick-connect fitting is improved.

[0050] Optionally, in this embodiment, the fixed seat 1 is detachably connected to the fuselage 100, making disassembly and assembly more convenient. Specifically, the fixed seat 1 is provided with a second connection hole 11. The opening and closing mechanism of the quick-connect fitting further includes a third screw. The third screw passes through the second connection hole 11 and is threadedly connected to the threaded hole of the fuselage 100. Optionally, in this embodiment, a pressing hole 24 is provided at the second end of the rotating member 2 for convenient gripping by hand for pressing.

[0051] The present utility model further provides a wafer testing device, which includes a fuselage 100, a quick-connect joint 300, an air pipe 200, and an opening and closing mechanism for the quick-connect joint. The quick-connect joint 300 is fixed to the fuselage 100; a fixed seat 1 is arranged on the fuselage 100, the fuselage 100 is provided with a receiving cavity 101, a rotating member 2 passes through the receiving cavity 101, and the first end of the rotating member 2 is rotatably connected to the fixed seat 1, and the second end of the rotating member 2 extends outside the receiving cavity 101; the rotating member 2 is provided with a first through hole 21, and the air pipe 200 passes through the first through hole 21 and is inserted into the quick-connect joint 300; the quick-connect joint 300 includes a release ring 301. When the second end of the rotating member 2 is pressed, the rotating member 2 rotates and can press the release ring 301 to pull out the air pipe 200 from the quick-connect joint 300; a limiting member 3 is arranged on the fuselage 100 and is located outside the receiving cavity 101. When installing and disassembling the air pipe 200 and the quick-connect joint 300 in the relatively narrow receiving cavity 101, convenient and quick operation can be realized.

[0052] Optionally, in this embodiment, the fuselage 100 includes a base 102, a linear driving component 103, an adapter 104, a rotary driving component 105, and a suction cup 106. The linear driving component 103 is fixed on the base 102, the output end of the linear driving component 103 is drivingly connected to the adapter 104, and the linear driving component 103 is used to drive the adapter 104 to move along the radial direction of the suction cup 106; an air passage is arranged in the adapter 104, and the quick-connect joint 300 is fixed to the adapter 104 and communicated with the air passage; the rotary driving component 105 is fixed on the adapter 104, the receiving cavity 101 is arranged in the rotary driving component 105, the output end of the rotary driving component 105 is drivingly connected to the suction cup 106, and the rotary driving component 105 is used to drive the suction cup 106 to rotate axially; the suction cup 106 is used to place the wafer, and the suction cup 106 is communicated with the air pipe 200. When detecting the wafer, a detection probe is arranged above the wafer, and the position of the detection probe is fixed. The above setting drives the wafer to move through the linear driving component 103 and the rotary driving component 105, which is convenient for the detection probe to detect all positions on the top of the wafer. If only the rotary driving component 105 is set, only a circumference inside the wafer can be detected. Optionally, as Figure 1 shown, the linear driving component 103 includes a sliding seat 1031, a driving member, a lead screw 1032, and a sliding table 1033. The sliding seat 1031 is fixed to the base 102, the driving member is fixed to the sliding seat 1031 and is drivingly connected to the lead screw 1032, the sliding table 1033 is drivingly connected to the lead screw 1032 and is slidably connected to the sliding seat 1031 along the radial direction of the suction cup 106, and the driving member is used to drive the lead screw 1032 to rotate so that the sliding table 1033 moves along the radial direction of the suction cup 106. Optionally, as Figure 5As shown, the rotation drive assembly 105 includes a rotation motor 1051, a base 1052, and a transmission assembly. The rotation motor 1051 is fixed on the base 1052. The transmission assembly is disposed within the base 1052 and is drivingly connected to the output end of the rotation motor 1051. The output end of the transmission assembly is drivingly connected to the suction cup 106 for driving the suction cup 106 to rotate. Optionally, the transmission assembly is a bevel gear transmission structure. The above settings make the structures of the linear drive assembly 103 and the rotation drive assembly 105 simple and compact.

[0053] Optionally, the air passage of the adapter 104 has two communication ports. The quick connector 300 is communicated with the air passage through one communication port. The fuselage 100 further includes a gas source connector 107. The gas source connector 107 is communicated with the air passage through the other communication port. The gas source connector 107 is used for connecting to a gas source. With such a setting, the structure is simple and the introduction of gas can be realized. Optionally, the fuselage 100 further includes a rotary joint 108. The suction cup 106 is connected to the trachea 200 through the rotary joint 108, which can ensure the airtightness at the connection between the suction cup 106 and the trachea 200 and can realize the flexible rotation of the suction cup 106.

[0054] The steps for assembling the wafer testing device are as follows:

[0055] Step 1: Install the fixing base 1 on the adapter 104, install the trachea guide 4 on the rotating member 2, and then install the rotating member 2 on the fixing base 1;

[0056] Step 2: Install the rotary joint 108 on the suction cup 106, then cut an appropriate length of the trachea 200 and connect the trachea 200 to the bottom of the rotary joint 108;

[0057] Step 3: Install the adapter 104 on the linear drive assembly 103, and then install the rotation drive assembly 105 on the adapter 104;

[0058] Step 4: Insert the trachea 200 at the bottom of the suction cup 106 into the quick connector 300 to realize the communication between the trachea 200 and the air passage of the adapter 104;

[0059] Step 5: Install the suction cup 106 on the top of the rotation drive assembly 105, and then install the limiting member 3 to limit the position of the rotating member 2, thereby completing the installation.

[0060] When disassembling and maintaining the entire gas path, disassemble the suction cup 106 from the top of the rotation drive assembly 105 and support it with other supporting tools. Then cancel the limitation of the rotating member 2 by the limiting member 3. After that, press the second end of the rotating member 2 to rotate the rotating member 2 to press the release ring 301 of the quick connector 300, thereby pulling out the trachea 200 from the quick connector 300. The wafer testing device is convenient to assemble and is also convenient and fast to disassemble and maintain.

[0061] Obviously, the above embodiments of the present utility model are merely examples for clearly illustrating the present utility model, rather than limitations on the implementation manners of the present utility model. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present utility model. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present utility model shall be included within the protection scope of the claims of the present utility model.

Claims

1. An opening and closing mechanism for a quick connector, characterized in that, Comprising: A fixed seat (1), configured to be arranged on the fuselage (100); A rotating member (2) passes through the accommodation cavity (101) of the fuselage (100), and the first end of the rotating member (2) is rotatably connected to the fixed seat (1), and the second end of the rotating member (2) extends outside the accommodation cavity (101); the rotating member (2) is provided with a first through hole (21) for a gas pipe (200) to pass through and be inserted into a quick-connect fitting (300); when pressing the second end of the rotating member (2), the rotating member (2) rotates and can press the release ring (301) of the quick-connect fitting (300) to pull out the gas pipe (200) from the quick-connect fitting (300); A limiting member (3), configured to be arranged on the fuselage (100) and located outside the accommodation cavity (101) for limiting the position of the rotating member (2).

2. The opening and closing mechanism for the quick-connect fitting according to claim 1, wherein The limiting member (3) is adjustably arranged on the fuselage (100), and the limiting member (3) is provided with a clamping groove (31), and the rotating member (2) is clamped with the clamping groove (31).

3. The opening and closing mechanism for the quick connector according to claim 2, characterized in that, The limiting member (3) is provided with an elongated hole (32), and the opening and closing mechanism for the quick-connect fitting further includes a first screw, and the first screw passes through the elongated hole (32) and is threadedly connected to the threaded hole of the fuselage (100).

4. The opening and closing mechanism for the quick connector according to claim 2, characterized in that, When the rotating member (2) is clamped with the clamping groove (31), the axis of the first through hole (21) coincides with the axis of the insertion cavity (3011) of the release ring (301).

5. The opening and closing mechanism for the quick-connect fitting according to any one of claims 1-4, characterized in that, A groove (22) is recessed at the bottom of the rotating member (2), and the groove (22) is located at the bottom opening of the first through hole (21), and the bottom surface of the groove (22) is used to abut against the release ring (301).

6. The opening and closing mechanism for the quick connector according to any one of claims 1-4, characterized in that, The opening and closing mechanism for the quick-connect fitting further includes a gas pipe guide member (4), the gas pipe guide member (4) is arranged on the top of the rotating member (2), and the gas pipe guide member (4) is provided with a second through hole (41), and the second through hole (41) communicates with the first through hole (21); the second through hole (41) has a gas pipe inlet (42) and a gas pipe outlet (43), and the side of the second through hole (41) close to the gas pipe inlet (42) is a conical hole, and the side of the second through hole (41) close to the gas pipe outlet (43) is a cylindrical hole.

7. The opening and closing mechanism for the quick connector according to claim 6, characterized in that, The gas pipe guide member (4) is detachably connected to the rotating member (2), and the fixed seat (1) is detachably connected to the fuselage (100).

8. The opening and closing mechanism for a quick-connect fitting according to any one of claims 1-4, characterized in that, The opening and closing mechanism for the quick-connect fitting further includes two retaining sleeves (5) and a rotating shaft, the rotating member (2) is rotatably connected to the fixed seat (1) through the rotating shaft, and the two retaining sleeves (5) are arranged on both sides of the rotating member (2) and are both sleeved on the rotating shaft; the retaining sleeve (5) abuts against the fixed seat (1) and abuts against the rotating member (2) for limiting the axial position of the rotating member (2) on the rotating shaft.

9. A wafer testing device, characterized in that, It includes a fuselage (100), a quick-connect fitting (300), an air pipe (200), and an opening and closing mechanism for the quick-connect fitting as described in any one of claims 1-8. The quick-connect fitting (300) is fixed to the fuselage (100); a fixed seat (1) is arranged on the fuselage (100). The fuselage (100) is provided with a receiving cavity (101). A rotating member (2) passes through the receiving cavity (101), and the first end of the rotating member (2) is rotatably connected to the fixed seat (1). The second end of the rotating member (2) extends outside the receiving cavity (101); the rotating member (2) is provided with a first through hole (21), and the air pipe (200) passes through the first through hole (21) and is inserted into the quick-connect fitting (300); the quick-connect fitting (300) includes a release ring (301). When pressing the second end of the rotating member (2), the rotating member (2) rotates and can press the release ring (301) to pull out the air pipe (200) from the quick-connect fitting (300); a limiting member (3) is arranged on the fuselage (100) and is located outside the receiving cavity (101).

10. The wafer testing device according to claim 9, characterized in that, The fuselage (100) includes a base (102), a linear driving assembly (103), an adapter (104), a rotary driving assembly (105), and a suction cup (106). The linear driving assembly (103) is fixed on the base (102), and the output end of the linear driving assembly (103) is drivingly connected to the adapter (104). The linear driving assembly (103) is used to drive the adapter (104) to move radially along the suction cup (106); an air passage is provided in the adapter (104), and the quick-connect fitting (300) is fixed to the adapter (104) and is in communication with the air passage; the rotary driving assembly (105) is fixed on the adapter (104), the receiving cavity (101) is arranged in the rotary driving assembly (105), and the output end of the rotary driving assembly (105) is drivingly connected to the suction cup (106). The rotary driving assembly (105) is used to drive the suction cup (106) to rotate axially; the suction cup (106) is used to place a wafer, and the suction cup (106) is in communication with the air pipe (200).

Images