Detection module, detection module mounting assembly and three-dimensional micro-contact measurement device

Abstract

The utility model provides a detection module, a detection module installation assembly and a three-dimensional micro-contact measuring device, the detection module comprises a suspension structure, a clamping assembly, a probe and a reflector assembly, the suspension structure comprises a central area and a fixed frame which are connected with each other, and the fixed frame is arranged around the central area; the clamping assembly fixes the fixing frame of the suspension structure, so that the suspension structure is in a plane shape. The clamping assembly is further used for being fixed to an external component. The upper end of the probe is fixed on the lower surface of the central area of the suspension structure, so that the probe is in a suspension state; the lower end of the reflector assembly is fixed to the upper surface of the central area of the suspension structure, and a reflector body is formed at the upper end of the reflector assembly. When the measuring ball moves, the measuring needle rotates, and the central area of the suspension structure and the reflector assembly rotate along with the measuring needle, so that the displacement of the measuring ball can be converted into the displacement of the reflector body of the reflector assembly, and the measurement accuracy is ensured while the measurement is convenient.

Description

Technical Field

[0001] The utility model relates to a detection module.

[0002] The utility model also relates to a detection module installation assembly including the detection module.

[0003] The utility model also relates to a three-dimensional micro-contact measurement device including the detection module installation assembly. Background Art

[0004] Currently, common measurement means in micro-nano scale three-dimensional measurement include scanning probe microscope, confocal microscope, white light interference microscope, micro-nano coordinate measuring machine, etc. Micro-nano coordinate measurement technology can overcome the contradiction between measurement range and measurement accuracy, and at the same time has the detection and sensing capabilities in three dimensions, and can achieve true 3D measurement. It is a relatively effective means to solve the problem of micro-nano scale three-dimensional measurement at present.

[0005] The lower end of the probe used in micro-nano coordinate measurement is provided with a probe ball, and the probe ball is in contact with the sample surface. When the sample moves, the probe ball will displace following the undulation of the sample surface. The displacement of the probe ball in contact with the sample surface can be calculated by the detector, so as to obtain the surface topography data of the sample and the three-dimensional measurement results of the key dimensions. In order to ensure the accuracy of the measurement results, it is necessary to ensure that the probe remains vertical without external force, and at the same time, it cannot prevent the probe ball from displacing following the undulation of the sample surface.

[0006] How to design the detection module for installing the probe to ensure the measurement accuracy of the probe is an important problem to be solved in micro-nano scale three-dimensional measurement. Summary of the Utility Model

[0007] The utility model provides a detection module, a detection module installation assembly and a three-dimensional micro-contact measurement device to achieve the purpose of facilitating the installation of the probe and ensuring the measurement accuracy of the probe.

[0008] The utility model solves the above technical problems through the following technical solutions:

[0009] The utility model provides a detection module. The detection module includes a suspension structure, a clamping assembly, a probe and a mirror assembly. The suspension structure includes a central area and a fixed frame connected to each other, and the fixed frame is arranged around the central area; the clamping assembly fixes the fixed frame of the suspension structure to make the suspension structure in a plane; the clamping assembly is also used to be fixed to an external component; the upper end of the probe is fixed on the lower surface of the central area of the suspension structure to make the probe in a suspended state; the lower end of the mirror assembly is fixed on the upper surface of the central area of the suspension structure, and the upper end of the mirror assembly forms a mirror body.

[0010] In this technical solution, the probe is fixed on the lower surface of the central area of the suspension structure, and the probe ball at the lower end of the probe can displace following the undulation of the sample surface; the mirror assembly is fixed on the upper surface of the central area. When the probe ball moves, the probe rotates, and the central area of the suspension structure and the mirror assembly will rotate together with the probe, so that the displacement of the probe ball can be converted into the displacement of the mirror body of the mirror assembly.

[0011] Preferably, the suspension structure further includes a plurality of suspension beams, the suspension beams are arranged between the central area and the fixed frame, and two ends of the suspension beams are respectively connected to the outer edge of the central area and the inner edge of the fixed frame; the plurality of suspension beams are evenly distributed along the circumferential direction of the central area.

[0012] In this technical solution, since the plurality of suspension beams are evenly distributed along the circumferential direction of the central area, the probe is uniformly stressed, and the probe maintains a vertical state without external force, and at the same time, it does not prevent the probe ball from displacing following the undulation of the sample surface.

[0013] Preferably, the central area is circular, the inner edge of the fixed frame is circular, and the inner edge of the fixed frame is coaxially arranged with the central area; the center line of the suspension beam is an Archimedean spiral, and the polar coordinate origin of the center line coincides with the center of the central area.

[0014] In this technical solution, the suspension beam extending along the direction of the Archimedean spiral can make the probe uniformly stressed and maintain a vertical state without external force. At the same time, the probe ball can maintain sufficient sensitivity and displace following the undulation of the sample surface.

[0015] Preferably, the clamping assembly includes a lower base, an upper pressing plate and a clamping member. The upper surface of the lower base is provided with a placement surface, and the lower surface of the fixed frame of the suspension structure is placed on the placement surface of the lower base; the upper pressing plate presses on the upper surface of the fixed frame of the suspension structure; the clamping member clamps the upper pressing plate and the lower base, so that the fixed frame of the suspension structure is clamped between the lower base and the upper pressing plate.

[0016] In this technical solution, by clamping the fixed frame of the suspension structure with the lower base and the upper pressing plate, and then using the clamping member to clamp the upper pressing plate and the lower base, the suspension structure can be fixed and presented in a horizontally unfolded state.

[0017] Preferably, the lower base is provided with a convex platform protruding upward, and the placement surface is formed on the upper surface of the convex platform.

[0018] In this technical solution, the suspension structure is placed on the convex platform during installation, and the convex platform plays a role in positioning the suspension structure; at the same time, the setting of the convex platform also facilitates the design and installation of the clamping member, enabling the clamping member to realize the functions of clamping the lower base and the upper pressing plate.

[0019] Preferably, the lower base is provided with a flange extending outward, and the flange is used to be fixed to an external component.

[0020] In this technical solution, the flange is in contact with the transverse mounting plate, and the flange and the transverse mounting plate are fixed by a plurality of fixing bolts.

[0021] Preferably, the clamping member includes a clamping main body, an upper pressing edge and a lower fixing edge. The upper pressing edge is formed at the upper edge of the clamping main body, and the upper pressing edge presses on the upper surface of the upper pressing plate; the lower fixing edge is formed at the lower edge of the clamping main body, and the lower fixing edge is fixed to the lower base.

[0022] In this technical solution, for the clamping member with the above structure, through the fixation of the lower fixing edge to the lower base, the upper pressing edge can press the upper pressing plate, thereby pressing and fixing the suspension structure.

[0023] Preferably, a receiving groove is formed on the upper surface of the upper pressing plate and is recessed downward, and the upper pressing edge is located in the receiving groove.

[0024] In this technical solution, the receiving groove is used to position the upper pressing edge, so that the position of the clamping member is relatively fixed with respect to the upper pressing plate during installation.

[0025] Preferably, the number of the clamping members is several, and the several clamping members are arranged around the suspension structure.

[0026] In this technical solution, preferably, the number of the clamping members is several, and the several clamping members are arranged around the suspension structure, so that the suspension structure can be uniformly stressed and ensure that the probe can always remain in the middle position.

[0027] The present utility model also provides a detection module installation assembly. The installation assembly includes a transverse mounting plate and a detection module. A central hollow area is provided in the middle of the transverse mounting plate; the detection module is as described in the above technical solution, the reflecting mirror body of the detection module extends out from the central hollow area above the transverse mounting plate, and the clamping assembly of the detection module is fixed to the transverse mounting plate.

[0028] In this technical solution, by providing the central hollow area, the reflecting mirror body can extend above the transverse mounting plate, enabling the detection module to be fixed to the transverse mounting plate circumferentially, and ensuring uniform stress on the detection module.

[0029] Preferably, a plurality of vertically arranged first mounting holes are provided on the horizontal mounting plate, and a plurality of vertically arranged second mounting holes are provided on the clamping assembly of the detection module. The second mounting holes are arranged in one-to-one correspondence with the first mounting holes, and the diameter of the first mounting holes is larger than that of the second mounting holes. The detection module mounting assembly further includes a plurality of fixing bolts, and the fixing bolts sequentially penetrate through the first mounting holes and the second mounting holes to fix the clamping assembly and the horizontal mounting plate.

[0030] In this technical solution, through the above structural arrangement, the fixing bolts can move horizontally in the second mounting holes, so that the displacement of the lower base relative to the horizontal mounting plate can be adjusted, and the position of the mirror body relative to the detector can be adjusted, ensuring the accuracy of the relative positions of the detection module and the detector, guaranteeing the measurement accuracy, and avoiding measurement errors.

[0031] The present invention also provides a three-dimensional micro-contact measurement device, which includes a device main body, a sample placement table, and a detection module mounting assembly. The sample placement table is mounted on the device main body, and the sample placement table can move relative to the device main body. The sample placement table is used for placing samples. The detection module mounting assembly is as described in the above technical solution. The horizontal mounting plate is fixed on the device main body, and the horizontal mounting plate is located above the sample placement table. The lower end of the probe needle of the detection module can contact the surface of the sample placed on the sample placement table.

[0032] In this technical solution, the sample is placed on the sample placement table, and the lower end of the probe needle of the detection module can contact the surface of the sample placed on the sample placement table. When the sample placement table drives the sample to move, the lower end of the probe needle will also move up and down following the surface of the sample, thereby driving the displacement of the mirror body. The detector can detect the displacement of the mirror body, send the measured displacement data to the data processor, calculate the displacement of the lower end of the probe needle, and finally calculate the shape data of the sample surface.

[0033] On the basis of conforming to the common knowledge in the art, the above preferred conditions can be combined arbitrarily to obtain various preferred embodiments of the present invention.

[0034] The positive and progressive effects of the present invention are as follows:

[0035] When the probe ball moves, the probe needle rotates, and the central area of the suspension structure and the mirror assembly will rotate together with the probe needle, so that the displacement of the probe ball can be converted into the displacement of the mirror body of the mirror assembly; when the detection module is applied to the three-dimensional micro-contact measurement device, the displacement of the mirror body can be detected by the detector, and the measured displacement data is sent to the data processor, the displacement of the lower end of the probe needle can be calculated, and finally the shape data of the sample surface can be calculated, which ensures the measurement accuracy while facilitating the measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic structural diagram of the detection module of the present invention.

[0037] Figure 2 is Figure 1 A schematic cross-sectional view of the detection module shown.

[0038] Figure 3 is Figure 1 A schematic structural diagram of the suspension structure, the probe needle and the mirror assembly of the detection module shown.

[0039] Figure 4 is Figure 1 A schematic structural diagram of the suspension structure of the detection module shown.

[0040] Figure 5 is Figure 4 A front view of the suspension structure of the detection module shown.

[0041] Figure 6 It is a schematic structural diagram of the three-dimensional micro-contact measurement device of the present invention.

[0042] Figure 7 It is a schematic structural diagram of the detection module installation component of the present invention.

[0043] DESCRIPTION OF THE REFERENCE NUMERALS

[0044] Detection module 100

[0045] Suspension structure 1

[0046] Central area 11

[0047] Outer edge 111

[0048] Fixed frame 12

[0049] Inner edge 121

[0050] Suspension beam 13

[0051] Center line 131

[0052] Clamping assembly 2

[0053] Lower base 21

[0054] Placement surface 211

[0055] Boss 212

[0056] Flange 213

[0057] Second mounting hole 214

[0058] Upper pressure plate 22

[0059] Receiving groove 221

[0060] Clamping member 23

[0061] Clamping body 231

[0062] Upper pressing edge 232

[0063] Lower fixed edge 233

[0064] Probe 3

[0065] Probe ball 31

[0066] Mirror assembly 4

[0067] Mirror body 41

[0068] Horizontal mounting plate 200

[0069] Central hollow area 201

[0070] First mounting hole 202

[0071] Sample placement table 300

[0072] Sample 400

[0073] Detector 500

[0074] Device main body 600 Specific embodiments

[0075] The present utility model will be further described below by way of embodiments, but the present utility model is not limited to the scope of the described embodiments.

[0076] Figures 1 to 5As shown, this is an embodiment of the detection module 100 of the present utility model. The detection module 100 includes a suspension structure 1, a clamping assembly 2, a probe 3, and a mirror assembly 4. The suspension structure 1 includes a central area 11 and a fixed frame 12 that are connected to each other. The fixed frame 12 is arranged around the central area 11. The clamping assembly 2 fixes the fixed frame 12 of the suspension structure 1, making the suspension structure 1 in a plane. The upper end of the probe 3 is fixed to the lower surface of the central area 11 of the suspension structure 1, making the probe 3 in a suspended state. The lower end of the mirror assembly 4 is fixed to the upper surface of the central area 11 of the suspension structure 1, and the upper end of the mirror assembly 4 forms a mirror body 41. The clamping assembly 2 is also used to be fixed to the transverse mounting plate 200, so that the detection module 100 is fixed on the measuring device.

[0077] As Figure 6 and Figure 7 shown, by fixing the clamping assembly 2 to the transverse mounting plate 200, the entire detection module 100 can be fixed on the three-dimensional micro-contact measuring device, so that the probe ball 31 at the lower end of the probe 3 can contact the sample 400 on the sample stage 300.

[0078] The probe 3 is fixed to the lower surface of the central area 11 of the suspension structure 1. The probe ball 31 at the lower end of the probe 3 can displace following the undulation of the sample surface. The mirror assembly 4 is fixed to the upper surface of the central area 11. When the probe ball 31 moves, the probe 3 rotates, and the central area 11 of the suspension structure 1 and the mirror assembly 4 will rotate together with the probe 3, so that the displacement of the probe ball 31 can be converted into the displacement of the mirror body 41 of the mirror assembly 4.

[0079] This three-dimensional micro-contact measuring device is provided with a number of detectors 500. The detectors 500 are arranged opposite to the mirror body 41. The detectors 500 can detect the displacement of the mirror body 41, so that the displacement of the probe ball 31 can be calculated, and thus the topography data of the sample surface and the three-dimensional measurement results of the key dimensions can be obtained.

[0080] As Figures 3 to 5 shown, the suspension structure 1 further includes a number of suspension beams 13. The suspension beams 13 are arranged between the central area 11 and the fixed frame 12. The two ends of the suspension beam 13 are respectively connected to the outer edge 111 of the central area 11 and the inner edge 121 of the fixed frame 12. A number of suspension beams 13 are evenly distributed along the circumference of the central area 11. Since a number of suspension beams 13 are evenly distributed along the circumference of the central area 11, the probe 3 is evenly stressed, and the probe 3 remains vertical without external force, and at the same time, it does not prevent the probe ball 31 from displacing following the undulation of the sample surface.

[0081] Among them, the central area 11 is circular, the inner edge 121 of the fixed frame 12 is circular, and the inner edge 121 of the fixed frame 12 is coaxially arranged with the central area 11; the center line 131 of the suspension beam 13 is an Archimedean spiral, and the pole coordinate origin of the center line 131 coincides with the center of the central area 11. The suspension beam 13 extending along the direction of the Archimedean spiral can make the stylus 3 receive uniform force and keep vertical without external force. At the same time, the probe ball 31 can maintain sufficient sensitivity and can displace following the undulation of the sample surface.

[0082] Among them, the radius of the inner edge 121 of the fixed frame 12 is 2.6 mm, and the radius of the outer edge 111 of the central area 11 is 0.6 mm; the polar coordinate equation of the center line 131 of the suspension beam 13 is r = a + bθ, a = 0.6 mm, The suspension structure 1 with the above size settings can make the probe ball 31 of the stylus 3 maintain sufficient sensitivity and can displace following the undulation of the sample surface.

[0083] In this embodiment, the center line 131 of the suspension beam 13 is an Archimedean spiral. In other embodiments, the center line 131 of the suspension beam 13 can be other shapes that can achieve uniform force on the stylus 3.

[0084] In this embodiment, the number of the suspension beams 13 is three. The three suspension beams 13 are evenly distributed along the circumferential direction of the central area 11, so that the stylus 3 fixed below the central area 11 receives uniform force. In other embodiments, the number of the suspension beams 13 can be 3 to 6. The suspension beams 13 with the number of 3 to 6 can ensure the strength of the suspension structure 1 while not preventing the probe ball 31 from displacing following the undulation of the sample surface.

[0085] In this embodiment, the suspension structure 1 is made of beryllium copper or silicon material. The suspension structure 1 made of beryllium copper or silicon material can achieve isotropic stiffness in lateral and longitudinal detections.

[0086] As Figures 1 to 2 shown, the clamping assembly 2 includes a lower base 21, an upper pressing plate 22 and a clamping member 23. The upper surface of the lower base 21 is provided with a placement surface 211, and the lower surface of the fixed frame 12 of the suspension structure 1 is placed on the placement surface 211 of the lower base 21; the upper pressing plate 22 presses on the upper surface of the fixed frame 12 of the suspension structure 1; the clamping member 23 clamps the upper pressing plate 22 and the lower base 21, so that the fixed frame 12 of the suspension structure 1 is clamped between the lower base 21 and the upper pressing plate 22.

[0087] By clamping the fixed frame 12 of the suspension structure 1 with the lower base 21 and the upper pressing plate 22, and then using the clamping member 23 to clamp the upper pressing plate 22 and the lower base 21, the suspension structure 1 can be fixed and presented in a horizontally unfolded state.

[0088] Among them, the lower base 21 is provided with a convex platform 212 protruding upward, and the placement surface 211 is formed on the upper surface of the convex platform 212. When installed, the suspension structure 1 is placed on the convex platform 212, and the convex platform 212 plays a role in positioning the suspension structure 1; at the same time, the setting of the convex platform 212 also facilitates the design and installation of the clamping member 23, enabling the clamping member 23 to realize the function of clamping the lower base 21 and the upper pressing plate 22.

[0089] Among them, the convex platform 212, the upper pressing plate 22, and the fixed frame 12 of the suspension structure 1 have the same outer shape, so that the convex platform 212, the suspension structure 1, and the upper pressing plate 22 are stacked to form an integral body, facilitating the installation of the clamping member 23; at the same time, the central area 11 and the suspension beam 13 of the suspension structure 1 are surrounded by the upper pressing plate 22 and the convex platform 212.

[0090] As Figure 1 shown, the lower base 21 is provided with a flange 213 extending outward, and the flange 213 is used to be fixed to the horizontal mounting plate 200. The flange 213 is attached to the horizontal mounting plate 200, and the flange 213 and the horizontal mounting plate 200 are fixed by a plurality of fixing bolts.

[0091] As Figure 2 shown, the clamping member 23 includes a clamping body 231, an upper pressing edge 232, and a lower fixing edge 233. The upper pressing edge 232 is formed on the upper edge of the clamping body 231, and the upper pressing edge 232 presses on the upper surface of the upper pressing plate 22; the lower fixing edge 233 is formed on the lower edge of the clamping body 231, and the lower fixing edge 233 is fixed to the lower base 21.

[0092] For the clamping member 23 with the above structure, by fixing the lower fixing edge 233 to the lower base 21, the upper pressing edge 232 can press the upper pressing plate 22, thereby pressing and fixing the suspension structure 1.

[0093] Among them, a receiving groove 221 recessed downward is formed on the upper surface of the upper pressing plate 22, and the upper pressing edge 232 is located in the receiving groove 221. The receiving groove 221 is used to position the upper pressing edge 232, so that the position of the clamping member 23 is relatively fixed to the upper pressing plate 22 during installation.

[0094] In this embodiment, the shapes of the upper pressing plate 22 and the convex platform 212 are square; correspondingly, the number of clamping members 23 is four, which are respectively arranged on the four sides of the upper pressing plate 22, so that the suspension structure 1 clamped between the upper pressing plate 22 and the convex platform 212 can be uniformly stressed. In other embodiments, the shapes of the upper pressing plate 22 and the convex platform 212, the number and positions of the clamping members 23 can also be set according to actual needs. The number of clamping members 23 is preferably several, and several clamping members 23 are arranged around the suspension structure 1, so that the suspension structure 1 can be uniformly stressed and ensure that the probe 3 can always be kept in the middle position.

[0095] As shown Figure 7 As shown, the above-mentioned detection module 100 is installed on the horizontal mounting plate 200 to form a detection module mounting assembly. A central hollow area 201 is provided in the middle of the horizontal mounting plate 200. The upper surface of the lower base 21 of the clamping assembly 2 is attached to the lower surface of the horizontal mounting plate 200. The boss 212 and the upper pressing plate 22 protrude into the central hollow area 201. The mirror body 41 extends from the central hollow area 201 above the horizontal mounting plate 200. The lower base 21 of the clamping assembly 2 is fixed to the horizontal mounting plate 200.

[0096] Among them, a number of vertically arranged first mounting holes 202 are provided on the horizontal mounting plate 200, and a number of vertically arranged second mounting holes 214 are provided on the lower base 21. The second mounting holes 214 are arranged in one-to-one correspondence with the first mounting holes 202. The diameter of the first mounting holes 202 is larger than the diameter of the second mounting holes 214. The detection module mounting assembly further includes a number of fixing bolts (not shown in the figure). The fixing bolts sequentially pass through the first mounting holes 202 and the second mounting holes 214 to fix the lower base 21 and the horizontal mounting plate 200, so as to fix the detection module 100 and the horizontal mounting plate 200.

[0097] The lower base 21 and the horizontal mounting plate 200 are clamped in the vertical direction by fixing bolts passing through the first mounting holes 202 and the second mounting holes 214. Since the diameter of the first mounting holes 202 is larger than the diameter of the second mounting holes 214, there is a gap between the fixing bolts and the first mounting holes 202, so that the fixing bolts can move horizontally in the second mounting holes 214, thereby adjusting the displacement of the lower base 21 relative to the horizontal mounting plate 200, making the position of the mirror body 41 relative to the detector 500 adjustable, ensuring the accuracy of the relative position of the detection module 100 and the detector 500, ensuring the measurement accuracy, and avoiding measurement errors.

[0098] In order to ensure the uniform force on the detection module 100, the second mounting holes 214 are evenly distributed circumferentially around the mirror body 41. Correspondingly, the first mounting holes 202 and the fixing bolts are also evenly distributed circumferentially around the mirror body 41.

[0099] In other embodiments, for clamping assemblies 2 with different structures, the second mounting holes 214 are arranged at positions corresponding to the first mounting holes 202, so that the fixing bolts can pass through the first mounting holes 202 and the second mounting holes 214, thereby realizing the fixation between the clamping assembly 2 and the horizontal mounting plate 200, and thus fixing the detection module 100 on the measuring device.

[0100] As Figure 6As shown, the detection module 100 is fixed on the measuring device, which includes a device main body 600, a sample placement table 300, a horizontal mounting plate 200, a detection module 100, and a detector 500. The sample placement table 300 is mounted on the device main body 600 and can move relative to the device main body 600. The sample placement table 300 is used to place the sample 400. The horizontal mounting plate 200 is fixed on the device main body 600 and is located above the sample placement table 300. The lower end of the probe 3 of the detection module 100 fixed on the horizontal mounting plate 200 can contact the surface of the sample 400 placed on the sample placement table 300. The detector 500 is mounted on the device main body 600 and is arranged opposite to the mirror body 41. The detector 500 is used to detect the displacement of the mirror body 41.

[0101] The sample 400 is placed on the sample placement table 300, and the lower end of the probe 3 of the detection module 100 can contact the surface of the sample 400 placed on the sample placement table 300. When the sample placement table 300 drives the sample 400 to move, the lower end of the probe 3 will also move up and down following the surface of the sample 400, thereby driving the displacement of the mirror body 41. The detector 500 can detect the displacement of the mirror body 41, send the measured displacement data to the data processor, and calculate the displacement of the lower end of the probe 3, and finally calculate the shape data of the surface of the sample 400.

[0102] The present utility model is not limited to the above embodiments. No matter what changes are made in its shape or structure, they all fall within the protection scope of the present utility model. The protection scope of the present utility model is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principle and essence of the present utility model, but these changes and modifications all fall within the protection scope of the present utility model.

Claims

1. A detection module, characterized in that, The detection module includes: A suspension structure, which includes a central area and a fixed frame connected to each other, and the fixed frame is arranged around the central area; A clamping assembly, which fixes the fixed frame of the suspension structure to make the suspension structure in a plane; the clamping assembly is also used to be fixed to an external component; A probe, the upper end of which is fixed to the lower surface of the central area of the suspension structure, so that the probe is in a suspended state; A mirror assembly, the lower end of which is fixed to the upper surface of the central area of the suspension structure, and the upper end of the mirror assembly forms a mirror body.

2. The detection module according to claim 1, characterized in that: The suspension structure further includes a plurality of suspension beams, which are arranged between the central area and the fixed frame, and both ends of the suspension beams are respectively connected to the outer edge of the central area and the inner edge of the fixed frame; the plurality of suspension beams are evenly distributed along the circumferential direction of the central area.

3. The detection module according to claim 2, wherein: The central area is circular, the inner edge of the fixed frame is circular, and the inner edge of the fixed frame is coaxially arranged with the central area; the center line of the suspension beam is an Archimedean spiral, and the polar coordinate origin of the center line coincides with the center of the central area.

4. The detection module according to claim 1, wherein The clamping assembly includes: A lower base, the upper surface of which is provided with a placement surface, and the lower surface of the fixed frame of the suspension structure is placed on the placement surface of the lower base; An upper pressing plate, which presses on the upper surface of the fixed frame of the suspension structure; A clamping member, which clamps the upper pressing plate and the lower base, so that the fixed frame of the suspension structure is clamped between the lower base and the upper pressing plate.

5. The detection module according to claim 4, characterized in that: The lower base is provided with an upward protruding boss, and the placement surface is formed on the upper surface of the boss.

6. The detection module according to claim 4 or 5, characterized in that: The lower base is provided with a flange extending outwards, and the flange is used to be fixed to an external component.

7. The detection module according to claim 4, characterized in that: The clamping member includes; A clamping main body; An upper pressing edge, which is formed on the upper edge of the clamping main body, and the upper pressing edge presses on the upper surface of the upper pressing plate; A lower fixing edge, which is formed on the lower edge of the clamping main body, and the lower fixing edge is fixed to the lower base.

8. The detection module according to claim 7, wherein: A receiving groove is formed on the upper surface of the upper pressing plate in a downward concave shape, and the upper pressing edge is located in the receiving groove.

9. The detection module according to claim 7, wherein: The number of the clamping members is several, and the several clamping members are arranged around the suspension structure.

10. A detection module installation component, characterized in that, The mounting assembly includes: A horizontal mounting plate, the middle of which is provided with a central hollow area; A detection module as described in any one of claims 1 to 9, the mirror body of the detection module extends out from the central hollow area above the horizontal mounting plate, and the clamping assembly of the detection module is fixed to the horizontal mounting plate.

11. The detection module mounting assembly according to claim 10, characterized in that: A plurality of vertically arranged first mounting holes are provided on the horizontal mounting plate, and a plurality of vertically arranged second mounting holes are provided on the clamping assembly of the detection module. The second mounting holes are arranged in one-to-one correspondence with the first mounting holes, and the diameter of the first mounting holes is larger than the diameter of the second mounting holes. The detection module mounting assembly further includes a plurality of fixing bolts, and the fixing bolts sequentially penetrate through the first mounting holes and the second mounting holes to fix the clamping assembly and the horizontal mounting plate.

12. A three-dimensional micro-contact measurement device, characterized in that, The measuring device includes: A device main body; A sample placement table, which is mounted on the device main body and can move relative to the device main body. The sample placement table is used for placing samples; A detection module mounting assembly, as described in claim 10 or 11. The horizontal mounting plate is fixed on the device main body, and the horizontal mounting plate is located above the sample placement table. The lower end of the probe pin of the detection module can contact the surface of the sample placed on the sample placement table.

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