Liquid particulate matter detection device

Abstract

The utility model provides a liquid particulate matter detection device and relates to the technical field of particulate matter detection. The liquid particulate matter detection device comprises a liquid inlet pipeline and a measuring mechanism, the liquid inlet pipeline is used for conveying to-be-detected fluid and comprises a to-be-detected fluid input end and a to-be-detected fluid output end, the to-be-detected fluid input end is used for introducing the to-be-detected fluid, and the measuring mechanism is connected with the to-be-detected fluid output end of the liquid inlet pipeline. The measuring mechanism comprises a circulation chamber and a stirring assembly, the circulation chamber is used for containing to-be-measured fluid, the stirring assembly comprises a stirrer, the stirrer is located in the circulation chamber, and the stirrer is used for stirring the to-be-measured fluid conveyed into the circulation chamber. According to the liquid particulate matter detection device, the stirrer is arranged in the circulation chamber of the measuring mechanism, so that the distribution uniformity of particulate matters in the fluid to be detected is improved, the particulate matters in the fluid to be detected are all detected by the measuring mechanism, and the detection accuracy of the liquid particulate matter detection device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of particulate matter detection, in particular to a liquid particulate matter detection device. Background Art

[0002] In many industrial fields, such as semiconductor manufacturing, pharmaceuticals, food and beverage processing, etc., the detection of particulate matter in fluids is crucial. These particulate matters may originate from raw materials, production equipment or impurities in the environment, and their presence may seriously affect the quality and performance of products, and even lead to equipment failures or production interruptions. Therefore, it is particularly important to develop an efficient, accurate and easy-to-operate liquid particulate matter detection device.

[0003] In the prior art, the particulate matter detection mechanism is usually directly connected to the pipeline of the fluid to be measured, that is, the fluid to be measured is transported through the pipeline to the detection chamber of the particulate matter detection mechanism, and the concentration and diameter of the particulate matter in the fluid to be measured are detected by detection methods such as photoelectric detection. However, since the particulate matter in the fluid to be measured usually causes some particulate matter to precipitate during the flow process, the particulate matter detection mechanism cannot detect the precipitated particulate matter, resulting in a decrease in the detection accuracy of the particulate matter detection mechanism. Summary of the Utility Model

[0004] An object of the utility model is to provide a liquid particulate matter detection device, which solves the technical problem that the detection result is inaccurate due to the precipitation of fluid particulate matter in the existing liquid particulate matter detection device.

[0005] Another object of the utility model is to further improve the detection accuracy of particulate matter.

[0006] According to the object of the utility model, the utility model provides a liquid particulate matter detection device, comprising:

[0007] A liquid inlet pipe for transporting the fluid to be measured, the liquid inlet pipe includes a fluid input end to be measured and a fluid output end to be measured, and the fluid input end to be measured is used for introducing the fluid to be measured;

[0008] A measuring mechanism connected to the fluid output end to be measured of the liquid inlet pipe, the measuring mechanism includes a flow-through chamber and a stirring assembly, the flow-through chamber is used for accommodating the fluid to be measured, the stirring assembly includes a stirrer, and the stirrer is located in the flow-through chamber, and the stirrer is used for stirring the fluid to be measured transported into the flow-through chamber.

[0009] Optionally, the stirring assembly is a magnetic stirring assembly.

[0010] Optionally, the liquid particulate matter detection device further includes:

[0011] A waste discharge output pipeline, one end of which is communicated with the flow-through chamber, and the other end is used for discharging the fluid to be measured;

[0012] A first branch, both ends of which are respectively connected to the liquid inlet pipeline and the waste discharge output pipeline, and a first switching valve is provided on the first branch for controlling the on / off of the first branch.

[0013] Optionally, the liquid particulate matter detection device further includes:

[0014] A pure water input pipeline, one end of which is connected to a pure water source, and the other end is connected to the liquid inlet pipeline, and the pure water is used for cleaning the liquid inlet pipeline.

[0015] Optionally, the liquid particulate matter detection device further includes:

[0016] A nitrogen input pipeline, one end of which is connected to a nitrogen source, and the other end is connected to the pure water input pipeline, and the nitrogen is used for purging the liquid inlet pipeline.

[0017] Optionally, the liquid particulate matter detection device further includes:

[0018] A second branch, both ends of which are respectively connected to the liquid inlet pipeline and the waste discharge output pipeline, the second branch is located downstream of the connection point of the first branch and the liquid inlet pipeline, and a first regulating valve is provided on the second branch, and the first regulating valve is used for regulating the flow rate of the fluid to be measured entering the flow-through chamber;

[0019] A flowmeter, which is arranged on the waste discharge output pipeline and upstream of the connection point of the second branch and the waste discharge output pipeline, and the flowmeter is used for detecting the flow rate of the fluid to be measured flowing from the flow-through chamber into the waste discharge output pipeline.

[0020] Optionally, the liquid particulate matter detection device further includes:

[0021] A heat exchanger, which is located upstream of the connection point of the first branch and the liquid inlet pipeline, and the heat exchanger is connected to the liquid inlet pipeline for cooling the fluid to be measured.

[0022] Optionally, the number of the fluid to be measured input ends is multiple, each of the fluid to be measured input ends is communicated with a semiconductor chamber, and the multiple fluid to be measured input ends are connected in parallel through a third branch, and the third branch is connected to the liquid inlet pipeline.

[0023] Optionally, the liquid particulate matter detection device further includes:

[0024] A second switching valve, which is located upstream of the liquid inlet pipeline, and the second switching valve is used for controlling the on / off of the liquid inlet pipeline.

[0025] Optionally, the liquid particulate matter detection device further includes:

[0026] A second regulating valve, located upstream of the flow chamber, for regulating the pressure of the fluid to be measured entering the flow chamber;

[0027] A pressure gauge, located downstream of the second regulating valve, for detecting the pressure of the fluid to be measured.

[0028] By arranging a stirrer in the flow chamber of the measuring mechanism, the liquid particulate matter detection device of the present utility model improves the uniformity of the distribution of particulate matter in the fluid to be measured, so that the particulate matter in the fluid to be measured is always detected by the measuring mechanism, thereby improving the detection accuracy of the liquid particulate matter detection device.

[0029] Furthermore, the liquid particulate matter detection device of the present utility model further includes a pure water input pipeline. One end of the pure water input pipeline is connected to a pure water source, and the other end is connected to the liquid inlet pipeline. The pure water is used to clean the liquid inlet pipeline. The pure water input pipeline is used to introduce the pure water output from the pure water source into the liquid inlet pipeline, so that the pure water flushes the impurities in the liquid inlet pipeline, that is, pre-cleans the liquid inlet pipeline, avoiding the influence of the impurities in the liquid inlet pipeline on the particulate matter detection result of the fluid to be measured, thereby further improving the detection accuracy of the liquid particulate matter detection device.

[0030] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly and implement it according to the content of the specification, the following takes the preferred embodiments of the present utility model and combines with the drawings to describe in detail as follows. Description of the Drawings

[0031] Hereinafter, some specific embodiments of the present utility model will be described in detail in an exemplary but not restrictive manner with reference to the drawings. The same reference numerals in the drawings denote the same or similar components or parts. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0032] Figure 1 is a schematic structural diagram of a liquid particulate matter detection device according to an embodiment of the present utility model;

[0033] Figure 2 is a schematic partial structural diagram of a measuring mechanism according to an embodiment of the present utility model;

[0034] Figure 3 is a schematic structural diagram of a liquid particulate matter detection device according to another embodiment of the present utility model.

[0035] Reference Numerals:

[0036] 100 - Liquid particulate matter detection device, 200 - Pure water source, 300 - Nitrogen source, 10 - Liquid inlet pipeline, 11 - Input end of fluid to be measured, 12 - Output end of fluid to be measured, 13 - Third branch, 14 - Second switching valve, 15 - Second regulating valve, 16 - Pressure gauge, 20 - Measuring mechanism, 21 - Flow-through chamber, 22 - Stirring assembly, 23 - Display screen, 24 - Alarm, 221 - Stirring bar, 222 - Magnetic driving member, 30 - Waste discharge output pipeline, 40 - First branch, 41 - First switching valve, 50 - Pure water input pipeline, 60 - Nitrogen input pipeline, 70 - Flowmeter, 80 - Second branch, 81 - First regulating valve, 90 - Heat exchanger. Detailed implementation manners

[0037] The following combines the accompanying drawings and embodiments to further describe in detail the specific implementation manners of the present utility model. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.

[0038] To make the above objects, features, and advantages of the present application more obvious and understandable, the following combines the accompanying drawings to make a detailed description of the specific implementation manners of the present application. It can be understood that the specific embodiments described herein are only used to explain the present application, rather than limiting the present application. Additionally, it should be noted that for the sake of convenience of description, only the parts related to the present application rather than all the structures are shown in the accompanying drawings. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present application.

[0039] The terms "including" and "having" in the present application and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products, or devices.

[0040] Referring to "embodiments" herein means that specific features, structures, or characteristics described in connection with the embodiments can be included in at least one embodiment of the present application. The phrase appears at various positions in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0041] Figure 1 is a schematic structural diagram of a liquid particulate matter detection device according to an embodiment of the present utility model, Figure 2 is a schematic partial structural diagram of a measuring mechanism according to an embodiment of the present utility model.

[0042] As shown Figure 1 in the figure, the present utility model provides a liquid particulate matter detection device 100. The liquid particulate matter detection device 100 includes a liquid inlet pipe 10 and a measuring mechanism 20. The liquid inlet pipe 10 is used for conveying a fluid to be measured. The liquid inlet pipe 10 includes a fluid input end 11 to be measured and a fluid output end 12 to be measured. The fluid input end 11 to be measured is used for introducing the fluid to be measured. The measuring mechanism 20 is connected to the fluid output end 12 to be measured of the liquid inlet pipe 10. The measuring mechanism 20 includes a flow-through chamber 21 and a stirring assembly 22. The flow-through chamber 21 is used for accommodating the fluid to be measured. The stirring assembly 22 includes a stirrer 221. The stirrer 221 is located in the flow-through chamber 21. The stirrer 221 is used for stirring the fluid to be measured conveyed into the flow-through chamber 21. Here, the liquid inlet pipe 10 is located upstream of the measuring mechanism 20. The measuring mechanism 20 further includes a photoelectric sensor, which is used for detecting the particulate matter concentration and particulate matter diameter of the fluid to be measured flowing through the flow-through chamber 21.

[0043] In this embodiment, by arranging the measuring mechanism 20 downstream of the liquid inlet pipe 10 and arranging the stirrer 221 in the flow-through chamber 21 of the measuring mechanism 20, that is, the fluid to be measured flows through the fluid input end 11 to be measured, the liquid inlet pipe 10 and the measuring mechanism 20 in sequence. When the fluid to be measured flows through the flow-through chamber 21 of the measuring mechanism 20, the measuring mechanism 20 detects the particulate matter concentration and particulate matter diameter of the fluid to be measured. And at this time, the stirrer 221 stirs the fluid to be measured, avoiding the situation that the particulate matter in the fluid to be measured sinks to the bottom of the flow-through chamber 21, resulting in inaccurate detection by the measuring mechanism 20. That is to say, by arranging the stirrer 221 in the flow-through chamber 21 of the measuring mechanism 20, the uniformity of the particulate matter distribution in the fluid to be measured is improved, so that the particulate matter in the fluid to be measured can be detected by the measuring mechanism 20, thereby improving the detection accuracy of the liquid particulate matter detection device 100.

[0044] In this embodiment, the liquid particulate matter detection device 100 further includes a warning device 24 and a display screen 23. The warning device 24 is connected to the measuring mechanism 20. The warning device 24 is used for sending a warning signal for an abnormal detection result of the measuring mechanism 20. The display screen 23 is connected to the measuring mechanism 20. The display screen 23 is used for displaying the detection result of the measuring mechanism 20. The display screen 23 is further connected to the warning device 24. When the warning device 24 sends a warning signal, relevant information of the warning signal is correspondingly displayed on the display screen 23. By arranging the warning device 24 and the display screen 23, while the detection result of the measuring mechanism 20 can be displayed in real time, a corresponding warning signal can also be sent when the detection result of the measuring mechanism 20 is abnormal, avoiding damage to the measuring mechanism 20, thereby improving the safety of the liquid particulate matter detection device 100. Here, the warning signal can be a voice signal or a three-color warning signal.

[0045] As shown Figure 2As shown, in a further embodiment, the stirring assembly 22 is a magnetic stirring assembly 22. The stirring assembly 22 includes a stirrer 221 and a magnetic driving member 222. That is, the stirrer 221 is a magnetic stirrer. The stirrer 221 stirs the fluid to be measured in the flow chamber 21 by using magnetic force, so as to make the particulate matter distribution of the fluid to be measured uniform. Since the magnetic stirring assembly 22 works based on the principle of magnetic transmission, the power of the stirrer 221 can be completely isolated from contact with the fluid to be measured, avoiding the direct contact between the mechanical transmission parts and the fluid to be measured that may occur in the traditional mechanical stirring process, thereby reducing the risk of contamination of the fluid to be measured. Moreover, the magnetic stirring assembly 22 also has the characteristics of low noise and stable speed regulation. Since the liquid particulate matter detection device 100 needs to operate all day long, using the magnetic stirring assembly 22 instead of mechanical stirring can also reduce the night noise pollution.

[0046] In this embodiment, the components of the magnetic stirring assembly 22 are all detachable, which is convenient for the cleaning and disinfection work of the liquid particulate matter detection device 100. In addition, compared with the traditional mechanical stirrer, the magnetic stirring assembly 22 occupies a smaller area. For the measuring mechanism 20 with limited internal space, the use of the magnetic stirring assembly 22 not only ensures the uniformity of the fluid to be measured in the flow chamber 21, but also improves the space utilization rate of the measuring mechanism 20.

[0047] In a further embodiment, the liquid particulate matter detection device 100 further includes a waste discharge output pipeline 30 and a first branch 40. One end of the waste discharge output pipeline 30 is communicated with the flow chamber 21, and the other end is used for discharging the fluid to be measured. Both ends of the first branch 40 are respectively connected to the liquid inlet pipeline 10 and the waste discharge output pipeline 30. A first switching valve 41 is provided on the first branch 40, and the first switching valve 41 is used to control the on-off of the first branch 40. That is to say, the measuring mechanism 20 is arranged between the liquid inlet pipeline 10 and the waste discharge output pipeline 30, so that after the measuring mechanism 20 measures the fluid to be measured input to the liquid inlet pipeline 10, the fluid to be measured is output through the waste discharge output pipeline 30, so as to realize the continuous detection of the fluid to be measured by the measuring mechanism 20, and thus realize the all-day operation of the liquid particulate matter detection device 100.

[0048] In a further embodiment, the liquid particulate matter detection device 100 further includes a pure water input pipeline 50. One end of the pure water input pipeline 50 is connected to a pure water source 200, and the other end is connected to the liquid inlet pipeline 10. The pure water is used to clean the liquid inlet pipeline 10. The pure water input pipeline 50 is used to introduce the pure water output from the pure water source 200 into the liquid inlet pipeline 10, so that the pure water flushes the impurities in the liquid inlet pipeline 10, that is, pre-cleans the liquid inlet pipeline 10, and avoids the impurities in the liquid inlet pipeline 10 from affecting the particulate matter detection result of the fluid to be measured, thereby improving the detection accuracy of the liquid particulate matter detection device 100. Here, a third regulating valve is provided upstream of the pure water input pipeline 50. The third regulating valve is used to control the on / off of the pure water input pipeline 50 and is also used to adjust the pure water input volume.

[0049] In a further embodiment, the liquid particulate matter detection device 100 further includes a nitrogen input pipeline 60. One end of the nitrogen input pipeline 60 is connected to a nitrogen source 300, and the other end is connected to the pure water input pipeline 50. The nitrogen is used to purge the liquid inlet pipeline 10. After the pure water flushing is completed, the third regulating valve is closed, and the fourth regulating valve located upstream of the nitrogen input pipeline 60 is opened to introduce nitrogen into the liquid inlet pipeline 10, so that the nitrogen purges the impurities in the liquid inlet pipeline 10, that is, performs secondary pre-cleaning on the liquid inlet pipeline 10, and avoids the impurities in the liquid inlet pipeline 10 from affecting the particulate matter detection result of the fluid to be measured, thereby improving the detection accuracy of the liquid particulate matter detection device 100. At the same time, the nitrogen input into the liquid inlet pipeline 10 by the nitrogen input pipeline 60 can also purge the residual pure water in the liquid inlet pipeline 10 to avoid the residual pure water from contaminating the fluid to be measured.

[0050] In a further embodiment, the liquid particulate matter detection device 100 further includes a second branch 80 and a flowmeter 70. The two ends of the second branch 80 are respectively connected to the liquid inlet pipe 10 and the waste discharge output pipeline 30. The second branch 80 is located downstream of the connection point of the first branch 40 and the liquid inlet pipe 10. A first regulating valve 81 is provided on the second branch 80. The first regulating valve 81 is used to regulate the flow rate of the fluid to be measured entering the flow chamber 21. The flowmeter 70 is arranged on the waste discharge output pipeline 30 and upstream of the connection point of the second branch 80 and the waste discharge output pipeline 30. The flowmeter 70 is used to detect the flow rate of the fluid to be measured flowing from the flow chamber 21 into the waste discharge output pipeline 30. That is to say, the flowmeter 70 is located upstream of the waste discharge output pipeline 30, the connection point of the second branch 80 and the waste discharge output pipeline 30 is located downstream of the flowmeter 70, and a first regulating valve 81 is provided on the second branch 80. That is, the fluid to be measured flows into the measuring mechanism 20 from the downstream of the liquid inlet pipe 10. After the measurement is completed, the fluid to be measured flows out through the waste discharge output pipeline 30. That is to say, the flowmeter 70 is used to detect the fluid to be measured flowing out of the measuring mechanism 20, and at the same time detect the flow rate of the fluid to be measured flowing into the measuring mechanism 20, ensuring a stable and uniform inflow of the fluid to be measured into the measuring mechanism 20, and avoiding the detection result of the measuring mechanism 20 being affected by different flow rates of the fluid to be measured flowing into the measuring mechanism 20, thereby improving the detection accuracy of the liquid particulate matter detection device 100.

[0051] In a further embodiment, the liquid particulate matter detection device 100 further includes a heat exchanger 90. The heat exchanger 90 is located upstream of the connection point of the first branch 40 and the liquid inlet pipe 10. The heat exchanger 90 is connected to the liquid inlet pipe 10 and is used to cool the fluid to be measured. The heat exchanger 90 can stably reduce the temperature of the fluid to be measured to the optimal temperature range required for detection, which helps to reduce the influence of temperature fluctuations on the particulate matter detection result, improve the accuracy and reliability of particulate matter detection, and at the same time avoid the interference of bubbles, steam or other volatile substances that may exist in the high-temperature fluid to be measured on the particulate matter detection. In addition, the heat exchanger 90 can effectively reduce the fluid temperature, protect the liquid particulate matter detection device 100 from high-temperature damage, thereby ensuring the normal operation of the liquid particulate matter detection device 100 and extending the service life of the liquid particulate matter detection device 100. The heat exchanger 90 can quickly cool the fluid to be measured to the appropriate detection temperature, thereby shortening the preparation time before detection and improving the overall detection efficiency.

[0052] Figure 3 It is a schematic structural diagram of a liquid particulate matter detection device according to another embodiment of the present invention.

[0053] Such as Figure 3As shown, in a further embodiment, the number of input ends 11 of the fluid to be measured is multiple. Each input end 11 of the fluid to be measured is communicated with a semiconductor chamber, and the multiple input ends 11 of the fluid to be measured are connected in parallel through a third branch 13. The third branch 13 is connected to the liquid inlet pipe 10. That is to say, the multiple input ends 11 of the fluid to be measured are connected in parallel through the third branch 13, enabling the liquid particle detection device 100 to detect multiple different fluids to be measured. That is, by connecting each storage chamber storing the fluid to be measured to the corresponding input end 11 of the fluid to be measured, the corresponding fluid to be measured can be input into the liquid inlet pipe 10, thereby realizing the particle detection of the fluid to be measured by the liquid particle detection device 100. The operation is simple, the replacement rate of the fluid to be measured is increased, and further the detection rate of the liquid particle detection device 100 when detecting different fluids to be measured is improved. Here, a fourth switching valve is provided upstream of the connection point between each input end 11 of the fluid to be measured and the third branch 13. The fourth switching valve is used to control the on-off between each input end 11 of the fluid to be measured and the third branch 13.

[0054] In a further embodiment, the liquid particle detection device 100 further includes a second switching valve 14. The second switching valve 14 is located upstream of the liquid inlet pipe 10, and the second switching valve 14 is used to control the on-off of the liquid inlet pipe 10. Here, the second switching valve 14 is a one-way valve. The second switching valve 14 is arranged downstream of the input end 11 of the fluid to be measured and is configured as a one-way valve to prevent the incomplete closing of the second switching valve 14 from causing the leakage of the fluid to be measured, and to avoid unnecessary resource waste and pipeline pollution.

[0055] In a further embodiment, the liquid particle detection device 100 further includes a second regulating valve 15 and a pressure gauge 16. The second regulating valve 15 is located upstream of the flow chamber 21, and the second regulating valve 15 is used to regulate the pressure of the fluid to be measured entering the flow chamber 21. The pressure gauge 16 is located downstream of the second regulating valve 15 and is used to detect the pressure of the fluid to be measured. That is to say, the second regulating valve 15 is located upstream of the flow chamber 21, and can accurately regulate the pressure of the fluid to be measured entering the flow chamber 21. This helps to ensure that the fluid to be measured maintains a stable pressure state during the detection process, thereby improving the accuracy and reliability of the detection. At the same time, the second regulating valve 15 can prevent excessive pressure from damaging the flow chamber 21, thereby extending the service life of the liquid particle detection device 100. The pressure gauge 16 is located downstream of the second regulating valve 15, and can detect the pressure of the fluid to be measured input into the flow chamber 21 in real time and accurately, improving the accuracy and reliability of the detection.

[0056] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0057] The above-described embodiments merely represent several implementation manners of the present utility model. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the present utility model patent shall be subject to the appended claims.

Claims

1. A liquid particulate matter detection device, characterized in that, Comprising: A liquid inlet pipeline for conveying a fluid to be measured, the liquid inlet pipeline including an input end of the fluid to be measured and an output end of the fluid to be measured, the input end of the fluid to be measured being used for introducing the fluid to be measured; A measuring mechanism connected to the output end of the fluid to be measured of the liquid inlet pipeline, the measuring mechanism including a flow-through chamber and a stirring assembly, the flow-through chamber being used for accommodating the fluid to be measured, the stirring assembly including a stirrer located inside the flow-through chamber, the stirrer being used for stirring the fluid to be measured conveyed into the flow-through chamber.

2. The liquid particulate matter detection device according to claim 1, wherein: The stirring assembly is a magnetic stirring assembly.

3. The liquid particulate matter detection device according to claim 2, wherein, Further comprising: A waste discharge output pipeline, one end of which is communicated with the flow-through chamber and the other end of which is used for discharging the fluid to be measured; A first branch, both ends of which are respectively connected to the liquid inlet pipeline and the waste discharge output pipeline, and a first switching valve is provided on the first branch for controlling the on / off of the first branch.

4. The liquid particulate matter detection device according to claim 3, characterized in that Further comprising: A pure water input pipeline, one end of which is connected to a pure water source and the other end of which is connected to the liquid inlet pipeline, the pure water being used for cleaning the liquid inlet pipeline.

5. The liquid particulate matter detection device according to claim 4, characterized in that, Further comprising: A nitrogen input pipeline, one end of which is connected to a nitrogen source and the other end of which is connected to the pure water input pipeline, the nitrogen being used for purging the liquid inlet pipeline.

6. The liquid particulate matter detection device according to claim 5, characterized in that Further comprising: A second branch, both ends of which are respectively connected to the liquid inlet pipeline and the waste discharge output pipeline, the second branch being located downstream of the connection point of the first branch and the liquid inlet pipeline, and a first regulating valve is provided on the second branch, the first regulating valve being used for regulating the flow rate of the fluid to be measured entering the flow-through chamber; A flow meter provided in the waste discharge output pipeline and upstream of the connection point of the second branch and the waste discharge output pipeline, the flow meter being used for detecting the flow rate of the fluid to be measured flowing from the flow-through chamber into the waste discharge output pipeline.

7. The liquid particulate matter detection device according to claim 6, characterized in that, Further comprising: A heat exchanger located upstream of the connection point of the first branch and the liquid inlet pipeline, the heat exchanger being connected to the liquid inlet pipeline for cooling the fluid to be measured.

8. The liquid particulate matter detection device according to any one of claims 1-7, wherein: The number of the input ends of the fluid to be measured is multiple, each input end of the fluid to be measured is communicated with a semiconductor chamber, and the multiple input ends of the fluid to be measured are connected in parallel through a third branch, and the third branch is connected to the liquid inlet pipeline.

9. The liquid particulate matter detection device according to claim 8, wherein, Further comprising: A second switching valve located upstream of the liquid inlet pipeline, the second switching valve being used for controlling the on / off of the liquid inlet pipeline.

10. The liquid particulate matter detection device according to claim 9, characterized in that, Further comprising: A second regulating valve located upstream of the flow-through chamber, the second regulating valve being used for regulating the pressure of the fluid to be measured entering the flow-through chamber; A pressure gauge located downstream of the second regulating valve for detecting the pressure of the fluid to be measured.

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