Automatic cleaning device for carrier plate wheel rail

Abstract

The utility model discloses an automatic cleaning device for a carrier plate wheel rail, which comprises an automatic cleaning device, a carrier plate conveying mechanism, a carrier plate and a carrier plate wheel rail, the automatic cleaning device comprises a rolling brush transmission seat, a reversing gear, a rolling brush rotating synchronous wheel, a rolling brush rotating synchronous belt, a rolling brush, a dust collection device connector, a wheel rail dust collection device and a cleaning device supporting seat, and the transmission wheel, the reversing gear and the rolling brush rotating synchronous wheel are installed on the rolling brush transmission seat. The conveying wheel drives the roller brush to rotate through the reversing gear, the roller brush rotating synchronous wheel and the roller brush rotating synchronous belt, the roller brush, the dust collection device connector and the wheel rail dust collection device are installed on the cleaning device supporting base, and the wheel rail dust collection device is connected to the dust collection device connector. According to the utility model, the existing power system is used for automatically cleaning dust at the wheel track of the carrier plate, the labor cost is saved, the dust on the carrier plate and in the cavity is greatly reduced, and the production efficiency and the product yield are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of PVD carrier plates, and particularly relates to an automatic cleaning device for carrier plate wheel tracks. Background Art

[0002] As a carrier for sputtering coating of silicon wafers of solar cells in the PVD equipment chamber, a thin film will also be deposited on the surface of the carrier plate itself. The PVD carrier plate is used in cyclic production. As the production time increases, the coating deposited on the entire carrier plate will become thicker and thicker. The carrier plate is automatically conveyed by the transmission wheels of the PVD conveying mechanism, and the transmission roller wheels and the wheel tracks of the carrier plate perform rolling friction in real time. In this way, during the conveying process of the carrier plate, the transmission wheels will rub against the coating on the carrier plate wheel tracks to form powder and fall onto the lower surface of the carrier plate wheel tracks. Over time, more and more powder will accumulate on the carrier plate wheel tracks, thus polluting the PVD chamber and the battery silicon wafers.

[0003] The cleanliness of the PVD carrier plate determines the process stability and product yield of the PVD production process, and also has an important impact on the cleanliness of the PVD vacuum chamber. In order to ensure the overall cleanliness of the carrier plate, after a certain production cycle, an overall pickling and film stripping operation is required. Regularly performing pickling and film stripping operations on the PVD carrier plate is a conventional method to remove the coating on the carrier plate and maintain its cleanliness. However, the cleaning cycle of the carrier plate is relatively long (once every 1 - 2 months). During this period, the dust problem caused by the rolling friction between the transmission wheels and the carrier plate wheel tracks is a major problem affecting production. The conventional practice in the industry is to manually blow and clean the carrier plate with an air gun at regular times every day, or blow compressed air at the wheel track position for cleaning.

[0004] Manually blowing and cleaning the carrier plate with an air gun at regular times every day or setting compressed air to blow and clean at the wheel track position can remove some dust, but it will bring new problems: The PVD production workshop is a dust-free and clean workshop, and the dust swept by air is difficult to collect, easily polluting the dust-free workshop and causing problems such as excessive dust in the workshop. In addition, there is a situation where the air sweep cannot blow off the particulate powder adhering to the wheel track position after rolling, and the cleaning effect is not good. The particulate powder adhering to the wheel track position will be brought into the PVD chamber and fall off with the vibration during the conveying process of the carrier plate, polluting the chamber and the product, resulting in defects or equipment failures.

[0005] Therefore, in order to solve the dust problem at the wheel tracks, an automatic cleaning device for carrier plate wheel tracks is designed to automatically clean the dust at the carrier plate wheel tracks instead of manual labor. Summary of the Utility Model

[0006] In view of the above problems, the utility model provides an automatic cleaning device for carrier plate wheel tracks, which automatically cleans the dust at the carrier plate wheel tracks instead of manual labor, greatly reducing the dust on the carrier plate and in the chamber, and improving the production efficiency and product yield.

[0007] To solve the above technical problems, the technical solution adopted by the present utility model is as follows: A carrier plate wheel-rail automatic cleaning device, including an automatic cleaning device, a carrier plate conveying mechanism, a carrier plate, and carrier plate wheel-rails. The carrier plate conveying mechanism is connected to the automatic cleaning device through a transmission wheel. The carrier plate conveying mechanism includes a power motor, a synchronous pulley, a synchronous belt, and a transmission seat. The power motor drives the transmission wheel to rotate through multi-stage synchronous pulleys and synchronous belts. The synchronous pulleys are installed on the transmission seat. The automatic cleaning device includes a roller brush transmission seat, a reversing gear, a roller brush rotating synchronous pulley, a roller brush rotating synchronous belt, a roller brush, a dust suction device interface, a wheel-rail dust suction device, and a cleaning device support seat. The transmission wheel, the reversing gear, and the roller brush rotating synchronous pulley are installed on the roller brush transmission seat. The transmission wheel drives the roller brush to rotate through the reversing gear, the roller brush rotating synchronous pulley, and the roller brush rotating synchronous belt. The roller brush, the dust suction device interface, and the wheel-rail dust suction device are installed on the cleaning device support seat. The wheel-rail dust suction device is connected to the dust suction device interface.

[0008] Further, the reversing gear is composed of two meshing large and small gears, which changes the rotation direction to achieve reverse rotation. The reverse roller brush is more powerful than the forward roller brush. At the same time, the large and small gear structure realizes speed increase, so that the rotation speed of the roller brush is higher than the speed of the carrier plate transmission wheel.

[0009] Further, the roller brush has a double-sided structure, and simultaneously brushes the upper surface and the side surface of the roller brush carrier plate wheel-rail, ， The cleaning is more thorough and the effect is better.

[0010] Further, the dust suction device interface is externally connected to a negative pressure suction pipeline and then shunted to the wheel-rail dust suction device.

[0011] Further, at least two groups of the wheel-rail dust suction devices are provided. The wheel-rail dust suction device adopts a universal corrugated pipe negative pressure dust suction mechanism, which can flexibly adjust the dust suction angle and position, and simultaneously sucks dust from the side surface and the bottom surface of the wheel-rail, realizing all-round three-dimensional cleaning.

[0012] From the above description of the structure of the present utility model, compared with the prior art, the present utility model has the following advantages:

[0013] 1. The present utility model borrows the existing power system for driving the carrier plate transmission through the carrier plate conveying mechanism to drive the roller brush of the automatic cleaning device to perform cleaning operations, without the need to additionally increase a power motor, and the structure is simple and practical.

[0014] 2. The reversing gear is composed of two meshing large and small gears to change the rotation direction, realizing the reverse rolling of the roller brush. The cleaning effect is more thorough and the effect is better. Both the gear and the synchronous pulley are driven by large wheels to small wheels, playing a role of two-stage speed increase, so that the rotation speed of the roller brush is higher than the speed of the carrier plate transmission wheel, achieving a better rolling brush effect.

[0015] 3. The wheel-rail dust suction device adopts a negative pressure dust suction mechanism with multiple universal joint bamboo tubes. The dust suction head can swing at will, and the optimal dust suction position can be adjusted according to the actual work, with strong flexibility. At the same time, it can also suck the comprehensive three-dimensional positions such as the contact surface between the wheel-rail and the transmission wheel, the side surface of the wheel-rail, and the bottom surface of the wheel-rail, achieving all-directional dust removal and improving production efficiency and product yield.

[0016] 4. During sputtering coating, the contact surface between the carrier plate and the wheel-rail of the transmission wheel and the side surface of the wheel-rail are automatically and continuously roller-brushed in real time during the transmission of the carrier plate, so that the wheel-rail of the carrier plate remains clean during the normal production process, avoiding the dust generated by the rolling friction between the transmission wheel and the wheel-rail of the carrier plate. At the same time, manual operation is avoided, greatly saving labor costs. At the same time, the dust particles brushed by the roller are directly sucked away by the dust suction mechanism, without causing pollution to the workshop environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings forming a part of this application are used to provide a further understanding of the present utility model. The schematic embodiments and descriptions thereof of the present utility model are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0018] Figure 1 is a front axonometric structural schematic diagram of the present utility model;

[0019] Figure 2 is a back axonometric structural schematic diagram of the present utility model;

[0020] Figure 3 is an axonometric structural schematic diagram of the automatic cleaning device of the present utility model;

[0021] Figure 4 is a side view structural schematic diagram of the automatic cleaning device of the present utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] In order to make the purpose, technical solutions and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0023] Embodiment

[0024] Reference Figures 1-4, A carrier plate wheel-rail automatic cleaning device, including an automatic cleaning device 10, a carrier plate conveying mechanism 20, a carrier plate 30, and a carrier plate wheel-rail 301. The carrier plate conveying mechanism 20 is connected to the automatic cleaning device 10 through a transmission wheel 205. The carrier plate conveying mechanism 20 includes a power motor 201, a synchronous pulley 202, a synchronous belt 203, and a transmission seat 204. The power motor 201 drives the transmission wheel 205 to rotate through a multi-stage synchronous pulley 202 and a synchronous belt 203. The synchronous pulley 202 is installed on the transmission seat 204. The automatic cleaning device 10 includes a roller brush transmission seat 101, a reversing gear 102, a roller brush rotating synchronous pulley 103, a roller brush rotating synchronous belt 104, a roller brush 105, a dust suction device interface 106, a wheel-rail dust suction device 107, and a cleaning device support seat 108. The transmission wheel 205, the reversing gear 102, and the roller brush rotating synchronous pulley 103 are installed on the roller brush transmission seat 101. The transmission wheel 205 drives the roller brush 105 to rotate through the reversing gear 102, the roller brush rotating synchronous pulley 103, and the roller brush rotating synchronous belt 104. The roller brush 105, the dust suction device interface 106, and the wheel-rail dust suction device 107 are installed on the cleaning device support seat 108. The wheel-rail dust suction device 107 is connected to the dust suction device interface 106.

[0025] The reversing gear 102 is composed of two meshing gears of different sizes. The carrier plate conveying mechanism provides forward rotation power, and the rotation direction is changed through the reversing gear 102 to achieve reverse rotation. The reverse roller brush is more powerful than the forward roller brush. At the same time, the two gears are designed with a large and small tooth structure to achieve speed increase, so that the rotation speed of the roller brush is higher than that of the carrier plate transmission wheel. Then, a set of roller brush rotating synchronous pulleys 103 and a roller brush rotating synchronous belt 104 transmit the power to the power shaft of the roller brush 105. The function of the synchronous belt is to increase the distance between the roller brush 105 and the transmission wheel 205, which is convenient for adjusting the height of the roller brush 105. In addition, the roller brush rotating synchronous pulley 103 and the power shaft of the roller brush 105 also use a large wheel to drive a small wheel, which plays a role of secondary speed increase and further improves the rotation speed of the roller brush.

[0026] The roller brush 105 has a double-sided structure and cleans both the upper surface and the side surface of the carrier plate wheel-rail 301 at the same time.

[0027] The dust suction device interface 106 is externally connected to a negative pressure suction pipeline and then shunted to the wheel-rail dust suction device 107. The wheel-rail dust suction device 107 adopts a universal bellows negative pressure dust suction mechanism. There are three groups of the wheel-rail dust suction devices 107. The dust suction heads can swing at will, and the optimal dust suction position can be adjusted according to the actual work. It has strong flexibility. At the same time, it also sucks the contact surface between the wheel-rail and the transmission wheel, the side surface of the wheel-rail, the bottom surface of the wheel-rail and other comprehensive three-dimensional positions, achieving all-directional dust removal and improving production efficiency and product yield.

[0028] This utility model borrows the existing power system for driving the carrier board transmission through the carrier board transmission mechanism to drive the roller brush of the automatic cleaning device to perform cleaning operations, without the need to additionally increase a power motor, and the structure is simple and practical. During sputtering coating, during the carrier board transmission process, the roller brush automatically and in real time cleans the contact surface between the carrier board and the wheel rail transmission wheel of the carrier board, as well as the side surface of the wheel rail, so that the carrier board wheel rail remains clean during the normal production process, avoiding the dust generated by the rolling friction between the transmission wheel and the carrier board wheel rail. At the same time, manual operation is avoided, greatly saving labor costs. At the same time, the dust particles falling from the roller brush are directly sucked away by the dust suction mechanism, without causing pollution to the workshop environment.

[0029] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. An automatic cleaning device for the wheel rail of a carrier plate, characterized in that: It includes an automatic cleaning device (10), a carrier plate conveying mechanism (20), a carrier plate (30), and a carrier plate wheel rail (301). The carrier plate conveying mechanism (20) is connected to the automatic cleaning device (10) through a transmission wheel (205). The carrier plate conveying mechanism (20) includes a power motor (201), a synchronous pulley (202), a synchronous belt (203), and a transmission seat (204). The power motor (201) drives the transmission wheel (205) to rotate through a multi-stage synchronous pulley (202) and a synchronous belt (203). The synchronous pulley (202) is installed on the transmission seat (204). The automatic cleaning device (10) includes a roller brush transmission seat (101), a reversing gear (102), a roller brush rotating synchronous pulley (103), a roller brush rotating synchronous belt (104), a roller brush (105), a dust suction device interface (106), a wheel rail dust suction device (107), and a cleaning device support seat (108). The transmission wheel (205), the reversing gear (102), and the roller brush rotating synchronous pulley (103) are installed on the roller brush transmission seat (101). The transmission wheel (205) drives the roller brush (105) to rotate through the reversing gear (102), the roller brush rotating synchronous pulley (103), and the roller brush rotating synchronous belt (104). The roller brush (105), the dust suction device interface (106), and the wheel rail dust suction device (107) are installed on the cleaning device support seat (108). The wheel rail dust suction device is connected to the dust suction device interface (106).

2. The automatic cleaning device for the carrier plate wheel rail according to claim 1, characterized in that: The reversing gear (102) consists of two meshing gears of different sizes.

3. The automatic cleaning device for the carrier plate wheel rail according to claim 1, wherein: The roller brush (105) has a double-sided structure and cleans both the upper surface and the side surface of the roller brush carrier plate wheel rail (301).

4. The automatic cleaning device for the carrier plate wheel rail according to claim 1, wherein: The dust suction device interface (106) is externally connected to a negative pressure suction pipeline and then branched to the wheel rail dust suction device (107).

5. The automatic cleaning device for the carrier plate wheel rail according to claim 1, wherein: At least two groups of the wheel rail dust suction devices (107) are provided, and the wheel rail dust suction device (107) adopts a universal corrugated pipe negative pressure dust suction mechanism.

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