Structure for improving light path stability of ultraviolet drilling equipment

Abstract

The utility model relates to the technical field of laser, in particular to a structure for improving the stability of an optical path of ultraviolet drilling equipment, an incident port of a reflecting device is communicated with an ultraviolet nanosecond laser through a sealing cylinder and a zoom beam expander, an emergent port of the reflecting device is communicated with a galvanometer through the sealing cylinder, the lower part of the galvanometer is connected with a field lens, and the field lens is connected with a light source. A first annular pipe is adhered to the lower part of the field lens, at least ten first air blowing ports are formed in the first annular pipe, first nozzles are arranged in the first air blowing ports, and the first nozzles are mutually connected through air valves and air pipes. According to the utility model, components such as the second annular pipe are arranged, air is blown out by the air pump and exchanges heat with the condensation pipe to form cold air, then the cold air is communicated with the air valve corresponding to the second nozzle through the air pipe and the air tap, and finally the cold air is sprayed out from the second nozzle to cool the reflector; therefore, the reflector can be prevented from generating local high temperature during laser irradiation, and the influence on the stability of a light path caused by deformation of the reflector due to local overheating is prevented.

Description

Technical Field

[0001] The utility model relates to the field of laser technology, in particular to a structure for improving the optical path stability of an ultraviolet drilling device. Background Technique

[0002] With the rapid development of technology, the demand for circuit boards and integrated electronic components in various fields is increasing day by day. Electronic products are moving towards the direction of portability and miniaturization, which puts higher requirements on the miniaturization of circuit boards. In this context, laser drilling technology is particularly important in the field of precision machining. The ultraviolet laser drilling machine, as an efficient and precise drilling device, uses an ultraviolet laser for cold processing, can achieve precise drilling on various hard and soft materials, and will not cause material damage or deformation. Laser drilling has significant advantages such as a small heat-affected zone, high processing speed, and high quality, and is particularly suitable for application scenarios that require high-precision and high-quality holes. However, due to the high energy density of ultraviolet light, when ultraviolet light irradiates the surface of optical components, local overheating is likely to occur, which may in turn cause damage to the optical components. At the same time, during operation, the dust on the substrate on the processing platform will splash onto the surface of the field lens, resulting in uneven distribution of laser energy and affecting the drilling effect. In view of this, the utility model proposes a structure for improving the optical path stability of an ultraviolet drilling device, which solves at least one of the above-mentioned technical problems. Content of the Utility Model

[0003] In order to overcome at least one technical problem mentioned in the background technique, the utility model provides a structure for improving the optical path stability of an ultraviolet drilling device.

[0004] The technical implementation solution of the utility model is: a structure for improving the optical path stability of an ultraviolet drilling device, including a reflection device. The incident port of the reflection device is connected to an ultraviolet nanosecond laser through a sealing cylinder and a variable magnification beam expander. The exit port of the reflection device is connected to a galvanometer through a sealing cylinder. A field lens is connected to the lower part of the galvanometer. Protective mirrors are fixedly connected to the incident port and the exit port of the reflection device in a sealed manner. A first annular pipe for exhausting air to form an annular air curtain is arranged below the field lens. An installation box is arranged below the ultraviolet nanosecond laser. An air inlet and an air outlet are arranged on the installation box. An air pump is hermetically connected to the air inlet, and the air outlet is connected to the reflection device through an air pipe and an air nozzle.

[0005] Optionally, a plurality of first air blowing ports are arranged on the first annular pipe. A first nozzle is arranged in the first air blowing port. The first nozzle can blow air to form an air curtain to prevent the dust of the substrate on the processing platform from splashing onto the surface of the field lens during operation. The first nozzles are connected to each other through air valves and air pipes.

[0006] Optionally, a through groove is provided at the outlet of the reflection device. An air extractor is installed outside the through groove, and a booster pump is installed on the side of the reflection device. The booster pump and the air extractor are connected to each other through an air pipe, and the booster pump is connected to the air valve of one of the first nozzles.

[0007] Optionally, a condensing pipe is provided in the installation box, and a condenser is fixedly connected to the bottom surface of the installation box. The condensing pipe is connected to the condenser.

[0008] Optionally, the reflection device includes at least four reflection boxes and a moving component for moving the corresponding reflection boxes. The reflection boxes are hermetically connected through a sealing cylinder, and a reflection base is installed in the reflection box. A second annular pipe is rotatably connected to the reflection base. A reflecting mirror is pasted on the inner ring of the second annular pipe. A plurality of second air blowing ports are provided on the second annular pipe, and second nozzles are provided in the second air blowing ports. The second nozzles are connected to each other through air valves and air pipes. The air valve of one of the second nozzles is communicated with the air outlet through an air pipe and an air nozzle.

[0009] Optionally, a heat dissipation box is provided between the ultraviolet nanosecond laser and the installation box. At least five heat dissipation fins are provided in the heat dissipation box. The heat dissipation fins are in contact with the ultraviolet nanosecond laser. A gas dispersion port is provided on the heat dissipation box. The heat dissipation box and the installation box are communicated through a one-way valve.

[0010] Compared with the prior art, the utility model has the following advantages:

[0011] 1. The utility model is provided with components such as a first annular pipe. The air extractor and the booster pump are started. Then the gas ejected from the second nozzle will flow to the air extractor. Then the air extractor conveys the cooled gas to the booster pump for pressurization, and then flows through the air pipe to the air valve of the first nozzle and is ejected from the first nozzle to form an air curtain, so as to prevent the dust on the base material on the processing platform from splashing onto the surface of the field lens, which may lead to uneven distribution of the laser energy and affect the drilling effect.

[0012] 2. The utility model is provided with components such as a second annular pipe. The gas is blown out by an air pump and exchanges heat with the condensing pipe to form cold air, and then is communicated with the air valve of the corresponding second nozzle through an air pipe and an air nozzle and finally ejected from the second nozzle, so as to cool the reflecting mirror. In this way, it can prevent the reflecting mirror from generating local high temperature during laser irradiation and prevent the reflecting mirror from deforming due to local overheating, thereby affecting the stability of the optical path. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a three-dimensional structural schematic diagram of the utility model.

[0014] Figure 2 It is another three-dimensional structural schematic diagram of the utility model.

[0015] Figure 3A cross-sectional view of components such as the induced draft fan, galvanometer, and reflection base of the present utility model.

[0016] Figure 4 A cross-sectional view of components such as the first annular tube of the present utility model.

[0017] Figure 5 A cross-sectional view of components such as the reflection base of the present utility model.

[0018] Figure 6 A cross-sectional view of components such as the second annular tube of the present utility model.

[0019] Figure 7 A cross-sectional view of components such as the installation box and one-way valve of the present utility model.

[0020] The meanings of the reference numerals in the figure: 1: reflection device, 101: incident port, 102: exit port, 111: reflection box, 112: sealing cylinder, 113: reflection base, 114: second annular tube, 1141: second air blowing port, 115: micro motor, 116: reflecting mirror, 117: second nozzle, 121: through groove, 2: ultraviolet nanosecond laser, 3: galvanometer, 4: field lens, 5: first annular tube, 501: first air blowing port, 502: first nozzle, 6: installation box, 6011: air inlet, 6012: air outlet, 7: condensation tube, 8: condenser, 9: air pump, 1001: heat dissipation box, 1002: heat dissipation fin, 1003: air dispersion port, 1004: one-way valve, 11: induced draft fan, 12: booster pump, 13: air valve, 14: protective mirror, 15: variable magnification beam expander. Specific embodiments

[0021] To make the objectives, technical solutions, and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings. It is hereby declared that the orientation terms such as up, down, left, right, front, back, inside, and outside that appear or will appear in the text of the present utility model are only based on the accompanying drawings of the present utility model, and they do not specifically limit the present utility model.

[0022] A structure for improving the optical path stability of an ultraviolet drilling device, such as Figures 1-7As shown in the figure, the inlet 101 of the reflection device 1 is connected to the ultraviolet nanosecond laser 2 through the sealing cylinder 112 and the variable magnification beam expander 15. The variable magnification beam expander 15 is installed in the sealing cylinder 112. The outlet 102 of the reflection device 1 is connected to the galvanometer 3 through the sealing cylinder 112. A field lens 4 is connected to the lower part of the galvanometer 3. A first annular pipe 5 for exhausting air to form an annular air curtain is arranged below the field lens 4. An installation box 6 is arranged below the ultraviolet nanosecond laser 2. An air inlet 6011 and an air outlet 6012 are arranged on the installation box 6. A condensing pipe 7 is arranged in the installation box 6. The condensing pipe 7 is arranged between the air inlet 6011 and the air outlet 6012. A condenser 8 is fixedly connected to the bottom surface of the installation box 6. The condensing pipe 7 is connected to the condenser 8. An air pump 9 is hermetically connected to the air inlet 6011. The air pump 9 is connected to an external gas cylinder. The gas cylinder is filled with nitrogen. The air outlet 6012 is connected to the reflection device 1 through a trachea and a nozzle.

[0023] Among them, the reflection device 1 includes four reflection boxes 111 and a moving component for moving the corresponding reflection box 111. An inlet 101 is arranged on one of the reflection boxes 111, and an outlet 102 is arranged on another reflection box 111. Protective mirrors 14 are hermetically connected to the inlet 101 and the outlet 102. The protective mirrors 14 make the reflection device 1 form a closed space, so as to prevent dust or impurities from entering the reflection device 1 and affecting the scattering of light. The four reflection boxes 111 are arranged in a continuously bent position, so as to facilitate adjusting the laser path to the required direction and angle, and then accurately adjusting the focus and direction of the laser. The reflection boxes 111 are hermetically connected through the sealing cylinder 112. The sealing cylinder 112 is telescopic to facilitate the movement of the moving component. The moving component is a combination of a hydraulic cylinder and a fixed plate, and is only used for positioning, adjusting the moving speed and direction control of the laser during drilling, etc., which is irrelevant to the technical problem of the present invention. Therefore, this embodiment will not be described. A reflection base 113 is installed in the reflection box 111. A second annular pipe 114 is rotatably connected to the reflection base 113. A micro motor 115 is installed on the side surface of the reflection base 113. The output shaft of the micro motor 115 is fixedly connected to the rotating shaft of one of the second annular pipes 114. When the micro motor 115 is started, a reflecting mirror 116 is pasted on the inner ring of the second annular pipe 114. Thus, when debugging the machine, the micro motor 115 can be started, and then the micro motor 115 can adjust the reflection angle of the reflecting mirror 116, and then adjust the laser path to the required direction and angle. Six second air blowing ports 1141 are uniformly arranged on the second annular pipe 114. A second nozzle 117 is fixedly connected in the second air blowing port 1141. The second nozzles 117 are connected to each other through an air valve 13 and a trachea.

[0024] Further, ten first air blowing ports 501 are evenly arranged on the first annular pipe 5. A first nozzle 502 is arranged in each first air blowing port 501. The first nozzle 502 can blow a curtain of air to prevent the base material dust on the processing platform from splashing onto the surface of the lens 4 during work. The first nozzles 502 are connected to each other through an air valve 13 and an air pipe. A through groove 121 is further arranged on the reflection box 111 with an emission port 102. An induced draft fan 11 is hermetically installed outside the through groove 121. A booster pump 12 is installed on the side of the reflection box 111. The booster pump 12 and the induced draft fan 11 are connected to each other through an air pipe. The booster pump 12 is connected to the air valve 13 of one of the first nozzles 502.

[0025] Further, a heat dissipation box 1001 is arranged between the ultraviolet nanosecond laser 2 and the installation box 6. The heat dissipation box 1001 is fixedly connected to the ultraviolet nanosecond laser 2. The installation box 6 is fixedly connected to the heat dissipation box 1001. Five heat dissipation fins 1002 are arranged in the heat dissipation box 1001. The heat dissipation fins 1002 penetrate through the heat dissipation box 1001 and are in contact with the ultraviolet nanosecond laser 2. A gas dispersion port 1003 is arranged on the heat dissipation box 1001. A dust-proof net is arranged on the gas dispersion port 1003. The heat dissipation box 1001 and the installation box 6 are communicated through a one-way valve 1004.

[0026] Working principle: First, start the air pump 9. Then, the air pump 9 sprays out nitrogen. The nitrogen undergoes heat exchange through the condenser tube 7. The coolant in the condenser tube 7 absorbs heat, and the nitrogen releases heat, thus forming cold air. Part of the cold air flows into the heat dissipation box 1001 through the one-way valve 1004 and exchanges heat with the heat dissipation fins 1002. Then, the heat dissipation fins 1002 release heat, and this part of the cold air absorbs heat. In this way, the ultraviolet nanosecond laser 2 can be cooled to prevent the ultraviolet nanosecond laser 2 from generating local high temperature. Finally, this part of the cold air flows into the outside from the gas dispersion port 1003. Another part of the cold air flows out from the air outlet 6012 and is connected to the air valve 13 of the corresponding second nozzle 117 through an air pipe and an air nozzle, and finally sprays out from the second nozzle 117. Thus, the mirror 116 can be cooled, so as to prevent the mirror 116 from generating local high temperature when irradiated by the laser, prevent local overheating from deforming the mirror 116, and further affect the stability of the optical path. Since the protection mirrors 14 are hermetically connected to both the incident port 101 and the emission port 102 of the reflection device 1, the inside of the reflection device 1 is in a relatively sealed state. At this time, start the induced draft fan 11 and the booster pump 12. Then, the nitrogen sprayed out from the second nozzle 117 will flow towards the induced draft fan 11. Then, the induced draft fan 11 conveys the cooled gas to the booster pump 12 for pressurization, and then flows through the air pipe to the air valve 13 of the first nozzle 502 and is sprayed out from the first nozzle 502 to form a curtain of air. In this way, it can prevent tiny impurities from adhering to the field lens, and further ensure the stability of the optical path.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes may be made therein without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. Structure for improving the optical path stability of an ultraviolet drilling device, including a reflection device (1). The incident port (101) of the reflection device (1) is connected to an ultraviolet nanosecond laser (2) through a sealing cylinder (112) and a variable magnification beam expander (15). The exit port (102) of the reflection device (1) is connected to a galvanometer scanner (3) through a sealing cylinder (112). A field lens (4) is connected to the lower part of the galvanometer scanner (3). It is characterized in that: A protective mirror (14) is fixedly connected in a sealed manner to both the incident port (101) and the exit port (102) of the reflection device (1). A first annular pipe for exhausting air to form an annular air curtain is provided below the field lens (4). An installation box (6) is provided below the ultraviolet nanosecond laser (2). The installation box (6) is provided with an air inlet (6011) and an air outlet (6012). An air pump (9) is hermetically connected to the air inlet (6011), and the air outlet (6012) is communicated with the reflection device (1) through an air pipe and an air nozzle.

2. The structure for improving the optical path stability of the ultraviolet drilling equipment according to claim 1, wherein: A plurality of first air blowing ports (501) are provided on the first annular pipe. A first nozzle (502) is provided in the first air blowing port (501). Blowing air from the first nozzle (502) can form an air curtain to prevent dust of the substrate on the processing platform from splashing onto the surface of the lens of the field lens (4) during operation. The first nozzles (502) are connected to each other through air valves (13) and air pipes.

3. The structure for enhancing the optical path stability of the ultraviolet drilling equipment according to claim 2, wherein: A through groove (121) is provided at the exit port (102) of the reflection device (1). An induced draft fan (11) is installed outside the through groove (121). A booster pump (12) is installed on the side of the reflection device (1). The booster pump (12) and the induced draft fan (11) are connected to each other through an air pipe. The booster pump (12) is connected to the air valve (13) of one of the first nozzles (502).

4. The structure for improving the optical path stability of the ultraviolet drilling equipment according to claim 1, characterized in that: A condensing pipe (7) is provided in the installation box (6). A condenser (8) is fixedly connected to the bottom surface of the installation box (6). The condensing pipe (7) is connected to the condenser (8).

5. The structure for enhancing the optical path stability of the ultraviolet drilling equipment according to claim 1, characterized in that: The reflection device (1) includes at least four reflection boxes (111) and a moving component for moving the corresponding reflection boxes (111). The reflection boxes (111) are hermetically connected to each other through a sealing cylinder (112). A reflection base (113) is installed in the reflection box (111). A second annular pipe (114) is rotatably connected to the reflection base (113). A reflection mirror (116) is pasted on the inner ring of the second annular pipe (114). A plurality of second air blowing ports (1141) are provided on the second annular pipe (114). A second nozzle (117) is provided in the second air blowing port (1141). The second nozzles (117) are connected to each other through air valves (13) and air pipes. The air valve (13) of one of the second nozzles (117) is communicated with the air outlet (6012) through an air pipe and an air nozzle.

6. The structure for enhancing the optical path stability of the ultraviolet drilling equipment according to claim 1, wherein: ultraviolet A heat dissipation box (1001) is provided between the nanosecond laser (2) and the installation box (6). At least five heat dissipation fins (1002) are provided in the heat dissipation box (1001). The heat dissipation fins (1002) are in contact with the ultraviolet nanosecond laser (2). A gas dispersion port (1003) is provided on the heat dissipation box (1001). The heat dissipation box (1001) is communicated with the installation box (6) through a one-way valve (1004).

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