Raw material tank for preparing acid etching liquid
The multi-compartmented material tank with controlled gas access and sequential dispensing addresses etching challenges in semiconductor manufacturing by ensuring accurate and reliable chemical addition, enhancing operational efficiency and reducing human error.
Patent Information
- Application Number
- CN202422434526.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-09
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-10-09
AI Technical Summary
Existing wet etching processes for copper/nickel multilayer films in semiconductor manufacturing face challenges such as inconsistent etching rates, significant critical dimension loss, and issues like undercutting, which are exacerbated by manual addition of multiple chemicals in incorrect sequences and dosages, leading to operational inefficiencies.
A novel acid etching solution preparation system using a multi-compartmented material tank with controlled gas access and sequential dispensing, ensuring accurate and reliable addition of etching chemicals through a rotating mechanism, minimizing human error and simplifying the process.
The system ensures precise and efficient etching liquid preparation by eliminating sequence errors and reducing manual intervention, thereby improving operational reliability and simplifying the etching process.
Smart Images
Figure CN223101606U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a raw material tank for preparing acidic etching solution, belonging to the technical field of solution mixing preparation. Background Art
[0002] In the manufacturing process of liquid crystal displays, metals such as copper (Cu), chromium (Cr), molybdenum (Mo), aluminum (Al), titanium (Ti) or their alloys are often used as conductive materials. With the development of larger and higher-resolution displays, it has become an inevitable trend to use metal copper with low resistance as the conductive material. However, using copper alone as the conductive material has the disadvantage of poor wear resistance, so a multi-layer metal containing copper is usually used as the conductive material. Nickel has a strong passivation ability and can quickly form an extremely thin passivation film on the surface of the workpiece, which can resist the corrosion of the atmosphere and certain acids. Therefore, the nickel plating layer has high stability in the air. It has excellent polishing performance, and the polished nickel plating layer has a mirror-like luster and can maintain its luster in the atmosphere for a long time. In addition, the nickel plating layer also has high hardness and wear resistance. Therefore, a nickel plating layer is deposited on the surface of the copper layer as a protective layer.
[0003] In order to apply the copper-nickel plating layer to the semiconductor field, it is necessary to effectively etch the copper / nickel (Cu / Ni) multi-layer film. Dry etching needs to be carried out under highly vacuum conditions, and the operating conditions are strict and the cost is too high. Therefore, the industry usually adopts wet etching method for etching. When wet etching copper / nickel, it is difficult to control the etching effect due to the difference in the etching rates of copper and nickel, and it is inevitable that there will be excessive loss of the critical dimension of the multi-layer metal of copper / nickel, the bevel angle is greater than or equal to 90°, and undercut occurs on the copper layer after etching.
[0004] At present, a wet etching method is provided. To solve the above problems, a mixed solution of more than six kinds is used to prepare the etching solution. The process requires adding the corresponding solution into it quickly one by one during preparation to meet the preparation requirements. However, considering the actual production environment, this reaction mixing method mainly requires manual operation to add the corresponding amount of solution into the reaction container one by one, and manual operation is prone to problems such as incorrect addition order and dosage loss, and the reliability of actual operation is low. Moreover, when this etching solution needs to be prepared multiple times, relevant instruments need to be repeatedly used for proportioning, and the operation is very cumbersome. Summary of the Invention
[0005] The purpose of the present utility model is to overcome the deficiencies in the prior art and provide a raw material tank for preparing acidic etching solution, which is used to add the raw materials for preparing the etching solution into the reactor one by one. It only needs to cooperate with a rotating device to control the amount of raw materials, and then it can achieve the addition of multiple raw material samples. The addition sequence is not prone to errors, the operation reliability is high and it is more convenient, which is beneficial to quickly prepare the required acidic etching solution samples.
[0006] To achieve the above purpose, the present utility model is implemented by the following technical solutions:
[0007] A raw material tank for preparing acidic etching solution provided by the present utility model includes a tank body. A partition plate group is arranged inside the tank body, and the partition plate group is used to equally divide the inside of the tank body into multiple mutually enclosed storage chambers. Each storage chamber is adjacent to the outer wall of the tank body. A scale window for displaying the internal liquid volume of the storage chamber is arranged on the outer surface of the tank body. A plurality of discharge pipes corresponding to the storage chambers one by one are arranged at the bottom of the tank body. A sealing plate for closing each storage chamber is arranged above the tank body. A plurality of ventilation holes are arranged in a circumferential array on the sealing plate, and each ventilation hole is connected to the corresponding storage chamber. A ventilation plate is also rotatably arranged above the tank body. An air inlet is arranged on the ventilation plate, and the ventilation plate is used to seal all the ventilation holes. The ventilation plate can drive the air inlet to communicate with one of the ventilation holes during rotation, so as to realize the connection between the corresponding storage chamber and the external atmospheric environment. A closing component for closing each discharge pipe is arranged at the bottom of the tank body.
[0008] Specifically, the inner diameter of the liquid discharge port of the discharge pipe is between 1.5 mm and 4 mm.
[0009] Specifically, a plurality of positioning knots are arranged on the outer wall of the tank body. The ventilation plate abuts above the plurality of positioning knots. The middle part of the ventilation plate is hollowed out. A limiting plate is installed on the sealing plate by bolt limitation, and the limiting plate is used to press the ventilation plate on the upper surface of the sealing plate.
[0010] Specifically, a pusher for pushing the ventilation plate to rotate is arranged on the ventilation plate.
[0011] Specifically, the ventilation hole includes a thin arc-shaped ventilation groove. An air inlet circle is arranged at the end of the thin arc-shaped ventilation groove. The diameter of the air inlet circle is larger than the width of the thin arc-shaped ventilation groove. The center of the thin arc-shaped ventilation groove coincides with the center of the sealing plate.
[0012] Specifically, an air pipe joint is installed at the air inlet position of the ventilation plate, and the air pipe joint is used to connect the air pipe.
[0013] Specifically, a plurality of the discharge pipes are all arranged close to the center of the tank body, and the plurality of the discharge pipes are distributed in a circumferential array with respect to each other.
[0014] Specifically, a connecting rod is provided at the bottom of the tank body. The closing assembly includes a mounting disc. A plurality of pipe blocking members are arranged on the disc surface of the mounting disc in a circumferential array along the axis of the mounting disc. The pipe blocking members are used to close the openings of each discharge pipe one by one, and the mounting disc is fixedly arranged on the connecting rod.
[0015] Specifically, a plurality of indicating labels are provided on the peripheral side of the tank body, and a plurality of prompting portions for indicating the current communicating position of the air inlet are provided on the peripheral side of the tank body.
[0016] Specifically, a screw rod is provided at the top position of the partition plate group, and the sealing plate passes through the screw rod and is fixed inside the tank body by a nut.
[0017] Compared with the prior art, the beneficial effects achieved by the present utility model are as follows:
[0018] By providing a large raw material storage tank, the present utility model sequentially divides the interior of the large raw material storage tank into a plurality of independent solution storage chambers. After being closed, the storage of the liquid in each chamber can be realized by using the atmospheric pressure without flowing out from the position of the discharge pipe. At this time, by rotating the ventilation plate, the corresponding chambers can be connected to the atmospheric pressure, so that the liquid in the chambers can flow into the reaction vessel. By arranging the required solutions in adjacent chambers in sequence, when the ventilation plate rotates in a certain direction, the corresponding solutions can be discharged from the chambers in sequence, that is, the order of adding raw materials is fixed and it is not easy to have the situation of incorrect manual adding order. Moreover, the dosage used can be read through the scale window, and the preparation work of samples with different ratios can be quickly realized, which is beneficial to quickly produce a variety of samples with different ratios, can effectively simplify the manual operation, and has higher operation reliability. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 is an overall structural schematic diagram of a raw material tank provided by an embodiment of the present utility model;
[0020] Figure 2 is an exploded structural schematic diagram of a raw material tank provided by an embodiment of the present utility model;
[0021] Figure 3 is a front view of a raw material tank provided by an embodiment of the present utility model;
[0022] Figure 4 is the present utility model Figure 3 a sectional view taken along the A-A direction of a raw material tank provided by an embodiment;
[0023] Figure 5 is the present utility modelFigure 3 Cross-sectional view of a raw material tank in the B-B direction provided by the embodiment;
[0024] Reference numerals: 1, tank body; 2, partition plate group; 3, sealing plate; 4, ventilation hole; 5, ventilation plate; 6, discharge pipe; 7, mounting disc; 8, pipe plug; 9, positioning knot; 10, limiting plate; 11, bolt; 12, nut; 13, air pipe joint; 14, pusher; 15, scale window; 16, indicating label. Detailed implementation manners
[0025] The present utility model will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present utility model, and cannot be used to limit the protection scope of the present utility model.
[0026] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "plurality" is two or more.
[0027] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood through specific situations. Embodiment
[0028] The embodiment of the utility model provides a raw material tank for preparing an acidic etching solution, which is used to add the raw materials for preparing the etching solution into the reactor one by one. It only needs to cooperate with the rotating device to control the amount of raw materials to realize the addition of multiple raw material samples. The order of addition is not easy to make mistakes, the operation reliability is high and it is more convenient, which is conducive to the rapid preparation of the required acidic etching solution samples. In order to realize the structural function of the device, the device is provided here including a tank body 1, specifically, a partition plate group 2 is provided inside the tank body 1, and the cross section of the partition plate group 2 can refer to Figure 5 As shown, the partition plate group 2 is used to divide the interior of the tank body 1 into a plurality of mutually closed storage chambers, each storage chamber is adjacent to the outer wall of the tank body 1, and is used to store a standby liquid sample to be added. In order to observe or detect the amount of the liquid sample, a scale window 15 for displaying the liquid volume inside the storage chamber can be provided on the outer surface of the tank body 1. In order to take the liquid raw material in the tank body 1, a plurality of discharge pipes 6 connected to the storage chambers one by one are provided at the bottom of the tank body 1. In order to simplify the discharge design of the discharge pipes 6 and reduce the complexity of the operation of adding raw materials as much as possible, a sealing plate 3 for sealing each storage chamber is provided above the tank body 1, as shown in FIG. Figure 2 and Figure 4As shown, by enclosing each storage chamber, a closed space can be formed in the corresponding chamber. At this time, the outlet of the discharge pipe 6 is made narrow, and the atmospheric pressure can be used to control the connection state between the corresponding storage chamber and the atmosphere, thereby controlling the supply of the raw material solution inside. For ease of operation, a number of vent holes 4 are arranged in a circular array on the sealing plate 3. Each vent hole 4 is connected to the corresponding storage chamber, and a vent plate 5 is rotatably arranged above the tank body 1. An air inlet is provided on the vent plate 5. The vent plate 5 can be used to seal all the vent holes 4 and can drive the air inlet to communicate with one of the vent holes 4 during rotation, so as to connect the corresponding storage chamber with the external atmospheric environment. Once the connection state between the storage chamber and the external air pressure is achieved, the raw material solution stored inside can flow out through the discharge pipe 6. After all the discharge pipes 6 are opened, by rotating the vent plate 5 in a specific direction, all the raw materials can be added to the reaction vessel in sequence. At this time, only by observing the indication scale of the liquid level on the surface of the tank body 1 can the amount of raw materials be controlled. Considering that all the openings need to be opened when filling the corresponding raw materials into the tank body 1 and the liquid needs to be prevented from flowing out directly from the discharge pipe 6, a closing component for temporarily closing each discharge pipe 6 is further provided at the bottom of the tank body 1. The method of taking raw materials from this raw material tank is simple, and it is easier to operate and pour into the reaction vessel. It can simplify manual operations and can perform multiple methods of rapid proportioning, with higher operation reliability and less likely to have the phenomenon of incorrect original use order. When the device is in use, it should be noted that a certain distance needs to be ensured between adjacent positions of the vent holes 4 on the sealing plate 3, so that the air inlet does not communicate with any chamber, that is, no liquid discharge operation is performed, which is convenient for observing the actual amount of liquid and making corresponding adjustments, etc.
[0029] In the raw material tank for preparing acidic etching solution provided by the embodiment of the present utility model, considering that if the liquid discharge diameter of the discharge pipe 6 is too wide, it may cause the liquid inside the storage chamber to leak directly. Therefore, as a preferred embodiment, the inner diameter of the liquid discharge port of the discharge pipe 6 is set between 1.5 mm and 4 mm.
[0030] An ingredient tank for preparing acidic etching solution provided by an embodiment of the present utility model. Considering that the ventilation plate 5 needs to be in sealing and mating contact with the sealing plate 3 and also needs to be conveniently rotated and disassembled, as a preferred assembly method, a plurality of positioning knots 9 are provided on the outer wall of the tank body 1. The ventilation plate 5 is arranged to abut above the plurality of positioning knots 9, and the middle part of the ventilation plate 5 is provided with a hollow. A limiting plate 10 is installed on the sealing plate 3 by bolts 11 for pressing the ventilation plate 5 against the upper surface of the sealing plate 3. The bolts 11 pass through the hollow position of the ventilation plate and are connected to the sealing plate 3 for pressing down the limiting plate 10, thereby abutting the ventilation plate 5 against the upper surface of the sealing plate 3. At this time, the ventilation plate 5 can be rotated within a limited range to enable the air pressure to communicate with the corresponding liquid chambers respectively. For the relevant sealing structure mating parts, elastic materials are required for sealing, which will not be elaborated here. To facilitate the rotation of the ventilation plate 5, a pusher 14 for pushing the ventilation plate 5 to rotate is provided on the ventilation plate 5.
[0031] An ingredient tank for preparing acidic etching solution provided by an embodiment of the present utility model. In order to control the flow rate of the liquid and prevent the flow rate from being too fast to accurately control the dosage or too slow to slow down the preparation rhythm. To solve the above problems, the ventilation hole 4 can be provided with a fine arc-shaped ventilation groove, as Figure 2 shown. Specifically, an air inlet round opening is provided at the end of the fine arc-shaped ventilation groove, and the diameter of the air inlet round opening is larger than the width of the fine arc-shaped ventilation groove. Through the above setting, during the rotation of the ventilation plate 5, it can first contact the air inlet round opening for rapid feeding. When the liquid dosage reaches a certain level, the air inlet position can be rotated to the position of the fine arc ventilation groove, thereby reducing the air intake volume, so that when the liquid flow rate is too fast, a certain degree of negative pressure can be generated in its chamber to avoid the liquid flow rate from being too fast, and thus the liquid discharge action can be slowed down. Considering the circumferential rotation range of the air inlet, it is necessary to control the center of the fine arc-shaped ventilation groove to coincide with the center of the sealing plate 3.
[0032] An ingredient tank for preparing acidic etching solution provided by an embodiment of the present utility model. In order to ensure that unnecessary liquid does not leak out from the discharge pipe 6, the smaller the diameter of the discharge pipe 6, the better. However, the smaller the diameter of the discharge pipe 6, the slower the liquid flow rate, which will affect the preparation efficiency. In order to increase the liquid discharge rate when the flow rate of the discharge pipe 6 is too small, an air pipe joint 13 can be installed at the air inlet position of the ventilation plate 5. The air pipe joint 13 is used to connect an air pipe with a certain air pressure and can be used to quickly discharge the raw material liquid in the corresponding chamber to the outside. In order to improve the accuracy of receiving materials at the material receiving port position or to facilitate the discharge and receiving of materials, a plurality of discharge pipes 6 can be arranged close to the center of the tank body 1, and the plurality of discharge pipes 6 are arranged in a circumferential array with respect to each other.
[0033] An ingredient tank for preparing acidic etching solution provided by an embodiment of the present utility model specifically provides a closing assembly for simply closing the discharge pipe 6. Specifically, a connecting rod is provided at the bottom of the tank body 1 here. The closing assembly includes an installation disc 7. A plurality of pipe plugs 8 are arranged on the surface of the disc body of the installation disc 7 in a circumferential array along the axis of the installation disc 7. The pipe plugs 8 are used to close the openings of each discharge pipe 6 one by one (including using an elastic ring material at the bottom to ensure the sealing effect). The installation disc 7 is fixedly arranged on the connecting rod. Preferably, mechanisms such as bolts can be used for locking. This method can simultaneously close multiple discharge pipes 6, avoiding the cumbersome operation of opening the pipe orifices one by one when preparing the etching solution. After the preparation requirements are completed, they can also be closed simultaneously. Before closing, the inside of the pipe plugs 8 should be cleaned and dried to ensure that their cleanliness does not contaminate the remaining liquid in the tank body 1.
[0034] An ingredient tank for preparing acidic etching solution provided by an embodiment of the present utility model. In order to facilitate manual judgment of what raw material solution needs to be added to the corresponding chamber, several indication labels 16 can be provided on the peripheral side of the tank body 1. In order to facilitate prompting the connection position of the current air inlet, several prompting parts for indicating the connection position of the current air inlet can also be provided on the peripheral side of the tank body 1, such as at the corresponding moving position, gray scale bar corresponding position prompting, etc.
[0035] An ingredient tank for preparing acidic etching solution provided by an embodiment of the present utility model. In order to facilitate the locking, installation and fixation of the sealing plate 3, a screw rod can be provided at the top position of the partition plate group 2, and the sealing plate 3 is arranged to pass through the screw rod and is fixed inside the tank body 1 by a nut 12, as Figure 4 shown. By tightening with the nut 12, the sealing plate 3 can ensure good sealing performance of each chamber.
[0036] The above are only the preferred embodiments of the present utility model. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the technical principle of the present utility model, several improvements and deformations can be made, and these improvements and deformations should also be regarded as the protection scope of the present utility model.
Claims
1. A raw material tank for preparing acidic etching solution, characterized in that, It includes a tank body (1). Inside the tank body (1), there is a partition plate group (2). The partition plate group (2) is used to equally divide the inside of the tank body (1) into a plurality of mutually enclosed storage chambers. Each storage chamber is adjacent to the outer wall of the tank body (1). On the outer surface of the tank body (1), there is a scale window (15) for displaying the internal liquid volume of the storage chamber. At the bottom of the tank body (1), there are several discharge pipes (6) corresponding to and communicating with the storage chambers one by one. Above the tank body (1), there is a sealing plate (3) for closing each storage chamber. On the sealing plate (3), several vent holes (4) are arranged in a circumferential array. Each vent hole (4) is connected to the corresponding storage chamber. Above the tank body (1), there is also a rotatably arranged vent plate (5). An air inlet is provided on the vent plate (5). The vent plate (5) is used to seal all the vent holes (4). The vent plate can drive the air inlet to communicate with one of the vent holes (4) during rotation, so as to connect the corresponding storage chamber with the external atmospheric environment. At the bottom of the tank body (1), there is a closing component for closing each discharge pipe (6).
2. The raw material tank for preparing acidic etching solution according to claim 1, wherein The inner diameter of the liquid discharge port of the discharge pipe (6) is between 1.5 mm and 4 mm.
3. A raw material tank for preparing an acidic etching solution according to claim 1, characterized in that, A number of positioning knots (9) are provided on the outer wall of the tank body (1). The vent plate (5) abuts above the plurality of positioning knots (9). The middle of the vent plate (5) is hollowed out. A limiting plate (10) is installed on the sealing plate (3) by bolts (11) for limiting. The limiting plate (10) is used to press the vent plate (5) on the upper surface of the sealing plate (3).
4. A raw material tank for preparing an acidic etching solution according to claim 3, characterized in that, A pusher (14) for pushing the vent plate (5) to rotate is provided on the vent plate (5).
5. A raw material tank for preparing an acidic etching solution according to claim 1, characterized in that, The vent hole (4) includes a thin arc-shaped vent groove. The end of the thin arc-shaped vent groove is provided with an air inlet circle. The diameter of the air inlet circle is larger than the width of the thin arc-shaped vent groove. The center of the thin arc-shaped vent groove coincides with the center of the sealing plate (3).
6. The raw material tank for preparing acidic etching solution according to claim 1, characterized in that, A trachea joint (13) is installed at the air inlet position of the vent plate (5). The trachea joint (13) is used to connect the trachea.
7. A raw material tank for preparing an acidic etching solution according to claim 1, characterized in that, The plurality of discharge pipes (6) are all arranged close to the center of the tank body (1). The plurality of discharge pipes (6) are distributed in a circumferential array with respect to each other.
8. A raw material tank for preparing an acidic etching solution according to claim 1, characterized in that, A connecting rod is provided at the bottom of the tank body (1). The closing component includes an installation disc (7). On the disc surface of the installation disc (7), a number of pipe plugs (8) are arranged in a circumferential array along the axis of the installation disc (7). The pipe plugs (8) are used to close the openings of each discharge pipe (6) one by one. The installation disc (7) is fixedly arranged on the connecting rod.
9. The raw material tank for preparing acidic etching solution according to claim 1, characterized in that, A number of indication labels (16) are provided on the peripheral side of the tank body (1). A number of prompting parts for indicating the current connection position of the air inlet are provided on the peripheral side of the tank body (1).
10. The raw material tank for preparing an acidic etching solution according to claim 1, characterized in that, A screw rod is provided at the top position of the partition plate group (2). The sealing plate (3) passes through the screw rod and is fixed inside the tank body (1) by a nut (12).