Sintering feeding device and sintering equipment

Abstract

The utility model belongs to the field of semiconductor sintering equipment, and particularly relates to a sintering feeding device and sintering equipment. The sintering feeding device comprises a rack, a cover plate, a supporting plate and a material carrying conveying assembly, the rack is provided with a containing cavity, the supporting plate is located in the containing cavity, the surface of the rack is further provided with a feeding port communicating with the containing cavity, the hot-pressing station is arranged on the supporting plate, and the material carrying conveying assembly is slidably connected with the supporting plate and can slide between the feeding port and the hot-pressing station in a reciprocating mode. The cover plate has a first state for opening the feeding port and a second state for covering the feeding port, and when the cover plate is in the first state, the part, at the feeding port, of the material carrying and conveying assembly is exposed; and when the cover plate is in the second state, the material carrying and conveying assembly retracts into the containing cavity and moves to the hot-pressing station. Due to the fact that the cover plate has the first state and the second state, when the feeding port is opened and closed, automatic conveying of the material tray is achieved, manual operation is reduced, and feeding or discharging convenience is improved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor sintering equipment, and particularly relates to a sintering feeding device and a sintering equipment. Background Art

[0002] Power semiconductor devices need to withstand high current, high voltage and high energy density, which requires the packaging interconnect materials to have excellent electrical conductivity, thermal conductivity and mechanical properties. With the improvement of device integration and the gradual commercialization of the third-generation semiconductors represented by silicon carbide, the traditional connection methods can no longer meet the requirements of power devices in terms of heat dissipation, electrical conductivity and mechanical properties. Under this background, new packaging methods represented by the sintered silver process have gradually become the mainstream technology for power device packaging.

[0003] However, after sintering is completed on the current sintering equipment, it is necessary to open the rack door on the rack. The rack door is generally arranged to be flipped. During the opening process, two handles on the rack door are grasped by hand and then the rack door is pushed upward, so that feeding or loading operations can be carried out. Generally, the rack door is relatively heavy. Opening the rack door manually and then carrying out loading or feeding makes the whole process time-consuming and laborious, resulting in inconvenient operation. Summary of the Utility Model

[0004] The purpose of the embodiment of the present application is to provide a sintering feeding device, aiming to solve the problem of how to improve the convenience of loading or feeding.

[0005] To achieve the above purpose, the technical solution adopted in the present application is as follows:

[0006] In a first aspect, a sintering feeding device is provided for loading a target object to a hot pressing station. The sintering feeding device includes a rack, a cover plate, a support plate and a material-carrying conveying component. The rack has a receiving cavity and the support plate is located in the receiving cavity. A feeding port communicating with the receiving cavity is further opened on the surface of the rack. The hot pressing station is arranged on the support plate. The material-carrying conveying component is slidably connected to the support plate and can reciprocally slide between the feeding port and the hot pressing station. The cover plate has a first state of opening the feeding port and a second state of closing the feeding port. When the cover plate is in the first state, the material-carrying conveying component is partially exposed at the feeding port for loading or unloading the target object; when the cover plate is in the second state, the material-carrying conveying component retracts into the receiving cavity and moves to the hot pressing station.

[0007] In some embodiments, the cover plate is slidably connected to the rack, and the cover plate slides relative to the rack by a predetermined distance to switch between the first state and the second state.

[0008] In some embodiments, the cover plate is rotatably arranged at the feeding port, and the cover plate rotates relative to the frame by a predetermined angle to switch between the first state and the second state.

[0009] In some embodiments, the sintering feeding device further includes a rotating shaft located at the feeding port and rotatably connected to the frame, and a flipping driver connected to the frame and used to drive the rotating shaft to rotate. The cover plate is connected to the rotating shaft.

[0010] In some embodiments, the sintering feeding device further includes a support seat connected to the frame. Two support seats are arranged at intervals along the axial direction of the rotating shaft. The two ends of the rotating shaft are respectively rotatably connected to the two support seats, and the flipping driver is connected to one of the support seats.

[0011] In some embodiments, the shape of the feeding port is circular, oval or polygonal.

[0012] In some embodiments, the material-carrying conveying assembly includes a material-carrying tray for placing the target object and guide rails arranged on the support plate. The two ends of the guide rails respectively extend towards the feeding port and the hot pressing station, and two guide rails are arranged at intervals. The two ends of the material-carrying tray are respectively slidably connected to the two guide rails.

[0013] In some embodiments, the material-carrying conveying assembly further includes a synchronous belt rotatably arranged along the length direction of the guide rail, a rotatably arranged synchronous transmission shaft, and a synchronous driver for driving the synchronous transmission shaft to rotate. One end of the synchronous belt is drivingly connected to the synchronous transmission shaft, and the material-carrying tray is connected to the synchronous belt.

[0014] In some embodiments, two synchronous belts are arranged at intervals. The two synchronous belts are respectively drivingly connected to the two ends of the synchronous transmission shaft, and the two sides of the material-carrying tray are respectively connected to the two synchronous belts.

[0015] In a second aspect, a sintering device is provided, which includes the sintering feeding device. The sintering device further includes a heating structure located in the accommodating cavity and arranged at the hot pressing station.

[0016] The beneficial effects of the present application are as follows: The sintering feeding device includes a frame, a cover plate, a support plate and a material-carrying conveying assembly. By reciprocatingly sliding the material-carrying conveying assembly between the feeding port and the hot pressing station, the feeding and conveying of the tray from the feeding port to the hot pressing station or the discharging and conveying from the hot pressing station to the feeding port are realized. The frame provides a stable support structure. By opening a feeding port on the frame, and the cover plate has a first state and a second state. When opening and closing the feeding port, the automatic conveying of the tray is realized, reducing manual operation and improving the convenience of feeding or discharging. Brief Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments or exemplary technical descriptions. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 is a schematic three-dimensional structure diagram of the sintering equipment provided by the embodiment of the present application with the cover plate in the first state;

[0019] Figure 2 is a schematic three-dimensional structure diagram of the sintering equipment provided by another embodiment of the present application with the cover plate in the second state;

[0020] Figure 3 is Figure 1 an assembly schematic diagram of the material-carrying conveying component and the support plate of;

[0021] Figure 4 is Figure 3 a partial explosion diagram of.

[0022] Among them, each reference numeral in the figure:

[0023] 100, sintering equipment; 101, frame; 102, cover plate; 103, feeding port; 20, material-carrying conveying component; 22, material-carrying tray; 21, fixture; 11, flipping driver; 12, rotating shaft; 13, support seat; 30, support plate; 23, guide rail; 25, synchronous belt; 105, hot pressing station; 24, synchronous driver; 26, synchronous transmission shaft; Detailed Embodiments

[0024] In order to make the purpose, technical solutions and advantages of the present application clearer, the following further details the present application in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0025] It should be noted that when a component is referred to as "fixed to" or "arranged on" another component, it can be directly on the other component or indirectly on the other component. When a component is referred to as "connected to" another component, it can be directly or indirectly connected to the other component. The orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to this application. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances. The terms "first" and "second" are only used for the purpose of convenient description, and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of technical features. The meaning of "a plurality" is two or more, unless otherwise specifically defined.

[0026] Please refer to Figures 1 to 3 , an embodiment of the present application provides a sintering feeding device and a sintering device 100 having the same. The sintering feeding device can feed a target object to perform sintering on the target object, or discharge the sintered target object for subsequent sintering of the target object. The target object includes a plurality of semiconductor devices, and the plurality of semiconductor devices are all arranged on a tray, and are moved and sintered with the tray as a carrier.

[0027] Please refer to Figures 1 to 3 , a sintering feeding device for loading a tray to a hot pressing station 105. The sintering feeding device includes a frame 101 erected in the vertical direction, a cover plate 102, a horizontally arranged support plate 30, and a material-carrying conveying assembly 20. The frame 101 has a receiving cavity, and the support plate 30 is laid flat in the receiving cavity. A feeding port 103 communicating with the receiving cavity is also opened on the surface of the frame 101. One end of the feeding port 103 is adjacent to the support plate 30. The hot pressing station 105 is arranged at the central position of the support plate 30. The material-carrying conveying assembly 20 is slidably connected to the support plate 30 and can reciprocate between the feeding port 103 and the hot pressing station 105. The cover plate 102 has a first state of opening the feeding port 103 and a second state of closing the feeding port 103. When the cover plate 102 is in the first state, a part of the material-carrying conveying assembly 20 is exposed at the feeding port 103 for loading the tray or discharging the sintered tray; when the cover plate 102 is in the second state, the material-carrying conveying assembly 20 retracts into the receiving cavity and moves to the hot pressing station 105. That is, the material-carrying conveying assembly 20 conveys the tray carrying the material to be sintered to the hot pressing station 105 for subsequent sintering.

[0028] The sintering feeding device provided by this application includes a frame 101, a cover plate 102, a support plate 30, and a material-carrying conveying assembly 20. By reciprocatingly sliding the material-carrying conveying assembly 20 between the feeding port 103 and the hot pressing station 105, the feeding and conveying of the tray from the feeding port 103 to the hot pressing station 105, or the discharging and conveying from the hot pressing station 105 to the feeding port 103 are realized. The frame 101 provides a stable support structure. By opening the feeding port 103 on the frame 101, and the cover plate 102 has a first state and a second state. When opening and closing the feeding port 103, the automatic conveying of the tray is realized, reducing manual operation and improving the convenience of feeding or discharging.

[0029] Please refer to Figures 1 to 3 , in some embodiments, the cover plate 102 is slidably connected to the frame 101, and the cover plate 102 slides a predetermined distance relative to the frame 101 to switch between the first state and the second state. The cover plate 102 can slide a predetermined distance relative to the frame 101 in the horizontal direction or in the vertical direction, and the predetermined distance can be the length of the cover plate 102 in the horizontal direction or the length in the vertical direction, so as to be able to open or close the feeding port 103.

[0030] Please refer to Figures 2 to 4 , optionally, by slidably connecting the cover plate 102 and the frame 101 in the vertical direction, the cover plate 102 can slide a predetermined distance relative to the frame 101 and switch between the first state and the second state, realizing the flexible opening and closing of the cover plate 102. The predetermined distance is the length of the feeding port 103 in the sliding direction. It facilitates the feeding and discharging operations of the tray, ensures the sealing of the feeding port 103 in the non-working state, prevents dust and impurities from entering, guarantees the cleanliness and safety of the production environment, and improves the stability and service life of the equipment.

[0031] Please refer to Figures 1 to 3 , in some embodiments, the cover plate 102 is rotatably arranged at the feeding port 103, and the cover plate 102 rotates a predetermined angle relative to the frame 101 to switch between the first state and the second state. The rotation angle can be greater than 90 degrees, such as 100 degrees, 120 degrees, so that the cover plate 102 can fully open the feeding port 103.

[0032] Please refer to Figures 2 to 4 , optionally, by rotatably arranging the cover plate 102 at the feeding port 103, the cover plate 102 can rotate a predetermined angle relative to the frame 101 and switch between the first state and the second state, realizing the flexible control of the cover plate 102. Simplify the operation of the cover plate 102, reduce the wear of mechanical transmission components, increase the reliability and durability of the cover plate 102, and improve production efficiency.

[0033] Please refer to Figures 1 to 3, in some embodiments, the sintering feeding device further includes a rotating shaft 12 located at the feeding port 103 and rotatably connected to the frame 101, and a flipping driver 11 connected to the frame 101 and used to drive the rotating shaft 12 to rotate. The cover plate 102 is connected to the rotating shaft 12. The flipping driver 11 can be a servo motor.

[0034] Please refer to Figures 2 to 4 , optionally, the rotating shaft 12 is located in the accommodating cavity, or the rotating shaft 12 is arranged in the sandwich layer of the frame 101. By arranging the rotating shaft 12 and the flipping driver 11 at the feeding port 103 and connecting the cover plate 102 to the rotating shaft 12, the automatic flipping control of the cover plate 102 is realized. The flipping driver 11 drives the rotating shaft 12 to rotate, which can accurately control the opening and closing positions of the cover plate 102, improve the operation accuracy and efficiency, reduce the labor intensity of manual operation, enhance the automation level and operation stability of the equipment, and is suitable for the automatic production line.

[0035] Please refer to Figures 1 to 3 , in some embodiments, the sintering feeding device further includes a support seat 13 connected to the frame 101. Two support seats 13 are arranged at intervals along the axial direction of the rotating shaft 12. The two ends of the rotating shaft 12 are respectively rotatably connected to the two support seats 13, and the flipping driver 11 is connected to one of the support seats 13. By the forward rotation or reverse rotation of the flipping driver 11, the cover plate 102 can be switched between the first state and the second state.

[0036] Optionally, by arranging the support seat 13 on the frame 101 and arranging two support seats 13 at intervals along the axial direction of the rotating shaft 12, the support and stability of the rotating shaft 12 are enhanced. The flipping driver 11 is connected to one of the support seats 13, realizing the reliable drive of the rotating shaft 12, ensuring the smooth rotation of the rotating shaft 12, reducing mechanical vibration and offset, improving the accuracy and stability of the flipping of the cover plate 102, and being suitable for high-precision production equipment.

[0037] It can be understood that the flipping driver 11 can drive the rotating shaft 12 through a coupling.

[0038] Optionally, an induction switch is further provided on the frame 101. After the flipping driver 11 rotates forward and drives the rotating shaft 12 to trigger the induction switch, the flipping driver 11 stops, and the cover plate 102 is in the first state. Then, by the reverse rotation of the flipping driver 11, the cover plate 102 is switched to the second state.

[0039] Please refer to Figures 1 to 3 , in some embodiments, the shape of the feeding port 103 is circular, elliptical or polygonal.

[0040] Optionally, since the shape of the feeding port 103 is circular, oval or polygonal, different shapes of the feeding port 103 can be selected according to actual requirements to adapt to trays of different sizes and shapes. This flexible design improves the adaptability and versatility of the equipment, can meet diverse production requirements, and expands the application scope of the equipment.

[0041] Please refer to Figures 1 to 3 , in some embodiments, the loading and conveying assembly 20 includes a loading tray 22 for placing the tray and guide rails 23 arranged on the support plate 30. The two ends of the guide rails 23 extend towards the feeding port 103 and the hot pressing station 105 respectively, and two guide rails 23 are arranged at intervals. The two ends of the loading tray 22 are respectively slidably connected to the two guide rails 23. A fixture 21 for fixing the tray is provided on the loading tray 22.

[0042] Optionally, by providing the loading and conveying assembly 20, which includes a loading tray 22 and guide rails 23, smooth conveyance of the tray on the support plate 30 is achieved. The two ends of the guide rails 23 extend to the feeding port 103 and the hot pressing station 105 respectively, ensuring accurate positioning of the loading tray 22 during the feeding process, enabling the tray to be loaded or unloaded at the feeding port 103 and sintered at the hot pressing station 105, improving the smoothness and accuracy of tray conveyance, and reducing mechanical friction and vibration.

[0043] Please refer to Figures 1 to 3 , in some embodiments, the loading and conveying assembly 20 further includes a synchronous belt 25 rotatably arranged along the length direction of the guide rails 23, a synchronous drive shaft 26 rotatably arranged, and a synchronous driver 24 for driving the synchronous drive shaft 26 to rotate. One end of the synchronous belt 25 is drivingly connected to the synchronous drive shaft 26, and the loading tray 22 is connected to the synchronous belt 25.

[0044] Optionally, by providing a synchronous belt 25, a synchronous drive shaft 26 and a synchronous driver 24 in the loading and conveying assembly 20, synchronous conveyance of the loading tray 22 is achieved. The synchronous belt 25 is drivingly connected to the synchronous drive shaft 26, ensuring smooth movement of the loading tray 22 on the guide rails 23. It improves the coordination and synchronism of the conveying process, reduces errors and offsets, and realizes a high-precision and high-efficiency automated production line.

[0045] Please refer to Figures 2 to 4 , in some embodiments, two synchronous belts 25 are arranged at intervals. The two synchronous belts 25 are respectively drivingly connected to the two ends of the synchronous drive shaft 26, and the two sides of the loading tray 22 are respectively connected to the two synchronous belts 25.

[0046] Optionally, one end of each of the two synchronous belts 25 is respectively rotatably connected to two support seats 13, and the rotating shaft 12 and the synchronous drive shaft 26 are respectively located at the two ends of the guide rails 23.

[0047] Optionally, by arranging two synchronous belts 25 at intervals and respectively drivingly connecting the two ends of the synchronous transmission shaft 26, the uniform force on both sides of the material-carrying tray 22 is ensured, the stability of the material-carrying tray 22 and the reliability of the conveying process are improved, mechanical failures and downtime are reduced, and a production line capable of continuous long-term operation can be realized.

[0048] Please refer to Figures 2 to 4 , the present utility model also proposes a sintering device 100, which includes a sintering feeding device. The specific structure of the sintering feeding device refers to the above-mentioned embodiment. Since the sintering device 100 adopts all the technical solutions of the above-mentioned all embodiments, it also has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, and will not be elaborated here one by one.

[0049] In some embodiments, the sintering device 100 further includes a heating structure located in the accommodating cavity and arranged at the hot pressing station 105.

[0050] Optionally, by integrating the sintering feeding device in the sintering device 100, the full-automatic operation of the material tray from loading to the hot pressing station 105 is realized. The heating structure arranged at the hot pressing station 105 can uniformly heat and sinter the material tray, improving the efficiency and quality of the sintering process.

[0051] The above are only optional embodiments of the present application and are not used to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the scope of the claims of the present application.

Claims

1. A sintering feeding device for feeding a target object to a hot pressing station, characterized in that, The sintering feeding device includes a frame, a cover plate, a support plate, and a material-carrying conveying assembly. The frame has a receiving cavity, and the support plate is located within the receiving cavity. A feeding opening communicating with the receiving cavity is further formed on the surface of the frame. The hot pressing station is arranged on the support plate. The material-carrying conveying assembly is slidably connected to the support plate and can reciprocally slide between the feeding opening and the hot pressing station. The cover plate has a first state of opening the feeding opening and a second state of closing the feeding opening. When the cover plate is in the first state, a part of the material-carrying conveying assembly is exposed at the feeding opening for loading or unloading the target object; when the cover plate is in the second state, the material-carrying conveying assembly retracts into the receiving cavity and moves to the hot pressing station.

2. The sintering feeding device according to claim 1, characterized in that: The cover plate is slidably connected to the frame, and the cover plate slides relative to the frame by a predetermined distance to switch between the first state and the second state.

3. The sintering feeding device according to claim 1, wherein: The cover plate is rotatably arranged at the feeding opening, and the cover plate rotates relative to the frame by a predetermined angle to switch between the first state and the second state.

4. The sintering feeding device according to claim 3, wherein: The sintering feeding device further includes a rotating shaft located at the feeding opening and rotatably connected to the frame, and a flipping driver connected to the frame and used to drive the rotating shaft to rotate. The cover plate is connected to the rotating shaft.

5. The sintering feeding device according to claim 4, wherein: The sintering feeding device further includes a support seat connected to the frame. Two support seats are arranged at intervals along the axial direction of the rotating shaft. The two ends of the rotating shaft are respectively rotatably connected to the two support seats, and the flipping driver is connected to one of the support seats.

6. The sintering feeding device according to any one of claims 1-5, characterized in that: The shape of the feeding opening is circular, oval, or polygonal.

7. The sintering feeding device according to any one of claims 1-5, characterized in that: The material-carrying conveying assembly includes a material-carrying tray for placing the target object and guide rails arranged on the support plate. The two ends of the guide rails respectively extend towards the feeding opening and the hot pressing station, and two guide rails are arranged at intervals. The two ends of the material-carrying tray are respectively slidably connected to the two guide rails.

8. The sintering feeding device according to claim 7, characterized in that: The material-carrying conveying assembly further includes a synchronous belt rotatably arranged along the length direction of the guide rail, a rotatably arranged synchronous transmission shaft, and a synchronous driver used to drive the synchronous transmission shaft to rotate. One end of the synchronous belt is drivingly connected to the synchronous transmission shaft, and the material-carrying tray is connected to the synchronous belt.

9. The sintering feeding device according to claim 8, characterized in that: Two synchronous belts are arranged at intervals. The two synchronous belts are respectively drivingly connected to the two ends of the synchronous transmission shaft, and the two sides of the material-carrying tray are respectively connected to the two synchronous belts.

10. A sintering device, characterized in that, Including the sintering feeding device according to any one of claims 1-9, the sintering equipment further includes a heating structure located within the receiving cavity and arranged at the hot pressing station.

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