PVD (Physical Vapor Deposition) equipment transmission transition device

Abstract

The utility model relates to a PVD (Physical Vapor Deposition) equipment transmission transition device which comprises a transmission cavity, a rotating mechanism, a blocking piece and a pressing mechanism, and an opening is formed in one side of the transmission cavity; the rotating mechanism comprises a rotating driving assembly and a rotating shaft located in the conveying cavity, and the rotating driving assembly is connected with the rotating shaft and used for driving the rotating shaft to rotate around the axis of the rotating shaft. The stopper is connected with the rotating shaft; the device has a blocking state, when the device is in the blocking state, the blocking piece is located at the opening of the transmission cavity to block the opening, and the pressing mechanism abuts against the blocking piece. According to the PVD equipment transmission transition device, the pressing mechanism abuts against the blocking piece, the rotary driving assembly drives the rotary shaft to drive the blocking piece to shield the opening of the transmission cavity, different vacuum coating cavities are prevented from being directly communicated with the outside to cause pressure relief, vacuum leakage is prevented, and equipment operation is not affected.

Description

Technical Field

[0001] The utility model relates to a transmission and transition device for a PVD device. Background Art

[0002] In existing multiple vacuum coating chambers, two vacuum coating chambers are arranged adjacent to each other. There is a problem that the vacuum coating chamber is directly communicated with the outside world, resulting in pressure relief, which affects the operation of the device and the coating effect. Content of the Utility Model

[0003] The purpose of the utility model is to provide a transmission and transition device for a PVD device to prevent the vacuum chamber from being directly communicated with the outside world.

[0004] To achieve the above purpose, the technical scheme adopted by the utility model is:

[0005] A transmission and transition device for a PVD device includes a transmission chamber, a rotation mechanism, a blocking member, and a pressing mechanism. An opening is provided on one side of the transmission chamber. The rotation mechanism includes a rotation driving component and a rotating shaft. The rotating shaft is located in the transmission chamber, and the rotation driving component is connected to the rotating shaft for driving the rotating shaft to rotate around its own axis. The blocking member is connected to the rotating shaft.

[0006] The device has a blocking state. When in the blocking state, the blocking member is located at the opening of the transmission chamber to block the opening, and the pressing mechanism presses against the blocking member.

[0007] According to some embodiments of the utility model, the blocking member includes a baffle and a blocking rod. The extending direction of the baffle is the same as the extending direction of the rotating shaft. The blocking rod is connected to both the rotating shaft and the baffle, and the blocking rod is perpendicular to the baffle. The pressing mechanism is used to press against the blocking rod.

[0008] According to some embodiments of the utility model, a groove is provided in the lower part of one side surface of the blocking rod away from the baffle, and the groove is recessed towards the baffle. The pressing mechanism is used to press against the groove.

[0009] According to some embodiments of the utility model, the rotation driving component includes a support member, a rotation driving member, and a hinge member. The support member and the rotation driving member are both located outside the transmission chamber. The main body of the rotation driving member is rotatably connected to the support member, and the driving shaft of the rotation driving member is hinged to the rotating shaft through the hinge member. The driving shaft of the rotation driving member extends in the vertical direction.

[0010] According to some implementation aspects of the present utility model, the pressing mechanism includes a pressing driving member, a connecting member, and a pressing wheel. The extending direction of the connecting member is parallel to the extending direction of the rotating shaft. The pressing driving member is connected to the connecting member for driving the connecting member to move along its extending direction. The pressing wheel is arranged on the connecting member, and the center line of the pressing wheel is perpendicular to the extending direction of the rotating shaft.

[0011] According to some implementation aspects of the present utility model, a plurality of pressing wheels are arranged, and the plurality of pressing wheels are sequentially arranged along the extending direction of the connecting member.

[0012] According to some implementation aspects of the present utility model, two rotating driving assemblies are provided, and two pressing driving members are provided. The two pressing driving members are respectively connected to opposite ends of the connecting member.

[0013] According to some implementation aspects of the present utility model, the connecting member includes a first connecting plate and a second connecting plate. The first connecting plate is connected to the pressing driving member, the second connecting plate is connected to the first connecting plate, and the pressing wheel is arranged on the second connecting plate.

[0014] According to some implementation aspects of the present utility model, the second connecting plate includes a plate body and an extension plate. The extension plate is arranged on a side of the plate body away from the blocking member, and the extension plate is connected to the first connecting plate.

[0015] According to some implementation aspects of the present utility model, the pressing mechanism further includes a fixing member and a rotating member. The fixing member is fixedly connected to the inner side wall of the transmission cavity, and opposite ends of the rotating member are respectively rotatably connected to the fixing member and the connecting member.

[0016] According to some implementation aspects of the present utility model, two rotating members are provided, and the two rotating members are respectively located on opposite sides of the plate body.

[0017] According to some implementation aspects of the present utility model, a viewing window is provided on the transmission cavity.

[0018] Due to the application of the above technical solution, the present utility model has the following advantages compared with the prior art:

[0019] The PVD equipment transmission and transition device provided by the present utility model presses against the blocking member through the pressing mechanism, and the rotating driving assembly drives the rotating shaft to drive the blocking member to block the opening of the transmission cavity, preventing the direct communication between different vacuum coating chambers and the outside world from causing pressure relief and preventing vacuum leakage, without affecting the operation of the equipment. Description of the Drawings

[0020] AppendixFigure 1 Structural diagram of the PVD equipment transmission transition device provided by the present utility model from the first perspective;

[0021] Appendix Figure 2 Structural diagram of the PVD equipment transmission transition device provided by the present utility model from the second perspective;

[0022] Appendix Figure 3 Structural diagram of the PVD equipment transmission transition device provided by the present utility model from the third perspective (one side of the transmission cavity is retained);

[0023] Appendix Figure 4 For Figure 2 Enlarged view;

[0024] Appendix Figure 5 Structural diagram of the rotation mechanism, stopper, and pressing mechanism of the PVD equipment transmission transition device provided by the present utility model from the first perspective;

[0025] Appendix Figure 6 For appendix Figure 5 Enlarged view of the rotation mechanism and pressing mechanism in

[0026] Appendix Figure 7 Structural diagram of the rotation mechanism, stopper, and pressing mechanism of the PVD equipment transmission transition device provided by the present utility model from the second perspective;

[0027] Appendix Figure 8 Structural diagram of the rotation mechanism, stopper, and pressing mechanism of the PVD equipment transmission transition device provided by the present utility model from the second perspective;

[0028] Appendix Figure 9 For appendix Figure 8 Enlarged view of the rotation mechanism and stopper in

[0029] Appendix Figure 10 Structural diagram of the rotation mechanism of the PVD equipment transmission transition device provided by the present utility model;

[0030] Appendix Figure 11 Structural diagram of the pressing mechanism of the PVD equipment transmission transition device provided by the present utility model.

[0031] In the above figures:

[0032] 1 - Transmission cavity, 11 - Opening, 12 - Visual window;

[0033] 2 - Rotation mechanism, 21 - Support member, 22 - Rotation driving member, 23 - Hinge member, 24 - Rotating shaft, 25 - Shaft seal;

[0034] 3 - Compression mechanism, 31 - Compression driving part, 32 - Compression wheel, 33 - Plate body, 34 - Extension plate, 35 - First connecting plate, 36 - Fixing part, 37 - Rotating part;

[0035] 4 - Baffle; 5 - Stop bar. Specific embodiments

[0036] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative work belong to the scope of protection of the present invention.

[0037] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0038] See Figures 1 to 11 The PVD equipment transfer and transition device shown in, the device includes a transfer chamber 1, a rotating mechanism 2, a baffle, and a compression mechanism 3, where:

[0039] In actual production, the PVD equipment transfer and transition device is used for a variety of PVD coating equipment. The PVD equipment transfer and transition device is located between two vacuum coating chambers, playing a transitional role to prevent the vacuum coating chamber from directly communicating with the outside world and causing pressure relief, without affecting the operation of the equipment.

[0040] The transfer chamber 1 is cuboid-shaped. An opening 11 is provided on one side of the transfer chamber 1, and an open end is provided on the side opposite to this side. When the opening 11 and the open end are in communication, the carrier (carrying silicon wafers) is sequentially transferred from one vacuum coating chamber, through the transfer chamber 1 to another vacuum coating chamber.

[0041] The rotating mechanism 2 includes a rotation driving assembly and a rotating shaft 24. The rotating shaft 24 is located inside the transfer chamber 1. The axial direction of the rotating shaft 24 is parallel to the extension direction of the opening 11 of the transfer chamber 1. For example, the rotating shaft 24 extends along the X-axis direction. The rotation driving assembly is connected to the rotating shaft 24 for driving the rotating shaft 24 to rotate around its own axis; the baffle is connected to the rotating shaft 24.

[0042] The device has a blocking state and a non-blocking state. When in the blocking state, the blocking member is located at the opening 11 of the transmission chamber 1 to block the opening 11, and the pressing mechanism 3 presses against the blocking member, so that the blocking member can better block the opening 11. At this time, the side of the vacuum coating chamber adjacent to the transmission chamber 1 is adjacent to the transmission chamber 1, which can prevent the vacuum coating chamber from communicating directly with the outside world to cause pressure relief, prevent vacuum leakage, and ensure the vacuum degree; when in the non-blocking state, the blocking member is away from the opening 11 of the transmission chamber 1, the opening 11 is communicated with the open end, the pressing mechanism 3 is away from the blocking member, and the carrier can sequentially transfer from one vacuum coating chamber, through the transmission chamber 1 to another vacuum coating chamber.

[0043] In this example, the blocking member includes a baffle 4 and a blocking rod 5. The extending direction of the baffle 4 is the same as the extending direction of the rotating shaft 24. The surface area of the baffle 4 is greater than or equal to the surface area of the opening 11 of the transmission chamber 1. The baffle 4 can block the opening 11. The blocking rod 5 is connected to both the rotating shaft 24 and the baffle 4. The blocking rod 5 is perpendicularly arranged with respect to the baffle 4, that is, the baffle 4 extends in the vertical direction, and the pressing mechanism 3 is used to press against the blocking rod 5.

[0044] In this example, the upper end of the blocking rod 5 is connected to the rotating shaft 24, the lower end of the blocking rod 5 extends downward to a distance exceeding the lower end of the baffle 4, and the blocking rod 5 and the baffle 4 are connected by fasteners (such as bolt-nut assemblies). A groove is formed in the lower part of the side surface of the blocking rod 5 away from the baffle 4, and the groove is recessed towards the direction close to the baffle 4. The pressing mechanism 3 is used to press against the groove. The setting of the groove is beneficial for the pressing mechanism 3 to better press the blocking rod 5.

[0045] In this example, the rotation driving assembly includes a support member 21, a rotation driving member 22, and a hinge member 23. The support member 21 and the rotation driving member 22 are both located outside the transmission chamber 1. The main body of the rotation driving member 22 is rotatably connected to the support member 21. The driving shaft of the rotation driving member 22 is hinged to the rotating shaft 24 through the hinge member 23 (one end of the hinge member 23 is fixedly connected to the rotating shaft 24, and the driving shaft of the rotation driving member 22 is rotatably connected to the other end of the hinge member 23). The driving shaft of the rotation driving member 22 extends in the vertical direction (Z-axis). Under the drive of the rotation driving member 22, the rotating shaft 24 rotates around its own axis, driving the baffle 4 to rotate, so that the baffle 4 blocks the opening 11 of the transmission chamber 1 or moves away from the opening 11 of the transmission chamber 1.

[0046] See Figures 6 - 7 , the device further includes a shaft seal 25. One end of the rotating shaft 24 is connected to the shaft seal 25, and the hinge member 23 is connected to the shaft seal 25, that is, the shaft seal 25 connects the rotating shaft 24 and the hinge member 23.

[0047] In this example, the pressing mechanism 3 includes a pressing driving member 31, a connecting member, and a pressing wheel 32. The extending direction of the connecting member is parallel to the extending direction of the rotating shaft 24. The pressing wheel 32 is rotatably arranged on the connecting member, and the center line of the pressing wheel 32 is perpendicular to the extending direction of the rotating shaft 24. The pressing driving member 31 is connected to the connecting member and is used to drive the connecting member to move along the extending direction of the connecting member. For example, when the connecting member moves towards the baffle 4, until the pressing wheel 32 presses against the blocking rod 5, so that the baffle 4 better blocks the opening 11 of the transmission cavity 1; when the connecting member moves away from the baffle 4, the pressing wheel 32 moves away from the blocking rod 5.

[0048] In a preferred embodiment, a plurality of pressing wheels 32 are provided, and the plurality of pressing wheels 32 are sequentially arranged along the extending direction of the connecting member. A plurality of blocking rods 5 can be provided, and the plurality of blocking rods 5 are sequentially arranged along the extending direction of the baffle 4. The blocking rods 5 correspond to the pressing wheels 32 one by one. When the device is in the blocking state, each blocking rod 5 presses against the corresponding pressing wheel 32, so that the baffle 4 better blocks the opening 11 of the transmission cavity 1.

[0049] See Figure 11 , the connecting member includes a first connecting plate 35 and a second connecting plate. The first connecting plate 35 is connected to the pressing driving member 31 (the first connecting plate 35 can be connected to the pressing driving member 31 through a floating joint), the second connecting plate is connected to the first connecting plate 35, and the pressing wheel 32 is rotatably arranged on the second connecting plate. Preferably, two first connecting plates 35 are provided, and the two first connecting plates 35 are arranged up and down opposite to each other. The two first connecting plates 35 are respectively arranged on the opposite sides of one end of the second connecting plate (the extending plate 34 of the second connecting plate). By providing two first connecting plates 35, the connection between the connecting member and the pressing driving member 31 is more stable.

[0050] See Figure 11 , the second connecting plate includes a plate body 33 and an extending plate 34. The extending plate 34 is arranged on the side of the plate body 33 away from the blocking member. The extending plate 34 is connected to the first connecting plate 35. The surface area of the extending plate 34 is smaller than the surface area of the plate body 33. The arrangement of the extending plate 34 facilitates the connection between the first connecting plate 35 and the second connecting plate.

[0051] The pressing mechanism 3 further includes a fixing member 36 and a rotating member 37. The fixing member 36 is fixedly connected to an inner side wall of the transmission cavity 1. The rotating member 37 is strip-shaped, and the opposite ends of the rotating member 37 are respectively rotatably connected to the fixing member 36 and the plate body 33. When the pressing driving member 31 drives the connecting member to move towards the baffle 4, the fixing member 36 remains stationary, and the rotating member 37 rotates relative to the fixing member 36 until the pressing wheel 32 presses against the blocking rod 5. The advantages of providing the fixing member 36 and the rotating member 37 are: making the movement of the connecting member more stable, without deviation during the movement of the connecting member, so that the baffle 4 better blocks the opening 11 of the transmission cavity 1.

[0052] In this example, there are two rotating members 37, and the two rotating members 37 are respectively located on the opposite sides of the plate body 33. The advantage of setting two rotating members 37 is that the movement of the connecting member is more stable and does not deviate during the movement of the connecting member.

[0053] Refer to Figure 11 , a convex portion is provided on the upper surface of the plate body 33. The convex portion is close to the first connecting plate 35. The pressing wheel 32 is located on the surface of the plate body 33 lower than the upper surface of the convex portion. The advantage of this convex portion is to support and limit the pressing wheel 32. A viewing window 12 is provided on the transfer chamber 1.

[0054] In a preferred embodiment, there are two pressing driving members 31, and the two pressing driving members 31 are respectively connected to the opposite ends of the connecting member. There are two rotation driving assemblies, and the two rotation driving assemblies are respectively connected to the opposite ends of the rotating shaft 24. The advantage of such a setting is that the rotation of the rotating shaft 24 is more stable, the movement of the connecting member is more stable, so that the baffle 4 better blocks the opening 11 of the transfer chamber 1 to ensure the vacuum degree of the overall state.

[0055] The rotation driving member and the pressing driving member in this example can be a motor or a cylinder.

[0056] The specific implementation manner of the transfer transition device of the PVD device in this example is as follows: When work is required (in a non-blocking state), the pressing mechanism 3 does not press against the blocking member, and the rotation driving assembly drives the rotating shaft 24 to drive the blocking member away from the opening 11 of the transfer chamber 1. After the carrier passes through, the rotation driving assembly drives the rotating shaft 24 to drive the blocking member to block the opening 11 of the transfer chamber 1, and the pressing mechanism 3 presses against the blocking member to prevent vacuum leakage.

[0057] The advantage of the transfer transition device of the PVD device in this example is that the pressing mechanism 3 presses against the blocking member, and the rotation driving assembly drives the rotating shaft 24 to drive the blocking member to block the opening 11 of the transfer chamber 1, preventing the direct connection between different vacuum coating chambers and the outside world from causing pressure relief, preventing vacuum leakage, and not affecting the operation of the device.

[0058] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention, and their purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and cannot be used to limit the protection scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A transmission transition device for a PVD device, characterized in that It includes a transmission cavity, a rotating mechanism, a blocking member, and a pressing mechanism. An opening is provided on one side of the transmission cavity. The rotating mechanism includes a rotation driving assembly and a rotating shaft. The rotating shaft is located within the transmission cavity, and the rotation driving assembly is connected to the rotating shaft to drive the rotating shaft to rotate about its own axis. The blocking member is connected to the rotating shaft. The device has a blocking state. When in the blocking state, the blocking member is located at the opening of the transmission cavity to block the opening, and the pressing mechanism presses against the blocking member.

2. The PVD equipment transfer and transition device according to claim 1, characterized in that, The blocking member includes a baffle and a blocking rod. The extending direction of the baffle is the same as that of the rotating shaft. The blocking rod is connected to both the rotating shaft and the baffle, and the blocking rod is perpendicular to the baffle. The pressing mechanism is used to press against the blocking rod.

3. The PVD device transfer transition device according to claim 2, characterized in that, A groove is provided in the lower part of one side of the blocking rod away from the baffle. The groove recesses towards the direction close to the baffle, and the pressing mechanism is used to press against the groove.

4. The PVD device transfer transition device according to claim 1, characterized in that, The rotation driving assembly includes a support member, a rotation driving member, and a hinge member. The support member and the rotation driving member are both located outside the transmission cavity. The main body of the rotation driving member is rotatably connected to the support member, and the driving shaft of the rotation driving member is hinged to the rotating shaft through the hinge member. The driving shaft of the rotation driving member extends in the vertical direction.

5. The PVD device transfer and transition device according to claim 1, characterized in that, The pressing mechanism includes a pressing driving member, a connecting member, and a pressing wheel. The extending direction of the connecting member is parallel to that of the rotating shaft. The pressing driving member is connected to the connecting member to drive the connecting member to move along its extending direction. The pressing wheel is provided on the connecting member, and the center line of the pressing wheel is perpendicular to the extending direction of the rotating shaft.

6. The PVD device transfer transition device according to claim 5, wherein, There are two rotation driving assemblies, and there are two pressing driving members. The two pressing driving members are respectively connected to the opposite ends of the connecting member.

7. The PVD device transfer transition device according to claim 6, wherein, The connecting member includes a first connecting plate and a second connecting plate. The first connecting plate is connected to the pressing driving member, and the second connecting plate is connected to the first connecting plate. The pressing wheel is provided on the second connecting plate.

8. The PVD device transfer transition device according to claim 7, characterized in that, The second connecting plate includes a plate body and an extension plate. The extension plate is provided on the side of the plate body away from the blocking member, and the extension plate is connected to the first connecting plate.

9. The PVD device transfer transition device according to claim 6, characterized in that, The pressing mechanism further includes a fixing member and a rotating member. The fixing member is fixedly connected to the inner side wall of the transmission cavity, and the opposite ends of the rotating member are respectively rotatably connected to the fixing member and the connecting member.

10. The PVD device transfer transition device according to claim 1, characterized in that, A viewing window is provided on the transmission cavity.

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