Vertical furnace

Abstract

The utility model provides a vertical furnace, and relates to the technical field of photovoltaic cells. The vertical furnace comprises a furnace body, a furnace cover and a heating body, and an outer furnace tube is arranged in the furnace body; a material loading seat and an inner furnace tube are arranged on the furnace cover, one end, far away from the furnace cover, of the inner furnace tube is closed, and an avoiding part for the inner furnace tube to penetrate through is arranged on the material loading seat; the heating body is arranged in the inner furnace tube and between the outer furnace tube and the furnace body; the furnace cover is matched with the furnace body, and when the furnace cover and the furnace body are closed, a closed cavity can be formed between the inner furnace tube and the outer furnace tube. The inner furnace tube is mounted on the furnace cover, so that materials and a charging tray cannot collide with the inner furnace tube during feeding, and the inner furnace tube is prevented from being damaged; and meanwhile, the installation difficulty of the inner furnace tube is reduced, and the installation and maintenance cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cells, in particular to a vertical furnace. Background Art

[0002] In the field of solar photovoltaic cell wafers, processes such as boron diffusion and phosphorus diffusion are required. For example, boron source is diffused on the front side of the silicon wafer to form a PN junction on the front side of the silicon wafer; the boron source can be BCl3, which reacts with oxygen under high temperature conditions to generate silicon oxide and boron atoms. The boron atoms diffuse into the silicon wafer, changing the conductivity of the silicon surface and forming a PN junction. Similar diffusion processes all need to be carried out in a reaction furnace.

[0003] In the existing reaction furnace with a double furnace tube structure, the inner furnace tube is usually installed and fixed inside the furnace body. Specifically, when loading materials, the materials are placed on the material tray of the lower furnace door, and the materials are arranged in advance to avoid the position of the inner furnace tube according to the position of the inner furnace tube, and then the lower furnace door is lifted to complete the loading operation. In the feeding process of this reaction furnace structure, the feeding situation inside the furnace cannot be observed, and the materials and the material tray are easy to collide with the inner furnace tube, causing damage to the inner furnace tube; at the same time, the upper end of the inner furnace tube is installed and fixed, and its installation difficulty, installation and maintenance costs are high. Summary of the Utility Model

[0004] The utility model provides a vertical furnace for processes such as boron diffusion and phosphorus diffusion of photovoltaic cell wafers. By arranging the inner furnace tube on the furnace cover, the problem that the inner furnace tube is easily damaged due to incomplete alignment of the materials and the inner furnace tube during the feeding process is solved.

[0005] The technical solution adopted by the utility model is: a vertical furnace, including,

[0006] A furnace body, which is internally provided with an outer furnace tube;

[0007] A furnace cover, which is provided with a material loading seat and an inner furnace tube. One end of the inner furnace tube far away from the furnace cover is closed, and the material loading seat is provided with an avoidance part for the inner furnace tube to pass through;

[0008] A heating body, which is arranged inside the inner furnace tube, between the outer furnace tube and the furnace body;

[0009] The furnace cover matches the furnace body, and when the two are covered, a sealed cavity can be formed between the inner furnace tube and the outer furnace tube.

[0010] Optionally, the material loading seat is a hanging furnace paddle, and the hanging furnace paddle is provided with a hanging position for hanging a carrier carrying wafers.

[0011] Optionally, the material loading seat is a material loading platform, and the furnace cover is provided with a support member for supporting the material loading platform to make the material loading platform away from the furnace cover.

[0012] Furthermore, a plurality of through holes are provided on the material loading platform.

[0013] Furthermore, the material loading platform is at least composed of two material loading units.

[0014] Furthermore, a heat insulation member is provided on the furnace cover.

[0015] More preferably, the heat insulation member is a plurality of spaced heat insulation plates.

[0016] More preferably, the heat insulation member is a heat insulation package, the heat insulation package is provided with a cavity, and a heat insulation filler is provided in the cavity.

[0017] Preferably, the vertical furnace further includes a driving device, and the driving device can drive one of the furnace body and the furnace cover to move towards the other and abut against the other.

[0018] Furthermore, the furnace body is fixedly arranged, the driving device includes a lifting arm, and a lifting seat capable of making a lifting motion relative to the lifting arm, and the furnace cover is arranged on the lifting seat.

[0019] The utility model can achieve the following beneficial effects by adopting the above technical solutions:

[0020] By installing the inner furnace tube on the furnace cover, during the feeding process, the materials can be arranged on the periphery of the inner furnace tube within the visible range. In this way, during the feeding process, the materials and the inner furnace tube will not be damaged easily due to incomplete alignment, which is beneficial to extending the service life of the inner furnace tube; at the same time, installing the inner furnace tube on the furnace cover reduces the installation difficulty of the inner furnace tube and the installation cost. Moreover, when maintaining and repairing the inside of the furnace body, there is enough space inside the furnace, which reduces the difficulty of maintaining and repairing the furnace body and the maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic structural diagram inside the vertical furnace of the utility model when it is working;

[0022] Figure 2 is a schematic installation structure diagram of the integrated material loading platform in the utility model;

[0023] Figure 3 is a schematic installation structure diagram of the split material loading platform in the utility model;

[0024] Figure 4 is a schematic structural diagram inside the vertical furnace with a heat insulation package of the utility model when it is working;

[0025] Figure 5 is a schematic diagram of the process of the driving device driving the furnace cover to feed in the utility model.

[0026] In the figure,

[0027] 100, furnace body; 110, outer furnace tube;

[0028] 200, furnace cover; 210, material-carrying seat; 211, avoidance part; 212, through hole; 210a, material-carrying platform; 220, inner furnace tube; 230, heat insulation part; 240, sealed cavity; 250, support part; 251, support bracket; 252, connecting plate;

[0029] 300, heating element;

[0030] 400, driving device; 410, lifting arm; 420, lifting seat;

[0031] 500, carrier. Detailed implementation mode

[0032] For the convenience of understanding the present utility model, the present utility model will be described more comprehensively below with reference to the relevant drawings. The preferred embodiments of the present utility model are given in the drawings. However, the present utility model can be implemented in more different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present utility model understood more thoroughly and comprehensively.

[0033] It should be noted that when an element is referred to as being "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time.

[0034] In the present utility model, unless otherwise clearly specified and limited, the first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicating that the horizontal height of the first feature is less than that of the second feature.

[0035] The present utility model provides a vertical furnace, such as Figure 1As shown in the figure, the vertical furnace includes a furnace body 100 and a furnace cover 200. Among them, an outer furnace tube 110 is installed inside the furnace body 100, and a heating element 300 is provided between the outer furnace tube 110 and the furnace body 100. The heating element 300 can heat the internal space of the outer furnace tube 110; a loading seat 210 and an inner furnace tube 220 are installed on the furnace cover 200. One end of the inner furnace tube 220 away from the furnace cover 200 is closed, and a heating element 300 (this heating element 300 is not shown in the figure) is also provided inside the inner furnace tube 220. When this heating element 300 works, it can heat the peripheral space of the inner furnace tube 220. At the same time, an avoidance portion 211 is provided on the loading seat 210, and the inner furnace tube 220 installed on the furnace cover 200 can pass through this avoidance portion 211. The furnace cover 200 matches the furnace body 100. When the two are closed, a sealed cavity 240 can be formed between the inner furnace tube 220 and the outer furnace tube 110.

[0036] In this way, by installing the inner furnace tube 220 on the furnace cover 200, when placing the material on the loading seat 210, the material can be arranged on the periphery of the inner furnace tube 220 within the visible range. In this way, during the feeding process, the material and the inner furnace tube 220 enter the furnace body 100 at the same time, and the inner furnace tube 220 will not be damaged due to incomplete alignment, which is beneficial to extending the service life of the inner furnace tube 220; at the same time, installing the inner furnace tube 220 on the furnace cover 200 reduces the installation difficulty of the inner furnace tube 220 and the installation cost. Moreover, when maintaining and repairing the inside of the furnace body 100, there is enough space inside the furnace, which reduces the difficulty of maintaining and repairing the furnace body 100 and reduces the maintenance cost. During operation, the heating element 300 between the outer furnace tube 110 and the furnace body 100 and the heating element 300 inside the inner furnace tube 220 can heat the material in the sealed cavity 240 at the same time, which can not only improve the heating efficiency of the material, but also ensure that the material is heated evenly and improve the process effect.

[0037] Since the temperature loss of the furnace cover 200 is accelerated, when the material is placed close to the furnace door, the material close to the furnace cover 200 cannot reach the process temperature. Therefore, in an alternative embodiment of the present invention, as Figure 1 shown, the loading seat 210 is a loading platform 210a, and a support member 250 is provided on the furnace cover 200. The support member 250 is used to carry the loading platform 210a so that the loading platform 210a is away from the furnace cover 200. In this way, a heat insulation area is formed between the furnace cover 200 and the loading platform 210a, and this heat insulation area can slow down the temperature loss of the material on the loading platform 210a, which is beneficial to keeping the material within a relatively stable process temperature range.

[0038] In a specific embodiment, as Figure 2As shown, the support member 250 is a support rod and sleeve structure, and the loading platform 210a is an integral structure. The loading platform 210a is provided with assembly holes matching the above-mentioned support rods. When the loading platform 210a is installed, it is placed downward from the top of the inner furnace tube 220. The inner furnace tube 220 passes through the avoidance portion 211, and at the same time, the support rod passes through the assembly holes, and the main body of the loading platform 210a is supported by the sleeve. When loading, the carrier 500 carrying the battery wafers is placed on the loading platform 210a around the inner furnace tube 220. Here, the support member 250 not only supports the loading platform 210a, but also plays a positioning role, which can prevent the loading platform 210a from changing its position during use.

[0039] At the same time, in order to ensure that the reaction gas can fully react with the material, in an improved scheme of this embodiment, as Figure 2 shown, a number of through holes 212 are provided on the loading platform 210a. By providing the through holes 212 on the loading platform 210a, when the reaction gas flows downward from above the material, the through holes 212 can reduce the obstruction to the air flow, especially ensuring that the material near the loading platform 210a can fully react with the reaction gas, and ensuring that the process effects of the materials in the same batch are basically the same. In this application, the number, arrangement, shape and size of the through holes 212 are not specifically limited, as long as it can ensure that the reaction gas can pass through the loading platform 210a so that the reaction gas can fully react with the material.

[0040] In an improved scheme of this embodiment, as Figure 3 shown, the loading platform 210a is composed of two symmetrically arranged loading units. In this way, when the loading platform 210a is installed, there is no need to install it from the top of the inner furnace tube 220 anymore, and it can be installed and spliced one by one from the side of the inner furnace tube 220, which is convenient for the installation and replacement of the loading platform 210a. In addition, if a part of the loading platform 210a is damaged, only the corresponding damaged loading unit needs to be replaced, and there is no need to replace the entire loading platform 210a, reducing the repair cost. It should be noted that when using a split-type loading platform 210a, the corresponding support member 250 also needs to be adjusted accordingly to ensure the stability of each loading unit during operation. When using two symmetric loading units as above, two more support brackets 251 can be added to the furnace cover 200, and the support brackets 251 abut against the bottom of the connection between the two symmetric loading units, and each newly added support bracket 251 can support two loading units at the same time. And the number of divided loading units forming the loading platform 210a can be adjusted according to the size and requirements of the loading platform 210a, and this application does not make specific limitations on this.

[0041] In an improved scheme of this embodiment, a heat insulation member 230 is provided on the above-mentioned furnace cover 200, as Figure 4As shown, a heat insulation member 230 is provided between the furnace cover 200 and the loading platform 210a. By providing the heat insulation member 230, the heat preservation effect of the heat insulation area can be improved, the temperature loss of the materials on the loading platform 210a can be further slowed down, and it is beneficial for the materials to be maintained within a relatively stable process temperature range. Of course, the heat insulation member 230 is also provided with an avoidance hole for the inner furnace tube 220 to pass through.

[0042] The heat insulation member 230 here can be multiple spaced-apart heat insulation plates (not shown in the figure). In addition to having good heat insulation effect itself, by arranging the multiple heat insulation plates at intervals, an air cavity is formed between the heat insulation plates, blocking the possibility of direct heat transfer between the heat insulation plates, and thus being able to better slow down the temperature loss of the materials on the loading platform 210a and improve the heat preservation effect.

[0043] As Figure 4 shown, the heat insulation member 230 here can also be a heat insulation package. The heat insulation package is provided with a cavity, and a heat insulation filler is provided in the cavity. The heat insulation filler here can be ceramic fiber thermal insulation cotton, glass fiber needle punched felt, etc., and the present application does not make specific limitations on this. Of course, the heat insulation package is preferably composed of two heat insulation units, which is convenient for the installation and replacement of the heat insulation package. It should be noted that when using a heat insulation package composed of two heat insulation units, a connecting plate 252 can be provided between the support columns. The connecting plate 252 is provided below the heat insulation package and is used to support the heat insulation package.

[0044] In an alternative embodiment of the present utility model, the loading seat 210 is a hanging furnace paddle (not shown in the figure). The hanging furnace paddle is provided with hanging positions for hanging the carriers 500 carrying wafers. By providing the hanging furnace paddle, multiple layers of carriers 500 can be hung, improving the loading capacity while also eliminating the blocking effect of the traditional loading platform 210a on the reaction gas flow, ensuring that the reaction gas can fully react with the materials. Of course, in this embodiment, the heat insulation member 230 surrounding the hanging furnace paddle can also be added on the furnace cover 200.

[0045] For example, in an embodiment, the hanging furnace paddle is installed on the furnace cover 200 in a prismatic structure and sleeved outside the inner furnace tube 220. In this way, the hanging furnace paddle can further protect the inner furnace tube 220 and avoid damaging the inner furnace tube 220 during loading. In this embodiment, the hanging position can be a hanging hole. Correspondingly, hooks are provided on the carrier 500. During loading, the loading can be completed by the cooperation of the hooks and the hanging holes.

[0046] In the above embodiments, the vertical furnace further includes a driving device 400. The driving device 400 can drive one of the furnace body 100 and the furnace cover 200 to move towards the other and abut against the other.

[0047] In a preferred embodiment, the furnace body 100 is suspended and fixedly arranged (the structure for fixing the furnace body 100 is not shown in the figure). The driving device 400 includes a lifting arm 410 and a lifting seat 420 capable of moving up and down relative to the lifting arm 410. The furnace cover 200 is arranged on the lifting seat 420. After the charging is completed, the lifting seat 420 drives the furnace cover 200 to move towards the furnace body 100, and the material and the inner furnace tube 220 are inserted into the furnace body 100 until the furnace body 100 abuts against the furnace cover 200, thus completing the feeding operation.

[0048] Certainly, in another embodiment, the furnace cover 200 can also be fixedly arranged, and the furnace body 100 is installed on the driving device 400. During feeding, the driving device 400 moves the furnace body 100 to cover the material and the inner furnace tube 220 inside it until the furnace body 100 abuts against the furnace cover 200, thus completing the feeding operation.

[0049] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vertical furnace, characterized in that, including, a furnace body (100) with an outer furnace tube (110) disposed therein; a furnace cover (200) having a material loading seat (210) and an inner furnace tube (220) thereon. One end of the inner furnace tube (220) away from the furnace cover (200) is closed, and the material loading seat (210) has an avoidance portion (211) for the inner furnace tube (220) to pass through; a heating body (300) disposed inside the inner furnace tube (220) and between the outer furnace tube (110) and the furnace body (100); the furnace cover (200) matches the furnace body (100), and when they are closed, a sealed cavity (240) can be formed between the inner furnace tube (220) and the outer furnace tube (110).

2. The vertical furnace according to claim 1, wherein The material loading seat (210) is a hanging furnace paddle with a hanging position for hanging a carrier (500) carrying wafers.

3. A vertical furnace according to claim 1, characterized in that, The material loading seat (210) is a material loading platform (210a), and the furnace cover (200) is provided with a support member (250) for supporting the material loading platform (210a) to keep the material loading platform (210a) away from the furnace cover (200).

4. The vertical furnace according to claim 3, characterized in that, The material loading platform (210a) is provided with a plurality of through holes (212).

5. A vertical furnace according to claim 3, characterized in that, The material loading platform (210a) is composed of at least two material loading units.

6. A vertical furnace according to claim 3, characterized in that The furnace cover (200) is provided with a heat insulation member (230).

7. The vertical furnace according to claim 6, characterized in that, The heat insulation member (230) is a plurality of spaced heat insulation plates.

8. The vertical furnace according to claim 6, characterized in that, The heat insulation member (230) is a heat insulation package which is provided with a cavity filled with heat insulation filler.

9. A vertical furnace according to any one of claims 1-8, characterized in that, including a driving device (400) which can drive one of the furnace body (100) and the furnace cover (200) to move towards the other and abut against the other.

10. A vertical furnace according to claim 9, characterized in that, The furnace body (100) is fixedly arranged. The driving device (400) includes a lifting arm (410) and a lifting seat (420) capable of lifting relative to the lifting arm (410), and the furnace cover (200) is disposed on the lifting seat (420).

Images