Suspended furnace paddle and vertical diffusion furnace

Abstract

The utility model provides a suspended furnace paddle and a vertical diffusion furnace, and relates to the technical field of photovoltaic cells. The suspension furnace paddle comprises a connecting body and a furnace paddle main body integrally arranged with the connecting body, a plurality of hanging positions are arranged on the furnace paddle main body, a supporting structure is arranged on each hanging position, and the supporting structures are used for carrying a carrier boat filled with materials, so that the carrier boat is suspended at the hanging positions. The utility model further provides a vertical diffusion furnace with the suspended furnace paddle. The suspension furnace paddle adopts a furnace loading mode of suspending the carrier boat, so that the furnace quantity in a vertical diffusion furnace is increased, stable reaction gas flow can be ensured to be formed between the top of the carrier boat and the bottom of the carrier boat, sufficient and effective contact between battery pieces and the reaction gas is ensured, and the processing quality of the battery pieces processed in the reaction furnace is ensured to be basically consistent.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cells, in particular to a suspended furnace paddle and a vertical diffusion furnace. Background Art

[0002] In the field of solar photovoltaic cells, it is necessary to go through processes such as boron diffusion and phosphorus diffusion, that is, the reaction gas enters from one end of the diffusion furnace, reacts with the cells in the furnace, and the reacted gas is discharged from the other end.

[0003] In existing vertical diffusion furnaces, the carrier is usually placed on a plate-type boat support platform, which will seriously hinder the flow of the reaction gas and reduce the diffusion effect, especially for the battery cells close to the boat support platform. The diffusion effect is significantly reduced; in addition, when a multi-layer boat support platform is used to increase production capacity, the upper boat support platform will block the flow of the reaction gas, and the diffusion effect of the battery cells at the lower end of the boat support platform will be significantly reduced, thereby affecting the process quality of the battery cells. Utility Model Content

[0004] The utility model provides a suspended furnace paddle, which ensures the fluidity of the reaction gas and improves the diffusion process quality of the battery sheet by adopting the method of suspending a carrier boat.

[0005] The technical solution adopted by the utility model is: a suspended furnace paddle, including a connecting body and a furnace paddle main body integrally arranged with the connecting body, the furnace paddle main body is provided with a plurality of hanging positions, the hanging positions are provided with a supporting structure, the supporting structure is used to carry a carrier boat loaded with materials so that the carrier boat is suspended in the hanging position.

[0006] Optionally, the supporting structure is a hanging hole provided on the furnace paddle body, and the carrier boat is provided with a hook matching the hanging hole.

[0007] Optionally, the supporting structure is a plurality of pairs of brackets provided on the furnace paddle body, and the brackets are used to support the carrier boat.

[0008] Preferably, a pair of the brackets are provided on the hanging position, and the pair of brackets are used to receive the crystal plates on both sides of the carrier boat, or the handles on both sides of the upper part of the carrier boat.

[0009] Preferably, two pairs of the brackets are provided on the hanging position, and at least one pair of the brackets is used to receive the handles on both sides of the upper part of the carrier boat.

[0010] Preferably, a limiting structure is provided on the bracket.

[0011] Preferably, the bracket is detachably connected to the furnace paddle body.

[0012] Preferably, the suspended furnace paddle is in the shape of a regular prism.

[0013] The present utility model also provides a vertical diffusion furnace, which includes a furnace body, a furnace door matching with the furnace body, and the hanging furnace paddle as described above. The hanging furnace paddle is installed on the furnace door.

[0014] Preferably, the vertical diffusion furnace further includes an inner furnace tube with a second heating element. The hanging furnace paddle is provided with a cavity. When the furnace door covers the furnace body, the inner furnace tube is placed in the cavity, and a sealed cavity is formed between the inner furnace tube and the outer furnace tube.

[0015] The present utility model can achieve the following beneficial effects by adopting the above technical solutions:

[0016] Compared with the platform - type carrier boat in the prior art, the hanging furnace paddle of the present utility model can hang the carrier boat on the hanging furnace paddle. When the battery wafers are undergoing the diffusion process, a stable reaction gas flow can be formed between the top and the bottom of the carrier boat (the battery wafers in this area are standing upright), ensuring that the battery wafers are in full and effective contact with the reaction gas, and ensuring that the processing quality of the battery wafers processed in the reaction furnace is basically the same. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of the hanging furnace paddle in this application;

[0018] Figure 2 It is a schematic installation structure diagram of the carrier boat and the hanging furnace paddle in the first solution of this application;

[0019] Figure 3 It is a schematic structural diagram of the hanging furnace paddle in a state of being fully loaded with carrier boats in the first solution of this application;

[0020] Figure 4 It is a schematic structural diagram of the hanging furnace paddle in a state of being fully loaded with carrier boats in the second solution of this application;

[0021] Figure 5 It is a schematic structural diagram of the hanging furnace paddle in a state of being fully loaded with carrier boats in the third solution of this application;

[0022] Figure 6 It is a schematic structural diagram of the hanging furnace paddle in a state of being fully loaded with carrier boats in the fourth solution of this application;

[0023] Figure 7 It is a schematic structural diagram of the hanging furnace paddle in a state of being fully loaded with carrier boats in the fifth solution of this application;

[0024] Figure 8 It is a schematic overall structural diagram of the single - furnace - tube vertical diffusion furnace in this application;

[0025] Figure 9 It is a schematic overall structural diagram of the double - furnace - tube vertical diffusion furnace in this application;

[0026] In Figures 1-9 ,

[0027] 100, hanging furnace paddle;

[0028] 110, connecting body; 120, furnace paddle main body; 130, hanging position; 140, support structure; 141, hanging hole; 142, bracket;

[0029] 200, carrier boat;

[0030] 210, hook; 220, crystal plate; 230, handle;

[0031] 300a, single furnace tube vertical diffusion furnace; 300b, double furnace tube vertical diffusion furnace;

[0032] 310, furnace body; 320, furnace door; 330, outer furnace tube; 340, first heating body; 350, inner furnace tube. Detailed implementation mode

[0033] For the convenience of understanding the present utility model, the present utility model will be described more comprehensively below with reference to the relevant drawings. The preferred embodiments of the present utility model are shown in the drawings. However, the present utility model can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present utility model more thorough and comprehensive.

[0034] It should be noted that when an element is referred to as being "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present utility model belongs. The terms used in the description of the present utility model in this specification are only for the purpose of describing specific embodiments and are not intended to limit the present utility model.

[0036] In the present utility model, unless otherwise clearly defined and limited, the first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicating that the horizontal height of the first feature is less than that of the second feature.

[0037] In existing vertical diffusion furnaces, the carrier boats are usually placed on a plate-shaped boat support platform. During the process execution, this boat support platform will impede the flow of reaction gases, reducing the diffusion effect. Especially for the solar cells near the boat support platform, the diffusion effect is significantly reduced. When choosing to use a multi-layer boat support platform to increase production capacity, the upper boat support platform will block the flow of reaction gases, and the solar cells on the lower layer cannot come into normal contact with the reaction gases, resulting in a significant reduction in the diffusion effect and uneven quality of the solar cells processed in the same batch of reaction furnaces.

[0038] The utility model provides a hanging furnace paddle, as Figure 1 shown, which includes a connecting body 110 and a furnace paddle main body 120 integrally provided with the connecting body 110. The hanging furnace paddle 100 is installed and connected to the furnace door 320 through the connecting body 110 to fix the overall position of the hanging furnace paddle 100 and ensure the stability of the hanging furnace paddle 100 during operation. A plurality of hanging positions 130 are provided on the furnace paddle main body 120, and a support structure 140 is provided on the hanging position 130. The support structure 140 is used to carry the carrier boat 200 loaded with materials, so that the carrier boat 200 is suspended on the hanging position 130. Here, the hanging position 130 refers to the position where a single carrier boat 200 is hung. The hanging positions 130 are distributed around the hanging furnace paddle 100 and can be set in multiple layers. The carrier boat 200 carrying the solar cells is suspended on the hanging position 130, which can ensure the process quality of the solar cells while increasing the furnace loading capacity.

[0039] Specifically, by hanging the carrier boat 200 on the hanging furnace paddle 100, when the solar cells are undergoing the diffusion process, a stable reaction gas flow can be formed between the top and the bottom of the carrier boat 200 (the solar cells in this area are standing upright, and a plurality of slots for placing the solar cells are provided on the support rods of the carrier boat), ensuring that the solar cells are in full and effective contact with the reaction gases, improving the process quality, and ensuring that the processing quality of the solar cells processed in the same batch of reaction furnaces is basically the same.

[0040] In an optional implementation of the utility model, as Figures 2-3As shown, the support structure 140 is a hanging hole 141 provided on the furnace paddle body 120. At the same time, a hook 210 matching the hanging hole 141 is provided on the carrier boat 200. When hanging the carrier boat 200, the external robotic arm grips the handles 230 on both sides of the carrier boat 200 to perform the moving operation, inserts the hook 210 into the hanging hole 141 and then lowers it. Through the cooperation of the hook 210 and the hanging hole 141, each carrier boat 200 can be suspended at the corresponding hanging position 130. Each hanging position 130 is preferably provided with four hanging holes 141 arranged in a two-by-two pattern. Correspondingly, each carrier boat 200 is provided with four hooks 210, so as to ensure the stability and reliability of each carrier boat 200 suspended on the hanging position 130. Of course, two symmetrical hanging holes 141 can also be provided at the upper part of the hanging position 130. Correspondingly, two hooks 210 are provided at the upper part of each carrier boat 200. The present application does not make specific limitations on the specific quantity and position of the hanging holes 141 and the hooks 210.

[0041] At the same time, in this embodiment, as Figures 1-3 shown, the connecting body 110 is a stepped structure, and the fixed flange is installed and abutted against the stepped structure to fix the hanging furnace paddle 100 at the pre-installation position. Of course, the connecting body 110 can also be other structures, and the present application does not make specific limitations on this.

[0042] In addition, for experimental or small-production diffusion furnaces, the furnace paddle body 120 can be designed as several hanging rods / plates (not shown in the drawings), such as arranged in a grid pattern and connected to the connecting body 110. By suspending the carrier boat 200 on the hanging rods / plates, the manufacturing cost of the diffusion furnace can be reduced.

[0043] In another alternative solution of the present utility model, as Figures 4-8 shown, the support structure 140 is several pairs of brackets 142 provided on the furnace paddle body 120, and the carrier boat 200 can be suspended at the hanging position 130 through these brackets 142. Here, the brackets 142 are preferably support plates protruding from the outer wall of the hanging furnace paddle 100, and the support plates are arranged vertically. It can effectively increase the bearing capacity of the brackets 142, extend the service life of the brackets 142, and also does not hinder the flow of reaction gas.

[0044] In one embodiment, a pair of support plates are provided at the hanging position 130, as Figure 4As shown, the pair of support plates are arranged at the bottom of the hanging position 130. When placing the carrier boat 200, the handles 230 on both sides of the carrier boat 200 are clamped by an external mechanical arm to perform the transport action, and the bottom of the crystal plates 220 on both sides of the carrier boat 200 are aligned with the upper end surfaces of the support plates and placed on the support plates. The carrier boat 200 is suspended as a whole on the side of the hanging furnace paddle 100. At the same time, steps are provided on the pair of support plates, and the steps of the two support plates are relatively arranged to form a limiting structure with a restraining effect, so that the carrier boat 200 is more stable when placed. Of course, the pair of support plates can also directly abut against the handles 230, such as Figure 5 As shown, it receives the handles 230 on both sides of the upper part of the carrier boat 200, and the carrier boat 200 can also be suspended on the side of the suspended furnace paddle 100. It should be noted that when the carrier boat 200 is suspended in this way, the extended length of the handle 230 is greater than the width of the support plate, so that the robot arm can complete the action of clamping and moving the carrier boat 200. In addition, a limit block can also be set at the end of the support plate away from the suspended furnace paddle 100, so that the handle 230 can be constrained between the limit block and the suspended furnace paddle 100, which can ensure that the carrier boat 200 can be more stably suspended on the suspended furnace paddle 100. In the present application, the limit block and the step structure are used as a limit structure to constrain the carrier boat 200, and the limit structure can be selectively changed according to actual conditions. The present application does not specifically limit the shape of the limit structure.

[0045] In this embodiment, Figures 4-7 As shown, the connector 110 is an extension of the furnace paddle main body 120, and a mounting flange is provided on the pre-installation position. A mounting groove consistent with the shape of the connector 110 is provided on the mounting flange. When fixing the suspended furnace paddle 100, the connector 110 is inserted into the mounting groove and fixed.

[0046] In addition, in other embodiments, Figure 6 As shown, the arrangement of the support plates can include both of the above-mentioned embodiments, that is, there are two pairs of support plates, one pair of support plates is used to receive the crystal plates 220 on both sides of the carrier boat 200, and the other pair of support plates is used to receive the handles 230 on both sides of the upper part of the carrier boat 200; of course, as Figure 7 As shown, the two pairs of support plates can also be used to simultaneously receive the handles 230 on both sides of the upper part of the carrier boat 200, that is, in this case, two pairs of upper and lower handles 230 are provided on both sides of the carrier boat 200. By increasing the number of support plates, it can be ensured that the carrier boat 200 can be more stably suspended on the suspension furnace paddle 100.

[0047] Of course, in other embodiments, the position and number of the support plates may be changed according to the suspension requirements of the carrier boat 200, and this application does not make any specific limitation to this.

[0048] In another embodiment of the present utility model, the support plate is detachably connected to the furnace paddle body 120 (not shown in the figure), that is, the support plate and the furnace paddle body 120 are not of an integral structure. In this case, when the support plate is damaged, the support plate can be replaced separately, reducing the maintenance cost. When the support plate is specifically arranged, it can be arranged separately, or the support plates close to each other on two adjacent hanging positions 130 can be integrally arranged, so as to increase the overall stability of the support plate. That is, in this embodiment, the support plate serves as an independent connection unit between the furnace paddle body 120 and the carrier boat 200.

[0049] In the above embodiments, the furnace paddle body 120 is preferably a regular prism. The structure of the regular prism-shaped furnace paddle body 120 can increase the overall strength of the structure of the furnace paddle body 120 and ensure the stability of the furnace paddle body 120 during operation; at the same time, the hanging positions 130 are arranged on each side surface to ensure the stability of the carrier boat 200 suspended on the side surface. As Figures 1-7 shown, a regular quadrangular prism-shaped furnace paddle body 120 is adopted. Of course, a regular pentagonal prism-shaped furnace paddle body 120 or a regular hexagonal prism-shaped furnace paddle body 120 can also be selected. Specifically, it can be selected according to the size of the furnace body 310. The present application does not make specific limitations on this. Of course, the furnace paddle body 120 can also be selected with other non-regular prism-shaped structures or cylindrical structures. Correspondingly, at this time, the support structure 140 is also adjusted accordingly to ensure that the carrier boat 200 can be suspended on the hanging position 130.

[0050] The present utility model also provides a single-tube vertical diffusion furnace 300a, as Figure 8 shown, including a furnace body 310, a furnace door 320 matching the furnace body 310, and the hanging furnace paddle 100 as described above. The hanging furnace paddle 100 is installed on the furnace door 320. An outer furnace tube 330 is provided in the furnace body 310. An air inlet is provided at the end of the outer furnace tube 330. An exhaust port is provided on the furnace door 320. A first heating element 340 is provided between the outer furnace tube 330 and the furnace body 310. When the furnace door 320 covers the furnace body 310, the hanging furnace paddle 100 and the carrier boat 200 are placed inside the outer furnace tube 330, and a sealed cavity is formed inside the outer furnace tube 330.

[0051] When the vertical diffusion furnace is working, the carrier boat 200 is hung on the hanging furnace paddle 100 and placed in the sealed cavity inside the outer furnace tube 330. The inside of the outer furnace tube 330 is heated by the first heating element 340 to the process temperature. During the process that the process gas enters the sealed cavity from the air inlet at the top of the outer furnace tube 330 and is discharged from the exhaust port, a stable reaction gas flow can be formed between the top and the bottom of the carrier boat 200 (the solar cells in this area are arranged vertically), ensuring sufficient and effective contact between the solar cells and the reaction gas, and ensuring that the processing quality of the solar cells processed in the reaction furnace of the same batch is basically the same. Of course, a flow guiding structure can also be arranged at the top end of the furnace paddle body 120 to diffuse the reaction gas around.

[0052] Based on the improvement of the above vertical diffusion furnace, in another vertical diffusion furnace (double furnace tube vertical diffusion furnace 300b) of the present application, as Figure 9 shown, it includes an inner furnace tube 350 with a second heating element (not shown in the figure). There is a cavity inside the hanging furnace paddle 100. When the furnace door 320 covers the furnace body 310, the inner furnace tube 350 is placed in the cavity, and a sealed cavity is formed between the inner furnace tube 350 and the outer furnace tube 330. By placing the inner furnace tube 350 in the cavity, not only can the temperature control be improved, but also the accommodation space of the sealed cavity can be increased, and the furnace loading capacity can be improved.

[0053] When the vertical diffusion furnace is working, the carrier boat 200 is hung on the hanging furnace paddle 100 and placed in the sealed cavity between the inner furnace tube 350 and the outer furnace tube 330. The sealed cavity is heated simultaneously by the first heating element 340 and the second heating element to ensure that the process temperature in each area of the sealed cavity remains stable. During the process that the process gas enters the sealed cavity from the air inlet at the top of the outer furnace tube 330 and is discharged from the exhaust port, a stable reaction gas flow can be formed between the top and the bottom of the carrier boat 200 (the solar cells in this area are arranged vertically), ensuring sufficient and effective contact between the solar cells and the reaction gas, and ensuring that the processing quality of the solar cells processed in the reaction furnace of the same batch is basically the same. In addition, the above cavity is preferably a cylindrical structure that penetrates the hanging furnace paddle 100. Of course, the specific structure of the cavity is determined according to the structure of the inner furnace tube 350, and the present application does not make specific limitations on this.

[0054] Similarly, when the furnace body 310 is large enough, the number of the inner furnace tubes 350 and the hanging furnace paddles 100 can also be increased accordingly, and the present application does not make specific limitations on this.

[0055] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A hanging furnace paddle, characterized in that, It includes a connecting body (110) and a furnace paddle body (120) integrally provided with the connecting body (110). A number of hanging positions (130) are provided on the furnace paddle body (120), and a support structure (140) is provided on the hanging positions (130). The support structure (140) is used to carry a carrier boat (200) loaded with materials, so that the carrier boat (200) is suspended on the hanging positions (130).

2. A hanging furnace paddle according to claim 1, wherein, The support structure (140) is a hanging hole (141) provided on the furnace paddle body (120), and a hook (210) matching the hanging hole (141) is provided on the carrier boat (200).

3. A hanging furnace paddle according to claim 1, characterized in that, The support structure (140) is at least a pair of brackets (142) provided on the furnace paddle body (120), and the brackets (142) are used to support the carrier boat (200).

4. A hanging furnace paddle according to claim 3, characterized in that, A pair of the brackets (142) are provided on the hanging position (130), and the pair of brackets (142) are used to receive the crystal plates (220) on both sides of the carrier boat (200), or the handles (230) on both sides of the upper part of the carrier boat (200).

5. A hanging furnace paddle according to claim 3, characterized in that, Two pairs of the brackets (142) are provided on the hanging position (130), and one pair of the brackets (142) are used to receive the handles (230) on both sides of the upper part of the carrier boat (200), and the other pair of brackets (142) receive the crystal plates (220) on both sides of the carrier boat (200), or the handles (230) on both sides of the lower part of the carrier boat (200).

6. A hanging furnace paddle according to claim 3, characterized in that, A limiting structure is provided on the bracket (142).

7. A hanging furnace paddle according to claim 3, characterized in that, The bracket (142) is detachably connected to the furnace paddle body (120).

8. A hanging furnace paddle according to any one of claims 1-7, characterized in that, The hanging furnace paddle is in the shape of a regular prism.

9. A vertical diffusion furnace, characterized in that, It includes a furnace body (310), a furnace door (320) matching the furnace body (310), and a hanging furnace paddle (100) according to any one of claims 1-8. The hanging furnace paddle (100) is installed on the furnace door (320).

10. A vertical diffusion furnace according to claim 9, characterized in that, It further includes an inner furnace tube (350) with a second heating element built in. A cavity is provided in the hanging furnace paddle (100). When the furnace door (320) covers the furnace body (310), the inner furnace tube (350) is placed in the cavity, and a sealed cavity is formed between the inner furnace tube (350) and an outer furnace tube (330).

Images