Adjusting device and optical measurement equipment

Abstract

The utility model discloses an adjusting device and optical measurement equipment. The adjusting device comprises a base body part, a moving part, a bearing part, a deflection adjusting assembly and a translation adjusting assembly, wherein the deflection adjusting assembly and the translation adjusting assembly are arranged in parallel; the moving part is arranged in the containing cavity of the base part, and the bearing part is arranged on the side, facing the open end of the base part, of the moving part. The deflection adjusting assembly is connected between the bearing piece and the moving piece and used for driving the bearing piece to deflect relative to the moving piece around the second axis and / or the third axis. The translation adjusting assembly is connected between the base part and the moving part and used for driving the moving part to drive the bearing part to move relative to the base part along the first axis. The base body part is used as a mounting and accommodating carrier of other parts, so that the integrity of the overall outline of the device can be effectively enhanced, the structural layout of the device is more compact, the size is smaller, and conditions are created for reducing the occupied space of the adjusting device; by means of the matching relation of the deflection adjusting assembly and the translation adjusting assembly, the spatial positions of the bearing piece and the moving piece are adjusted, and multi-dimensional adjustment of the optical element can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical devices, and particularly relates to an adjusting device and an optical measuring device. Background Art

[0002] In precision optical measuring devices, the installation positions and precisions of some optical elements are crucial for ensuring the overall optical performance of the devices. For example, the spatial positions of elements such as mirrors have a crucial impact on the optical path of the devices. Therefore, adjusting devices are usually arranged in the structural framework of the devices to adjust the positions of some key optical elements by means of the adjusting devices. However, most of the related adjusting devices can only perform rough adjustments, have limited adjustment dimensions, and usually have relatively large structural sizes, which need to occupy the limited device space. Summary of the Utility Model

[0003] The main technical problem to be solved by the utility model is to provide an adjusting device and an optical measuring device applying the adjusting device, which can realize multi-dimensional adjustment and have a more compact structure.

[0004] According to a first aspect, an adjusting device is provided in an embodiment, including:

[0005] A base member having a closed end and an open end opposite to each other along a first axis, and a receiving cavity communicating with the open end is formed inside the base member;

[0006] A moving member movably disposed in the receiving cavity;

[0007] A carrier member disposed on a side of the moving member facing the open end, and an optical element is to be disposed on a side of the carrier member away from the moving member;

[0008] A yaw adjustment assembly connected between the carrier member and the moving member; the yaw adjustment assembly is configured to drive the carrier member to drive the optical element to deflect relative to the moving member around a second axis and / or a third axis; and

[0009] A translation adjustment assembly arranged in parallel with the yaw adjustment assembly, the translation adjustment assembly being connected between the base member and the moving member; the translation adjustment assembly is configured to drive the moving member to drive the carrier member to move relative to the base member along the first axis;

[0010] Wherein, the first axis, the second axis and the third axis are perpendicular to each other in a three-dimensional space.

[0011] In one embodiment, the translation adjustment assembly includes:

[0012] A translation driving member is disposed through the closed end along the first axis; the translation driving member is movably connected to the base member and is used to abut against the moving member to provide a driving force for urging the moving member to move along the first axis toward the open end side; and

[0013] A plurality of translation preloading members are connected between the moving member and the closed end; the plurality of translation preloading members are evenly arranged around the translation driving member and are used to provide a preloading force for urging the moving member to move along the first axis toward the closed end side.

[0014] In one embodiment, the translation driving member includes a first fixed screw sleeve, a coarse adjustment screw sleeve, and a fine adjustment screw rod; wherein, the first fixed screw sleeve is fixed to the base member and is disposed through the closed end along the first axis; the coarse adjustment screw sleeve is screwed through the first fixed screw sleeve and is used to push against the moving member to drive the moving member to move within a first stroke; the fine adjustment screw rod is threaded through the coarse adjustment screw sleeve and is used to push against the moving member to drive the moving member to move within a second stroke; the first stroke is greater than the second stroke;

[0015] and / or

[0016] The translation preloading member includes a guiding pin shaft and a first elastic member. The guiding pin shaft is disposed through the moving member parallel to the translation driving member, and one end of the guiding pin shaft is fixed to the closed end; the first elastic member is disposed between the other end of the guiding pin shaft and the moving member and is used to provide an elastic preloading force for urging the moving member to move toward the closed end side.

[0017] In one embodiment, the yaw adjustment assembly includes:

[0018] A yaw driving member is movably and cooperatively connected to one of the moving member and the bearing member; the yaw driving member is used to abut against the other of the moving member and the bearing member to provide a driving force for urging the bearing member to rotate and open relative to the moving member around the second axis or the third axis; and

[0019] A yaw preloading member is arranged in parallel with the yaw driving member; the yaw preloading member is connected between the bearing member and the moving member and is used to provide a preloading force for urging the bearing member to rotate and close relative to the moving member around the second axis or the third axis.

[0020] In one embodiment, the yaw driving member includes a second fixed screw sleeve and an adjustment screw rod. The second fixed screw sleeve penetrates and is fixed to the moving member, and the adjustment screw rod is disposed through the second fixed screw sleeve; the adjustment screw rod is threadedly connected to the second fixed screw sleeve and is used to push against the bearing member to drive the bearing member to rotate and open relative to the moving member;

[0021] and / or

[0022] The yaw preloading member includes a second elastic member arranged parallel to the yaw driving member; one end of the second elastic member is connected to the moving member, and the other end is connected to the bearing member, for providing an elastic preloading force to urge the bearing member to rotate and close relative to the moving member.

[0023] In one embodiment, the yaw driving member penetrates through the moving member and is movably and cooperatively connected to the moving member; the base member further has an operation window penetrating through the position of the closed end facing the yaw driving member, so as to control the yaw driving member.

[0024] In one embodiment, a yaw cooperating member is further included, and the yaw cooperating member is connected between the moving member and the bearing member; the number of the yaw adjusting assemblies is set to be multiple, and the multiple yaw adjusting assemblies include a first yaw adjusting assembly and a second yaw adjusting assembly; wherein:

[0025] The projection connection lines of the yaw cooperating member, the yaw driving member of the first yaw adjusting assembly, and the yaw driving member of the second yaw adjusting assembly form an isosceles right triangle in the projection on a preset reference plane, and the preset reference plane is a plane perpendicular to the first axis;

[0026] The projection of the yaw cooperating member in the preset reference plane is located at the vertex of the isosceles right triangle, the projection of the first axis in the preset reference plane is located at the midpoint of the base of the isosceles right triangle, and the yaw preloading members of the first yaw adjusting assembly and the second yaw adjusting assembly are located at the midpoints of the waist sides of the isosceles right triangle.

[0027] In one embodiment, the moving member has a plurality of first guiding structures, and the plurality of first guiding structures are uniformly arranged around the first axis on the contour edge of the moving member; the base member has a plurality of second guiding structures, and the plurality of second guiding structures are uniformly arranged around the first axis in the receiving cavity;

[0028] The plurality of first guiding structures and the plurality of second guiding structures are in one-to-one correspondence and are slidably and cooperatively connected, for guiding the moving member to move relative to the base member along the first axis.

[0029] In one embodiment, the mating surface where the first guiding structure and the second guiding structure are in sliding contact with each other is an arc surface.

[0030] According to a second aspect, an embodiment provides an optical measurement device, including an optical element and the adjusting device according to the first aspect.

[0031] The adjusting device according to the above embodiment includes a moving member, a bearing member, a yaw adjusting assembly, a translation adjusting assembly, and a base member having a closed end and an open end; a receiving cavity communicating with the open end is formed inside the base member, the moving member is movably disposed in the receiving cavity, and the base member is arranged on one side of the moving member facing the open end; the yaw adjusting assembly is connected between the bearing member and the moving member and is configured to drive the bearing member to deflect relative to the moving member about a second axis and / or a third axis; the translation adjusting assembly is parallel to the yaw adjusting assembly and is connected between the base member and the moving member; the translation adjusting assembly is configured to drive the moving member to drive the bearing member to move relative to the base member along a first axis; the first axis, the second axis, and the third axis are perpendicular to each other in a three-dimensional space.

[0032] By using the base member as the installation and receiving carrier for other components, the integrity of the overall contour of the device can be effectively enhanced, making the structural layout of the device more compact and smaller in size, thus creating conditions for reducing the occupied space of the adjusting device; by arranging the yaw and translation adjusting assemblies side by side, multi-dimensional adjustment of the optical element (such as in dimensions of Z, Rx, Ry, etc.) can be achieved by adjusting the spatial positions of the bearing member and the moving member, and the structural space provided by the base member can be more reasonably utilized. Description of the Drawings

[0033] Figure 1 It is a front view plane structure schematic diagram of an adjusting device according to an embodiment.

[0034] Figure 2 It is a rear view plane structure schematic diagram of an adjusting device according to an embodiment.

[0035] Figure 3 It is a cross-sectional structure schematic diagram (I) of an adjusting device according to an embodiment in the direction of the first axis.

[0036] Figure 4 It is a cross-sectional structure schematic diagram (II) of an adjusting device according to an embodiment in the direction of the first axis.

[0037] Figure 5 It is a structure schematic diagram of an adjusting device according to an embodiment with the base member omitted.

[0038] In the figure:

[0039] 10. Substrate member; 10a. Receiving cavity; 10b. Operation window; 20. Movable member; 20a. First guiding structure; 30. Carrier member; 45a. First yaw adjusting assembly; 45b. Second adjusting assembly; 40. Yaw driving member; 41. Second fixing sleeve; 42. Adjusting screw; 50. Yaw preloading member; 51. Second elastic member; 52. Fixing pin; 60. Translation driving member; 61. First fixing sleeve; 62. Coarse adjustment sleeve; 63. Fine adjustment screw; 70. Translation preloading member; 71. Guide pin shaft; 71a. Step structure; 72. First elastic member; 73. Limit end cap; 80. Yaw mating member; A. Reflector; L1. First axis; L2. Second axis; L3. Third axis. Detailed implementation manners

[0040] The present utility model will be further described in detail below in conjunction with the accompanying drawings through specific implementation manners. Similar elements in different implementation manners are labeled with related similar element numbers. In the following implementation manners, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification to avoid overwhelming the core part of the present application with excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the descriptions in the specification and general technical knowledge in the art.

[0041] In addition, the features, operations, or characteristics described in the specification can be combined in any appropriate manner to form various implementation manners. At the same time, the steps or actions in the method description can also be reordered or adjusted in an obvious manner for those skilled in the art. Therefore, the various sequences in the specification and drawings are only for clearly describing a certain embodiment and do not mean a necessary sequence unless it is stated that a certain sequence must be followed.

[0042] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meaning. The "connection" and "coupling" mentioned in the present application, unless otherwise specified, both include direct and indirect connection (coupling).

[0043] Please refer to Figures 1 to 5, embodiments of the present application provide an adjustment device, which can be installed and applied as a carrier for optical elements in an optical device (such as an optical measurement device suitable for precision optical detection and measurement of wafers, display screens, glass, etc.). By adjusting the spatial position of the optical element in multiple dimensions, the adjustment of the device optical path can be achieved or the optical element can be positioned in the device optical path. The adjustment device includes a base member 10, a moving member 20, a carrier member 30, a yaw adjustment assembly, a translation adjustment assembly, and other functional components as required.

[0044] For a more clear and detailed description of the adjustment device, please refer to Figure 5 , in this article, three virtual axes perpendicular to each other in three-dimensional space are defined based on the structural configuration and adjustment principle of the adjustment device, namely the first axis L1, the second axis L2, and the third axis L3; exemplarily, in a spatial rectangular coordinate system established based on the adjustment device, the direction of the first axis L1 can refer to the Z-axis direction, the direction of the second axis L2 can refer to the X-axis direction, and the direction of the third axis L3 can refer to the Y-axis direction.

[0045] Below, mainly taking the mirror A as the optical element to be adjusted, the adjustment device will be described; however, it should be noted that the mirror A is only a specific application of the adjustment device, and the adjustment device can also be used for multi-dimensional precise adjustment of the spatial position of other optical lenses or optical devices such as beam splitters, filters, cameras, etc.

[0046] Please refer to Figure 3 and Figure 4 , the base member 10 is mainly used as an installation carrier for other components of the adjustment device, and the adjustment device can be installed on the optical device by means of the base member 10; the base member 10 is generally a housing structure with an opening. Exemplarily, the base member 10 is a cylindrical structure with a preset length in the direction of the first axis L1.

[0047] For the convenience of distinction and description, the end where the opening of the base member 10 is located is defined as the open end of the base member 10, the other end opposite to the open end in the direction of the first axis L1 is defined as the closed end of the base member 10, and the internal space of the base member 10 is defined as the receiving cavity 10a. It can be understood that the open end and the closed end of the base member 10 are arranged opposite to each other along the first axis L1, and the receiving cavity 10a is communicated with the outside of the base member 10 through the open end of the base member 10.

[0048] Please refer to Figure 4 and Figure 5, the moving member 20 and the bearing member 30 are arranged side by side along the first axis L1 in the receiving cavity 10a; wherein, the moving member 20 is connected to the base member 10 in a form that can move along the first axis L1 in the receiving cavity 10a; for example, a guiding structure can be provided between the moving member 20 and the base member 10, and a linear sliding connection relationship is established between the moving member 20 and the base member 10 by means of the guiding structure to guide the moving member 20 to move relative to the base member 10 along the first axis L1; again, the cross-sectional shapes of the moving member 20 and the receiving cavity 10a can be set to non-circular geometric shapes (such as rectangles) that match each other, and by using the shape matching relationship between the moving member 20 and the receiving cavity 10a, the moving member 20 can perform a linear movement relative to the base member 10 in the receiving cavity 10a.

[0049] The bearing member 30 is located on the side of the opening end of the moving member 20 facing the base member 10 and mainly serves as the installation carrier of the mirror A; exemplarily, the mirror A can be fixedly arranged on the side of the bearing member 30 far from the moving member 20 in the direction of the first axis L1 in a detachable or non-detachable manner such as bonding, welding, clamping, etc., so that the mirror A is exposed outside the base member 10 through the opening end of the base member 10, or the mirror A protrudes from the opening end of the base member 10. Of course, the mirror A or other optical elements can also be arranged on the bearing member 30 in other suitable structural forms, which will not be elaborated here.

[0050] Please refer to Figures 1 to 5 , the yaw adjustment assembly is connected between the bearing member 30 and the moving member 20 and is used on the one hand to realize the angle adjustment of the mirror A in dimensions such as Rx and Ry, for example, the adjustment in dimensions such as around the second axis L2, or the third axis L3, or the second axis L2 and the third axis L3, etc.; on the other hand, a structural connection relationship is established between the bearing member 30 and the moving member 20 by means of the yaw adjustment assembly.

[0051] In one embodiment, please refer to Figure 5 , the number of the yaw adjustment assemblies is set to two. For the convenience of distinction and description, one of the two yaw adjustment assemblies is defined as the first yaw adjustment assembly 45a, and the other of the two yaw adjustment assemblies is defined as the second yaw adjustment assembly 45b; wherein, the first yaw adjustment assembly 45a is mainly used to drive the bearing member 30 to drive the mirror A to rotate (i.e., deflect and open) within a preset angle relative to the moving member 20 around the second axis L2 to realize the angle adjustment of the mirror A in the Rx dimension; the second yaw adjustment assembly 45b is mainly used to drive the bearing member 30 to drive the mirror A to rotate within a preset angle relative to the moving member 20 around the third axis L3 to realize the angle adjustment of the mirror A in the Ry dimension.

[0052] Please refer to Figures 3 to 5, in terms of the commonality of the first yaw adjustment assembly 45a and the second yaw adjustment assembly 45b, each of them includes a yaw driving member 40 and a yaw preloading member 50 that cooperate with each other and are arranged in parallel; in terms of the difference between the first yaw adjustment assembly 45a and the second yaw adjustment assembly 45b, the yaw driving member 40 and the yaw preloading member 50 of the first yaw adjustment assembly 45a are generally arranged side by side along the third axis L3 or in a direction parallel to the third axis L3; the yaw driving member 40 and the yaw preloading member 50 of the second yaw adjustment assembly 45b are generally arranged side by side along the second axis L2 or in a direction parallel to the second axis L2.

[0053] Taking the first yaw adjustment assembly 45a as an example below, the yaw driving member 40, the yaw preloading member 50 and their related structures will be described; it can be understood that the related structures and principles of the second yaw adjustment assembly 45b are the same as or substantially the same as those of the first yaw adjustment assembly 45a.

[0054] The yaw driving member 40 is movably connected to the moving member 20 in such a way that it can move relative to the moving member 20 along a direction parallel to the first axis L1. For example, the yaw driving member 40 penetrates through the moving member 20 and is threadedly connected to the moving member 20; by means of the yaw driving member 40, it can abut against the bearing member 30 along a direction parallel to the first axis L1, so as to provide a driving force for the bearing member 30 to rotate relative to the moving member 20 around the second axis L2 to open, that is, to drive the bearing member 30 and the moving member 20 to move away from each other around the second axis L2.

[0055] The yaw preloading member 50 is connected and arranged between the moving member 20 and the bearing member 30 along a direction parallel to the first axis L1. By means of the yaw preloading member 50, a preloading force can be provided for the bearing member 30 and the moving member 20 to cause the two to relatively close around the second axis L2, and a structural connection relationship can also be established between the bearing member 30 and the moving member 20.

[0056] Specifically, during the process that the yaw driving member 40 exerts a pushing force on the bearing member 30 to drive the bearing member 30 to rotate relative to the moving member 20 around the second axis L2 to open, the yaw preloading member 50 can provide a force that is generally opposite to the direction of the pushing force, so as to form a certain constraint on the yaw driving member 40 and ensure that the bearing member 30 can stably make a small relative rotational movement relative to the moving member 20 within a certain angle range.

[0057] Specifically, after the fine adjustment of the angular position of the bearing member 30 or the mirror A is completed, the reverse acting force formed between the yaw preloading member 50 and the yaw driving member 40 between the bearing member 30 and the moving member 20 can be utilized to produce a restraining effect on the bearing member 30 and the moving member 20, so that the relative angular position of the two can be kept stable.

[0058] In some embodiments, the yaw driving member 40 may also be movably connected to the carrier member 30 and abutted against the moving member 20. By using the pushing action of the yaw driving member 40 on the moving member 20, the carrier member 30 can also be driven to drive the mirror A to rotate and open relative to the moving member 20 around the second axis L2 or the third axis L3.

[0059] In some embodiments, the number of the yaw adjusting assemblies may also be set to one. A rotating shaft connection structure (for example, the axis line of the rotating shaft connection structure is the second axis L2 or the third axis L3) may be provided between the moving member 20 and the carrier member 30. Thus, with a set of mutually cooperating yaw driving member 40 and yaw pre-tightening member 50, the carrier member 30 can have the structural conditions for rotating and opening and closing relative to the moving member 20 around the second axis L2 or the third axis L3.

[0060] In some embodiments, the number of the yaw adjusting assemblies may also be set to two or more, so as to drive the carrier member 30 to rotate and open and close relative to the moving member 20 around the second axis L2 and the third axis L3 from multiple different positions to meet different application requirements. All these cases are not elaborated herein.

[0061] It should be noted that the term "rotating and opening and closing" used herein can be understood as that when two associated components rotate towards each other close to the rotation axis, they realize rotation opening, and when the two associated components rotate away from each other around the rotation axis, they realize rotation closing.

[0062] Please refer to Figures 1 to 5 , the translation adjusting assembly and the yaw adjusting assembly are arranged side by side in a plane perpendicular to the first axis L1. The translation adjusting assembly is connected between the base member 10 and the moving member 20, and is mainly used to realize the position adjustment of the mirror A in the Z-axis direction. That is, by means of the translation adjusting assembly, the moving member 20 can be driven to drive the carrier member 30 (together with the mirror A, the yaw adjusting assembly, etc.) to move relative to the base member 10 along the first axis L1.

[0063] In one embodiment, please refer to Figures 1 to 3 , the translation adjusting assembly includes a translation driving member 60 and a translation pre-tightening member 70. Among them, the translation driving member 60 is movably connected to the closed end of the base member 10 in a manner that it can make a feeding motion relative to the base member 10 along the first axis L1. For example, the translation driving member 60 penetrates the closed end of the base member 10 and is threadedly connected to the base member 10. By means of the translation driving member 60, the moving member 20 can be abutted along the first axis L1, so as to provide a driving force for the moving member 20 to make a linear movement along the first axis L1 towards the open end side of the base member 10, that is, to drive the moving member 20 to move away from the closed end of the base member 10 along the first axis L1.

[0064] The translation pre-tightening member 70 is connected between the moving member 20 and the closed end of the base member 10. By means of the translation pre-tightening member 70, not only can a pre-tightening force be provided for the base member 10 and the moving member 20 to urge the two to approach each other along the first axis L1, but also a structural connection relationship can be established between the base member 10 and the moving member 20. The number of the translation pre-tightening members 70 is set to be multiple, and the multiple translation pre-tightening members 70 are uniformly arranged around the translation driving member 60 or the first axis L1; Exemplarily, please refer to Figure 1 , four translation pre-tightening members 70 are uniformly arranged at intervals around the translation driving member 60 at the contour edge position of the moving member 20; By using the multiple translation pre-tightening members 70 arranged around the translation driving member 60, the balance of the force on the moving member 20 can be ensured, providing a guarantee for the smooth linear movement of the moving member 20 relative to the base member 10.

[0065] Specifically, during the process that the translation driving member 60 exerts a pushing force on the moving member 20 to drive the moving member 20 to move along the first axis L1 toward the side away from the closed end of the base member 10, the translation pre-tightening member 70 can provide a force roughly opposite to the direction of the pushing force, thereby forming a constraint and limitation on the translation driving member 60 and the moving member 20, ensuring that the moving member 20 can undergo a small position movement relative to the closed end of the base member 10 within a certain stroke range.

[0066] Specifically, after the position fine-tuning of the moving member 20 or the mirror A in the direction of the first axis L1 is completed, the reverse force formed between the translation driving member 60 and the translation pre-tightening member 70 can be utilized to generate a restraining effect on the moving member 20 and the base member 10, so that the relative position between the moving member 20 and the closed end of the base member 10 can be kept stable.

[0067] In other embodiments, the translation adjustment assembly can also adopt other suitable structural forms. For example, the translation driving member 60 and the translation pre-tightening member 70 are arranged in one-to-one correspondence and coaxially. By means of a group of translation adjustment assemblies arranged along the first axis L1, or by means of multiple groups of translation adjustment assemblies arranged around the first axis L1, the linear translation movement of the moving member 20 along the first axis L1 can also be controlled; All these are not elaborated here.

[0068] On the one hand, by accommodating the moving member 20, the bearing member 30, the yaw adjustment assembly, etc. inside the base member 10, the integrity of the overall contour of the adjustment device and the compactness of the structure can be effectively improved, making the overall size of the device smaller. This is not only beneficial to reducing the occupation of the limited space of the optical device by the adjustment device, but also the adjustment device can be conveniently and quickly installed on the optical device by means of the base member 10.

[0069] On the other hand, by utilizing the cooperation of the yaw adjustment assembly and the translation adjustment assembly, multi-dimensional adjustment of the spatial position of the optical element (such as mirror A) provided on the carrier 30 can be achieved, such as linear translation in the Z-axis and yaw rotation in the Rx and Ry dimensions; thus, by adjusting the spatial position of the optical element, the optical path of the optical device can be adjusted or the optical element can be positioned in the optical path of the optical device.

[0070] In one embodiment, please refer to Figures 2 to 4 , the translation driving member 60 includes a first fixed screw sleeve 61, a coarse adjustment screw sleeve 62, and a fine adjustment screw rod 63; wherein, the first fixed screw sleeve 61 penetrates and is fixed to the closed end of the base member 10 along the first axis L1. For example, the first fixed screw sleeve 61 can be fixed to the closed end of the base member 10 by means of clamping, interference fit, screwing, etc.; the coarse adjustment screw sleeve 62 is arranged to pass through the first fixed screw sleeve 61 in a threaded connection manner, and the fine adjustment screw rod 63 is arranged to pass through the coarse adjustment screw sleeve 62 in a threaded connection manner. Based on the elastic pre-tightening force provided by the translation pre-tightening member 70 for the moving member 20 to move toward the closed end side of the base member 10, the moving member 20 and the coarse adjustment screw sleeve 62 (or the closed end of the base member 10) can be kept in a structure state of being in mutual abutment.

[0071] By operating the coarse adjustment screw sleeve 62 to rotate relative to the first fixed screw sleeve 61 from the closed end side of the base member 10, the coarse adjustment screw sleeve 62 can be used to push the moving member 20 (together with the carrier 30, etc.) to linearly move along the first axis L1 toward the opening end side of the base member 10, thereby completing the large-stroke position adjustment of the mirror A in the Z-axis direction or the first axis L1 direction.

[0072] By operating the fine adjustment screw rod 63 to rotate relative to the coarse adjustment screw sleeve 62 from the closed end side of the base member 10, the fine adjustment screw rod 63 can be made to extend out of the coarse adjustment screw sleeve 62 and push the moving member 20 to linearly move along the first axis L1 toward the opening end side of the base member 10, thereby completing the small-stroke position adjustment of the mirror A in the Z-axis direction or the first axis L1 direction.

[0073] Thus, by means of the cooperation of the first fixed screw sleeve 61, the coarse adjustment screw sleeve 62, and the fine adjustment screw rod 63, the translation driving member 60 can be configured into a structure form similar to a differential screw. By adjusting the position of the moving member 20 in the first axis L1 direction, both large-stroke position adjustment of optical elements such as the mirror A provided on the carrier 30 and small-stroke high-precision position adjustment of the optical element can be achieved, thereby finally realizing high-precision position adjustment of the optical element in the first axis L1 direction; at the same time, the setting of the first fixed screw sleeve 61 can enhance the stability of the rotational movement of the coarse adjustment screw sleeve 62 and the fine adjustment screw rod 63.

[0074] It can be understood that the moving member 20 can be driven to move within the first stroke by means of the coarse adjustment screw sleeve 62, and the moving member 20 can be driven to move within the second stroke by means of the fine adjustment screw rod 63. Usually, the first stroke is greater than the second stroke, so as to achieve the coarse adjustment of the optical element within the first stroke and the fine adjustment of the optical element within the second stroke.

[0075] In some embodiments, the first fixing screw sleeve 61 can also be omitted, and the coarse adjustment screw sleeve 62 directly penetrates and is screwed to the closed end of the base member 10; or a screw hole structure with a preset length is provided at the closed end of the base member 10 in the direction of the first axis L1 to replace the first fixing screw sleeve 61. In this way, the hierarchical and precise adjustment of the optical element can also be achieved.

[0076] In some embodiments, the fine adjustment screw rod 63 or the coarse adjustment screw sleeve 62 can also be omitted, and the translation driving member 60 directly penetrates and is screwed to the closed end of the base member 10. At this time, a single-stage adjustment of the position of the optical element can be achieved in the direction of the first axis L1.

[0077] In one embodiment, please refer to Figure 3 , the translation preloading member 70 includes a guiding pin shaft 71 and a first elastic member 72; wherein, the moving member 20 has a through hole structure penetrating in a direction parallel to the first axis L1, the guiding pin shaft 71 is arranged through the moving member 20 via the through hole structure, and one end of the guiding pin shaft 71 is fixed to the closed end of the base member 10 (for example, inserted and screwed to the closed end of the base member 10), and a stepped structure 71a is provided at the other end of the guiding pin shaft 71.

[0078] The first elastic member 72 can include an elastic member such as a compression spring. The first elastic member 72 is sleeved on the guiding pin shaft 71 and clamped between the moving member 20 and the stepped structure 71a. Exemplarily, the through hole structure of the moving member 20 can be set as a variable diameter structure, and a part of the first elastic member 72 is inserted and received in the through hole structure of the moving member 20 and abuts against the moving member 20.

[0079] On the one hand, by means of the elastic force generated by the first elastic member 72, a preloading force can be applied to the moving member 20 to push the moving member 20 to move toward the closed end side of the base member 10, so that the translation driving member 60 and the moving member 20 always abut against each other, so that the moving member 20 can move linearly relative to the base member 10 stably under the action of the translation driving member 60, and the moving member 20 can be ensured to stay or maintain at a preset position stably.

[0080] On the other hand, the first elastic member 72 is arranged between the moving member 20 and the stepped structure 71a. For example, a part of the first elastic member 72 is received by the through-hole structure of the moving member 20, which can effectively reduce the occupation of the structural space between the moving member 20 and the bearing member 30 by the first elastic member 72, thereby creating conditions for reducing the overall volume size of the adjusting device and enhancing the structural compactness of the adjusting device.

[0081] In other embodiments, the first elastic member 72 may also include an elastic member such as a tension spring. One end of the first elastic member 72 is fixedly connected to the closed end of the base member 10, and the other end is fixedly connected to the moving member 20. Thus, by using the elastic force generated by the first elastic member 72, a pre-tightening force that can urge the moving member 20 to move toward the closed end side of the base member 10 can be generated. Cooperating with the pushing force provided by the translation driving member 20 toward the open end side of the base member 10, it is also possible to drive the moving member 20 to move along the first axis L1 or stay at a preset position.

[0082] In some embodiments, the guiding pin shaft 71 can also be omitted, and the first elastic member 72 is arranged between the moving member 20 and the closed end of the base member 10 in the form of an elastic column, an elastic flap or other forms of elastic structures.

[0083] In one embodiment, please refer to Figure 3 , the translation pre-tightening member 70 further includes a limit end cap 73, which is fixedly arranged on the side of the moving member 20 facing the bearing member 30 and covers the arrangement of the first elastic member 72. Specifically, one end of the guiding pin shaft 71 provided with the stepped structure 71a can penetrate through the limit end cap 73, and the stepped structure 71a and the first elastic member 72 are located in the space enclosed by the limit end cap 73 and the moving member 20.

[0084] By using the stepped structure 71a to abut against the limit end cap 73, the maximum stroke of the moving member 20 moving toward the closed end side of the base member 10 can be limited. At the same time, the structural connection stability among the translation pre-tightening member 70, the moving member 20 and the base member 10 can also be enhanced.

[0085] In one embodiment, please refer to Figure 4 , the yaw driving member 40 includes a second fixed sleeve 41 and an adjusting screw 42. Among them, the second fixed sleeve 41 penetrates and is fixed on the moving member 20, and the adjusting screw 42 is arranged through the second fixed sleeve 41 in a threaded connection form.

[0086] By using the threaded connection relationship between the second fixed sleeve 41 and the adjusting screw 42, the relative angle between the carrier 30 and the moving member 20 can be precisely adjusted. Exemplarily, by screwing the adjusting screw 42, the length of the adjusting screw 42 extending relative to the second fixed sleeve 41 can be precisely controlled. Thus, with the thrusting action of the adjusting screw 42 on the carrier 30 and in cooperation with the pre-tightening force provided by the translation pre-tightening member 50, the carrier 30 can be precisely controlled to rotate open (or rotate closed) relative to the moving member 20 around the second axis L2 or the third axis L3 to a preset angular position.

[0087] In some embodiments, the second fixed sleeve 41 can also be omitted. By selecting and configuring the dimension of the moving member 20 in the direction of the first axis L1, the adjusting screw 42 is directly arranged through the moving member 20 in a threaded connection form.

[0088] In one embodiment, please refer to Figure 4 , the base member 10 further has an operation window 10b. The operation window 10b is arranged at a position penetrating the closed end of the base member 10 and facing the yaw drive member 40 (specifically, such as the adjusting screw 42). With the structural space provided by the operation window 10b, it is convenient to operate the yaw drive member 40 from one side of the closed end of the base member 10 (for example, inserting an adjusting tool into the accommodation cavity 10a through the operation window 10b to screw the adjusting screw 42), so as to realize the angle adjustment of the mirror A in dimensions such as Rx and RY.

[0089] At the same time, since the translation drive member 60 is arranged through the closed end of the base member 10, it is convenient to complete the precise adjustment of multiple dimensions of the spatial position of the mirror A from the same end (i.e., the closed end) side of the base member 10, and it can also avoid interference with the mirror A or the optical path of the device during the adjustment operation and the structure of the adjustment device itself.

[0090] In some embodiments, the operation window 10b can also be omitted. The yaw drive member 40 (specifically, such as the adjusting screw 42) is arranged through the carrier 30 in a threaded connection form, so that the yaw drive member 40 can be controlled from the open end side of the base member 10 to realize the precise adjustment of the angular position of the optical element, thereby meeting different application requirements.

[0091] In one embodiment, please refer to Figure 1 and Figure 3, the yaw pre-tightening member 50 includes a second elastic member 51 and a fixing pin 52; wherein, a slot structure can be provided at the positions where the moving member 20 and the bearing member 30 correspond to each other. The second elastic member 51 can include an elastic member such as a tension spring. The two ends of the second elastic member 51 respectively extend into the slot structures of the moving member 20 and the bearing member 30, and the two ends of the second elastic member 51 are fixed to the moving member 20 and the bearing member 30 through the corresponding fixing pins 52.

[0092] Exemplarily, the slot structure is a through hole penetrating the moving member 20 and the bearing member 30 along the direction parallel to the first axis L1. The fixing pin 52 is arranged on one side of the closed end of the moving member 20 facing the base member 10 and on one side of the bearing member 30 away from the moving member 20; and the two ends of the second elastic member 51 respectively extend out through the through hole of the moving member 20 and the through hole of the bearing member 30, and are hooked on the fixing pins 52 at the corresponding ends.

[0093] Thus, with the help of the fixing pin 52, the second elastic member 51 can be fixedly connected between the moving member 20 and the bearing member 30 to ensure the stability of the structural connection between the bearing member 30 and the moving member 20; by using the moving member 20 and the bearing member 30 to accommodate the second elastic member 51 (it can also be understood that the two ends of the second elastic member 51 are accommodated inside the moving member 20 and the bearing member 30), it can effectively reduce the structural gap between the moving member 20 and the bearing member 30, create conditions for enhancing the overall structural compactness of the adjusting device and reducing the overall size of the device, and can also ensure that the bearing member 30 and the moving member 20 rotate relatively within a small angle range, so as to achieve precise adjustment of the angular position of the mirror A with the help of the yaw driving member 40.

[0094] In some embodiments, the yaw pre-tightening member 50 can also adopt other suitable structural members, for example, set the structure with reference to the aforementioned translation pre-tightening member 70; details are not described herein.

[0095] In one embodiment, please refer to Figure 2 and Figure 5 , the adjusting device further includes a yaw matching member 80; the yaw matching member 80 is connected between the moving member 20 and the bearing member 30. Exemplarily, the yaw matching member 80 can be a screw structure penetrating the moving member 20 and screwed to the bearing member 30; for the convenience of description, the plane perpendicular to the first axis L1 is defined as a preset reference plane. Exemplarily, please refer to Figure 1 , the preset reference plane can be the surface of the closed end side of the moving member 20 facing the base member 10.

[0096] The projection connection lines of the yaw driving member 40 of the first yaw adjustment assembly 45a, the yaw driving member 40 of the second yaw adjustment assembly 45b, and the yaw mating member 80 in the preset reference plane form an isosceles right triangle; wherein, the projection of the yaw mating member 80 in the preset reference plane is located at the vertex of the isosceles right triangle, the projections of the yaw pre-tightening members 50 of the first yaw adjustment assembly 45a and the second yaw adjustment assembly 45b in the preset reference plane are respectively located at the midpoints of the two waist sides of the isosceles right triangle, and the projection of the first axis L1 in the preset reference plane is located at the midpoint of the base of the isosceles right triangle; it can be understood that the projections of the second axis L2 and the third axis L3 in the preset reference plane are equivalent to the two waist sides of the isosceles right triangle.

[0097] The yaw mating member 80 can be used to form a constraint and limitation on the deflection and rotational movement of the carrier 30 relative to the moving member 20, so as to reduce or avoid the coupling of the degree of freedom of the carrier 30 rotating around the second axis L2 and the degree of freedom of rotating around the third axis L3, thereby reducing the difficulty of adjusting the angular position of the mirror A.

[0098] Specifically, by virtue of the relative spatial position relationship between components such as the yaw mating member 80, the first yaw adjustment assembly 45a, and the second yaw adjustment assembly 45b, or the positional arrangement relationship of the formed isosceles right triangle, during the process of adjusting the yaw driving members 40 of the first yaw adjustment assembly 45a and the second yaw adjustment assembly 45b, the yaw mating member 80 always remains in a relatively stationary state. In this way, during the process of the carrier 30 rotating relative to the moving member 20 around the second axis L2, it will not rotate around the third axis L3 at the same time. Thus, it can not only avoid the coupling of the mirror A in the Rx and Ry dimensions simultaneously, but also be beneficial to improving the accuracy of adjusting the angular position of the mirror A and reducing the adjustment difficulty.

[0099] It should be noted that Figure 2 The approximate morphological trajectory of the isosceles right triangle is schematically shown by a bold dashed line in

[0100] In one embodiment, please refer to Figure 1 and Figure 5 , the moving member 20 has a plurality of first guiding structures 20a, and the plurality of first guiding structures 20a are uniformly arranged around the first axis L1 (or the translation driving member 60) at the contour edge of the moving member 20; correspondingly, the base member 10 has a plurality of second guiding structures (not labeled in the figure), and the plurality of second guiding structures are uniformly arranged around the first axis L1 in the receiving cavity 10a, and the plurality of first guiding structures 20a are in one-to-one correspondence with the plurality of second guiding structures and are slidably and cooperatively connected.

[0101] Exemplarily, the first guiding structure 20a may be a protruding structure protruding from the surface of the moving member 20, and the second guiding structure may be a groove structure provided on the wall of the receiving cavity 10a. The first guiding structure 20a is inserted into the second guiding structure in a form that can slide along the second guiding structure.

[0102] Thus, by virtue of the shape matching relationship and the sliding fit relationship between the first guiding structure 20a and the second guiding structure, not only can the moving member 20 be guided during the process of driving the moving member 20 to slide in the receiving cavity 10a along the first axis L1 through the translation adjustment assembly, so that the moving member 20 moves smoothly relative to the base member 10 along the first axis L1; but also the stability and compactness of the structural connection between the moving member 20 and the base member 10 can be enhanced.

[0103] In some embodiments, the translation pre-tightening member 70 and its related structures may be disposed between the first guiding structure 20a and the base member 10. For example, the guiding pin shaft 71 penetrates through the first guiding structure 20a along a direction parallel to the first axis L1. In this way, not only can the structural space of the moving member 20 be fully utilized, but also the smoothness of the relative movement between the moving member 20 and the base member 10 and the balance of the structural connection between the two can be improved.

[0104] Of course, the first guiding structure 20a may also be a groove structure provided on the surface of the moving member 20, and the second guiding structure is a protruding structure protruding from the wall of the receiving cavity 10a; this will not be elaborated here.

[0105] In one embodiment, please refer to Figure 1 and Figure 5 , the mating surface where the first guiding structure 20a and the second guiding structure are in sliding contact with each other adopts an arc surface, which can ensure that the moving member 20 has a high linearity when moving relative to the base member 10 along the first axis L1, which is beneficial to enhancing the displacement adjustment accuracy of the mirror A in the Z-axis dimension.

[0106] Please combine Figures 1 to 5 , the embodiment of the present application further provides an optical measurement device, including an optical element, an adjustment device, and other functional components (such as a detection light source, a detection device such as a camera, etc.) as required; wherein, the adjustment device adopts the adjustment device of the foregoing embodiment, and the adjustment device can be used to perform precise adjustment of the spatial position of the optical element in multiple dimensions (such as linear translation, deflection, etc.), so that the optical path of the device can be precisely adjusted or the optical element can be accurately positioned in the optical path of the device based on the function or type of the optical element; at the same time, based on the structural configuration of the adjustment device itself, the occupation of the device space can also be effectively reduced, which is beneficial to enhancing the overall structural compactness of the device.

[0107] In some embodiments, the number of adjusting devices can be set to be multiple, and at least one optical element is correspondingly installed on each adjusting device, so that multiple optical elements in the optical measurement device all have the characteristics of multi-dimensional precise adjustment.

[0108] The above uses specific examples to elaborate on the present utility model, which is only used to help understand the present utility model and is not intended to limit the present utility model. For those skilled in the technical field to which the present utility model belongs, according to the idea of the present utility model, several simple deductions, deformations or replacements can also be made.

Claims

1. An adjustment device, characterized in that, Comprising: A base member having a closed end and an open end opposite to each other along a first axis, and a receiving cavity communicating with the open end is formed inside the base member; A moving member movably disposed in the receiving cavity; A carrier member disposed on a side of the moving member facing the open end, and an optical element is configured to be disposed on a side of the carrier member away from the moving member; A yaw adjustment assembly connected between the carrier member and the moving member; the yaw adjustment assembly is configured to drive the carrier member to drive the optical element to deflect relative to the moving member about a second axis and / or a third axis; And A translation adjustment assembly arranged in parallel with the yaw adjustment assembly, the translation adjustment assembly is connected between the base member and the moving member; the translation adjustment assembly is configured to drive the moving member to drive the carrier member to move relative to the base member along the first axis; Wherein, the first axis, the second axis and the third axis are perpendicular to each other in three-dimensional space.

2. The adjusting device according to claim 1, characterized in that, The translation adjustment assembly includes: A translation driving member arranged through the closed end along the first axis; the translation driving member is movably connected to the base member and is configured to abut against the moving member to provide a driving force for urging the moving member to move along the first axis toward the open end side; and A plurality of translation pre-tightening members connected between the moving member and the closed end; the plurality of translation pre-tightening members are uniformly arranged around the translation driving member and are configured to provide a pre-tightening force for urging the moving member to move along the first axis toward the closed end side.

3. The adjusting device according to claim 2, characterized in that, The translation driving member includes a first fixed screw sleeve, a coarse adjustment screw sleeve and a fine adjustment screw rod; wherein, the first fixed screw sleeve is fixed to the base member and is arranged through the closed end along the first axis; the coarse adjustment screw sleeve is screwed through the first fixed screw sleeve and is configured to push against the moving member to drive the moving member to move within a first stroke; the fine adjustment screw rod is threaded through the coarse adjustment screw sleeve and is configured to push against the moving member to drive the moving member to move within a second stroke; the first stroke is greater than the second stroke; And / or The translation pre-tightening member includes a guide pin shaft and a first elastic member, the guide pin shaft is arranged through the moving member parallel to the translation driving member, and one end of the guide pin shaft is fixed to the closed end; the first elastic member is disposed between the other end of the guide pin shaft and the moving member and is configured to provide an elastic pre-tightening force for urging the moving member to move toward the closed end side.

4. The adjusting device according to claim 1, characterized in that, The yaw adjustment assembly includes: A yaw driving member movably and cooperatively connected to one of the moving member and the carrier member; the yaw driving member is configured to abut against the other of the moving member and the carrier member to provide a driving force for urging the carrier member to rotate and open relative to the moving member about the second axis or the third axis; and A yaw pre-tightening member arranged in parallel with the yaw driving member; the yaw pre-tightening member is connected between the carrier member and the moving member and is configured to provide a pre-tightening force for urging the carrier member to rotate and close relative to the moving member about the second axis or the third axis.

5. The adjusting device according to claim 4, characterized in that, The yaw driving member includes a second fixed screw sleeve and an adjusting screw rod. The second fixed screw sleeve penetrates and is fixed to the moving member, and the adjusting screw rod is arranged through the second fixed screw sleeve. The adjusting screw rod is threadedly connected to the second fixed screw sleeve and is used to push against the bearing member to drive the bearing member to rotate and open relative to the moving member. and / or The yaw pre-tightening member includes a second elastic member arranged parallel to the yaw driving member. One end of the second elastic member is connected to the moving member, and the other end is connected to the bearing member, so as to provide an elastic pre-tightening force for promoting the bearing member to rotate and close relative to the moving member.

6. The adjusting device according to claim 4, characterized in that The yaw driving member penetrates through the moving member and is movably and cooperatively connected to the moving member. The base member further has an operation window formed through a position of the closed end facing the yaw driving member, so as to control the yaw driving member.

7. The adjusting device according to claim 4, wherein It further includes a yaw cooperating member, and the yaw cooperating member is connected between the moving member and the bearing member. The number of the yaw adjusting assemblies is set to be multiple, and the multiple yaw adjusting assemblies include a first yaw adjusting assembly and a second yaw adjusting assembly. Wherein: The projection connecting lines of the yaw cooperating member, the yaw driving member of the first yaw adjusting assembly, and the yaw driving member of the second yaw adjusting assembly in a preset reference plane form an isosceles right triangle, and the preset reference plane is a plane perpendicular to the first axis. The projection of the yaw cooperating member in the preset reference plane is located at the vertex of the isosceles right triangle, the projection of the first axis in the preset reference plane is located at the midpoint of the base of the isosceles right triangle, and the yaw pre-tightening members of the first yaw adjusting assembly and the second yaw adjusting assembly are located at the midpoints of the waist sides of the isosceles right triangle.

8. The adjusting device according to any one of claims 1-7, characterized in that, The moving member has a plurality of first guiding structures, and the plurality of first guiding structures are uniformly arranged around the first axis on the contour edge of the moving member. The base member has a plurality of second guiding structures, and the plurality of second guiding structures are uniformly arranged around the first axis in the receiving cavity. The plurality of first guiding structures and the plurality of second guiding structures are in one-to-one correspondence and are slidably and cooperatively connected to guide the moving member to move relative to the base member along the first axis.

9. The adjusting device according to claim 8, wherein, The mating surface where the first guiding structure and the second guiding structure are in sliding contact with each other is an arc surface.

10. An optical measurement device, characterized in that, It includes an optical element and the adjusting device according to any one of claims 1-9.

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