Camera shooting assembly of visual inspection equipment and light supplementing unit of camera shooting assembly

Abstract

The utility model belongs to the field of chip defect detection, particularly relates to a camera shooting assembly of visual inspection equipment and a light supplementing unit of the camera shooting assembly, and solves the problem of poor light supplementing effect. The light supplementing unit of the visual inspection equipment comprises a light source mounting frame, a camera hole is formed in the light source mounting frame, an annular light source is arranged on the periphery of the camera hole, and four strip-shaped light sources evenly distributed in the circumferential direction of the camera hole are arranged on the periphery of the annular light source; the light supplementing unit of the visual inspection equipment is arranged above the light supplementing unit, and the camera shooting central axis of the camera shooting unit and the camera shooting hole are coaxially arranged. According to the utility model, the annular light source and the strip-shaped light source are arranged, so that the targeted light supplementing effect on different detection items is realized, and the visual detection accuracy is improved.

Description

Technical Field

[0001] The utility model belongs to the field of chip defect detection, and particularly relates to a camera assembly and a supplementary light unit thereof for a vision detection device. Background Art

[0002] A semiconductor chip refers to a silicon wafer containing an integrated circuit, which is divided from a wafer and has a very small volume. It is usually part of a computer or other electronic device. In the manufacturing process of semiconductor chips, appearance defects may be introduced in different process links, such as impurities in the substrate material, incomplete removal of wet cleaning impurities, incomplete coating, uneven chemical vapor deposition and physical vapor deposition, scattered impurities in ion implantation, abnormal oxidation, and cracks caused by uneven heat treatment temperature. In addition, the step of cutting semiconductor chips on the wafer through the wafer dicing process may also cause damage to the chips, such as surface scratches. In order to ensure that the quality of semiconductor chips meets the requirements, factories need to pre-detect the appearance of semiconductor chips before leaving the factory.

[0003] At present, the main method for detecting the appearance of semiconductor chips is for workers to manually conduct a full inspection using a magnifying glass. This detection method not only has high requirements for the experience of IQC microscopy personnel, but also the detection results are affected by subjective factors such as the level and mood of the inspectors, and cannot be guaranteed.

[0004] In the prior art, some vision detection devices have also emerged, but most of them lack an effective supplementary light unit. Most of their supplementary light units achieve the purpose of supplementary light through a single ring light or bar light. Different defect detection items require different supplementary light conditions. For example, ring light is suitable for detecting foreign objects, and bar light is suitable for detecting scratches and dirt. Therefore, the vision detection devices in the prior art have the problem of poor supplementary light effect. Summary of the Utility Model

[0005] An object of the utility model is to propose a supplementary light unit for a vision detection device in view of the above problems existing in the prior art.

[0006] To achieve this object of the utility model, the following technical solutions can be adopted:

[0007] A supplementary light unit for a vision detection device includes a light source mounting frame. A camera hole is provided on the light source mounting frame. An annular light source is provided around the camera hole. Four bar light sources are evenly distributed along the circumference of the camera hole outside the annular light source.

[0008] The supplementary light unit of the present utility model is used to supplement light for the corresponding camera assembly in the vision inspection device to improve the accuracy of vision inspection. It is installed and fixed through a light source mounting bracket. The camera hole on the light source mounting bracket is vertically arranged to form a light passing channel between the chip to be measured and the camera assembly, ensuring that the camera assembly can smoothly capture the image of the chip to be measured, which is equivalent to making way. The annular light source is arranged below the light source mounting bracket, and the annular light emitted by it is mainly used to assist in detecting multiple metals and foreign objects. Four strip-shaped light sources are circumferentially distributed below the camera hole, and adjacent strip-shaped light sources are perpendicular to each other, forming a rectangular shape. The strip-shaped light emitted by them is mainly used to assist in detecting scratches and dirt. The different supplementary light conditions brought by the annular light and the strip-shaped light ensure the accuracy of vision inspection.

[0009] In the supplementary light unit of the above-mentioned vision inspection device, the light source mounting bracket includes a connecting plate capable of being connected to a lifting mechanism. An annular light source mounting seat is arranged on the connecting plate. At the bottom of the annular light source mounting seat, the annular light source coaxial with the camera hole is arranged. The periphery of the annular light source mounting seat is provided with a strip-shaped light source mounting seat connected to the connecting plate in a ring shape. At the bottom of the strip-shaped light source mounting seat, four strip-shaped light sources evenly distributed along the circumference of the camera hole are arranged.

[0010] The connecting plate is connected to the lifting mechanism and can be driven by the lifting mechanism to perform vertical displacement, achieving the effect of adjusting the vertical height from the chip to be measured, and performing vision inspection on the chip to be measured from multiple height planes, which helps to accurately detect the conditions of leads, sealing rings, core areas, bonding fingers, etc., and the vision inspection is more accurate. The annular light source and the strip-shaped light source are respectively arranged on the connecting plate through the annular light source mounting seat and the strip-shaped light source mounting seat to achieve supplementary light. The lifting mechanism can be a vertically arranged linear guide rail assembly, which is common knowledge and will not be specifically expanded.

[0011] In the supplementary light unit of the above-mentioned vision inspection device, the strip-shaped light source includes a strip-shaped lamp holder and a strip-shaped lamp body. The strip-shaped lamp holder is fixed on the strip-shaped light source mounting seat, and an irradiation angle adjustment structure is arranged between the strip-shaped lamp holder and the strip-shaped lamp body.

[0012] The irradiation angle adjustment structure is used to adjust the inclination angle of the light emitting direction of the strip-shaped light source to ensure that the strip-shaped light emitted by the strip-shaped light sources at different heights accurately irradiates the chip to be measured, ensuring good supplementary light.

[0013] In the supplementary light unit of the above-mentioned vision inspection device, the irradiation angle adjustment structure includes rotating pins respectively arranged at both ends of the strip-shaped lamp body. A slider is fixed at a position deviating from the rotation center at the end of the strip-shaped lamp body. The slider is arranged in the arc-shaped chute of the strip-shaped lamp holder and can slide along its length direction.

[0014] The strip lamp body is hinged to the strip lamp base through a rotating pin. The slider slides in the arc-shaped chute. By adjusting the fixed position of the slider in the chute, the tilting angle of the strip lamp body can be adjusted, and the irradiation angle can be adjusted.

[0015] In the supplementary lighting unit of the above-mentioned visual inspection device, a first height adjustment component is provided between the annular light source mounting seat and the connecting plate, and a second height adjustment component is provided between the strip light source mounting seat and the connecting plate.

[0016] The first height adjustment component is used to adjust the height of the annular light source relative to the connecting plate, and the second height adjustment component is used to adjust the height of the strip light source relative to the connecting plate, which is beneficial for the lifting mechanism to lift to the preset accurate height.

[0017] In the supplementary lighting unit of the above-mentioned visual inspection device, the first height adjustment component includes a first bolt plate in a Z shape arranged on one side of the annular light source mounting seat. One end of the first bolt plate is integrated with the annular light source mounting seat, and two first strip holes arranged parallel to each other and vertically are provided at the other end. Two rows of first bolt holes are provided on the connecting plate, and the two rows of first bolt holes correspond to the first strip holes one by one;

[0018] The second height adjustment component includes a second bolt plate arranged on one side of the strip light source mounting seat. One end of the second bolt plate is integrated with the strip light source mounting seat, and two second strip holes arranged parallel to each other and vertically are provided at the other end. Two rows of second bolt holes are provided on the connecting plate, and the two rows of second bolt holes correspond to the second strip holes one by one.

[0019] The first bolt plate is in a Z shape, and the first strip hole at one end is detachably fixed in the first bolt hole through a bolt. By adjusting the specific fixed position of the bolt in the first strip hole, the effect of adjusting the height of the annular light source mounting seat can be achieved; the second strip hole on the second bolt plate is fixed in the second bolt hole of the connecting plate through a bolt. By adjusting the specific fixed position of the bolt in the second strip hole, the height of the strip light source mounting seat can be adjusted; the bolt fixing method has good detachability and is convenient for disassembly and assembly.

[0020] As an optimization, each row of first bolt holes includes a plurality of first bolt holes vertically distributed, and each row of second bolt holes includes a plurality of second bolt holes vertically distributed.

[0021] In the supplementary lighting unit of the above-mentioned visual inspection device, a triangular first reinforcing rib is provided between the annular light source mounting seat and the first bolt plate;

[0022] A triangular second reinforcing rib is provided between the strip light source mounting seat and the second bolt plate.

[0023] The first reinforcing rib and the second reinforcing rib are used to increase the structural strength of the corresponding positions.

[0024] Another object of the present utility model is to provide an imaging assembly of a vision detection device in view of the above problems existing in the prior art.

[0025] To achieve this object of the present utility model, the following technical solutions can be adopted:

[0026] An imaging assembly of a vision detection device includes an imaging unit, and the imaging unit is disposed above the light supplementing unit of the above-mentioned vision detection device, and the imaging central axis of the imaging unit is coaxially arranged with the imaging hole.

[0027] The imaging unit is used to perform specific vision detection on the chip to be measured. Its imaging central axis passes through the imaging hole, and an image of the chip to be measured is taken through the imaging hole. The purpose of vision detection can be achieved by analyzing this image.

[0028] In the imaging assembly of the above-mentioned vision detection device, the imaging unit includes a camera, and the camera is fixed on the connecting plate through a camera fixing seat and is height adjustable.

[0029] Specifically, the imaging unit takes an image of the chip to be measured through the camera. The camera is disposed on the connecting plate with adjustable height. The position of the camera on the connecting plate and the height spacing relative to the light supplementing unit are adjustable, which helps to adjust the camera to an appropriate focal length and improve the accuracy of vision detection.

[0030] As an optimization, the camera includes a camera assembly and a camera lens that are connected in a butt joint. The camera fixing seat includes a main assembly fixing frame and a lens fixing frame for respectively fixing the camera assembly and the camera lens. The main assembly fixing frame includes a U-shaped bracket. Two mutually parallel and vertically arranged third strip holes are provided on the fixing legs of the U-shaped bracket. Two rows of third bolt holes are provided on the connecting plate, and the two rows of third bolt holes correspond to the third strip holes one by one. The lens fixing frame includes a fixing block and a clamping block. The inner end of the fixing block is fixed to the fourth bolt hole on the connecting plate through a bolt, and the outer end is detachably fixed to the clamping block. The neck of the camera lens is clamped and fixed in the circular clamping opening between the fixing block and the clamping block. The fourth bolt hole is provided with two longitudinal rows, and at least two fourth bolt holes are provided in each row.

[0031] The third strip-shaped hole of the U-shaped bracket is fixed to the third bolt hole of the connecting plate through a bolt. By adjusting the specific position where the bolt is fixed in the third strip-shaped hole, the vertical height of the camera assembly can be adjusted. The camera lens is clamped between the fixed block and the clamping block. Semi-circular arc openings are provided on the opposite sides of the fixed block and the clamping block. The two semi-circular arc openings are combined into a circular bayonet. The fixed block and the clamping block are detachably fixed, which is convenient for disassembly and assembly. Specifically, it can be achieved by bolts and other means. The inner end of the fixed block is fixed to the fourth bolt hole of the connecting plate through a bolt. There are multiple fourth bolt holes. By adjusting the connection between the fixed block and different fourth bolt holes, the height of the camera assembly can be adapted to ensure the stable docking of the camera assembly and the camera lens.

[0032] In the camera assembly of the above visual inspection device, the light source mounting bracket is connected to the XYZ-axis moving mechanism.

[0033] The light source mounting bracket can also be arranged on the XYZ-axis moving mechanism. The XYZ-axis moving mechanism is used to adjust the positions of the camera and the light source to ensure accurate docking above the chip to be measured and adapt to chips to be measured with different sizes. The lifting mechanism of the XYZ-axis moving mechanism realizes the movement drive in the Z-axis direction, and the movement in the XY-axis direction can be realized through corresponding slide rail and slider structures, etc., which is common knowledge and will not be further elaborated here.

[0034] Compared with the prior art, the present utility model mainly has the following advantages:

[0035] 1. The supplementary light unit of the present utility model is used to supplement light for the corresponding camera assembly in the visual inspection device, improving the accuracy of visual inspection. It is installed and fixed through the light source mounting bracket. The camera holes on the light source mounting bracket are vertically arranged to form a light passing channel between the chip to be measured and the camera assembly, ensuring that the camera assembly can smoothly capture the image of the chip to be measured, which is equivalent to making way. The annular light source is arranged below the light source mounting bracket. The annular light emitted by it is mainly used to help detect multiple metals and foreign objects. Four strip-shaped light sources are circumferentially distributed below the camera hole, and adjacent strip-shaped light sources are perpendicular to each other, forming a rectangular shape. The strip light emitted by them is mainly used to help detect scratches and dirt. The different supplementary light conditions brought by the annular light and the strip light ensure the accuracy of visual inspection.

[0036] 2. The connecting plate is connected to the lifting mechanism and can be driven by the lifting mechanism to perform vertical displacement, achieving the effect of adjusting the vertical height from the chip to be measured, and performing visual inspection on the chip to be measured from multiple height planes, which helps to accurately detect the conditions of leads, sealing rings, core areas, bonding fingers, etc., and the visual inspection is more accurate. The annular light source and the strip-shaped light source are respectively arranged on the connecting plate through the annular light source mounting seat and the strip-shaped light source mounting seat to achieve supplementary light.

[0037] 3. The irradiation angle adjustment structure is used to adjust the tilt angle of the light-emitting direction of the strip light source, ensuring that the strip lights emitted by the strip light sources at different heights are accurately irradiated onto the chip to be measured, and ensuring good supplementary lighting.

[0038] 4. The first bolt plate is Z-shaped. One end of the first elongated hole is detachably fixed in the first bolt hole through a bolt. By adjusting the specific fixing position of the bolt in the first elongated hole, the effect of adjusting the height of the annular light source mounting seat can be achieved; the second elongated hole on the second bolt plate is fixed in the second bolt hole of the connecting plate through a bolt. By adjusting the specific fixing position of the bolt in the second elongated hole, the height of the strip light source mounting seat can be adjusted; the bolt fixing method has good detachability, which is convenient for disassembly and assembly.

[0039] 5. The imaging unit specifically captures images of the chip to be measured through a camera. The camera is adjustably mounted on the connecting plate. The position of the camera on the connecting plate and the height spacing relative to the supplementary lighting unit are adjustable, which helps to adjust the camera to an appropriate focal length and improve the accuracy of visual inspection.

[0040] 6. The light source mounting bracket can be arranged on the XYZ-axis moving mechanism. The XYZ-axis moving mechanism is used to adjust the positions of the camera and the light source, ensuring accurate docking above the chip to be measured and adapting to chips to be measured of different sizes. Description of the Drawings

[0041] Figure 1 is the overall structural schematic diagram provided by the present utility model;

[0042] Figure 2 is the structural schematic diagram of the annular light source provided by the present utility model;

[0043] Figure 3 is the structural schematic diagram of the strip light source provided by the present utility model;

[0044] Figure 4 is the structural schematic diagram of the connecting plate provided by the present utility model.

[0045] In the figure, there are a light source mounting bracket 1, a camera hole 2, an annular light source 3, a strip light source 4, a lifting mechanism 5, a connecting plate 6, an annular light source mounting seat 7, a strip light source mounting seat 8, a strip lamp holder 9, a strip lamp body 10, an irradiation angle adjusting structure 11, a rotating pin 12, a slider 13, an arc-shaped sliding groove 14, a first height adjusting component 15, a second height adjusting component 16, a first bolt plate 17, a first strip-shaped hole 18, a first bolt hole 19, a second bolt plate 20, a second strip-shaped hole 21, a second bolt hole 22, a first reinforcing rib 23, a second reinforcing rib 24, a camera unit 25, a camera 26, a camera fixing seat 27, a camera assembly 28, a camera lens 29, an assembly fixing frame 30, a lens fixing frame 31, a third strip-shaped hole 32, a third bolt hole 33, a fixing block 34, a clamping block 35, a fourth bolt hole 36, a circular bayonet 37, an XYZ-axis moving mechanism 38, and a fixing foot 39. Detailed implementation mode

[0046] The following are specific embodiments of the present invention and in combination with the accompanying drawings, the technical solutions of the present invention are further described, but the present invention is not limited to these embodiments.

[0047] Specific embodiments are as Figures 1-4 As shown, the light supplement unit of this vision detection device includes a light source mounting bracket 1. There is a camera hole 2 on the light source mounting bracket 1. An annular light source 3 is arranged around the camera hole 2. Four strip light sources 4 evenly distributed along the circumferential direction of the camera hole 2 are arranged around the annular light source 3.

[0048] Specifically, the light supplement unit of the present invention is used to supplement light to the corresponding camera assembly in the vision detection device to improve the accuracy of vision detection. It is installed and fixed through the light source mounting bracket 1. The camera hole 2 on the light source mounting bracket 1 is arranged vertically, used to form a light passing channel between the chip to be measured and the camera assembly, ensuring that the camera assembly can smoothly capture the image of the chip to be measured, which is equivalent to making way. The annular light source 3 is arranged below the light source mounting bracket 1, and the annular light emitted by it is mainly used to assist in detecting multiple metals and foreign objects. Four strip light sources 4 are circumferentially distributed below the camera hole 2. Adjacent strip light sources 4 are perpendicular to each other, forming a rectangular shape. The strip light emitted by them is mainly used to assist in detecting scratches and dirt. The different light supplement conditions brought by the annular light and the strip light ensure the accuracy of vision detection.

[0049] As Figures 1-4 Shown, the light source mounting bracket 1 includes a connecting plate 6 that can be connected to the lifting mechanism 5. An annular light source mounting seat 7 in a ring shape is arranged on the connecting plate 6. An annular light source 3 coaxial with the camera hole 2 is arranged at the bottom of the annular light source mounting seat 7. An annular strip light source mounting seat 8 connected to the connecting plate 6 is arranged around the annular light source mounting seat 7. Four strip light sources 4 evenly distributed along the circumferential direction of the camera hole 2 are arranged at the bottom of the strip light source mounting seat 8.

[0050] Specifically, the connecting plate 6 is connected to the lifting mechanism 5 and can be driven by the lifting mechanism 5 to perform vertical displacement, achieving the effect of adjusting the vertical height from the measured chip, and visually detecting the measured chip from multiple height planes, which helps to accurately detect the situations of leads, sealing rings, core areas, bonding fingers, etc., and the visual detection is more accurate. The annular light source 3 and the linear light source 4 are respectively arranged on the connecting plate 6 through the annular light source mounting base 7 and the linear light source mounting base 8 to achieve supplementary lighting.

[0051] As Figure 1 , 2 shown, the linear light source 4 includes a linear lamp base 9 and a linear lamp body 10. The linear lamp base 9 is fixed on the linear light source mounting base 8, and an illumination angle adjustment structure 11 is provided between the linear lamp base 9 and the linear lamp body 10. The illumination angle adjustment structure 11 includes rotation pins 12 respectively arranged at both ends of the linear lamp body 10. A slider 13 is fixed at a position deviating from the rotation center at the end of the linear lamp body 10. The slider 13 is arranged in the arc-shaped chute 14 of the linear lamp base 9 and can slide along its length direction. The marked position of the slider 13 in the figure is its set position, and the specific shape is not shown.

[0052] Specifically, the illumination angle adjustment structure 11 is used to adjust the tilt angle of the light-emitting direction of the linear light source 4 to ensure that the linear light emitted by the linear light source 4 at different heights accurately irradiates the measured chip, ensuring good supplementary lighting. The linear lamp body 10 is hinged to the linear lamp base 9 through the rotation pins 12. The slider 13 slides in the arc-shaped chute 14. By adjusting the position where the slider 13 is fixed in the chute, the effect of adjusting the tilt angle of the linear lamp body 10 can be achieved, realizing the adjustment of the illumination angle.

[0053] As an optimization of this embodiment, a first height adjustment component 15 is provided between the annular light source mounting base 7 and the connecting plate 6, and a second height adjustment component 16 is provided between the strip light source mounting base 8 and the connecting plate 6. The first height adjustment component 15 includes a first bolt plate 17 in a Z shape arranged on one side of the annular light source mounting base 7. One end of the first bolt plate 17 is integrally connected with the annular light source mounting base 7, and the other end is provided with two parallel and vertically arranged first elongated holes 18. The connecting plate 6 is provided with two rows of first bolt holes 19, and the two rows of first bolt holes 19 correspond to the first elongated holes 18 one by one; the second height adjustment component 16 includes a second bolt plate 20 arranged on one side of the strip light source mounting base 8. One end of the second bolt plate 20 is integrally connected with the strip light source mounting base 8, and the other end is provided with two parallel and vertically arranged second elongated holes 21. The connecting plate 6 is provided with two rows of second bolt holes 22, and the two rows of second bolt holes 22 correspond to the second elongated holes 21 one by one. Each row of first bolt holes 19 includes a plurality of vertically distributed first bolt holes 19, and each row of second bolt holes 22 includes a plurality of vertically distributed second bolt holes 22. A triangular first reinforcing rib 23 is provided between the annular light source mounting base 7 and the first bolt plate 17; a triangular second reinforcing rib 24 is provided between the strip light source mounting base 8 and the second bolt plate 20.

[0054] Specifically, the first height adjustment component 15 is used to adjust the height of the annular light source 3 relative to the connecting plate 6, and the second height adjustment component 16 is used to adjust the height of the strip light source 4 relative to the connecting plate 6, which is beneficial for the lifting mechanism 5 to lift to a preset accurate height. The first bolt plate 17 is in a Z shape, and the first elongated hole 18 at one end is detachably fixed in the first bolt hole 19 through a bolt. By adjusting the specific fixing position of the bolt in the first elongated hole 18, the effect of height adjustment of the annular light source mounting base 7 can be achieved; the second elongated hole 21 on the second bolt plate 20 is fixed in the second bolt hole 22 of the connecting plate 6 through a bolt. By adjusting the specific fixing position of the bolt in the second elongated hole 21, the height adjustment of the strip light source mounting base 8 can be achieved; the bolt fixing method has good detachability and is convenient for disassembly and assembly. The first reinforcing rib 23 and the second reinforcing rib 24 are used to increase the structural strength of the corresponding positions.

[0055] As Figure 1 shown, the camera assembly of this vision detection device includes a camera unit 25. The camera unit 25 is arranged above the light supplementing unit of the above-mentioned vision detection device, and the camera central axis of the camera unit 25 is coaxially arranged with the camera hole 2. The camera unit 25 includes a camera 26, and the camera 26 is fixed on the connecting plate 6 through a camera fixing seat 27 and the height is adjustable.

[0056] Specifically, the imaging unit 25 is used to perform specific visual inspection on the chip under test. The imaging central axis thereof passes through the imaging hole 2, and the chip under test is imaged through the imaging hole 2. The purpose of visual inspection can be achieved by analyzing the image. The imaging unit 25 specifically captures the image of the chip under test through the camera 26. The camera 26 is adjustably mounted on the connecting plate 6. The position of the camera 26 on the connecting plate 6 and the height spacing relative to the light supplement unit are adjustable, which helps to adjust the camera 26 to an appropriate focal length and improve the accuracy of visual inspection.

[0057] As an optimization of this embodiment, the camera 26 includes a camera assembly 28 and a camera lens 29 connected in a butt joint manner. The camera fixing base 27 includes an assembly fixing frame 30 and a lens fixing frame 31 for respectively fixing the camera assembly 28 and the camera lens 29. The assembly fixing frame 30 includes a U-shaped bracket. Two third strip-shaped holes 32 that are parallel to each other and vertically arranged are provided on the fixing legs 39 of the U-shaped bracket. Two rows of third bolt holes 33 are provided on the connecting plate 6. The two rows of third bolt holes 33 correspond to the third strip-shaped holes 32 one by one. The lens fixing frame 31 includes a fixing block 34 and a clamping block 35. The inner end of the fixing block 34 is fixed to the fourth bolt hole 36 on the connecting plate 6 through a bolt, and the outer end is detachably fixed to the clamping block 35. The neck of the camera lens 29 is clamped and fixed in the circular bayonet 37 between the fixing block 34 and the clamping block 35. The fourth bolt hole 36 is provided with two longitudinal rows, and each row of the fourth bolt holes 36 is provided with two.

[0058] Specifically, the third strip-shaped hole 32 of the U-shaped bracket is fixed to the third bolt hole 33 on the connecting plate 6 through a bolt. The vertical height adjustment of the camera assembly 28 can be achieved by adjusting the specific position where the bolt is fixed in the third strip-shaped hole 32. The camera lens 29 is clamped between the fixing block 34 and the clamping block 35. Semi-circular arc openings are provided on the opposite sides of the fixing block 34 and the clamping block 35. The two semi-circular arc openings are combined into a circular bayonet 37. The fixing block 34 and the clamping block 35 are detachably fixed, which is convenient for disassembly and assembly. Specifically, it can be achieved by bolts and other means. The inner end of the fixing block 34 is fixed to the fourth bolt hole 36 on the connecting plate 6 through a bolt. There are multiple fourth bolt holes 36. By adjusting the connection between the fixing block 34 and different fourth bolt holes 36, the height of the camera assembly 28 can be adapted to ensure the stable butt joint between the camera assembly 28 and the camera lens 29.

[0059] In this embodiment, the light source mounting bracket 1 is connected to the XYZ-axis moving mechanism 38. The light source mounting bracket 1 is arranged on the XYZ-axis moving mechanism 38. The XYZ-axis moving mechanism 38 is used to adjust the positions of the camera 26 and the light source to ensure accurate docking above the chip under test and adapt to chips under test of different sizes. The XYZ-axis moving mechanism 38 includes a lifting mechanism 5. Only the lifting mechanism 5 of the XYZ-axis moving mechanism 38 is shown in the figure.

[0060] Specific working principle: The chip to be measured is located at the detection station below the imaging hole 2. The camera 26 captures an image of the chip to be measured through the imaging hole 2, and the obtained image is transmitted to the subsequent analysis terminal for visual inspection and analysis. Among them, the strip light source 4 and the annular light source 3 of the supplementary light unit emit strip light and annular light respectively. Under the condition of strip light supplementary lighting, the detection of scratches and dirt on the chip to be measured is emphasized, and under the condition of annular light supplementary lighting, the detection of multiple metals and foreign objects on the chip to be measured is emphasized.

[0061] The specific embodiments described in this article are only illustrative of the spirit of the present utility model. Those skilled in the art of the present utility model can make various modifications or supplements to the described specific embodiments or use similar methods for substitution, but will not deviate from the spirit of the present utility model or exceed the scope defined by the appended claims.

Claims

1. A supplementary lighting unit for a vision detection device, characterized in that, It includes a light source mounting bracket (1), on which there is a camera hole (2). Around the camera hole (2), there is an annular light source (3), and around the annular light source (3), there are four strip-shaped light sources (4) evenly distributed along the circumference of the camera hole (2).

2. The supplementary light unit of the vision detection device according to claim 1, characterized in that The light source mounting bracket (1) includes a connecting plate (6) that can be connected to a lifting mechanism (5). On the connecting plate (6), there is an annular light source mounting seat (7). At the bottom of the annular light source mounting seat (7), there is the annular light source (3) coaxially arranged with the camera hole (2). Around the annular light source mounting seat (7), there is a strip-shaped light source mounting seat (8) connected to the connecting plate (6) in an annular shape. At the bottom of the strip-shaped light source mounting seat (8), there are four strip-shaped light sources (4) evenly distributed along the circumference of the camera hole (2).

3. The supplementary lighting unit of the visual detection device according to claim 1, characterized in that The strip-shaped light source (4) includes a strip-shaped lamp holder (9) and a strip-shaped lamp body (10). The strip-shaped lamp holder (9) is fixed on the strip-shaped light source mounting seat (8), and there is an irradiation angle adjustment structure (11) between the strip-shaped lamp holder (9) and the strip-shaped lamp body (10).

4. The supplementary lighting unit of the visual detection device according to claim 3, characterized in that, The irradiation angle adjustment structure (11) includes rotation pins (12) respectively arranged at both ends of the strip-shaped lamp body (10). At a position deviating from the rotation center at the end of the strip-shaped lamp body (10), a slider (13) is fixed. The slider (13) is arranged in an arc-shaped chute (14) of the strip-shaped lamp holder (9) and can slide along its length direction.

5. The supplementary lighting unit of the vision detection device according to claim 2, characterized in that, Between the annular light source mounting seat (7) and the connecting plate (6), there is a first height adjustment component (15). Between the strip-shaped light source mounting seat (8) and the connecting plate (6), there is a second height adjustment component (16).

6. The supplementary lighting unit of the visual detection device according to claim 5, characterized in that, The first height adjustment component (15) includes a first bolt plate (17) in a Z shape arranged on one side of the annular light source mounting seat (7). One end of the first bolt plate (17) is integrated with the annular light source mounting seat (7), and at the other end, there are two parallel and vertically arranged first strip-shaped holes (18). On the connecting plate (6), there are two rows of first bolt holes (19), and the two rows of first bolt holes (19) correspond to the first strip-shaped holes (18) one by one; The second height adjustment component (16) includes a second bolt plate (20) arranged on one side of the strip-shaped light source mounting seat (8). One end of the second bolt plate (20) is integrated with the strip-shaped light source mounting seat (8), and at the other end, there are two parallel and vertically arranged second strip-shaped holes (21). On the connecting plate (6), there are two rows of second bolt holes (22), and the two rows of second bolt holes (22) correspond to the second strip-shaped holes (21) one by one.

7. The supplementary lighting unit of the visual detection device according to claim 6, characterized in that, Between the annular light source mounting seat (7) and the first bolt plate (17), there is a triangular first reinforcing rib (23); Between the strip-shaped light source mounting seat (8) and the second bolt plate (20), there is a triangular second reinforcing rib (24).

8. The camera component of a visual detection device, characterized in that, It includes a camera unit (25), and the camera unit (25) is arranged above the supplementary light unit of the visual detection device described in any one of claims 1-7, and the imaging central axis of the camera unit (25) is coaxially arranged with the imaging hole (2).

9. The camera assembly of the visual detection device according to claim 8, wherein The camera unit (25) includes a camera (26), and the camera (26) is fixed on the connecting plate (6) through a camera fixing seat (27) and is height adjustable.

10. The camera assembly of the visual detection device according to claim 8, characterized in that, The light source mounting bracket (1) is connected to the XYZ-axis moving mechanism.

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