Degumming machine for chip production

Abstract

The utility model provides a degumming machine for chip production, which relates to the technical field of chip degumming machines and comprises a degumming machine shell, a drying cavity is arranged in the degumming machine shell, a plurality of heating rods are arranged in the drying cavity, a liquid storage tank is arranged in the degumming machine shell, and a filter tank is arranged on one side of the degumming machine shell. The degumming assembly is arranged between the degumming machine shell and the filter box and is used for improving the degumming effect; and the drying assembly is arranged in the glue removing machine shell and is used for evaporating the glue removing liquid and water. Through the arrangement of the photoresist removing assembly, the photoresist removing liquid can be evenly distributed on the surface of the chip, it is ensured that the photoresist removing liquid without impurities continuously makes contact with the surface of the chip, the photoresist removing effect is improved, through the arrangement of the drying assembly, the residual photoresist removing liquid and water can be rapidly and effectively evaporated, the chip transfer time is shortened, and the chip transfer efficiency is improved. And the production efficiency and the productivity are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip debonders, specifically a debonder for chip production. Background Technique

[0002] A chip, also known as an integrated circuit, is a microelectronic device or component. By constructing and connecting a large number of tiny transistors, resistors, capacitors, and other electronic components on a small piece of semiconductor material, it can achieve specific electrical functions. Chips are widely used in various modern electronic products such as computers, smartphones, household appliances, automobiles, and industrial equipment, responsible for functions such as data processing, storage, signal transmission, and control. During the chip production process, photoresist is often used to create circuit patterns on silicon wafers. However, when a certain process step is completed, if the photoresist is not removed, the remaining photoresist will interfere with subsequent manufacturing processes, resulting in a decline or even failure of chip performance. Therefore, in order to provide a clean and unobstructed silicon wafer surface for the next process step and ensure that subsequent circuit patterns can be accurately printed on the chip, it is necessary to remove the photoresist on the silicon wafer surface. The debonding methods include wet debonding and dry debonding. Among them, the wet debonding method uses chemical solvents such as alkaline solutions, acidic solutions, or organic solvents to dissolve and remove the photoresist on the chip surface.

[0003] However, when the existing debonders for chip production are in use, there are still certain defects. For example, the existing debonders for chip production usually immerse the chips in a debonding tank containing a debonding agent, and then the debonding liquid will continuously flow through a circulation pump to ensure that the impurity-free debonding liquid continuously contacts the chip surface, improving the debonding efficiency. However, after debonding the chips using this debonding method, the circulating debonding liquid will be mixed with the dissolved photoresist and other possible impurities and adhere to the inner wall of the debonding chamber. When debonding the next batch of chips, these impurities will adhere to the chip surface, thus affecting the chip debonding effect. In addition, after the existing debonders for chip production debond the chips, the chips must be transferred to another device for drying treatment, which will increase additional handling and process steps and prolong the production cycle. Content of the Utility Model

[0004] The purpose of the utility model is to solve the shortcomings existing in the background technique and provide a debonder for chip production. To solve the above problems, through the setting of the debonding component, the debonding liquid can be evenly distributed on the chip surface and ensure that the impurity-free debonding liquid continuously contacts the chip surface, improving the debonding effect. And through the setting of the drying component, the remaining debonding liquid and moisture can be quickly and effectively evaporated, reducing the chip transfer time and improving the production efficiency and production capacity.

[0005] To achieve the above object, the utility model provides the following technical solutions. A degumming machine for chip production includes: a degumming machine housing, a drying chamber is provided inside the degumming machine housing, a plurality of heating rods are provided inside the drying chamber, a liquid storage tank is provided inside the degumming machine housing, a filter box is provided on one side of the degumming machine housing, a degumming component provided between the degumming machine housing and the filter box for improving the degumming effect; and a drying component provided inside the degumming machine housing for evaporating the degumming liquid and moisture.

[0006] Further, the degumming component includes: a liquid storage cavity opened inside the liquid storage tank, a temporary storage cavity is opened at the top of the liquid storage tank, a pump is provided inside the degumming machine housing, a liquid extraction pipe is provided on one side of the pump, one end of the liquid extraction pipe extends into the liquid storage cavity, two electric telescopic rods are provided inside the degumming machine housing, the two electric telescopic rods are symmetrically arranged with respect to the liquid storage tank, a support plate is provided at the tops of the two electric telescopic rods, a liquid outlet block is fixedly connected to the bottom of the support plate, a hose connected to the top of the pump, a liquid outlet cavity is opened inside the liquid outlet block, a plurality of shower heads are connected to the bottom of the liquid outlet block, a filter cavity is opened inside the filter box, a filter screen is provided inside the filter cavity, a diversion pipe is provided on one side of the filter box, and a drainage pipe is connected to one side of the filter box.

[0007] Further, a limiting hole a is opened at the top of the support plate, a limiting hole b is opened at the top of the support plate, one end of the hose passes through the limiting hole a and the limiting hole b and is connected to the liquid outlet block.

[0008] Further, a sealing plate is provided on one side of the filter box, one side of the sealing plate is connected to the filter box by bolts, and a sealing rubber block is provided between the filter box and the sealing plate.

[0009] Further, one end of the diversion pipe extends into the temporary storage cavity, one end of the drainage pipe extends into the liquid storage cavity, and a solenoid valve is provided on the drainage pipe.

[0010] Further, the drying component includes: two electric push rods provided on one side of the degumming machine housing, one end of the two electric push rods extends into the degumming machine housing and is fixedly connected to a degumming plate, a chip degumming groove is opened on one side of the top of the degumming plate, a plurality of drainage grooves are opened at the bottom of the degumming plate, a hot air fan is provided inside the drying chamber, and the hot air fan is located below the plurality of heating rods.

[0011] Further, a dust filter screen is provided on the top of the degumming machine housing, an air outlet groove is opened at the bottom of the inner wall of the drying chamber, a box door is provided on one side of the degumming machine housing, and a control panel is provided on one side of the degumming machine housing.

[0012] The utility model provides a deburring machine for chip production, which has the following beneficial effects:

[0013] The advantages of the utility model are that through the setting of the deburring component, the deburring liquid can be evenly distributed on the chip surface and complex three-dimensional structures, and the deburring liquid containing impurities can be separated from the unused deburring liquid, ensuring that the impurity-free deburring liquid continuously contacts the chip surface, improving the deburring effect, and at the same time reducing the waste of the deburring liquid;

[0014] Secondly, through the setting of the drying component, the residual deburring liquid and moisture can be quickly and effectively evaporated, preventing the moisture and other solvents from having an adverse impact on the subsequent process steps, and also reducing the transfer time of the chip between different devices, improving production efficiency and production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0016] Figure 2 It is a sectional view of the overall structure of the utility model.

[0017] Figure 3 It is a sectional view of the drying chamber structure of the utility model.

[0018] Figure 4 It is a top view of the overall structure of the utility model.

[0019] Figure 5 It is a schematic diagram of the deburring plate structure of the utility model.

[0020] Figure 6 It is a sectional view of the deburring plate structure of the utility model.

[0021] Figures 1-6 In the figure: 1. Deburring machine housing; 101. Drying chamber; 102. Dust filter screen; 103. Electric push rod; 104. Box door; 105. Control panel; 2. Liquid storage tank; 201. Temporary storage chamber; 202. Liquid storage chamber; 3. Pump; 301. Hose; 302. Liquid outlet block; 303. Support plate; 304. Electric telescopic rod; 305. Liquid outlet chamber; 306. Shower head; 307. Limiting hole a; 308. Limiting hole b; 4. Filter box; 401. Filter chamber; 402. Sealing plate; 403. Diversion pipe; 404. Drainage pipe; 405. Filter net; 5. Hot fan; 501. Heating rod; 502. Air outlet groove; 6. Deburring plate; 601. Chip deburring groove; 602. Drainage groove. DETAILED DESCRIPTION OF THE INVENTION

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application.

[0023] The following disclosure provides many different embodiments or examples for implementing different structures of the present application. To simplify the disclosure of the present application, components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present application. In addition, the present application may repeat reference numerals and / or reference letters in different examples. This repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0024] The embodiment of the present application provides a deburring machine for chip production. This deburring machine for chip production can achieve, through the setting of the deburring component, that the deburring liquid can be evenly distributed on the surface of the chip, and ensure that the impurity-free deburring liquid continuously contacts the surface of the chip, improving the deburring effect. And through the setting of the drying component, the residual deburring liquid and moisture can be quickly and effectively evaporated, reducing the time for chip transfer, and improving production efficiency and production capacity. The following will elaborate on this deburring machine for chip production. It should be noted that the description order of the following embodiments does not limit the preferred order of the embodiments.

[0025] The following will describe the present application in detail with reference to the accompanying drawings and specific embodiments.

[0026] Embodiment 1

[0027] Please refer to Figures 1-6 In, a deburring machine for chip production provided in this embodiment includes: a deburring machine housing 1, a drying chamber 101 is provided inside the deburring machine housing 1, a plurality of heating rods 501 are provided inside the drying chamber 101, a liquid storage tank 2 is provided inside the deburring machine housing 1, and a filter tank 4 is provided on one side of the deburring machine housing 1; a deburring component provided between the deburring machine housing 1 and the filter tank 4 for improving the deburring effect; and a drying component provided inside the deburring machine housing 1 for evaporating the deburring liquid and moisture.

[0028] Among them, through the setting of the deburring component, the deburring liquid can be evenly distributed on the surface of the chip and in complex three-dimensional structures, and the deburring liquid containing impurities can be separated from the unused deburring liquid, ensuring that the impurity-free deburring liquid continuously contacts the surface of the chip, improving the deburring effect, and at the same time reducing the waste of the deburring liquid;

[0029] Secondly, through the setting of the drying component, the residual degumming liquid and moisture can be quickly and effectively evaporated, preventing moisture and other solvents from having an adverse impact on subsequent process steps. It can also reduce the transfer time of the chip between different devices, improving production efficiency and productivity.

[0030] Embodiment 2

[0031] On the basis of Embodiment 1, the degumming component includes: a liquid storage cavity 202 opened inside the liquid storage tank 2, and a temporary storage cavity 201 opened at the top of the liquid storage tank 2; a pump 3 disposed inside the housing 1 of the degumming machine, a liquid suction pipe is provided on one side of the pump 3, one end of the liquid suction pipe extends into the liquid storage cavity 202, two electric telescopic rods 304 are provided inside the housing 1 of the degumming machine, the two electric telescopic rods 304 are symmetrically arranged with respect to the liquid storage tank 2, a support plate 303 is provided at the tops of the two electric telescopic rods 304, and a liquid outlet block 302 is fixedly connected to the bottom of the support plate 303; a hose 301 connected to the top of the pump 3, a liquid outlet cavity 305 is opened inside the liquid outlet block 302, and a plurality of shower heads 306 are connected to the bottom of the liquid outlet block 302; a filter cavity 401 opened inside the filter box 4, a filter screen 405 is provided inside the filter cavity 401, a diversion pipe 403 is provided on one side of the filter box 4, and a drainage pipe 404 is connected to one side of the filter box 4; a limiting hole a307 is opened at the top of the support plate 303, a limiting hole b308 is opened at the top of the support plate 303, one end of the hose 301 passes through the limiting hole a307 and the limiting hole b308 and is connected to the liquid outlet block 302; a sealing plate 402 is provided on one side of the filter box 4, one side of the sealing plate 402 is connected to the filter box 4 by bolts, and a sealing rubber block is provided between the filter box 4 and the sealing plate 402; one end of the diversion pipe 403 extends into the temporary storage cavity 201, one end of the drainage pipe 404 extends into the liquid storage cavity 202, and a solenoid valve is provided on the drainage pipe 404.

[0032] During use, control the two electric push rods 103 to extend, push the degumming plate 6 above the liquid storage tank 2, then place the chips one by one into the chip degumming groove 601, and control the two electric telescopic rods 304 to retract, so as to drive the liquid outlet block 302 to move downward through the support plate 303 until the plurality of shower heads 306 are close to the chip surface. At this time, start the pump 3 to pump out the degumming liquid inside the liquid storage cavity 202, so that the degumming liquid enters the liquid outlet cavity 305 through the liquid suction pipe and the hose 301 and sprays out from the plurality of shower heads 306, so that the degumming liquid is sprayed onto the chip surface, and the degumming liquid reacts with the photoresist on the chip surface, so that the photoresist falls off. Then, the fallen photoresist is washed out from the plurality of drainage grooves 602 by the continuously sprayed degumming liquid from the plurality of shower heads 306 and flows into the temporary storage cavity 201.

[0033] Further, after these photoresist-containing stripping liquids flow into the temporary storage cavity 201, the stripping liquids flow into the filter cavity 401 through the diversion pipe 403 and are filtered by the filter screen 405. When the stripping liquid in the liquid storage cavity 202 is used up, the solenoid valve on the drainage pipe 404 can be opened to make the filtered stripping liquid in the filter cavity 401 flow back into the liquid storage cavity 202. Finally, the solenoid valve on the drainage pipe 404 is closed to complete the separation of the filter cavity 401 and the temporary storage cavity 201.

[0034] Embodiment 3

[0035] On the basis of Embodiment 1, the drying assembly includes: two electric push rods 103 arranged on one side of the stripping machine housing 1. One ends of the two electric push rods 103 extend into the interior of the stripping machine housing 1 and are fixedly connected to a stripping plate 6. A chip stripping groove 601 is formed on one side of the top of the stripping plate 6, and a plurality of drainage grooves 602 are formed at the bottom of the stripping plate 6; a hot air fan 5 arranged inside the drying cavity 101, and the hot air fan 5 is located below a plurality of heating rods 501; a dust filter screen 102 is arranged on the top of the stripping machine housing 1, an air outlet groove 502 is formed at the bottom of the inner wall of the drying cavity 101, a box door 104 is arranged on one side of the stripping machine housing 1, and a control panel 105 is arranged on one side of the stripping machine housing 1.

[0036] After the stripping of the entire chip is completed, the user can control the two electric push rods 103 to retract, move the stripping plate 6 to the bottom of the drying cavity 101, and simultaneously start a plurality of heating rods 501 and the hot air fan 5 to generate warm air, so that the warm air blows onto the chip inside the chip stripping groove 601, thereby evaporating the stripping liquid on the surface of the chip.

[0037] In addition, a control panel 105 is arranged on one side of the stripping machine housing 1. The control panel 105 can control the start and stop of the electric push rods 103, the pump 3, and the electric telescopic rod 304, and the electric energy of this stripping machine is provided by an external power supply.

[0038] Regarding the control program involved in the present invention, those skilled in the art can all implement it according to the same or similar principles in the prior art, and this part is not the innovation of the present invention.

[0039] In the above embodiments, the descriptions of each embodiment have their own emphases. For the parts not detailed in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0040] The above has introduced in detail a deburring machine for chip production provided by the embodiments of the present application. Specific examples are used in this article to elaborate on the principle and implementation manner of the present application. The description of the above embodiments is only used to help understand the technical solution and its core idea of the present application; those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A degumming machine for chip production, characterized in that, Including: The housing (1) of the degumming machine, inside which a drying chamber (101) is provided. Inside the drying chamber (101), multiple heating rods (501) are provided. Inside the housing (1) of the degumming machine, a liquid storage tank (2) is provided. On one side of the housing (1) of the degumming machine, a filter box (4) is provided; A degumming component provided between the housing (1) of the degumming machine and the filter box (4) for improving the degumming effect; and A drying component provided inside the housing (1) of the degumming machine for evaporating the degumming liquid and moisture.

2. The debonding machine for chip production according to claim 1, wherein, The degumming component includes: A liquid storage cavity (202) opened inside the liquid storage tank (2). A temporary storage cavity (201) is opened at the top of the liquid storage tank (2); A pump (3) provided inside the housing (1) of the degumming machine. A liquid suction pipe is provided on one side of the pump (3). One end of the liquid suction pipe extends into the liquid storage cavity (202). Two electric telescopic rods (304) are provided inside the housing (1) of the degumming machine. The two electric telescopic rods (304) are symmetrically arranged with respect to the liquid storage tank (2). At the top of the two electric telescopic rods (304), a support plate (303) is provided. At the bottom of the support plate (303), a liquid outlet block (302) is fixedly connected; A hose (301) connected to the top of the pump (3). An liquid outlet cavity (305) is opened inside the liquid outlet block (302). Multiple shower heads (306) are connected to the bottom of the liquid outlet block (302); A filter cavity (401) opened inside the filter box (4). A filter net (405) is provided inside the filter cavity (401). A diversion pipe (403) is provided on one side of the filter box (4). A drainage pipe (404) is connected to one side of the filter box (4).

3. The debonding machine for chip production according to claim 2, wherein A limiting hole a (307) is opened at the top of the support plate (303). A limiting hole b (308) is opened at the top of the support plate (303). One end of the hose (301) passes through the limiting hole a (307) and the limiting hole b (308) and is connected to the liquid outlet block (302).

4. The debonding machine for chip production according to claim 1, wherein, A sealing plate (402) is provided on one side of the filter box (4). One side of the sealing plate (402) is connected to the filter box (4) by bolts, and a sealing rubber block is provided between the filter box (4) and the sealing plate (402).

5. The degumming machine for chip production according to claim 2, characterized in that, One end of the diversion pipe (403) extends into the temporary storage cavity (201) inside. One end of the drainage pipe (404) extends into the liquid storage cavity (202) inside. An electromagnetic valve is provided on the drainage pipe (404).

6. The debonding machine for chip production according to claim 1, wherein The drying component includes: Two electric push rods (103) provided on one side of the housing (1) of the degumming machine. One end of the two electric push rods (103) extends into the inside of the housing (1) of the degumming machine and is fixedly connected to a degumming plate (6). A chip degumming groove (601) is opened on one side of the top of the degumming plate (6). Multiple drainage grooves (602) are opened at the bottom of the degumming plate (6); A hot air fan (5) provided inside the drying chamber (101), and the hot air fan (5) is located below the multiple heating rods (501).

7. The degumming machine for chip production according to claim 1, wherein, The top of the degumming machine housing (1) is provided with a dust filter net (102), the bottom of the inner wall of the drying chamber (101) is provided with an air outlet groove (502), one side of the degumming machine housing (1) is provided with a box door (104), and one side of the degumming machine housing (1) is provided with a control panel (105).

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