Clamping mechanism
A simplified load port mechanism with integrated proximity sensors and magnetic strips addresses the complexity and misjudgment issues in existing FOUP positioning, ensuring accurate and safe FOUP handling.
Patent Information
- Application Number
- CN202422177409.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-05
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-09-05
AI Technical Summary
The mechanism of the existing loading port cannot accurately confirm whether the transmission box is in place, resulting in damage to the mechanism terminal and misjudgment by the user.
A clamping mechanism is adopted, including a first stage, a clamping member, a first pneumatic cylinder, a sensor and a sensing sheet. Through the coordination between the sensing sheet and the sensor, the control module determines the position of the clamping member to ensure that the substrate accommodation box is in place accurately.
The accurate positioning and stable clamping of the substrate housing box are achieved, avoiding mechanism damage and misjudgment, and improving the reliability of the transmission process.
Smart Images
Figure CN223108850U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a clamping mechanism. Background Art
[0002] Whether in the semiconductor manufacturing process or the panel manufacturing process, during the transportation of a substrate (such as a wafer or a glass substrate), in order to avoid being contaminated by the external environment, in addition to providing a dust-free environment such as a clean room, a specific transfer box is required as the accommodation space for the substrate to facilitate transmission.
[0003] Taking the use of a front open unified pod (FOUP) before use as an example, during the transmission process, the transfer box (or wafer box) will be fixed on the mechanism of the loading port, and after confirming that the transfer box is in place, the required transmission operation will be carried out.
[0004] However, the existing mechanisms of the loading port are usually relatively complex and cannot confirm whether the transfer box has arrived in place by the mechanism. Simply put, when using a pneumatic cylinder as the power source for the mechanism drive, in the prior art, only a sensor is provided at the pneumatic cylinder. This is likely to cause damage at the end of the mechanism, and since the pneumatic cylinder is still intact, it may lead to misjudgment by the user. Therefore, how to enable the mechanism of the loading part to reflect the actual operating state has become a topic that relevant technical personnel need to consider and solve. Summary of the Utility Model
[0005] The utility model provides a clamping mechanism, which can complete operations such as clamping and transmission with a simple mechanism and ensure that the substrate accommodation box can be accurately in place.
[0006] A clamping mechanism of the present utility model is used to clamp a substrate accommodating box. The clamping mechanism includes a first carrier, a clamping member, a first air cylinder, a first sensor, a first sensing piece, a second sensor, a second sensing piece, and a control module. The first carrier has a receiving groove, and the substrate accommodating box is adapted to be placed on the first carrier. The clamping member is movably disposed in the receiving groove. The first air cylinder is disposed below the first carrier and pivotally connected to the clamping member and is used to drive the clamping member to drive the clamping member to switch between a release position and a clamping position. In the clamping position, the clamping member clamps the substrate accommodating box located on the first carrier. In the release position, the clamping member releases the substrate accommodating box located on the first carrier. The first sensor is disposed on the first carrier, and the first sensing piece is disposed on the clamping member to move with the clamping member. The sensing range of the first sensor is located on the movement path of the first sensing piece. The second sensor is disposed on the first carrier, and the second sensing piece is disposed on the clamping member to move with the clamping member. The sensing range of the second sensor is located on the movement path of the second sensing piece. The control module is electrically connected to the first air cylinder, the first sensor, and the second sensor. The control module determines whether the clamping member is in the clamping position according to whether the first sensor senses the first sensing piece, and the control module determines whether the clamping member is in the release position according to whether the second sensor senses the second sensing piece.
[0007] In an embodiment of the present utility model, the above-mentioned first sensor and second sensor are proximity sensors respectively, and the first sensing piece and the second sensing piece are magnetic pieces respectively.
[0008] In an embodiment of the present utility model, the concave portion of the above-mentioned clamping member is pivotally connected to the convex portion of the first carrier, so that the first air cylinder drives the clamping member to rotate relative to the first carrier to protrude from the receiving groove or sink into the receiving groove. The convex portion is located in the receiving groove, the first sensor is located on the top surface of the convex portion, and the first sensing piece is located in the concave portion. When the clamping member moves out of the receiving groove and is in the clamping position, the first sensing piece moves closer to the first sensor and faces each other. When the clamping member sinks into the receiving groove and is in the release position, the first sensing piece and the first sensor are away from each other.
[0009] In an embodiment of the present utility model, the above-mentioned second sensor is located on the side surface of the receiving groove, and the second sensing piece is located on the side surface of the clamping member. When the clamping member is in the release position, the second sensing piece and the clamping member are located in the receiving groove, and the second sensor and the second sensing piece face each other. When the clamping member is in the clamping position, the second sensing piece moves away from the receiving groove with the clamping member.
[0010] In an embodiment of the present utility model, a code reader is further included, which is disposed on the first carrier and electrically connected to the control module. The control module identifies the identity of the substrate accommodating box through the code reader.
[0011] In an embodiment of the present utility model, it further includes a plurality of positioning posts and a plurality of positioning sensors adjacent to each other, which are respectively disposed on the first carrier. The positioning posts are clamped in a plurality of positioning recesses at the bottom of the substrate accommodating box to position the substrate accommodating box on the first carrier. The positioning sensors are electrically connected to the control module for the control module to determine whether the substrate accommodating box is fully carried on the positioning posts.
[0012] In an embodiment of the present utility model, it further includes a base, a second carrier, and a second pneumatic cylinder. The second pneumatic cylinder is disposed on the base and electrically connected to the control module. The second carrier is movably disposed on the track of the base and connected to the second pneumatic cylinder. The first carrier is structurally connected to the second carrier. The control module drives the second carrier and the first carrier to move relative to the base through the second pneumatic cylinder.
[0013] In an embodiment of the present utility model, the above-mentioned second pneumatic cylinder and the second carrier are located below the base, and the first carrier is located above the base.
[0014] In an embodiment of the present utility model, it further includes a rotating assembly and a third pneumatic cylinder. The third pneumatic cylinder is assembled to the second carrier and electrically connected to the control module. The first carrier is connected to the third pneumatic cylinder through the rotating assembly. The control module drives the first carrier to rotate relative to the base through the third pneumatic cylinder and the rotating assembly.
[0015] In an embodiment of the present utility model, the above-mentioned rotating assembly includes a rotating table and a rotating shaft. The first carrier is disposed on the rotating table. The third pneumatic cylinder is assembled below the second carrier and drives the first carrier to rotate through the rotating shaft.
[0016] Based on the above, since the clamping mechanism drives the clamping member to move relative to the first carrier by the first pneumatic cylinder to achieve the purpose of clamping or releasing the substrate accommodating box, a first sensor and a second sensor are further disposed on the first carrier, and a first sensing piece and a second sensing piece are disposed on the clamping member. In this way, the control module can determine whether the clamping member is in the locking position by whether the first sensor senses the first sensing piece, and the control module can also determine whether the clamping member is in the release position by whether the second sensor senses the second sensing piece. Accordingly, by mastering the position of the clamping member, it can be further confirmed whether the substrate accommodating box is in place for clamping or whether it has been released by the clamping member.
[0017] To make the above features and advantages of the present utility model more obvious and understandable, specific embodiments are hereinafter given and described in detail in conjunction with the accompanying drawings as follows. Description of the Drawings
[0018] Figure 1 It is a schematic diagram of a clamping mechanism according to an embodiment of the present utility model;
[0019] Figure 2Shows the clamping mechanism from another perspective;
[0020] Figure 3 Shows an exploded schematic view of the clamping mechanism;
[0021] Figure 4 Shows the clamping mechanism from another perspective;
[0022] Figure 5 Is an exploded schematic view of some components of the clamping mechanism;
[0023] Figure 6 Is a partial cross-sectional view of the clamping mechanism;
[0024] Figure 7 Is an electrical relationship diagram of some components of the clamping mechanism;
[0025] Figure 8 Shows a schematic view of the substrate accommodating box being moved into the clamping mechanism;
[0026] Figures 9A to 9E Shows a flowchart of the substrate accommodating box being driven by the clamping mechanism. Detailed implementation
[0027] Figure 1 Is a schematic view of the clamping mechanism according to an embodiment of the present invention. Figure 2 Shows the clamping mechanism from another perspective. Figure 3 Shows an exploded schematic view of the clamping mechanism. At the same time, Cartesian coordinates X - Y - Z are provided to facilitate the description of the components. Please also refer to Figures 1 to 3 , in this embodiment, the clamping mechanism 100 includes a base BS, a first carrier 110, positioning posts 130, a positioning sensor 120, a clamping member 140, a code reader 150, a second carrier 170, a first pneumatic cylinder pc1, a second pneumatic cylinder pc2, a third pneumatic cylinder pc3, a track RA, a rotating table RT, and a rotating shaft RS. The base BS includes a top plate BS1 and a side shell BS2. The first carrier 110 is located on the top plate BS1, and the positioning posts 130 and the positioning sensor 120 stand on the first carrier 110. The first carrier 110 has a receiving groove 112, and the clamping member 140 is movably disposed in the receiving groove 112. The code reader 150 is disposed on one side of the first carrier 110 and is opposite to the clamping member 140.
[0028] The track RA is disposed on the back surface of the top plate BS1 (the first carrier 110 can be regarded as being on the front surface of the top plate BS1). The second carrier 170 is movably coupled to the track RA and is located on the back surface of the top plate BS1, and the second carrier 170 is simultaneously connected to the second pneumatic cylinder pc2, so that the second carrier 170 can be driven by the second pneumatic cylinder pc2 to move back and forth along the track RA.
[0029] The rotating table RT and the rotating shaft RS form the rotating assembly of the clamping mechanism 100, as shown in the comparison Figure 2 , Figure 3 it can be known that the third air cylinder pc3 is arranged below the second stage 170, and the first stage 110 is connected to the third air cylinder pc3 through the rotating table RT and the rotating shaft RS. Here, the rotating table RT includes a fixed part RT2 arranged on the second stage 170 and a rotating part RT1 arranged on the first stage 110, and the rotating shaft RS includes a shaft part RS2 arranged on the third air cylinder pc3 and a shaft part RS1 arranged on the first stage 110, and the shaft parts RS1 and RS2 are docked with each other, and the rotating part RT1 is rotatably coupled to the fixed part RT2. Accordingly, the third air cylinder pc3 can drive the first stage 110 to rotate about the Z-axis relative to the top plate BS1 through the rotating assembly (the rotating table RT and the rotating shaft RS). At the same time, when the second air cylinder pc2 drives the second stage 170 to move along the Y-axis relative to the top plate BS1, it can also drive the third air cylinder pc3 and the first stage 110 to move synchronously along the Y-axis. Here, the second air cylinder pc2 is, for example, a rodless air cylinder for linear motion, and the third air cylinder pc3 is, for example, a rotary air cylinder.
[0030] Figure 4 The clamping mechanism is shown from another perspective. Figure 5 It is an exploded view of some components of the clamping mechanism. Figure 6 It is a partial cross-sectional view of the clamping mechanism. Please also refer to Figures 4 to 6 , in this embodiment, the first air cylinder pc1 is assembled below the first stage 110, the first air cylinder pc1 is pivotally connected to the clamping member 140, and the clamping member 140 is pivotally connected to the first stage 110. Further, as Figure 6 shown, the clamping member 140 includes a part one 141 and a part two 142, the first air cylinder pc1 includes a cylinder body pc11 and a push rod pc12, wherein the cylinder body pc11 is assembled to the first stage 110 through a bracket BR, and the push rod pc12 is movably coupled to the cylinder body pc11, and the push rod pc12 is pivotally connected to the pivotal portion 142b of the part two 142, and the pivotal portion 142a of the part two 142 is also pivotally connected to the first stage 110. Also as Figure 4 or Figure 5 shown, the part two 142 has a recess 142c, and the recess 142c is pivotally connected to the convex portion 111 of the first stage 110, wherein the convex portion 111 is located in the receiving groove 112.
[0031] Based on the above component assembly, the first air cylinder pc1 can drive the clamping member 140 to pivot relative to the first stage 110, so that the clamping member 140 can stand on the first stage 110 or be immersed in the receiving groove 112 (there will be further description later).
[0032] Figure 7 It is an electrical relationship diagram of some components of the clamping mechanism. Please refer to Figure 4 、 Figure 5 and Figure 7 Among them, as shown from Figure 6 , it can already be clearly known the movement mode of the clamping member 140 relative to the first carrier 110, to protrude into or immerse into the receiving groove 112. The clamping mechanism 100 of this embodiment further includes a first sensor SN1, a first sensing piece M1, a second sensor SN2, a second sensing piece M2 and a control module CM. The first sensor SN1 is disposed on the first carrier 110, the first sensing piece M1 is disposed on the clamping member 140 to move with the clamping member 140, and the sensing range of the first sensor SN1 is located on the action path of the first sensing piece M1. The second sensor SN2 is disposed on the first carrier 110, the second sensing piece M2 is disposed on the clamping member 140 to move with the clamping member 140, and the sensing range of the second sensor SN2 is located on the action path of the second sensing piece M2.
[0033] The control module CM is electrically connected to the first pneumatic cylinder pc1, the second pneumatic cylinder pc2, the third pneumatic cylinder pc3, the code reader 150, the positioning sensor 120, the first sensor SN1 and the second sensor SN2. First, as shown in Figure 4 and Figure 5 , the first sensor SN1 is located on the top surface of the convex portion 111, and the first sensing piece M1 is located in the concave portion 142c. When the clamping member 140 moves out of the receiving groove 112 and is in the fastening position, the first sensing piece M1 moves closer to the first sensor SN1 and faces each other. When the clamping member 140 immerses into the receiving groove 112 and is in the release position, the first sensing piece M1 and the first sensor SN1 are away from each other. Furthermore, as shown in Figure 5 , the second sensor SN2 is located on the side surface of the receiving groove 112, and the second sensing piece M2 is located on the side surface of the clamping member 140. When the clamping member 140 is in the release position, the second sensing piece M2 and the clamping member 140 are both located in the receiving groove 112, and the second sensor SN2 and the second sensing piece M2 face each other (simultaneously referring to Figure 4 、 Figure 5its relative position can be obtained). When the clamping member 140 is in the fastening position, the second sensing piece M2 moves away from the receiving groove 112 along with the clamping member 140, which is also equivalent to moving away from the second sensor SN2. Based on the above, the control module CM can determine whether the clamping member 140 is in the fastening position according to whether the first sensor SN1 senses the first sensing piece M1, and the control module CM can determine whether the clamping member 140 is in the release position according to whether the second sensor SN2 senses the second sensing piece M2. Simply put, the two extreme positions (fastening position and release position) generated by the movement of the clamping member 140 can be ensured by the corresponding positions of the above sensors and sensing pieces. Here, the first sensor SN1 and the second sensor SN2 are proximity sensors respectively, the first sensing piece M1 and the second sensing piece M2 are magnetic pieces respectively, and in one embodiment, the sensing range of the first sensor SN1 and the second sensor SN2 is 1 mm, that is, when the relative distance between the first sensing piece M1 (second sensing piece M2) and the first sensor SN1 (second sensor SN2) exceeds 1 mm, no induction can be generated.
[0034] Figure 8 Schematic diagram showing the substrate accommodating box being moved into the clamping mechanism. Please refer to Figure 8 , in this embodiment, the substrate accommodating box 200 of this embodiment takes the Front Open Unified Pod (FOUP) as an example, and the clamping mechanism 100 is, for example, arranged at the loading port of the wafer processing equipment, but not limited thereto. As Figure 8 shown, the substrate accommodating box 200 is moved into the loading port with the clamping mechanism 100 through the robotic arm 300.
[0035] On the other hand, please refer to Figure 1 , Figure 7 and Figure 8 , in this embodiment, the clamping mechanism 100 further includes a plurality of object state sensors 160, which are arranged on the first carrier 110 and electrically connected to the control module CM. The object state sensors 160 are adjacent to the positioning posts 130, the positioning sensors 120 and the barcode readers 150. The object state sensors 160 are used for the control module CM to determine the state of the object (such as a wafer) in the accommodating box 200, such as the size and thickness of the wafer before and after the process. Here, the object state sensors 160 can be set by the user according to the characteristics of the object to be sensed.
[0036] Figures 9A to 9E Flowchart showing the substrate accommodating box being driven by the clamping mechanism. Please refer to Figure 9A and Figure 9B , as Figure 8 after the robotic arm 300 sends the substrate accommodating box 200 into the loading port, Figures 9A to 9BThe process is that the robotic arm 300 places the substrate holding cassette 200 onto the first stage 110, and after the robotic arm 300 withdraws from the first stage 110 (as Figure 9B shown), the positioning recess 210 at the bottom of the substrate holding cassette 200 and the positioning posts 130 on the first stage 110 (as Figure 1 shown) are snap-fitted together in correspondence with each other to position the substrate holding cassette 200 on the first stage 110. At the same time, since the positioning sensor 120 is adjacent to the positioning posts 130, the control module CM can thus know whether the substrate holding cassette 200 has been successfully and firmly abutted against the positioning posts 130 through the sensing state of the positioning sensor 120. Simply put, in this embodiment, after Figure 1 the plurality of positioning sensors 120 shown all generate sensing signals, the control module CM confirms that the substrate holding cassette 200 is placed correctly. Otherwise, the control module CM will need to contact the robotic arm 300 to re-place the substrate holding cassette 200. Here, Figure 9A and Figure 9B the clamping members 140 shown are recessed into the receiving grooves 112 and are in the release position, and the control module CM confirms the position of the clamping members 140 through the second sensor SN2 and the second sensing piece M2 as described above.
[0037] Next, after the placement of the substrate holding cassette 200 is completed, the control module CM uses a barcode reader 150 to identify the identity of the substrate holding cassette 200 to confirm the relevant information of the substrate holding cassette 200 (and the substrate therein).
[0038] Next, as Figure 9C shown, the control module CM drives the clamping members 140 through the first pneumatic cylinder pc1 to cause the clamping members 140 to switch from the Figure 9B release position shown to the Figure 9C clamping position, and causes the clamping members 140 to clamp the clamping recess 220 at the bottom of the substrate holding cassette 200. At this time, the control module CM confirms whether the clamping members 140 are in the clamping position through the first sensor SN1 and the first sensing piece M1.
[0039] Next, after it is confirmed that the aforementioned clamping members 140 have clamped the substrate holding cassette 200, the control module CM can drive the first stage 110 to rotate about the Z axis through the third pneumatic cylinder pc3, that is, Figure 9C switch to the Figure 9D process. After that, the control module CM can further drive the first stage 110 and the second stage 170 to move along the Y axis through the second pneumatic cylinder pc2, so that the substrate holding cassette 200 and the second stage 170 are docked. There is no limitation here Figure 9D and Figure 9EThe actions and sequences are carried out according to actual requirements. However, it should be noted that all of them must be executed after ensuring that the clamping member 140 has firmly clamped the substrate accommodating box 200 on the first stage 110.
[0040] In summary, in the above embodiments of the present invention, the clamping mechanism uses a first pneumatic cylinder to drive the clamping member to move relative to the first stage to achieve the purpose of clamping or releasing the substrate accommodating box. Further, a first sensor and a second sensor are provided on the first stage, a first sensing piece and a second sensing piece are provided on the clamping member, and by restricting the sensing ranges, that is, making the sensing range of the first sensor located on the movement path of the first sensing piece, and the sensing range of the second sensor located on the movement path of the second sensing piece, the clamping position and the releasing position of the clamping member are ensured.
[0041] In this way, the control module can judge whether the clamping member is in the clamping position by whether the first sensor senses the first sensing piece, and the control module can also judge whether the clamping member is in the releasing position by whether the second sensor senses the second sensing piece. Accordingly, when the substrate accommodating box is placed on the first stage, and the control module confirms through the positioning sensor that the substrate accommodating box has been truly supported on the positioning posts, it can then continuously fix the substrate accommodating box on the first stage through the first pneumatic cylinder and the clamping member, and then further perform the transmission operations of rotating or moving the substrate accommodating box.
[0042] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A clamping mechanism for clamping a substrate accommodating box, characterized in that, Comprising: A first stage, having a receiving groove, the substrate receiving box being adapted to be placed on the first stage; A clamping member, movably disposed in the receiving groove; A first pneumatic cylinder, disposed below the first stage and pivotally connected to the clamping member to drive the clamping member to switch between a release position and a clamping position. When in the clamping position, the clamping member clamps the substrate receiving box located on the first stage. When in the release position, the clamping member releases the substrate receiving box located on the first stage; A first sensor, disposed on the first stage; A first sensing piece, disposed on the clamping member to move with the clamping member, the sensing range of the first sensor being located on the movement path of the first sensing piece; A second sensor, disposed on the first stage; A second sensing piece, disposed on the clamping member to move with the clamping member, the sensing range of the second sensor being located on the movement path of the second sensing piece; And A control module, electrically connected to the first pneumatic cylinder, the first sensor and the second sensor. Wherein the control module determines whether the clamping member is in the clamping position according to whether the first sensor senses the first sensing piece, and the control module determines whether the clamping member is in the release position according to whether the second sensor senses the second sensing piece.
2. The clamping mechanism according to claim 1, wherein The first sensor and the second sensor are proximity sensors respectively, and the first sensing piece and the second sensing piece are magnetic pieces respectively.
3. The clamping mechanism according to claim 1, wherein The concave portion of the clamping member is pivotally connected to the convex portion of the first stage, so that the first pneumatic cylinder drives the clamping member to rotate relative to the first stage to protrude from or sink into the receiving groove. The convex portion is located in the receiving groove, the first sensor is located on the top surface of the convex portion, and the first sensing piece is located in the concave portion. When the clamping member moves out of the receiving groove and is in the clamping position, the first sensing piece moves closer to the first sensor and faces each other. When the clamping member sinks into the receiving groove and is in the release position, the first sensing piece and the first sensor are away from each other.
4. The clamping mechanism according to claim 1, wherein, The second sensor is located on the side of the receiving groove, and the second sensing piece is located on the side of the clamping member. When the clamping member is in the release position, the second sensing piece and the clamping member are located in the receiving groove, and the second sensor and the second sensing piece face each other. When the clamping member is in the clamping position, the second sensing piece moves away from the receiving groove with the clamping member.
5. The clamping mechanism according to claim 1, characterized in that It further includes a code reader, disposed on the first stage and electrically connected to the control module, and the control module identifies the identity of the substrate receiving box through the code reader.
6. The clamping mechanism according to claim 1, characterized in that It further includes a plurality of positioning posts and a plurality of positioning sensors adjacent to each other, respectively disposed on the first stage. The plurality of positioning posts are clamped in a plurality of positioning recesses at the bottom of the substrate receiving box to position the substrate receiving box on the first stage. The plurality of positioning sensors are electrically connected to the control module for the control module to determine whether the substrate receiving box is fully carried on the plurality of positioning posts.
7. The clamping mechanism according to claim 1, characterized in that, It further includes a base, a second stage, and a second air cylinder. The second air cylinder is disposed on the base and electrically connected to the control module. The second stage is movably disposed on the track of the base and connected to the second air cylinder. The first stage is linked to the second stage. The control module drives the second stage and the first stage to move relative to the base through the second air cylinder.
8. The clamping mechanism according to claim 7, characterized in that, The second air cylinder and the second stage are located below the base, and the first stage is located above the base.
9. The clamping mechanism according to claim 7, characterized in that, It further includes a rotating assembly and a third air cylinder. The third air cylinder is assembled to the second stage and electrically connected to the control module. The first stage is connected to the third air cylinder through the rotating assembly. The control module drives the first stage to rotate relative to the base through the third air cylinder and the rotating assembly.
10. The clamping mechanism according to claim 9, characterized in that, The rotating assembly includes a rotating table and a rotating shaft. The first stage is disposed on the rotating table. The third air cylinder is assembled below the second stage and drives the first stage to rotate through the rotating shaft.