Cleaning tool

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a cleaning tool, which comprises a cleaning block provided with a wiping surface for cleaning an area to be wiped; the cover body detachably covers the cleaning block, at least the wiping surface of the cleaning block is exposed out of the cover body, a handheld part is arranged at one end, deviating from the wiping surface, of the cover body, and the handheld part is provided with a groove convenient to hold by hand. The cover body with the handheld part is arranged on the outer side of the cleaning block, so that manual operation is facilitated, and the handheld part is provided with the groove conforming to ergonomics, so that the problem that the cleaning tool falls off in the using process can be prevented, and meanwhile, the uniformity of force application in the cleaning process can be improved. In addition, the cover body and the cleaning block are designed to be detachable, so that the cleaning block is convenient to maintain and replace.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a cleaning tool. Background Art

[0002] In semiconductor process production, it is often necessary to maintain and service process equipment. For example, when cleaning the wafer stage, it is often necessary to use Figure 1 The cleaning block 1 shown is used to gently wipe the surface of the wafer carrier, and then dust and other foreign matter on the wafer carrier are sucked away using a vacuum cleaner to ensure the cleanliness of the wafer carrier surface and avoid affecting the yield of the wafer.

[0003] However, when this cleaning block 1 is used improperly during the cleaning process, there are at least the following problems:

[0004] 1) Inconvenient to take. Generally, the cleaning block 1 is held by hand around the side walls, but when the cleaning block 1 is held by hand to wipe the wafer carrier, there is a risk of it falling;

[0005] 2) It is inconvenient to apply force, and it is easy to apply uneven force to the wafer stage, causing the surface of the wafer stage to dent;

[0006] 3) The side walls of the cleaning block 1 are generally covered with plastic. When the cleaning block 1 is held by hand to wipe the wafer carrier, the side walls will inevitably rub and collide with the surface of the wafer carrier, thereby causing damage to the surface;

[0007] 4) The upper surface 2 of the cleaning block 1 is generally marked with text, but the text will fall off after long-term use, and it is easy to be confused with the wiping surface 3 (the lower surface of the cleaning block 1). The wiping surface 3 generally needs to be polished smooth, and the upper surface 2 of the cleaning block 1 is relatively rough. If the upper surface 2 of the cleaning block 1 is accidentally used to wipe the surface of the wafer carrier, it is easy to cause damage to the surface. Utility Model Content

[0008] The utility model aims to provide a cleaning tool, which solves the problems of the existing cleaning block for wiping the wafer carrier, such as inconvenient to take and apply force, easy collision with the wafer carrier, and mixed use of the front and back sides.

[0009] In order to achieve the above object, the utility model provides a cleaning tool, comprising:

[0010] A cleaning block having a wiping surface for cleaning an area to be wiped;

[0011] The cover body is detachably covered on the outside of the cleaning block, at least the wiping surface of the cleaning block is exposed from the cover body, and a hand-holding part is provided at one end of the cover body away from the wiping surface, and the hand-holding part is provided with a groove for easy hand-holding.

[0012] Optionally, there is a spacing between the end face of the cover body close to the wiping surface and the wiping surface.

[0013] Optionally, an internal thread is provided on the inner wall of the cover body, and an external thread adapted to the internal thread is provided on the outer wall of the cleaning block.

[0014] Optionally, a number of threaded holes for connection by screws are provided on the side wall of the cover body and the side wall of the cleaning block.

[0015] Optionally, both the cover body and the hand-held part are cylindrical and coaxially arranged, and the diameter of the hand-held part is smaller than the diameter of the cover body.

[0016] Optionally, the groove is an annular groove; or, there are two grooves which are respectively arranged on opposite sides of the hand-held part.

[0017] Optionally, the shapes and / or sizes of the two grooves are different.

[0018] Optionally, a number of dust suction holes are provided on the wiping surface, and the cleaning tool further includes a number of dust suction pipes. One end of the dust suction pipe is correspondingly communicated with the dust suction hole, and the other end sequentially passes through the cleaning block, the cover body and the hand-held part and then is connected to a negative pressure dust suction device.

[0019] Optionally, a number of cleaning channels are provided inside the cleaning block. The drainage ports of the cleaning channels are located on the wiping surface, and an annular water storage tank is provided on the cover body. The cleaning channels are communicated with the annular water storage tank.

[0020] Optionally, a number of water discharge ports are provided on the annular water storage tank. The water inlet of the cleaning channel is communicated with the water discharge port through a connector. The size of one end of the connector communicated with the water discharge port is larger than the size of one end of the connector communicated with the water inlet of the cleaning channel.

[0021] In the cleaning tool provided by the present utility model, there are at least one of the following beneficial effects:

[0022] 1) By providing the cover body with the hand-held part on the outside of the cleaning block, it is convenient for manual operation, and the hand-held part is provided with a groove conforming to ergonomics, which can not only prevent the cleaning tool from falling during use, but also help to improve the uniformity of the force applied during cleaning;

[0023] 2) The cover body and the cleaning block are designed to be detachable, which is convenient for maintaining and replacing the cleaning block;

[0024] 3) There is a gap between the end face of the cover body close to the wiping surface and the wiping surface, which avoids accidental collision between the cover body and the area to be wiped (such as the surface of the wafer stage) when holding the cleaning tool to wipe and clean the area to be wiped. Moreover, due to the presence of the cover body, the risk of accidental collision between the side wall of the cleaning block and the area to be wiped is further reduced;

[0025] 4) By arranging a dust suction pipeline inside the cleaning tool, dust and other particulate matters can be sucked away while cleaning the area to be wiped, improving the cleaning effect;

[0026] 5) By arranging the cleaning channel and the annular water storage tank, cleaning liquid can be conveyed to clean the area to be wiped, further improving the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Those of ordinary skill in the art should understand that the provided drawings are used to better understand the present utility model and do not constitute any limitation to the scope of the present utility model. Among them:

[0028] Figure 1 is a schematic structural view of the cleaning block provided by the prior art;

[0029] Figure 2 is a schematic structural view of the cleaning tool provided by an embodiment of the present utility model;

[0030] Figure 3 is a top view of the cleaning tool provided by an embodiment of the present utility model;

[0031] Figure 4 is a bottom view of the cleaning tool provided by an embodiment of the present utility model;

[0032] Figure 5 is a schematic view of the joint provided by an embodiment of the present utility model.

[0033] Among them:

[0034] 1 - cleaning block; 2 - upper surface; 3 - wiping surface;

[0035] 10 - cleaning block; 11 - wiping surface; 20 - cover body; 30 - holding part; 31 - groove; 40 - dust suction pipeline; 41 - dust suction hole; 50 - cleaning channel; 60 - annular water storage tank; 61 - water outlet; 70 - joint. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0036] To make the objectives, advantages, and features of the present utility model clearer, the following further describes the present utility model in detail with reference to the accompanying drawings and specific embodiments. It should be noted that the accompanying drawings are in a very simplified form and use non-precise scales, and are only used to conveniently and clearly assist in explaining the objectives of the embodiments of the present utility model. To make the objectives, features, and advantages of the present utility model more obvious and understandable, please refer to the accompanying drawings. It should be noted that the structures, scales, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present utility model. Any modification of the structure, change in the proportional relationship, or adjustment of the size, in the case of being the same or similar to the effects that the present utility model can produce and the objectives that can be achieved, should still fall within the scope covered by the technical content disclosed in the present utility model.

[0037] As used in the present utility model, the singular forms "a", "an", and "the" include plural objects unless the content clearly indicates otherwise. As used in the present utility model, the term "or" is generally used in the sense of including "and / or" unless the content clearly indicates otherwise. As used in the present utility model, the term "several" is generally used in the sense of including "at least one" unless the content clearly indicates otherwise. As used in the present utility model, the term "at least two" is generally used in the sense of including "two or more" unless the content clearly indicates otherwise. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", "third" may explicitly or implicitly include one or at least two of such features.

[0038] In the description of the present utility model, unless otherwise clearly specified and defined, the terms "mounted", "connected", "coupled", "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0039] Please refer to Figure 2 , this embodiment provides a cleaning tool, including:

[0040] A cleaning block 10 having a wiping surface 11 for cleaning a to-be-wiped area;

[0041] The cover body 20 is detachably disposed outside the cleaning block 10, and at least the wiping surface 11 of the cleaning block 10 is exposed from the cover body 20. One end of the cover body 20 facing away from the wiping surface 11 is provided with a handheld part 30, and the handheld part 30 is provided with a groove 31 convenient for holding.

[0042] By providing the cover body 20 with the handheld part 30 outside the cleaning block 10, it is convenient for manual operation, and the handheld part 30 is provided with a groove 31 that conforms to ergonomics, which can not only prevent the cleaning tool from falling during use, but also be beneficial to improving the uniformity of the force applied during cleaning. In addition, the cover body 20 and the cleaning block 10 are designed to be detachable, which is convenient for maintaining and replacing the cleaning block 10.

[0043] In this embodiment, at least the wiping surface 11 of the cleaning block 10 is exposed from the cover body 20. Preferably, there is a gap between the end face of the cover body 20 close to the wiping surface 11 and the wiping surface 11. It should be understood that taking the cleaning block 10 placed vertically as an example, the wiping surface 11 is the lower surface of the cleaning block 10, and the cover body 20 is covered outside the cleaning block 10 along the vertical direction. At this time, there is a gap between the end face of the cover body 20 close to the wiping surface 11 (that is, the lower surface of the cover body 20) and the wiping surface 11, which can be understood as the cover body 20 does not completely cover the side wall of the cleaning block 10. The purpose of such a design is to avoid accidental collision between the cover body 20 and the area to be wiped (such as the surface of the wafer stage) when using the cleaning tool to wipe the area to be wiped, and due to the existence of the cover body 20, the risk of accidental collision between the side wall of the cleaning block 10 and the area to be wiped is further reduced. It should be noted that the present invention does not limit the size of the gap between the end face of the cover body 20 close to the wiping surface 11 and the wiping surface 11, and it can be designed according to the actual situation.

[0044] In this embodiment, the cover body 20 is detachably disposed outside the cleaning block 10. As a preferred example in this embodiment, the inner wall of the cover body 20 is provided with internal threads, and the outer wall of the cleaning block 10 is provided with external threads adapted to the internal threads. The cover body 20 can be threadedly connected to the cleaning block 10 by screwing. Such a configuration simplifies the connection between the cover body 20 and the cleaning block 10 on the one hand, and the stability of the threaded connection is also better on the other hand.

[0045] In some other embodiments, a plurality of threaded holes for connection by screws are provided on the side walls of the cover body 20 and the cleaning block 10, and the cover body 20 and the cleaning block 10 can be firmly connected by screws. The present invention does not specifically limit the number and distribution mode of the threaded holes. For example, four threaded holes are uniformly arranged along the circumferential direction of the cover body 20 and the cleaning block 10.

[0046] Of course, in addition to providing threaded holes on the side wall of the cover body 20, the threaded holes can also be replaced with smooth holes, and the detachable connection between the cover body 20 and the cleaning block 10 can also be achieved by the fastening connection between the screw and the threaded hole on the cleaning block 10.

[0047] Preferably, both the cover body 20 and the handheld part 30 are cylindrical and coaxially arranged, and the diameter of the handheld part 30 is smaller than that of the cover body 20 for easy one-handed clamping by the user. In this embodiment, the cover body 20 and the handheld part 30 can be integrally formed, such as by metal machining or injection molding, or can be separately processed and then assembled into a whole. The present utility model does not limit this. In addition, the present utility model does not limit the materials of the cover body 20 and the handheld part 30 either. The materials of the two can be the same or different, and the materials include but are not limited to metal or plastic. In a preferred embodiment, the cover body 20 and the handheld part 30 are integrally processed from stainless steel material.

[0048] In this embodiment, the diameter of the cover body 20 is 76.4 mm, the height is 25 mm, the diameter of the handheld part 30 is 40 mm, the height is 10 mm, and the diameter of the cleaning block 10 is 76 mm, the height is 25 mm.

[0049] The cover body 20 is a hollow structure, and the handheld part 30 can be a solid structure or a hollow structure. The present utility model does not limit this.

[0050] The cleaning block 10 can be a solid structure or a hollow structure. The present utility model does not limit this either. In a preferred embodiment, the cleaning block 10 is a solid structure and is polished from granite.

[0051] In this embodiment, the handheld part 30 is provided with a groove 31 for easy holding, that is, the design of the groove 31 should conform to ergonomics. Preferably, the groove 31 is an annular groove, which facilitates the user to hold from any direction of the annular groove; or, the groove 31 is two and are respectively arranged on the opposite sides of the handheld part 30 for easy clamping by the user from both sides of the handheld part 30. In addition, the two grooves 31 can be symmetrically designed or asymmetrically designed. The present utility model does not limit this.

[0052] Furthermore, the shapes and / or sizes of the two grooves 31 are different. Generally speaking, since the sizes of fingers are different, grooves 31 with different shapes and / or sizes can be designed to better fit one-handed clamping, thus facilitating the user to apply external force.

[0053] Please continue to refer to Figures 2 - 4, a plurality of dust suction holes 41 are formed in the wiping surface 11. The cleaning tool further includes a plurality of dust suction pipes 40. One end of the dust suction pipe 40 is correspondingly communicated with the dust suction hole 41, and the other end sequentially passes through the cleaning block 10, the cover body 20 and the handheld part 30 and then is connected to a negative pressure dust suction device. By arranging the dust suction pipe 40 inside the cleaning tool, dust and other particulate matters can be sucked away while cleaning the area to be wiped, improving the cleaning effect. Moreover, the dust suction pipe 40 adopts a hidden design, which does not affect the aesthetics. The present utility model does not specifically limit the size, quantity, distribution mode of the dust suction port, as well as the size, quantity and distribution mode of the dust suction pipe 40, etc., but it is necessary to ensure that the dust suction hole 41 is adapted to the dust suction pipe 40.

[0054] In this embodiment, the dust suction pipe 40 is one, and the dust suction hole is one and is arranged at the center of the wiping surface 11. A through hole is pre-opened in the cleaning block 10 along the vertical direction, and through holes are correspondingly opened in the cover body 20 and the handheld part 30. The dust suction pipe 40 directly passes through the handheld part 30, the cover body 20 and the cleaning block 10 along the vertical direction and then extends to the dust suction hole 41.

[0055] Preferably, a plurality of cleaning channels 50 are formed inside the cleaning block 10. The drain outlet of the cleaning channel 50 is located on the wiping surface 11. An annular water storage tank 60 is arranged on the cover body 20. The cleaning channel 50 is communicated with the annular water storage tank 60. By arranging the cleaning channel 50 and the annular water storage tank 60, cleaning liquid can be conveyed to clean the area to be wiped, further improving the cleaning effect. The present utility model does not specifically limit the size, quantity, distribution mode of the cleaning channel 50, as well as the size of the annular water storage tank 60, etc. It should be noted that generally when using the cleaning tool to clean the surface of the wafer carrier, the amount of liquid used is not large, so there is no need to add cleaning liquid to the annular water storage tank 60 while cleaning, that is, only an appropriate amount of cleaning liquid needs to be added to the annular water storage tank 60 in advance, and no additional cleaning liquid needs to be added during the cleaning process.

[0056] In a preferred example, as Figure 5 shown, the annular water storage tank 60 is provided with a plurality of water outlets 61. The water inlet of the cleaning channel 50 is communicated with the water outlet 61 through a joint 70. The size of one end of the joint 70 communicated with the water outlet 61 is larger than the size of one end of the joint 70 communicated with the water inlet of the cleaning channel 50. Such a design is convenient for the cleaning liquid in the annular water storage tank 60 to smoothly enter the cleaning channel 50 through the joint 70.

[0057] In this embodiment, the cleaning channels 50 and the joints 70 are four, and the water outlets 61 are four and are evenly distributed along the circumferential direction of the annular water storage tank 60. Of course, the present application does not limit the quantity and distribution mode of the water outlets 61, as long as they are correspondingly communicated with the cleaning channels 50 through the joints 70 one by one.

[0058] In a preferred embodiment, the cover body 20 and the cleaning block 10 are threadedly connected in a screwing manner. After the cover body 20 is tightened, there is a certain distance between the top wall of the cover body 20 and the upper surface of the cleaning block 10 to form a receiving cavity. The joint 70 includes a frustum part and a cylindrical part. The frustum part is located in the receiving cavity and is aligned with the drain opening 61 formed in the annular water storage tank 60. The cylindrical part can be directly inserted into the cleaning channel 50 or can be installed by means of screwing. For example, internal threads are provided on the inner wall of the cleaning channel 50 and external threads are provided on the outside of the cylindrical part. At this time, after the cleaning liquid is injected into the annular water storage tank 60, the cleaning liquid can enter the cleaning channel 50 through the joint 70 and be discharged from the drain opening of the cleaning channel 50.

[0059] In summary, the embodiment of the present utility model provides a cleaning tool. By providing a cover body 20 with a hand-held part 30 on the outside of the cleaning block 10, it is convenient for manual operation. Moreover, the hand-held part 30 is provided with an ergonomic groove 31, which can not only prevent the cleaning tool from falling during use, but also help to improve the uniformity of the force applied during cleaning. In addition, the cover body 20 and the cleaning block 10 are designed to be detachable, which is convenient for maintaining and replacing the cleaning block 10.

[0060] In addition, it should also be recognized that although the present utility model has been disclosed above with preferred embodiments, the above embodiments are not intended to limit the present utility model. For any person skilled in the art, without departing from the scope of the technical solution of the present utility model, many possible changes and modifications can be made to the technical solution of the present utility model by using the technical content disclosed above, or it can be modified into an equivalent embodiment with equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present utility model without departing from the content of the technical solution of the present utility model still belong to the scope of protection of the technical solution of the present utility model.

Claims

1. A cleaning tool, characterized in that, Comprising: A cleaning block having a wiping surface for cleaning an area to be wiped; A cover body detachably covering the outside of the cleaning block, at least the wiping surface of the cleaning block being exposed from the cover body, one end of the cover body facing away from the wiping surface being provided with a hand-held portion, and the hand-held portion being provided with a groove facilitating hand-holding; A plurality of suction holes are formed in the wiping surface, and the cleaning tool further includes a plurality of suction pipes, one end of each suction pipe being correspondingly communicated with the suction hole, and the other end sequentially passing through the cleaning block, the cover body and the hand-held portion and then connecting to a negative pressure suction device; A plurality of cleaning channels are formed inside the cleaning block, the drain outlet of the cleaning channel being located on the wiping surface, and an annular water storage tank is arranged on the cover body, and the cleaning channel is communicated with the annular water storage tank; 2. The cleaning tool according to claim 1, characterized in that, There is a spacing between the end face of the cover body close to the wiping surface and the wiping surface; 3. The cleaning tool according to claim 1, wherein Internal threads are provided on the inner wall of the cover body, and external threads adapted to the internal threads are provided on the outer wall of the cleaning block; 4. The cleaning tool according to claim 1, characterized in that A plurality of threaded holes for connection by screws are formed in the side walls of the cover body and the cleaning block; 5. The cleaning tool according to claim 1, characterized in that, Both the cover body and the hand-held portion are cylindrical and coaxially arranged, and the diameter of the hand-held portion is smaller than the diameter of the cover body; 6. The cleaning tool according to claim 1, wherein, The groove is an annular groove; or, there are two grooves respectively arranged on opposite sides of the hand-held portion; 7. The cleaning tool according to claim 6, characterized in that, The shapes and / or sizes of the two grooves are different; 8. The cleaning tool according to claim 1, characterized in that, A plurality of water outlet ports are arranged on the annular water storage tank, the water inlet of the cleaning channel is communicated with the water outlet port through a connector, and the size of one end of the connector communicated with the water outlet port is larger than the size of one end of the connector communicated with the water inlet of the cleaning channel.

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