Conveying device, conveying system and process equipment

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to a conveying device, a conveying system and process equipment, and aims to solve the problems that when a guide structure guides the lower portion of a carrier plate, the lower portion of the carrier plate is prone to being stuck, and the conveying stability of the conveying device is poor. According to the conveying device, the carrier plate is supported through the multiple supporting wheels and the multiple first guide wheels, the two side walls of the first grooves of the first guide wheels limit the first side and the second side of the carrier plate correspondingly, the situation that the lower portion of the carrier plate is separated from the first grooves and deviates is prevented, and therefore the carrier plate moves in the first direction; in addition, due to the fact that the supporting wheels are further arranged between every two adjacent first guide wheels to support the carrier plate, the conveying device can be provided with few first guide wheels, the situation that the carrier plate is prone to being stuck due to the fact that the number of the first guide wheels is too large and machining errors and installation errors exist is avoided, and the stability of carrier plate conveying is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technologies, and particularly to a conveying device, a conveying system, and a process equipment. Background Art

[0002] In the semiconductor or photovoltaic industry, a carrier plate is commonly used to carry sheet materials, and a conveying device is used to convey the carrier plate so that the carrier plate moves between various chambers, a loading station, and an unloading station of the process equipment. The conveying device usually consists of a driving structure and a guiding structure. The driving structure is used to drive the carrier plate to move, and the guiding structure is used to guide the movement of the carrier plate.

[0003] However, when the existing guiding structure guides the lower part of the carrier plate, the lower part of the carrier plate is prone to jamming, and the conveying stability of the conveying device is poor. Summary of the Utility Model

[0004] In view of this, embodiments of this application provide a conveying device, a conveying system, and a process equipment to solve the problem that when the guiding structure guides the lower part of the carrier plate, the lower part of the carrier plate is prone to jamming, and the conveying stability of the conveying device is poor.

[0005] In a first aspect, an embodiment of this application provides a conveying device for transporting at least one carrier plate along a first direction. The upper part and the lower part of the carrier plate are oppositely arranged along a second direction, the second direction is perpendicular to the first direction, the first side and the second side of the carrier plate are oppositely arranged along a third direction, the third direction is perpendicular to the first direction and the second direction, and at least one sheet material is arranged on the first side and / or the second side of the carrier plate; wherein, the conveying device includes: a plurality of support wheels, which are arranged at intervals along the first direction, and the circumferential surface of the support wheel can contact the lower part of the carrier plate to support the carrier plate; a plurality of first guiding wheels, which are arranged at intervals along the first direction, the circumference of the first guiding wheel has a first groove, the first groove is configured to accommodate the lower part of the carrier plate and contact the lower part of the carrier plate, and two side walls of the first groove are respectively configured to limit the first side and the second side of the carrier plate; a guiding component, which is arranged above the support wheel and is configured to guide the upper part of the carrier plate; wherein, at least one support wheel is arranged between two adjacent first guiding wheels, and at least one of the guiding component, the support wheel, and the first guiding wheel is configured to drive the carrier plate to move.

[0006] In combination with the first aspect, in some implementation manners of the first aspect, the distance along the first direction between the two first guiding wheels that are the farthest apart among at least two and at most three adjacent first guiding wheels is less than or equal to the dimension of the carrier plate along the first direction.

[0007] In connection with the first aspect, in some implementations of the first aspect, the first direction is a horizontal direction, and the two side walls are arranged opposite to each other; in a cross-section perpendicular to the second direction, the distance between the two side walls is greater than the distance between the first side and the second side of the carrier plate.

[0008] In connection with the first aspect, in some implementations of the first aspect, the support wheel and / or the first guide wheel are configured to drive the carrier plate to move, and a magnetic portion is provided on the upper portion of the carrier plate; the guiding assembly includes: at least one first magnetic member, extending along the first direction, capable of being disposed on the first side of the carrier plate and close to the magnetic portion, wherein the polarity of the surface of the first magnetic member facing the magnetic portion is configured to be the same as the magnetism of the magnetic portion; at least one second magnetic member, extending along the first direction, capable of being disposed on the second side of the carrier plate and close to the magnetic portion, wherein the polarity of the surface of the second magnetic member facing the magnetic portion is configured to be the same as the magnetism of the magnetic portion; a first connection assembly connecting the first magnetic member and the second magnetic member.

[0009] In connection with the first aspect, in some implementations of the first aspect, the first connection assembly and the first magnetic member and the second magnetic member form a second groove, and the opening of the second groove can face the upper portion of the carrier plate, and the second groove is configured to accommodate the upper portion of the carrier plate.

[0010] In connection with the first aspect, in some implementations of the first aspect, the first connection assembly includes: a first connecting member connecting the first magnetic member and the second magnetic member and forming a second groove with the first magnetic member and the second magnetic member, wherein the dimension of the first connecting member along the direction from the first magnetic member towards the second magnetic member is equal to the distance between the side of the first magnetic member away from the second magnetic member and the side of the second magnetic member away from the first magnetic member; a second connecting member connected to the first connecting member.

[0011] In connection with the first aspect, in some implementations of the first aspect, the conveying device further includes: a driving assembly configured to synchronously drive a plurality of support wheels and / or a plurality of first guide wheels to rotate.

[0012] In a second aspect, an embodiment of the present application provides a conveying system, including: at least one carrier plate, the upper portion and the lower portion of the carrier plate are arranged opposite to each other along a second direction, the first side and the second side of the carrier plate are arranged opposite to each other along a third direction, the third direction is perpendicular to the second direction, and the first side and / or the second side of the carrier plate are used for arranging at least one sheet material; the conveying device mentioned in any item of the first aspect, configured to transport the carrier plate along a first direction, the first direction being perpendicular to the second direction and the third direction.

[0013] In connection with the second aspect, in some implementations of the second aspect, the surface of the lower portion of the carrier plate on the side away from the upper portion of the carrier plate is an arc surface.

[0014] In a third aspect, an embodiment of the present application provides a process equipment, including: at least one process cavity having a process chamber configured to accommodate at least one sheet material; a conveying device mentioned in any item of the first aspect, disposed in the process cavity and configured to transport at least one carrier along a first direction, wherein the upper part and the lower part of the carrier are oppositely arranged along a second direction perpendicular to the first direction, and the first side and the second side of the carrier are oppositely arranged along a third direction perpendicular to the first direction and the second direction, and at least one sheet material is disposed on the first side and / or the second side of the carrier.

[0015] The conveying device provided in this embodiment supports the carrier through a plurality of supporting wheels and a plurality of first guiding wheels. The two side walls of the first groove of the first guiding wheel respectively limit the first side and the second side of the carrier, preventing the lower part of the carrier from disengaging from the first groove and running off course, so that the carrier moves along the first direction. Since there are also supporting wheels between two adjacent first guiding wheels to support the carrier, the conveying device can be provided with fewer first guiding wheels, preventing the carrier from being easily stuck due to excessive first guiding wheels and the existence of machining errors and installation errors, and improving the stability of the carrier transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the drawings, the above and other objects, features and advantages of the present application will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present application, and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application, but do not constitute a limitation to the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 Shown is a schematic structural diagram of an application scenario applicable to the process equipment provided by an embodiment of the present application.

[0018] Figure 2 Shown is provided by an embodiment of the present application Figure 1 A cross-sectional view of the application scenario applicable to the process equipment shown along line AA.

[0019] Figure 3 Shown is provided by an embodiment of the present application Figure 2 A partial enlarged view at B in the above.

[0020] Figure 4 Shown is a schematic structural diagram of a supporting wheel and a transmission shaft provided by an embodiment of the present application.

[0021] Figure 5 Shown is a schematic structural diagram of a first guiding wheel and a transmission shaft provided by an embodiment of the present application.

[0022] Figure 6As shown in the figure, it is provided by an embodiment of the present application Figure 2 The partial enlarged view at position C in the figure.

[0023] Figure 7 As shown in the figure, it is a schematic structural diagram of a process equipment provided by an embodiment of the present application.

[0024] Figure 8 As shown in the figure, it is provided by an embodiment of the present application Figure 7 The cross-sectional view of the process equipment shown along line EE.

[0025] Reference numerals:

[0026] 1. Process equipment; 10. Conveyor device; 11. Support wheel; 12. First guide wheel; 120. First groove; 1200. Side wall; 1201. Bottom of the groove; 13. Guide assembly; 130. First magnetic member; 131. Second magnetic member; 132. First connection assembly; 1320. First connecting member; 1321. Second connecting member; 1322. Connecting column; 133. Second groove; 14. Driving assembly; 140. Transmission shaft; 141. Synchronous pulley; 142. Timing belt; 143. Driving source; 1430. Motor; 1431. Output synchronous pulley; 1432. Output timing belt; 20. Carrier plate; 200. Upper part of the carrier plate; 2000. Magnetic part; 201. Lower part of the carrier plate; 2010. Strip-shaped member; 202. First side of the carrier plate; 203. Second side of the carrier plate; 30. Conveyor system; 40. Process cavity; 41. Process chamber; 42. Opening; X1. First direction; X2. Second direction; X3. Third direction; D. Dimension; L. Distance. Detailed implementation manners

[0027] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0028] Figure 1 As shown in the figure, it is a schematic structural diagram of an application scenario applicable to a process equipment provided by an embodiment of the present application. Figure 2 As shown in the figure, it is provided by an embodiment of the present application Figure 1 The cross-sectional view of the application scenario applicable to the process equipment shown along line AA. Figure 3 As shown in the figure, it is provided by an embodiment of the present application Figure 2 The partial enlarged view at position B in the figure. Figure 4 As shown in the figure, it is a schematic structural diagram of a support wheel and a transmission shaft provided by an embodiment of the present application. Figure 5The figure shows a schematic structural diagram of a first guide wheel and a transmission shaft provided by an embodiment of the present application.

[0029] As Figures 1 to 5 shown, the conveying device 10 is configured to transport at least one carrier plate 20 along the first direction X1. The upper part 200 of the carrier plate and the lower part 201 of the carrier plate are arranged opposite to each other along the second direction X2, and the second direction X2 is perpendicular to the first direction X1. The first side 202 of the carrier plate and the second side 203 of the carrier plate are arranged opposite to each other along the third direction X3, and the third direction X3 is perpendicular to the first direction X1 and the second direction X2. The first side 202 of the carrier plate can be used to arrange at least one sheet material (not shown in the figure). The second side 203 of the carrier plate can also be used to arrange at least one sheet material.

[0030] Exemplarily, the carrier plate 20 can be plate-shaped. For example, the carrier plate 20 can be rectangular plate-shaped. Exemplarily, both the upper part 200 of the carrier plate and the lower part 201 of the carrier plate extend along the first direction X1. Exemplarily, the upper part 200 of the carrier plate and the lower part 201 of the carrier plate can be coplanar. Exemplarily, the sheet material can include silicon wafers, solar cells, wafers, glass substrates, etc.

[0031] The conveying device 10 includes: a plurality of support wheels 11, a plurality of first guide wheels 12, and a guide assembly 13. The plurality of support wheels 11 are arranged at intervals along the first direction X1. The circumferential surface of the support wheel 11 can contact the lower part 201 of the carrier plate to support the carrier plate 20. The plurality of first guide wheels 12 are arranged at intervals along the first direction X1. The circumferential direction of the first guide wheel 12 has a first groove 120, and the first groove 120 is configured to accommodate the lower part 201 of the carrier plate and contact the lower part 201 of the carrier plate. The two side walls 1200 of the first groove 120 are respectively configured to limit the first side 202 and the second side 203 of the carrier plate. The guide assembly 13 is arranged above the support wheel 11 and is configured to guide the upper part 200 of the carrier plate.

[0032] At least one support wheel 11 is provided between two adjacent first guide wheels 12. The guide assembly 13 can be configured to drive the carrier plate 20 to move. The support wheel 11 can also be configured to drive the carrier plate 20 to move. The first guide wheel 12 can also be configured to drive the carrier plate 20 to move.

[0033] Exemplarily, the support wheel 11 and the first guide wheel 12 are arranged on the side of the carrier plate 20 away from the upper part 200 of the carrier plate. Exemplarily, the plurality of support wheels 11 and the plurality of first guide wheels 12 are arranged in a straight line. Exemplarily, as Figure 1As shown, a support wheel 11 is provided between every two adjacent first guide wheels 12. In another embodiment, multiple support wheels 11 may be provided between two adjacent first guide wheels 12. Exemplarily, the distance between adjacent rollers is equal, so that the support wheels 11 and the first guide wheels 12 evenly support the lower part 201 of the carrier plate. Exemplarily, the distance between adjacent support wheels 11 is equal. Exemplarily, the distance between adjacent first guide wheels 12 is equal.

[0034] Exemplarily, the circumferential surface of the support wheel 11 may be a cylindrical surface. Exemplarily, the support wheel 11 may be a cylindrical roller. Exemplarily, the cross-sectional shape of the first groove 120 may be U-shaped or V-shaped. Exemplarily, the first groove 120 has a groove bottom 1201 and two side walls 1200. Exemplarily, the groove bottom 1201 is disposed on the side of the lower part 201 of the carrier plate away from the upper part 200 of the carrier plate. Exemplarily, the angle formed by the side wall 1200 and the groove bottom 1201 is an obtuse angle.

[0035] Specifically, the guiding assembly 13 is used to guide the upper part 200 of the carrier plate to prevent the upper part 200 of the carrier plate from deviating and the carrier plate 20 from tipping over. Exemplarily, the guiding assembly 13 may include multiple second guide wheels and multiple third guide wheels. The multiple second guide wheels are arranged at intervals along the first direction X1 and are disposed on the first side 202 of the carrier plate, and the rotation direction of the second guide wheels is tangent to the first direction X1. The multiple third guide wheels are arranged at intervals along the first direction X1 and are disposed on the second side 203 of the carrier plate, and the rotation direction of the third guide wheels is tangent to the first direction X1. The upper part 200 of the carrier plate is limited by the multiple second guide wheels and the multiple third guide wheels, so that the carrier plate 20 can move along the first direction X1 and prevent the carrier plate 20 from tipping over. Exemplarily, the circumferential surface of the second guide wheel is a cylindrical surface. The second guide wheel may be a cylindrical roller. Exemplarily, the circumferential surface of the third guide wheel is a cylindrical surface. The third guide wheel may be a cylindrical roller.

[0036] Exemplarily, the guiding assembly 13 may be configured to drive the carrier plate 20 to move. Exemplarily, a rack is provided on the upper part 200 of the carrier plate, and the rack extends along the first direction X1. The guiding assembly 13 further includes a gear and a motor for driving the gear to rotate. The gear meshes with the rack to drive the carrier plate 20 to move along the first direction X1.

[0037] The conveying device 10 provided in this embodiment supports the carrier 20 by means of a plurality of support wheels 11 and a plurality of first guide wheels 12. The two side walls 1200 of the first groove 120 of the first guide wheel 12 respectively limit the first side 202 and the second side 203 of the carrier to prevent the lower portion 201 of the carrier from being separated from the first groove 120 and deviating, thereby causing the carrier 20 to move along the first direction X1. Since a support wheel 11 is further provided between two adjacent first guide wheels 12 to support the carrier 20, the conveying device 10 can be provided with fewer first guide wheels 12 to prevent the first guide wheels 12 from being provided too much and causing the carrier 20 to be easily stuck due to processing errors and installation errors, thereby improving the stability of the transportation of the carrier 20.

[0038] In some embodiments, reference Figure 1 The distance between the two first guide wheels 12 that are farthest apart from each other among at least two and at most three adjacent first guide wheels 12 along the first direction X1 is less than or equal to the size of the carrier 20 along the first direction X1.

[0039] Exemplarily, the distance between the two first guide wheels 12 that are farthest apart among every three adjacent first guide wheels 12 along the first direction X1 is less than or equal to the size of the carrier along the first direction X1. Specifically, among the three adjacent first guide wheels 12, the two first guide wheels 12 located on both sides are farthest apart, and the distance between the two first guide wheels 12 located on both sides is less than or equal to the size of the carrier 20 along the first direction X1. This arrangement allows the three first guide wheels 12 to guide the first side 202 and the second side 203 of the carrier 20 during the movement of the carrier 20.

[0040] Exemplarily, the distance between each two adjacent first guide wheels 12 along the first direction X1 is less than or equal to the size of the carrier 20 along the first direction X1. This arrangement allows two first guide wheels 12 to guide the first side 202 and the second side 203 of the carrier during the movement of the carrier 20.

[0041] Specifically, the side walls 1200 of the two spaced first guide wheels 12 for limiting the first side 202 of the carrier 20 can form a limiting surface, thereby completing the limiting of the first side 202 of the carrier 20. Therefore, during the movement of the carrier 20, the first side 202 of the carrier and the second side 203 of the carrier can be guided by the two first guide wheels 12. When the size of the carrier 20 along the first direction X1 is large, the number of the first guide wheels 12 for limiting the carrier 20 during the movement of the carrier 20 can be set to three.

[0042] Exemplarily, the distance between the central axes of the two first guide wheels 12 that are the farthest apart among at least two and at most three adjacent first guide wheels 12 along the first direction X1 is less than or equal to the dimension of the carrier plate 20 along the first direction X1. Exemplarily, the distance between the two first guide wheels 12 that are the farthest apart among at least two and at most three adjacent first guide wheels 12 along the first direction X1 is less than or equal to the dimension of the lower part 201 of the carrier plate along the first direction X1.

[0043] In the conveying device 10 provided in this embodiment, the distance between the central axes of the two first guide wheels 12 that are the farthest apart among at least two and at most three adjacent first guide wheels 12 along the first direction X1 is less than or equal to the dimension of the carrier plate 20 along the first direction X1, so that during the movement of the carrier plate 20, at least two and at most three first guide wheels 12 can guide the first side 202 and the second side 203 of the carrier plate, enabling the number of first guide wheels 12 to be set relatively small, ensuring the stability and smoothness of the transportation of the carrier plate 20, neither getting stuck due to excessive guiding nor deviating due to insufficient guiding.

[0044] In some embodiments, as Figure 3 shown, the first direction X1 is a horizontal direction. The two side walls 1200 of the first groove 120 are oppositely arranged. In a cross-section perpendicular to the second direction X2, the distance between the two side walls 1200 is greater than the distance between the first side 202 and the second side 203 of the carrier plate. Such a setting enables there to be a gap between the carrier plate 20 and at least one side wall 1200, which can, to a certain extent, avoid the phenomenon that the first guide wheel 12 jams the carrier plate 20 due to machining errors and installation errors. For example, there can be a gap between the side surface of the first side 202 of the carrier plate and the side wall 1200 that limits the first side 202 of the carrier plate, and there can also be a gap between the side surface of the second side 203 of the carrier plate and the side wall 1200 that limits the second side 203 of the carrier plate.

[0045] Exemplarily, the cross-section perpendicular to the second direction X2 is a horizontal cross-section.

[0046] Figure 6 The following shows a partial enlarged view of the C position in an embodiment provided by the present application Figure 2 in.

[0047] In some embodiments, as Figure 1 , Figure 2 and Figure 6 shown, the support wheel 11 is configured to drive the carrier plate 20 to move. The first guide wheel 12 can also be configured to drive the carrier plate 20 to move. The guiding assembly 13 has a guiding function and can also have a driving function. A magnetic part 2000 is provided on the upper part 200 of the carrier plate.

[0048] Exemplarily, the supporting wheel 11 can provide frictional force for the lower part 201 of the carrier plate by actively rotating to drive the movement of the carrier plate 20. Exemplarily, the first guiding wheel 12 can provide frictional force for the lower part 201 of the carrier plate by actively rotating to drive the movement of the carrier plate 20.

[0049] The guiding assembly 13 includes: at least one first magnetic member 130, at least one second magnetic member 131, and a first connection assembly 132. The first magnetic member 130 extends along the first direction X1 and can be disposed on the first side 202 of the carrier plate and close to the magnetic part 2000. The polarity of the surface of the first magnetic member 130 facing the magnetic part 2000 is configured to be the same as the magnetism of the magnetic part 2000. The second magnetic member 131 extends along the first direction X1 and can be disposed on the second side 203 of the carrier plate and close to the magnetic part 2000. The polarity of the surface of the second magnetic member 131 facing the magnetic part 2000 is configured to be the same as the magnetism of the magnetic part 2000. The first connection assembly 132 connects the first magnetic member 130 and the second magnetic member 131.

[0050] Specifically, both the first magnetic member 130 and the second magnetic member 131 can be spaced apart from the carrier plate 20. Exemplarily, the first magnetic member 130 can be spaced apart from the magnetic part 2000. The second magnetic member 131 can be spaced apart from the magnetic part 2000. Exemplarily, a plurality of first magnetic members 130 are arranged along the first direction X1. Exemplarily, a plurality of second magnetic members 131 are arranged along the first direction X1. Exemplarily, the first magnetic member 130 and the second magnetic member 131 are disposed opposite to each other.

[0051] Exemplarily, the first magnetic member 130 can be a permanent magnet. The first magnetic member 130 can also be an electromagnet. Exemplarily, the second magnetic member 131 can be a permanent magnet. The second magnetic member 131 can also be an electromagnet. Exemplarily, the magnetic part 2000 can be a permanent magnet. The magnetic part 2000 can also be an electromagnet.

[0052] Exemplarily, the material of the part of the carrier plate 20 in contact with the magnetic part 2000 is a non-magnetic material. For example, the material of the part of the carrier plate 20 in contact with the magnetic part 2000 can be stainless steel. Exemplarily, the magnetic part 2000 extends along the first direction X1.

[0053] Exemplarily, the first connection assembly 132 can be used to connect to the process chamber 40 or the frame of the process equipment 1 hereinafter, so as to fix the first magnetic member 130 and the second magnetic member 131 to the process chamber 40 or the frame of the process equipment 1.

[0054] In the conveying device 10 provided in this embodiment, the first magnetic member 130 and the second magnetic member 131 are disposed on both sides of the carrier plate 20, both extending along the first direction X1 and respectively approaching the magnetic portion 2000. The polarities of the first magnetic member 130 and the second magnetic member 131 are the same as the magnetism of the magnetic portion 2000, so that the first magnetic member 130 and the second magnetic member 131 can generate a non-contact repulsive force on the magnetic portion 2000 of the upper part 200 of the carrier plate, avoiding the tilting of the carrier plate 20 due to unstable center of gravity, effectively reducing the friction force between the guiding component 13 and the carrier plate 20, and being able to avoid the generation of dust due to contact and friction.

[0055] In addition, since the first magnetic member 130 and the second magnetic member 131 can generate a repulsive force on the magnetic portion 2000 of the upper part 200 of the carrier plate, when the upper part 200 of the carrier plate approaches the first magnetic member 130 or the second magnetic member 131, the repulsive force becomes larger, forcing the carrier plate 20 to return to the desired position, such as the intermediate position between the first magnetic member 130 and the second magnetic member 131, being able to automatically correct the position of the carrier plate 20, and avoiding the problem that once the upper part 200 of the carrier plate approaches the first magnetic member 130 or the second magnetic member 131, it is easily attracted and causes tilting or shutdown when the polarities of the first magnetic member 130 and the second magnetic member 131 are different from the polarity of the magnetic portion 2000, improving the stability and smoothness of transporting the carrier plate 20.

[0056] In some embodiments, the guiding component 13 includes: at least one first magnetic member 130, at least one second magnetic member 131, a first connection component 132, and at least one third magnetic member (not shown in the figure).

[0057] The third magnetic member is disposed between the first magnetic member 130 and the second magnetic member 131, extends along the first direction X1, and can be slidably connected to the upper part 200 of the carrier plate. The first magnetic member 130 extends along the first direction X1, can be disposed on the first side 202 of the carrier plate, and is close to the third magnetic member. The polarity of the surface of the first magnetic member 130 facing the third magnetic member is configured to be the same as the magnetism of the third magnetic member. The second magnetic member 131 extends along the first direction X1, can be disposed on the second side 203 of the carrier plate, and is close to the third magnetic member. The polarity of the surface of the second magnetic member 131 facing the third magnetic member is configured to be the same as the magnetism of the third magnetic member. The first connection component 132 connects the first magnetic member 130, the second magnetic member 131, and the third magnetic member.

[0058] In some embodiments, the first connection component 132 includes a second connection component (not shown in the figure) and a third connection component (not shown in the figure). The second connection component is used to connect the first magnetic member 130 and the process chamber 40 or the frame of the process equipment 1. The third connection component is used to connect the second magnetic member 131 and the process chamber 40 or the frame of the process equipment 1. The first magnetic member 130 and the second magnetic member 131 are respectively connected to the process equipment or other supporting members through the second connection component and the third connection component.

[0059] In some embodiments, as Figure 2 and Figure 6 shown, the first connection component 132 and the first magnetic member 130 and the second magnetic member 131 form a second groove 133. The opening of the second groove 133 can face the upper part 200 of the carrier plate, and the second groove is configured to accommodate the upper part 200 of the carrier plate. By forming the second groove 133 through the first connection component 132 and the first magnetic member 130 and the second magnetic member 131, the first magnetic member 130 and the second magnetic member 131 are indirectly connected together, which is convenient for simplifying the structure of the first connection component 132, is beneficial to the overall adjustment of the positions of the first magnetic member 130 and the second magnetic member 131, and can avoid separately adjusting the distances between the first magnetic member 130 and the second magnetic member 131 and the carrier plate 20, thereby improving the installation and debugging efficiency.

[0060] Exemplarily, the first connection component 132 can be spaced apart from the upper part 200 of the carrier plate to prevent the first connection component 132 from contacting the carrier plate 20 and hindering the movement of the carrier plate 20. Exemplarily, the first connection component 132 is located on the side of the first magnetic member 130 away from the support wheel 11 and on the side of the second magnetic member 131 away from the support wheel 11. Exemplarily, the first connection component 132 can be located on the side of the carrier plate 20 away from the lower part 201 of the carrier plate.

[0061] In some embodiments, as Figure 6 shown, the first connection component 132 includes: a first connection member 1320 and a second connection member 1321. The first connection member 1320 connects the first magnetic member 130 and the second magnetic member 131 and forms a second groove 133 with the first magnetic member 130 and the second magnetic member 131. The dimension D of the first connection member 1320 in the direction from the first magnetic member 130 towards the second magnetic member 131 is equal to the distance L between the side of the first magnetic member 130 away from the second magnetic member 131 and the side of the second magnetic member 131 away from the first magnetic member 130. The second connection member 1321 is connected to the first connection member 1320.

[0062] Since the dimension D is equal to the distance L, when the first magnetic member 130 and the second magnetic member 131 are installed on the first connecting member 1320, the first magnetic member 130 and the second magnetic member 131 can be directly aligned with two opposite edges of the first connecting member 1320 along the direction in which the first magnetic member 130 faces the second magnetic member 131, which improves the installation efficiency and installation accuracy of the guiding assembly 13.

[0063] Exemplarily, the second connecting member 1321 can also be connected to the process chamber 40 or the frame of the process equipment 1. Such a setting facilitates fixing the first connecting member 1320 on which the first magnetic member 130 and the second magnetic member 131 are installed to the process chamber 40 or the frame, and determining the horizontal positions of the first magnetic member 130 and the second magnetic member 131 by adjusting the position of the first connecting member 1320 on the second connecting member 1321.

[0064] Exemplarily, as Figure 1 and Figure 6 shown, the first connection assembly 132 further includes a plurality of connection posts 1322. The plurality of connection posts 1322 are connected to the second connecting member 1321 and are disposed on a side of the second connecting member 1321 away from the first connecting member 1320. Exemplarily, the plurality of connection posts 1322 can also be connected to the process chamber 40 or the frame of the process equipment 1. The height of the first magnetic member 130 and the second magnetic member 131 can be adjusted by replacing connection posts 1322 with different heights.

[0065] Figure 7 The figure shows a schematic structural diagram of a process equipment provided by an embodiment of the present application. Figure 8 shown in an embodiment of the present application Figure 7 A cross-sectional view of the process equipment shown along line EE.

[0066] In some embodiments, as Figure 2 , Figure 7 and Figure 8 shown, the conveying device 10 further includes: a driving assembly 14. The driving assembly 14 can be configured to synchronously drive a plurality of supporting wheels 11 to rotate. By the rotation of the supporting wheels 11, frictional force is provided to the lower part 201 of the carrier plate by the circumferential surface of the supporting wheels 11, so as to drive the carrier plate 20 to move along the first direction X1.

[0067] The driving assembly 14 can also be configured to synchronously drive a plurality of first guiding wheels 12 to rotate. By the rotation of the first guiding wheels 12, frictional force is provided to the lower part 201 of the carrier plate by the circumferential surface of the first guiding wheels 12, so as to drive the carrier plate 20 to move along the first direction X1.

[0068] Exemplarily, the driving assembly 14 may include any structure capable of synchronously driving the rotation of a plurality of supporting wheels 11 and / or a plurality of first guiding wheels 12. Exemplarily, the driving assembly 14 may include one or a combination of more than one of the following driving structures: a gear set, a sprocket chain, a lead screw guide rail, a cylinder, a motor, and a crank-slider. The structure of the driving assembly 14 is not specifically limited in this embodiment.

[0069] Exemplarily, the driving assembly 14 may include: a plurality of transmission shafts 140, a plurality of synchronous wheels 141, a plurality of synchronous belts 142, and a driving source 143. One end of each transmission shaft 140 is connected to a supporting wheel 11 or a first guiding wheel 12. At least one synchronous wheel 141 is provided at the other end of each transmission shaft 140. The synchronous belt 142 is sleeved on the synchronous wheels 141 of adjacent plurality of transmission shafts 140. Adjacent synchronous belts 142 correspond to at least one common transmission shaft 140. This can ensure that each transmission shaft 140 rotates more synchronously without missing a rotation. The driving source 143 drives at least one transmission shaft 140 to rotate, so that at least one transmission shaft 140 drives other transmission shafts 140 to rotate through the synchronous belt 142.

[0070] Exemplarily, the driving source 143 includes: a motor 1430, an output synchronous wheel 1431, and an output synchronous belt 1432. The output synchronous wheel 1431 is provided on the output shaft of the motor 1430, and the output synchronous belt 1432 is sleeved on the output synchronous wheel 1431 and the synchronous wheel 141 corresponding to at least one transmission shaft 140. The rotation of the output shaft of the motor 1430 drives the output synchronous wheel 1431 to rotate, thereby driving at least one transmission shaft 140 to rotate through the output synchronous belt 1432. Exemplarily, the output synchronous belt 1432 may be sleeved on the output synchronous wheel 1431 and the synchronous wheels 141 corresponding to two adjacent transmission shafts 140.

[0071] The embodiments of the conveying device 10 of the present application are described in detail above. Next, the embodiments of the conveying system 30 of the present application are described in detail. It should be understood that the description of the embodiments of the conveying device 10 corresponds to the description of the embodiments of the conveying system 30. Therefore, for the parts not described in detail, reference may be made to the previous embodiments of the conveying device 10.

[0072] The conveying system 30 includes: at least one carrier plate 20 and the conveying device 10 mentioned in any of the above embodiments. The upper part 200 of the carrier plate and the lower part 201 of the carrier plate are oppositely arranged along the second direction X2, and the first side 202 of the carrier plate and the second side 203 of the carrier plate are oppositely arranged along the third direction X3. The third direction X3 is perpendicular to the second direction X2. At least one sheet material may be arranged on the first side 202 of the carrier plate. At least one sheet material may also be arranged on the second side 203 of the carrier plate. The conveying device 10 is configured to transport the carrier plate 20 along the first direction. The first direction X1 is perpendicular to the second direction X2 and the third direction X3.

[0073] Exemplarily, the carrier plate 20 stands on the support wheels 11 and the first guide wheels 12. Exemplarily, the conveying system 30 can transport multiple carrier plates 20 simultaneously. The multiple carrier plates 20 are arranged along the first direction X1.

[0074] For the conveying system 30 provided in this embodiment, the carrier plate 20 is supported by multiple support wheels 11 and multiple first guide wheels 12. The two side walls 1200 of the first groove 120 of the first guide wheel 12 respectively limit the first side 202 and the second side 203 of the carrier plate, preventing the lower part 201 of the carrier plate from deviating by disengaging from the first groove 120, so that the carrier plate 20 moves along the first direction X1. Since there is also a support wheel 11 between two adjacent first guide wheels 12 to support the carrier plate 20, the conveying device 10 can be provided with fewer first guide wheels 12 to prevent the carrier plate 20 from being easily stuck due to excessive first guide wheels 12 and the existence of machining errors and installation errors, improving the stability of transporting the carrier plate 20.

[0075] In some embodiments, the surface of the lower part 201 of the carrier plate on the side away from the upper part 200 of the carrier plate is an arc surface. The lower part 201 of the carrier plate contacts the first groove 120 through the arc surface, reducing the contact area between the lower part 201 of the carrier plate and the first groove 120, and reducing the resistance of the first guide wheel 12 to the carrier plate 20 when the carrier plate 20 moves.

[0076] Exemplarily, the cross-sectional shape of the arc surface can be a part of an ellipse or a part of a circle.

[0077] Exemplarily, the lower part 201 of the carrier plate is provided with a strip-shaped member 2010. Exemplarily, the cross-sectional shape of the strip-shaped member 2010 is circular or annular. Exemplarily, both ends of the strip-shaped member 2010 are tapered. This can prevent the end of the strip-shaped member 2010 from being hit by the support wheel 11 or the first guide wheel 12.

[0078] The embodiment of the conveying device 10 of the present application has been described in detail above. Next, the embodiment of the process equipment 1 of the present application will be described in detail. It should be understood that the description of the embodiment of the conveying device 10 corresponds to the description of the embodiment of the process equipment 1. Therefore, for the parts not described in detail, reference can be made to the previous embodiment of the conveying device 10.

[0079] As Figure 5 and Figure 6 shown, the process equipment 1 includes: at least one process chamber 40 and the conveying device 10 mentioned in any of the above embodiments. The process chamber 40 has a process cavity 41. The process cavity 41 is configured to accommodate at least one sheet material.

[0080] The conveying device 10 is disposed in the process chamber 40 and is configured to transport at least one carrier plate 20 along the first direction X1. The upper part 200 of the carrier plate and the lower part 201 of the carrier plate are oppositely arranged along the second direction X2, and the second direction X2 is perpendicular to the first direction X1. The first side 202 of the carrier plate and the second side 203 of the carrier plate are oppositely arranged along the third direction X3, and the third direction X3 is perpendicular to the first direction X1 and the second direction X2. The first side 202 of the carrier plate can be used to arrange at least one sheet material. The second side 203 of the carrier plate can also be used to arrange at least one sheet material.

[0081] Exemplarily, the process chamber 40 further has at least one opening 42. The opening 42 can serve as an inlet and / or an outlet of the carrier plate 20. As Figure 1 shown, the opening 42 serves as an inlet and an outlet of the carrier plate 20.

[0082] Exemplarily, the process chamber 40 can be a chamber for performing any process on the sheet material. The process chamber 40 can be used for performing at least one of processes such as a coating process, a pretreatment process, and a post-treatment process on the sheet material.

[0083] Exemplarily, each process chamber 40 can be correspondingly provided with a plurality of support wheels 11, a plurality of first guide wheels 12, and a guiding assembly 13. Specifically, exemplarily, the plurality of support wheels 11 and the plurality of first guide wheels 12 are both rotatably connected to the process chamber 40. The first connecting assembly 132 can be connected to the top of the process chamber 40 or the side wall of the process chamber 40. Exemplarily, one side of the second connecting member 1321 is connected to the first connecting member 1320, and the other side of the second connecting member 1321 is connected to the top of the process chamber 40. In some other embodiments, as Figure 6 shown, one end of the connecting column 1322 is connected to the second connecting member 1321, and the other end of the connecting column 1322 is connected to the top of the process chamber 40.

[0084] Exemplarily, the process chamber 40 has a plurality of through holes. The connecting shaft 140 passes through the through holes and is connected to the support wheel 11 or the first guide wheel 12 in the process chamber 41 and is rotatably connected to the process chamber 40. Exemplarily, the connecting shaft 140 seals the through holes of the process chamber 40. Exemplarily, the connecting shaft 140 seals the through holes of the process chamber 40 by using a magnetic fluid sealing technique. Exemplarily, the connecting shaft 140 is sleeved with a magnetic fluid sealing bearing to seal the through holes of the process chamber 40.

[0085] Exemplarily, the process equipment 1 further includes a loading / unloading table. The loading / unloading table can be a loading table, an unloading table, or a loading and unloading table. The conveying device 10 can also be disposed on the loading / unloading table to transport the carrier plate 20 between the process chamber 40 and the loading / unloading table.

[0086] The process equipment 1 provided in this embodiment supports the carrier plate 20 through a plurality of support wheels 11 and a plurality of first guide wheels 12. The two side walls 1200 of the first groove 120 of the first guide wheel 12 respectively limit the first side 202 and the second side 203 of the carrier plate, preventing the lower part 201 of the carrier plate from deviating from the first groove 120 and running off course, so that the carrier plate 20 moves along the first direction X1. Since there are also support wheels 11 between two adjacent first guide wheels 12 to support the carrier plate 20, the conveying device 10 can be provided with fewer first guide wheels 12, preventing too many first guide wheels 12 from being provided, and due to the existence of processing errors and installation errors, causing the carrier plate 20 to be easily stuck, thus improving the stability of the transportation of the carrier plate 20.

[0087] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for illustrative and easy-to-understand purposes, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0088] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any way. Words such as "including", "comprising", "provided with", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used here refer to the word "and / or", and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with each other.

[0089] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.

[0090] The above description of the disclosed aspects enables any person skilled in the art to make or use the present application. Various modifications to these aspects are very obvious to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0091] The foregoing description has been presented for purposes of illustration and description. Furthermore, this description is not intended to limit embodiments of the present application to the form disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize some of their variations, modifications, alterations, additions, and subcombinations.

Claims

1. A conveying device, characterized in that, For transporting at least one carrier plate along a first direction, an upper part of the carrier plate and a lower part of the carrier plate are oppositely arranged along a second direction, the second direction is perpendicular to the first direction, a first side of the carrier plate and a second side of the carrier plate are oppositely arranged along a third direction, the third direction is perpendicular to the first direction and the second direction, and at least one sheet material is arranged on the first side and / or the second side of the carrier plate; Wherein, the conveying device includes: A plurality of supporting wheels, the plurality of supporting wheels are arranged at intervals along the first direction, and a circumferential surface of the supporting wheels can contact with the lower part of the carrier plate to support the carrier plate; A plurality of first guiding wheels, the plurality of first guiding wheels are arranged at intervals along the first direction, a first groove is formed in a circumference of the first guiding wheels, the first groove is configured to accommodate the lower part of the carrier plate and contact with the lower part of the carrier plate, and two side walls of the first groove are respectively configured to limit the first side and the second side of the carrier plate; A guiding assembly, arranged above the supporting wheels, and configured to guide the upper part of the carrier plate; Wherein, at least one of the supporting wheels is arranged between two adjacent first guiding wheels, and at least one of the guiding assembly, the supporting wheels and the first guiding wheels is configured to drive the carrier plate to move.

2. The conveying device according to claim 1, characterized in that A distance along the first direction between two first guiding wheels which are the farthest apart among at least two and at most three adjacent first guiding wheels is less than or equal to a dimension of the carrier plate along the first direction.

3. The conveying device according to claim 1, characterized in that The first direction is a horizontal direction, and two side walls are oppositely arranged; In a cross-section perpendicular to the second direction, a distance between the two side walls is greater than a distance between the first side and the second side of the carrier plate.

4. The conveying device according to any one of claims 1 to 3, characterized in that The supporting wheels and / or the first guiding wheels are configured to drive the carrier plate to move, and a magnetic part is arranged on the upper part of the carrier plate; The guiding assembly includes: At least one first magnetic part, extending along the first direction, capable of being arranged on the first side of the carrier plate and close to the magnetic part, wherein a polarity of a surface of the first magnetic part facing the magnetic part is configured to be the same as that of the magnetic part; At least one second magnetic part, extending along the first direction, capable of being arranged on the second side of the carrier plate and close to the magnetic part, wherein a polarity of a surface of the second magnetic part facing the magnetic part is configured to be the same as that of the magnetic part; A first connection assembly, connecting the first magnetic part and the second magnetic part.

5. The conveying device according to claim 4, characterized in that, The first connection assembly and the first magnetic part and the second magnetic part form a second groove, an opening of the second groove can face the upper part of the carrier plate, and the second groove is configured to accommodate the upper part of the carrier plate.

6. The conveying device according to claim 5, characterized in that, The first connection assembly includes: The first connecting member connects the first magnetic member and the second magnetic member, and forms the second groove together with the first magnetic member and the second magnetic member. Wherein, the dimension of the first connecting member along the direction from the first magnetic member towards the second magnetic member is equal to the distance between the side of the first magnetic member away from the second magnetic member and the side of the second magnetic member away from the first magnetic member; The second connecting member is connected to the first connecting member.

7. The conveying device according to any one of claims 1 to 3, characterized in that, It further includes: The driving assembly is configured to synchronously drive the rotation of multiple said support wheels and / or multiple said first guide wheels.

8. A conveying system, characterized in that, It includes: At least one carrier plate, the upper part of the carrier plate is arranged opposite to the lower part of the carrier plate along a second direction, the first side of the carrier plate and the second side of the carrier plate are arranged opposite to each other along a third direction, the third direction is perpendicular to the second direction, and the first side of the carrier plate and / or the second side of the carrier plate are used to arrange at least one sheet material; The conveying device according to any one of claims 1-7 is configured to transport the carrier plate along a first direction, and the first direction is perpendicular to the second direction and the third direction.

9. The conveying system according to claim 8, wherein The surface of the side of the lower part of the carrier plate away from the upper part of the carrier plate is an arc surface.

10. A process equipment, characterized in that, It includes: At least one process cavity, having a process chamber, and the process chamber is configured to accommodate at least one sheet material; The conveying device according to any one of claims 1-7 is arranged in the process cavity and is used to transport at least one said carrier plate along the first direction. The upper part of the carrier plate is arranged opposite to the lower part of the carrier plate along a second direction, the second direction is perpendicular to the first direction, the first side of the carrier plate and the second side of the carrier plate are arranged opposite to each other along a third direction, the third direction is perpendicular to the first direction and the second direction, and the first side of the carrier plate and / or the second side of the carrier plate are used to arrange at least one said sheet material.

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