Novel vacuum inverted view window

Abstract

The utility model relates to the field of semiconductors, and discloses a novel vacuum inverted window which comprises a flange, a plurality of connecting holes distributed in an annular array are formed in the position, away from the center of the flange, of the flange in a penetrating mode, and the connecting holes are used for being matched with a connecting mechanism to fix the whole device and an installation position. An integrated longitudinal stainless steel cylinder is formed in the middle of the top end of the flange, a quartz tube is welded to the inner side of the stainless steel cylinder, and a quartz plate which does not exceed the top end of the stainless steel cylinder is bonded to the top end of the quartz tube at low temperature. The quartz tube and the quartz plate are connected in a low-temperature bonding mode instead of a current vacuum welding mode, the optical performance of the quartz plate is basically not changed, it is guaranteed that optical parameters are not affected, and even if the optical parameters are changed, the quartz plate can be subjected to finish machining, and it is guaranteed that the optical performance is not changed.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductors, and particularly relates to a new type of vacuum inverted viewing window. Background Art

[0002] In semiconductor manufacturing, quartz wafers and metals are usually welded in a vacuum, that is, the quartz wafer and the metal flange or pipe are welded together through a special optical adhesive or a low-melting-point metal. The optical adhesive can work well in a vacuum without damaging the quartz wafer or introducing air bubbles.

[0003] As Figure 1 shown is the current structure of the inverted viewing window. The metal flange, metal pipe and quartz wafer are vacuum welded together. Because the stress deformation of metal welding is large, the deformation amount of the optical window is very large. Even the best optical window will deform after high-temperature welding, which is mainly caused by the too large stress of the metal. Summary of the Invention

[0004] Technical problem to be solved: How to improve the optical performance of the window.

[0005] Technical solution: The utility model provides a new type of vacuum inverted viewing window, which includes a flange. A plurality of connection holes are formed through the flange at positions far from its center and are distributed in an annular array. These connection holes are used to cooperate with a connection mechanism to fix the whole device to the installation position. An integrated stainless steel cylinder is formed in the middle of the top of the flange in the longitudinal direction. A quartz tube is welded inside the stainless steel cylinder, and a quartz wafer that does not exceed the top of the stainless steel cylinder is bonded at low temperature to the top of the quartz tube.

[0006] Further, the specific steps of low-temperature bonding are as follows:

[0007] First, clean the surfaces of the quartz tube and the quartz wafer with a cleaning agent to remove contaminants and oxide layers on the quartz tube and the quartz wafer;

[0008] Second, perform surface treatment on the quartz tube and the quartz wafer. The surface treatment includes but is not limited to surface activation and surface coating;

[0009] Third, accurately align the quartz tube and the quartz wafer through an optical microscope or an automatic alignment system;

[0010] Fourth, place the quartz tube and the quartz wafer in a bonding device, apply pressure, and bond the surfaces of the two together by pressing or ultrasonic bonding in a low-temperature environment.

[0011] Further, the cleaning agent for cleaning the quartz tube and the quartz sheet can be acetone, isopropanol or N-methylpyrrolidone in organic solvents, or sodium hydroxide or hydrofluoric acid in acid-base cleaning agents, or ethylenediaminetetraacetic acid or citric acid in chelating agents, or hydrogen peroxide in peroxides, where:

[0012] The organic solvent is used to remove surface organic contaminants;

[0013] The acid-base cleaning agent is used to remove surface inorganic contaminants;

[0014] The chelating agent is used to remove metal contaminants;

[0015] The peroxide is used to remove organic and metal contaminants.

[0016] Further, the surface treatment performed on the quartz tube and the quartz sheet includes, but is not limited to, oxidation, photolithography, etching, and polishing.

[0017] Further, the connecting mechanism includes a plurality of combined bolts with the same number as the number of connecting holes. The combined bolt includes a bolt and a nut. The bolt passes through the connecting hole from the bottom end of the flange and is connected to the nut at the top end of the flange.

[0018] Further, the bolt is composed of a head and a rod body. A metal or elastic gasket can be sleeved on the outer peripheral side of the rod body, and the gasket is located between the nut and the top end of the flange.

[0019] Technical effect: In the present utility model, the connection between the quartz tube and the quartz sheet adopts a low-temperature bonding method to replace the current vacuum welding, which basically does not change the optical properties of the quartz sheet, ensures that the optical parameters are not affected. Even if there are changes, the quartz sheet can be further processed to ensure that the optical properties remain unchanged. Description of the Drawings

[0020] The drawings are used to provide a further understanding of the present utility model, and constitute a part of the specification. They are used together with the embodiments of the present utility model to explain the present utility model, and do not constitute a limitation to the present utility model. In the drawings:

[0021] Figure 1 It is a schematic diagram of the existing inverted window structure;

[0022] Figure 2 It is a schematic diagram of the structure of the present utility model;

[0023] Figure 3 It is a schematic diagram of the hierarchical structure of the present utility model;

[0024] In the figure: 1. Flange; 2. Connecting hole; 3. Stainless steel cylinder; 4. Quartz tube; 5. Quartz sheet. Detailed Embodiments

[0025] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application; obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0026] The novel vacuum inverted viewing window provided by this specific embodiment is as Figure 2 and Figure 3 shown, including a flange 1:

[0027] On the one hand, a plurality of connection holes 2 distributed in an annular array are penetrated through the flange 1 at a position far from its center. These connection holes 2 are used to cooperate with a connection mechanism to fix the entire device to the installation position. The connection mechanism includes a plurality of combination bolts with the same number as the connection holes 2. The combination bolt includes a bolt and a nut. The bolt passes through the connection hole 2 from the bottom end of the flange 1 and then connects the nut at the top end of the flange 1. Specifically, the bolt consists of a head and a rod body. A metal or elastic washer can be sleeved on the outer peripheral side of the rod body. The washer is located between the nut and the top end of the flange 1 to prevent thread slipping.

[0028] On the other hand, an integrated stainless steel cylinder 3 in the longitudinal direction is formed in the middle of the top end of the flange 1. A quartz tube 4 is welded inside the stainless steel cylinder 3. A quartz sheet 5 that does not exceed the top end of the stainless steel cylinder 3 is bonded at a low temperature to the top end of the quartz tube 4. The specific steps of the low-temperature bonding are as follows:

[0029] One, clean the surfaces of the quartz tube 4 and the quartz sheet 5 with a cleaning agent to remove pollutants and oxide layers on the quartz tube 4 and the quartz sheet 5. The cleaning agent mentioned here can be acetone, isopropanol or N-methylpyrrolidone in organic solvents, or sodium hydroxide or hydrofluoric acid in acid-base cleaning agents, or ethylenediaminetetraacetic acid or citric acid in chelating agents, or hydrogen peroxide in peroxides, where: organic solvents are used to remove surface organic pollutants such as photoresist residues, lipids, dust, etc.; acid-base cleaning agents are used to remove surface inorganic pollutants such as oxides, metal ions, etc.; chelating agents are used to remove metal pollutants; peroxides are used to remove organic and metal pollutants.

[0030] Two, perform surface treatment on the quartz tube 4 and the quartz sheet 5. The surface treatment includes but is not limited to surface activation and surface coating, and the surface treatment includes but is not limited to oxidation, lithography, etching and polishing.

[0031] Three, accurately align the quartz tube 4 and the quartz sheet 5 through an optical microscope or an automatic alignment system.

[0032] Fourth, place the quartz tube 4 and the quartz sheet 5 in a bonding device, apply pressure, and at a low-temperature environment, bond the surfaces of the two together through pressing or ultrasonic bonding.

[0033] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0034] The above are all preferred embodiments of the present application, and do not limit the protection scope of the present application accordingly. Therefore, any equivalent changes made according to the structure, shape and principle of the present application shall be covered within the protection scope of the present application.

Claims

1. A novel vacuum viewing window, comprising a flange (1), and a plurality of connection holes (2) are formed through the flange (1) at positions far from its center and are distributed in an annular array. These connection holes (2) are used to cooperate with a connection mechanism to fix the entire device to an installation position. It is characterized in that, The middle structure at the top of the flange (1) forms an integral and longitudinal stainless steel cylinder (3). A quartz tube (4) is welded inside the stainless steel cylinder (3). A quartz sheet (5) that does not exceed the top of the stainless steel cylinder (3) is bonded at a low temperature to the top of the quartz tube (4). The surface treatment of the quartz tube (4) and the quartz sheet (5) includes, but is not limited to, oxidation, photolithography, etching, and polishing. The connecting mechanism includes a plurality of combined bolts whose number is the same as that of the connecting holes (2). The combined bolt includes a bolt and a nut. The bolt passes through the connecting hole (2) from the bottom end of the flange (1) and then connects the nut at the top end of the flange (1). The bolt consists of a head and a rod body. A metal or elastic spacer ring can be sleeved on the outer peripheral side of the rod body. The spacer ring is located between the nut and the top end of the flange (1).

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