Film coating tool

Abstract

The utility model belongs to the technical field of vacuum coating, and particularly relates to a coating tool which comprises a coating machine body and a mounting sleeve, a connecting ring is rotatably connected to the mounting sleeve, a coating cover is fixedly connected to the top of the connecting ring, an adjusting ring is arranged in the mounting sleeve, a clamping plate is connected to the top end of a driving telescopic rod in a clamped mode, and the clamping plate is fixedly connected to the top end of the driving telescopic rod. A mounting groove is formed in the center of the clamping plate, four convex plates are arranged at each of the top end and the bottom end of the clamping plate, and an upper fixing ring is fixedly connected to the inner wall of the film coating cover; when a base plate is clamped through an upper fixing ring and clamping plates, evaporation substances are prevented from being scattered to the top end face of the base plate, the influence on the double-face coating quality of the base plate is avoided, then the height of the clamping plates can be adjusted in cooperation with driving telescopic rods, and after rotating rods slidably connected to connecting rods can be clamped with the butt joint plates, the clamping plates between the butt joint plates are turned over; the substrate can be turned over, so that the device can turn over the substrate under the condition that the coating cover does not need to be opened.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, and particularly relates to a coating tooling. Background Art

[0002] An evaporation coating machine is a device used to deposit a thin film on the surface of a substrate. Its working principle is that in a vacuum environment, the coating material is evaporated into a gas state by heating, and then condenses on the surface of the substrate to form a thin film. When the substrate is in the coating chamber for coating work, the substrate needs to rotate during the coating process to improve the uniformity of the film layer. When it is necessary to coat both sides of the substrate, or to achieve special film layer structures and properties, the substrate needs to be turned over. The substrate is clamped on a fixture in the coating chamber, and it is relatively difficult to turn over. Moreover, it is necessary to open the coating chamber to re-place the substrate, which is likely to contaminate the substrate again after surface cleaning, affecting its coating quality. At the same time, when the coating material evaporated from the evaporation kettle at the bottom of the substrate moves upward and acts on the bottom surface of the substrate for coating, the gas molecules and the atoms or molecules of the evaporated coating material in the vacuum environment have a certain mean free path and randomness in the movement direction. Some coating materials may move to the top surface of the substrate in an irregular trajectory, resulting in the coating quality of the other side of the substrate being affected when it is necessary to turn over the substrate for coating the other side. Summary of the Utility Model

[0003] The utility model provides a coating tooling, which has the characteristic of solving the problem that when the substrate is coated, the coating material will move to the side that has not been coated, thereby affecting the coating quality of both sides of the substrate.

[0004] The utility model provides the following technical solutions: It includes a coating machine body and an installation sleeve. A connection ring is rotatably connected to the installation sleeve. A coating cover is fixedly connected to the top of the connection ring. An adjusting ring is arranged inside the installation sleeve. A rotating ring is rotatably connected to the top of the adjusting ring. A driving telescopic rod is fixedly connected to the top of the rotating ring. A clamping plate is snap-connected to the top of the driving telescopic rod. An installation groove is formed at the center of the clamping plate. Four convex plates are arranged at the top and bottom of the clamping plate respectively. An upper fixing ring is fixedly connected to the inner wall of the coating cover. The inner wall of the upper fixing ring matches the outer wall of the clamping plate. A docking plate is fixedly connected to the outer wall of the clamping plate. Two connecting rods are threadedly connected to the outer wall of the coating cover. A rotating rod is slidably connected to the center of the connecting rod. One end of the rotating rod is snap-connected to the docking plate.

[0005] Wherein, a connection groove matching the installation sleeve is formed at the bottom of the connection ring. A threaded rod is threadedly connected to the adjusting ring. A motor for driving the threaded rod is arranged inside the installation sleeve.

[0006] The inner wall of the connecting ring is fixedly connected with a lower fixing ring, the inner wall of the lower fixing ring is fixedly connected with a limiting plate, and the limiting plate is slidably connected with the driving telescopic rod.

[0007] Wherein, a making way groove for making way for the docking plate is provided on the inner wall of the upper fixing ring, and a positioning plate is fixedly connected to the top end of the upper fixing ring.

[0008] Among them, a square groove is opened on one side of the docking plate, a square block is fixedly connected to one end of the rotating rod, a convex rod is fixedly connected to the other end of the rotating rod, and a connecting hole matching the connecting rod is opened on the outer wall of the coating cover.

[0009] The beneficial effects of the utility model are as follows: when the substrate is clamped by the upper fixing ring and the clamping plate, evaporated substances are prevented from scattering to the top surface of the substrate, thereby avoiding affecting the quality of the double-sided coating of the substrate; and the height of the clamping plate can be adjusted in conjunction with the driving telescopic rod, so that the rotating rod slidably connected to the connecting rod can be engaged with the docking plate, and the clamping plate between the docking plates can be turned over, so that the substrate can be turned over, thereby enabling the device to turn over the substrate without opening the coating cover, thereby avoiding contact with the outside world, and preventing the surface from being affected by dust and the like, which would affect the coating quality.

[0010] The parts not involved in the device are the same as those in the prior art or can be implemented by using the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0012] Figure 2 It is a schematic diagram of the three-dimensional cross-sectional structure of the coating cover in the utility model;

[0013] Figure 3 It is a schematic diagram of the top view of the upper fixing ring in the utility model;

[0014] Figure 4 For this utility model Figure 2 A is an enlarged schematic diagram.

[0015] In the figure: 1. Coating machine body; 11. Mounting sleeve; 2. Connecting ring; 21. Coating cover; 211. Connecting groove; 22. Lower fixing ring; 23. Adjusting ring; 231. Threaded rod; 232. Rotating ring; 24. Limiting plate; 25. Driving telescopic rod; 26. Clamping plate; 261. Mounting groove; 27. Protruding plate; 3. Upper fixing ring; 31. Displacement groove; 311. Positioning plate; 32. Docking plate; 321. Square groove; 33. Connecting hole; 34. Connecting rod; 35. Rotating rod; 351. Square block; 352. Protruding rod. DETAILED DESCRIPTION

[0016] Please refer to Figures 1 - 4 , the present utility model provides the following technical solutions: It includes a coating machine body 1 and a mounting sleeve 11. A connecting ring 2 is rotatably connected to the mounting sleeve 11. A coating hood 21 is fixedly connected to the top of the connecting ring 2. An adjusting ring 23 is arranged inside the mounting sleeve 11. A rotating ring 232 is rotatably connected to the top of the adjusting ring 23. A driving telescopic rod 25 is fixedly connected to the top of the rotating ring 232. The top of the driving telescopic rod 25 is snap-connected to a clamping plate 26. An installation groove 261 is opened at the center of the clamping plate 26. Four convex plates 27 are arranged at both the top and bottom of the clamping plate 26. An upper fixing ring 3 is fixedly connected to the inner wall of the coating hood 21. The inner wall of the upper fixing ring 3 matches the outer wall of the clamping plate 26. A docking plate 32 is fixedly connected to the outer wall of the clamping plate 26. Two connecting rods 34 are threadedly connected to the outer wall of the coating hood 21. A rotating rod 35 is slidably connected to the center of the connecting rod 34. One end of the rotating rod 35 is snapped with the docking plate 32.

[0017] In this embodiment: The coating machine body 1 is used to perform coating treatment on the substrate. The connecting ring 2 can be installed and connected through the mounting sleeve 11 fixedly connected to the coating machine body 1, enabling the connecting ring 2 to rotate on the top of the mounting sleeve 11. As a result, the coating hood 21 fixedly connected to the top of the connecting ring 2 can rotate synchronously with the connecting ring 2. When the connecting ring 2 rotates under the action of an external driving member, the coating hood 21 and the lower fixing ring 22 and the upper fixing ring 3 fixedly connected to the inner wall of the coating hood 21 rotate synchronously. The rotating ring 232 rotatably connected to the top of the adjusting ring 23 provided in the mounting sleeve 11 can rotate independently on the top of the adjusting ring 23. When the driving telescopic rod 25 fixedly connected to the top end of the rotating ring 232 engages and supports the bottom of the clamping plate 26, when the upper fixing ring 3 rotates synchronously with the coating hood 21, the clamping plate 26 engaged and connected to the inner wall of the upper fixing ring 3 and the driving telescopic rod 25 connected below the clamping plate 26 can rotate synchronously, preventing the driving telescopic rod 25 from being directly connected to the adjusting ring 23 and restricting the rotation of the clamping plate 26. Thus, after the substrate is clamped and fixed inside the coating hood 21, it can rotate synchronously with the coating hood 21 to ensure the uniformity of coating. Four convex plates 27 provided at the top and bottom ends of the clamping plate 26 are used to clamp the substrate, enabling the substrate to be coated to be clamped by the convex plates 27 and placed at the installation groove 261, so that the substrate can correspond to the evaporation source inside the mounting sleeve 11. After the coating material evaporates, the coating material changes from a solid state to a gaseous state and evaporates. These evaporated atoms or molecules diffuse in all directions in a straight-line motion in a vacuum environment to coat the bottom end face of the substrate fixed in the installation groove 261. At this time, the substrate is clamped in the installation groove 261, and the clamping plate 26 is connected to the upper fixing ring 3, enabling the clamping plate 26 and the upper fixing ring 3 to block the evaporated substances after the evaporation of the coating material, preventing them from freely moving above the substrate. When the substrate needs to be coated on both sides, when coating the bottom end face, a certain amount of evaporated substances will scatter above, affecting the quality of double-sided coating of the substrate. After the coating of the bottom end face is completed, at this time, the driving telescopic rod 25 can be telescoped. After the driving telescopic rod 25 is telescoped, the clamping plate 26 can be disengaged from the inner wall of the upper fixing ring 3, causing the position of the clamping plate 26 to move downward. After the docking plate 32 fixedly connected to the outer wall of the clamping plate 26 corresponds to the connecting rod 34 threadedly connected to the outer wall of the coating hood 21, at this time, the rotating rod 35 slidably connected to the center of the pushing connecting rod 34 can be rotated so that one end of the rotating rod 35 engages on the docking plate 32. At this time, the clamping plate 26 is supported by the rotating rod 35 and the docking plate 32, and the top of the driving telescopic rod 25 engages with the bottom of the clamping plate 26. At this time, the entire adjusting ring 23 can be moved downward inside the mounting sleeve 11, driving the driving telescopic rod 25 to move downward to make way for the clamping plate 26. When the rotating rod 35 rotates, it can drive the docking plate 32 and the clamping plate 26 to rotate and flip. After flipping, the clamping plate 26 can be reset, and the top end of the driving telescopic rod 25 can support the clamping plate 26 again.The driving telescopic rod 25 is extended to support the clamping plate 26 in the inner wall of the upper fixing ring 3, and the coating work is performed on the other side of the substrate again, so that the device can turn over the substrate without opening the coating cover 21, avoiding contact with the outside world, and preventing the surface from being affected by dust, etc., which may affect the coating quality.

[0018] A connecting groove 211 matching the mounting sleeve 11 is provided at the bottom of the connecting ring 2, and a threaded rod 231 is threadedly connected to the adjusting ring 23, and a motor for driving the threaded rod 231 is provided in the mounting sleeve 11; the connecting groove 211 provided at the bottom of the connecting ring 2 is used to dock with the top of the mounting sleeve 11, so that the connecting ring 2 can rotate on the top of the mounting sleeve 11, and the threaded rod 231 threadedly connected to the adjusting ring 23 is driven by the driving motor in the mounting sleeve 11, so that it can rotate, and the height of the adjusting ring 23 is adjusted by its rotation, so as to drive the rotating ring 232 and the driving telescopic rod 25 to perform synchronous height adjustment, so that when the clamping plate 26 needs to be rotated between the connecting rods 34, the driving telescopic rod 25 can give way to it, so as to avoid limiting the rotation and turning over of the clamping plate 26 after the driving telescopic rod 25 shrinks to the limit, thereby ensuring the turning over of the substrate.

[0019] A lower fixed ring 22 is fixedly connected to the inner wall of the connecting ring 2, and a limiting plate 24 is fixedly connected to the inner wall of the lower fixed ring 22, and the limiting plate 24 is slidably connected to the driving telescopic rod 25; the lower fixed ring 22 fixedly connected to the inner wall of the connecting ring 2 can install the limiting plate 24, and the driving telescopic rod 25 can be limited by the limiting plate 24 fixedly connected to the inner wall of the lower fixed ring 22, ensuring that the driving telescopic rod 25 is vertical on the rotating ring 232, and providing auxiliary support to the driving telescopic rod 25.

[0020] The inner wall of the upper fixing ring 3 is provided with a making way groove 31 for making way for the docking plate 32, and a positioning plate 311 is fixedly connected to the top of the upper fixing ring 3; the making way groove 31 provided on the inner wall of the upper fixing ring 3 is used to make way for the docking plate 32 to ensure that the clamping plate 26 can slide to a position corresponding to the inner wall of the upper fixing ring 3, and the positioning plate 311 is used to limit the top surface of the clamping plate 26 through the positioning plate 311 when the clamping plate 26 is reset and moved upward, so that the clamping plate 26 can be limited on the inner wall of the upper fixing ring 3 to protect the top surface of the substrate.

[0021] A square groove 321 is provided on one side of the docking plate 32, a square block 351 is fixedly connected to one end of the rotating rod 35, and a convex rod 352 is fixedly connected to the other end of the rotating rod 35. A connecting hole 33 matching the connecting rod 34 is provided on the outer wall of the coating cover 21; the square groove 321 provided on one side of the docking plate 32 is used to dock with the square block 351 fixedly connected to one end of the rotating rod 35, so that when the rotating rod 35 rotates, it can drive the docking plate 32 and the clamping plate 26 to rotate and turn over the substrate in the installation groove 261. The convex rod 352 is used to facilitate the rotation adjustment of the rotating rod 35. The connecting hole 33 provided on the outer wall of the coating cover 21 is used to install the connecting rod 34, so that after the connecting rod 34 is installed on the coating cover 21, one end of the limit plate 24 can be connected to the docking plate 32.

[0022] The working principle and use process of the utility model are as follows: when in use, the substrate can be clamped by the convex plate 27 and placed in the convex plate 27 opened on the clamping plate 26, and the clamping plate 26 is located on the inner wall of the yielding groove 31, so that the clamping plate 26 and the upper fixing ring 3 can block the evaporated substances after the evaporation of the coating material, and prevent a certain amount of evaporated substances from being scattered on the upper side when the bottom end surface is coated when the substrate needs to be coated on both sides, thereby affecting the quality of the double-sided coating of the substrate. When the substrate needs to be turned over, the telescopic rod 25 can be driven to be telescopic, so that the position of the clamping plate 26 is moved downward, and the rotating rod 35 slidably connected at the center of the connecting rod 34 is pushed to make one end of the rotating rod 35 engage with the docking The plate 32 is then moved upwardly in the mounting sleeve 11, and the adjusting ring 23 is moved downwardly as a whole, driving the telescopic rod 25 to move downwardly to make way for the clamping plate 26. When the rotating rod 35 is rotated, the docking plate 32 and the clamping plate 26 can be driven to rotate and flip. After flipping, the clamping plate 26 can be reset, so that the top end of the telescopic rod 25 is supported on the clamping plate 26 again, and the telescopic rod 25 is extended to support the clamping plate 26 in the inner wall of the upper fixing ring 3, and the other side of the substrate is coated again, so that the device can turn over the substrate without opening the coating cover 21, so as to avoid contact with the outside world and the surface being affected by dust, etc., which may affect the coating quality.

Claims

1. A coating tooling, comprising a coating machine body (1) and a mounting sleeve (11), characterized in that: The mounting sleeve (11) is rotatably connected to a connecting ring (2), the top of the connecting ring (2) is fixedly connected to a coating cover (21), an adjusting ring (23) is arranged inside the mounting sleeve (11), the top of the adjusting ring (23) is rotatably connected to a rotating ring (232), the top of the rotating ring (232) is fixedly connected to a driving telescopic rod (25), the top of the driving telescopic rod (25) is snap-connected to a clamping plate (26), the center of the clamping plate (26) is provided with a mounting groove (261), the clamping plate (26) is fixedly connected to the top of the driving telescopic rod (25), and the clamping plate (26) is fixedly connected to the top of the driving telescopic rod (25). Four convex plates (27) are provided at the top and bottom ends of the holding plate (26); the inner wall of the coating cover (21) is fixedly connected to an upper fixing ring (3); the inner wall of the upper fixing ring (3) matches the outer wall of the clamping plate (26); the outer wall of the clamping plate (26) is fixedly connected to a docking plate (32); the outer wall of the coating cover (21) is threadedly connected to two connecting rods (34); a rotating rod (35) is slidably connected to the center of the connecting rod (34); one end of the rotating rod (35) is engaged with the docking plate (32).

2. The coating tooling according to claim 1, characterized in that: The bottom of the connecting ring (2) is provided with a connecting groove (211) matching the mounting sleeve (11); a threaded rod (231) is threadedly connected to the adjusting ring (23); and a motor for driving the threaded rod (231) is provided in the mounting sleeve (11).

3. A coating tooling according to claim 1, characterized in that: The inner wall of the connecting ring (2) is fixedly connected to a lower fixing ring (22), the inner wall of the lower fixing ring (22) is fixedly connected to a limiting plate (24), and the limiting plate (24) is slidably connected to the driving telescopic rod (25).

4. A coating tooling according to claim 1, characterized in that: The inner wall of the upper fixing ring (3) is provided with a clearance groove (31) for making way for the docking plate (32), and the top end of the upper fixing ring (3) is fixedly connected with a positioning plate (311).

5. A coating tooling according to claim 1, characterized in that: A square groove (321) is provided on one side of the docking plate (32), a square block (351) is fixedly connected to one end of the rotating rod (35), a convex rod (352) is fixedly connected to the other end of the rotating rod (35), and a connecting hole (33) matching the connecting rod (34) is provided on the outer wall of the coating cover (21).

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