Material supplementing device

Abstract

The utility model provides a material supplementing device, and relates to the technical field of semiconductor material production equipment. The material supplementing device comprises a guide cylinder which is used for being arranged on a feeding pipe of material production equipment, and the guide cylinder is used for being communicated with the feeding pipe; the feeding spoon, the axial driving mechanism and the rotation driving mechanism are both arranged on the guide cylinder, the axial driving mechanism is configured to drive the feeding spoon to move in the axial direction of the guide cylinder so that the feeding spoon can move into or out of the feeding pipe, and the rotation driving mechanism is configured to drive the feeding spoon to move out of the feeding pipe when the feeding spoon moves into the feeding pipe. The feeding spoon is driven to rotate. According to the material supplementing device, the doping agent can be added without manually operating the feeding spoon, the doping agent can be conveniently added into the material production equipment, and monocrystalline silicon is prevented from being scattered during adding.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor material production equipment, and particularly relates to a material replenishing device. Background Art

[0002] Monocrystalline silicon is a very important material in the semiconductor industry and is mainly used to manufacture solar cells and various electronic devices. During the production process of monocrystalline silicon, dopants are added to control the conductivity of silicon, thereby manufacturing semiconductor materials with specific electronic properties.

[0003] When it is necessary to add dopants into a monocrystalline silicon production furnace, a dopant replenishing device is required. The dopant replenishing device in the related art includes a driving rod and a feeding spoon. The driving rod penetrates and is slidably connected to the feeding pipe of the single crystal production furnace. The feeding spoon is arranged at the end of the driving rod located inside the feeding pipe. The operator moves and rotates the driving rod by hand, so that the driving rod drives the feeding spoon to move and rotate, thereby adding the dopants in the feeding spoon into the monocrystalline silicon production furnace.

[0004] However, the method of manually holding the driving rod to drive the feeding spoon to move and rotate for adding dopants is inconvenient to operate and easily causes the dopants to spill. Summary of the Utility Model

[0005] This application provides a material replenishing device to solve the technical problems in the related art that it is necessary to manually hold the driving rod to drive the feeding spoon to move and rotate for adding dopants, which is inconvenient to operate and easily causes the dopants to spill.

[0006] This application provides a material replenishing device, including:

[0007] A guiding cylinder, which is used to be arranged on the feeding pipe of the material production equipment and is used to communicate with the feeding pipe;

[0008] A feeding spoon, an axial driving mechanism and a rotational driving mechanism. The axial driving mechanism and the rotational driving mechanism are both arranged on the guiding cylinder. The axial driving mechanism is configured to drive the feeding spoon to move along the axial direction of the guiding cylinder, so that the feeding spoon moves into or out of the feeding pipe. The rotational driving mechanism is configured to drive the feeding spoon to rotate when the feeding spoon moves into the feeding pipe.

[0009] In some embodiments, it further includes:

[0010] A driving rod, which is inserted into the guiding cylinder, and the feeding spoon is arranged at one end of the driving rod;

[0011] A sliding seat, the sliding seat is sleeved on the guiding cylinder, the axial driving mechanism is used to drive the sliding seat to move on the guiding cylinder, and the rotational driving mechanism is used to drive the sliding seat to rotate on the guiding cylinder;

[0012] A connecting mechanism, the connecting mechanism is configured such that when the sliding seat moves and rotates on the guiding cylinder, it drives the driving rod to move and rotate synchronously within the guiding cylinder.

[0013] In some embodiments, the connecting mechanism includes a magnetic attracting member and an attracted member, the magnetic attracting member and the attracted member are respectively arranged on one of the sliding seat and the driving rod, and the magnetic attracting member is configured to magnetically attract the attracted member to drive the driving rod to move and rotate synchronously with the sliding seat.

[0014] In some embodiments, it further includes a guiding rod, a first guiding groove, and a second guiding groove. The guiding rod penetrates and is fixedly connected to the sliding seat. The first guiding groove is arranged along the axial direction of the guiding cylinder. One end of the second guiding groove communicates with one end of the first guiding groove, and the second guiding groove is arranged along the circumferential direction of the guiding cylinder. The guiding rod is configured to slide reciprocally between the first guiding groove and the second guiding groove.

[0015] In some embodiments, the other end of the first guiding groove communicates with a fixing groove. The fixing groove is arranged along the circumferential direction on the outer wall of the guiding cylinder. The fixing groove is configured to allow the guiding rod to move into it to prevent the driving rod from moving axially along the guiding cylinder.

[0016] In some embodiments, the feeding spoon is detachably connected to the end of the driving rod.

[0017] In some embodiments, a blocking block is detachably connected inside the guiding cylinder. The driving rod penetrates and is slidably connected to the blocking block. The circumference of the blocking block abuts against the inner wall of the guiding cylinder. The blocking block is used to be arranged at a position of the guiding cylinder close to the feed pipe.

[0018] In some embodiments, it further includes a mounting cylinder, a connecting plate, and a sealing mechanism. The mounting cylinder is used to be arranged on the feed pipe and is used to communicate with the feed pipe. The connecting plate is arranged on the outer wall of the guiding cylinder. The connecting plate is detachably connected to the mounting cylinder. The sealing mechanism is used to seal the mounting cylinder and the connecting plate. The feeding spoon is used to move into or out of the feed pipe to move into or out of the mounting cylinder.

[0019] In some embodiments, the axial driving mechanism includes a plate body and an axial driving member. The plate body is disposed on the guiding cylinder, and the axial driving member is disposed on the plate body. The sliding seat is connected to the driving end of the axial driving member, and the axial driving member is configured to drive the sliding seat to approach or move away from the plate body.

[0020] In some embodiments, the plate body is sleeved and rotatably connected to the guiding cylinder. The rotational driving mechanism includes a connecting rod and a rotational driving member. One end of the connecting rod is connected to the plate body, and the other end is connected to the driving end of the rotational driving member. The rotational driving member is configured to drive the connecting rod to move circumferentially, so that the connecting rod drives the plate body to rotate.

[0021] The present application provides a material replenishing device. By adopting the axial driving mechanism and the rotational driving mechanism, the axial driving mechanism can drive the feeding spoon to move into or out of the feeding pipe. When the feeding spoon moves into the feeding pipe, the rotational driving mechanism can drive the feeding spoon to rotate at this time, so that the dopant in the feeding spoon can be poured into the material production equipment. There is no need for manual labor to drive the feeding spoon into the material production equipment and drive the feeding spoon to rotate, thus saving the labor for manually driving the feeding spoon to move and rotate; by using a mechanical method instead of manual labor, it is possible to prevent the gas volatilized in the feeding pipe of the material production equipment from affecting the manual replenishment of the dopant. And by driving the feeding spoon to move by the axial driving mechanism, the stability of the feeding spoon during movement is improved, and it is possible to prevent the dopant in the feeding spoon from spilling when the feeding spoon moves; and by driving the feeding spoon to move and rotate by the axial driving mechanism and the rotational driving mechanism, the moving position and rotational angle of the feeding spoon can be controlled more precisely, facilitating driving the feeding spoon to move to a specified position. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings herein are incorporated into the specification and constitute a part of the specification, showing embodiments consistent with the present application, and are used together with the specification to explain the principles of the present application.

[0023] Figure 1 is a schematic structural diagram of the material replenishing device in the installed state provided by the embodiment of the present application;

[0024] Figure 2 is Figure 1 a schematic structural diagram of the guiding cylinder and the feeding spoon in;

[0025] Figure 3 is a schematic structural diagram of the axial driving mechanism and the rotational driving mechanism of the material replenishing device provided by the embodiment of the present application;

[0026] Figure 4 is a schematic semi-sectional structural diagram of the material replenishing device provided by the embodiment of the present application;

[0027] Figure 5 Schematic semi-sectional structure diagram of the magnetic component and the adsorbing component of the material supplement device provided by the embodiment of the present application;

[0028] Figure 6 is Figure 4 The enlarged view of part A in

[0029] Description of reference numerals:

[0030] 100, guide cylinder; 110, first guide groove; 120, second guide groove; 130, fixing groove; 140, stop block; 150, clamping groove; 160, retaining ring;

[0031] 200, feeding spoon;

[0032] 300, axial driving mechanism; 310, plate body; 320, axial driving member; 330, sliding groove;

[0033] 400, rotational driving mechanism; 410, connecting rod; 420, rotational driving member;

[0034] 500, driving rod; 510, bearing;

[0035] 600, sliding seat; 610, seat body; 611, accommodating groove; 620, cover body; 630, guide rod;

[0036] 700, connecting mechanism; 710, magnetic component; 711, strong magnet; 720, adsorbing component; 721, adsorbing block; 722, adsorbing portion;

[0037] 800, mounting cylinder; 810, connecting plate; 820, sealing mechanism; 821, sealing block; 822, sealing groove; 823, sealing ring; 830, mounting plate;

[0038] 900, feed pipe.

[0039] Through the above-mentioned drawings, specific embodiments of the present application have been shown, and more detailed descriptions will be given later. These drawings and textual descriptions are not intended to limit the scope of the concept of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. Detailed Description of the Embodiment

[0040] Here, the exemplary embodiments will be described in detail, and the examples are shown in the drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims.

[0041] As described in the background art, when a dopant needs to be added to a single-crystal silicon production furnace, a dopant replenishing device is required. The dopant replenishing device in the related art includes a driving rod and a feeding spoon. The driving rod penetrates and is slidably connected to the feeding pipe of the single-crystal production furnace. The feeding spoon is arranged at the end of the driving rod located inside the feeding pipe. The operator moves and rotates the driving rod by hand, so that the driving rod drives the feeding spoon to move and rotate, thereby adding the dopant in the feeding spoon to the single-crystal silicon production furnace.

[0042] However, the method of manually holding the driving rod to drive the feeding spoon to move and rotate for dopant feeding is inconvenient to operate. When manually driving the driving rod to move, it is easy to cause the driving rod to rotate during movement, so that the driving rod drives the dopant to spill, resulting in some dopants not being added to the single-crystal silicon production furnace.

[0043] In view of the above technical problems, the embodiment of the present application provides a material replenishing device. When a dopant needs to be replenished, the dopant is placed in the feeding spoon. The sliding seat is driven by an axial driving member to move away from the plate body. The sliding seat can drive the driving rod to move axially in the guiding cylinder through a magnetic attracting member and an attracting accessory. At this time, the guiding rod can move in the first guiding groove, so that the driving rod drives the feeding spoon to move out of the mounting cylinder. At this time, the feeding spoon can move into the feeding pipe. At this time, the connecting rod is driven by a rotating driving member to move circumferentially along the guiding cylinder. The connecting rod can drive the plate body to rotate on the guiding cylinder, so that the plate body drives the axial driving member to move circumferentially along the guiding cylinder, so that the axial driving member drives the sliding seat to rotate on the guiding cylinder. The sliding seat can drive the driving rod to rotate in the guiding cylinder through the magnetic attracting member and the attracting accessory, so that the driving rod drives the feeding spoon to rotate, thereby pouring out the dopant in the feeding spoon. There is no need for manual driving of the sliding seat to move and rotate, thus saving manpower, facilitating the addition of the dopant to the single-crystal silicon production furnace, preventing the gas volatilized in the feeding pipe from affecting the manual addition of the dopant, and driving the feeding spoon to move by the axial driving member, improving the stability of the feeding spoon during movement, thereby preventing the dopant in the feeding spoon from spilling when the feeding spoon moves.

[0044] The technical solution of the present application and how the technical solution of the present application solves the above technical problems will be described in detail below with specific embodiments. These specific embodiments below can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments. The embodiments of the present application will be described below with reference to the drawings.

[0045] Combined with Figures 1 to 3 , a material replenishing device includes:

[0046] The guiding cylinder 100 is configured to be arranged on the feed pipe 900 of the material production equipment and is used to communicate with the feed pipe 900.

[0047] The feeding spoon 200, the axial driving mechanism 300, and the rotational driving mechanism 400. Both the axial driving mechanism 300 and the rotational driving mechanism 400 are arranged on the guiding cylinder 100. The axial driving mechanism 300 is configured to drive the feeding spoon 200 to move along the axial direction of the guiding cylinder 100 so that the feeding spoon 200 can be moved into or out of the feed pipe 900. The rotational driving mechanism 400 is configured to drive the feeding spoon 200 to rotate when the feeding spoon 200 is moved into the feed pipe 900.

[0048] In this embodiment, the material is a dopant, and the material production equipment is a single-crystal silicon production furnace. In other embodiments, the material can also be set as other materials to be added, such as solids or liquids.

[0049] By adopting the above technical solution, with the arrangement of the axial driving mechanism 300 and the rotational driving mechanism 400, the axial driving mechanism 300 can drive the feeding spoon 200 to move into or out of the feed pipe 900. When the feeding spoon 200 is moved into the feed pipe 900, the rotational driving mechanism 400 can drive the feeding spoon 200 to rotate at this time, so that the dopant in the feeding spoon 200 can be poured into the single-crystal silicon production furnace, eliminating the need for manual labor to move the feeding spoon 200 into the single-crystal silicon production furnace and drive the feeding spoon 200 to rotate, thus saving the labor for manually moving and rotating the feeding spoon 200; by using a mechanical method instead of manual labor, it can prevent the gas volatilized in the feed pipe 900 of the single-crystal silicon production furnace from affecting the manual replenishment of the dopant. Moreover, by driving the feeding spoon 200 to move through the axial driving mechanism 300, the stability of the feeding spoon 200 during movement is improved, and it can prevent the dopant in the feeding spoon 200 from spilling when the feeding spoon 200 moves; and by driving the feeding spoon 200 to move and rotate through the axial driving mechanism 300 and the rotational driving mechanism 400, the moving position and rotational angle of the feeding spoon 200 can be controlled more precisely, facilitating the driving of the feeding spoon 200 to move to a specified position.

[0050] Combined with Figures 1 to 3 , the material replenishing device further includes:

[0051] The driving rod 500 is inserted into the guiding cylinder 100, and the feeding spoon 200 is arranged at one end of the driving rod 500.

[0052] The sliding seat 600 is sleeved on the guiding cylinder 100. The axial driving mechanism 300 is used to drive the sliding seat 600 to move on the guiding cylinder 100, and the rotational driving mechanism 400 is used to drive the sliding seat 600 to rotate on the guiding cylinder 100.

[0053] The connecting mechanism 700 is configured to drive the driving rod 500 to move and rotate synchronously within the guiding cylinder 100 when the sliding seat 600 moves and rotates on the guiding cylinder 100.

[0054] In this embodiment, a bearing 510 is provided at the end of the driving rod 500 away from the feed pipe 900. The driving rod 500 moves and rotates within the guiding cylinder 100 through the bearing 510, indirectly improving the stability of the movement and rotation of the driving rod 500.

[0055] By adopting the above technical solution, by slidably connecting the driving rod 500 within the guiding cylinder 100 and arranging the feeding spoon 200 at one end of the driving rod 500, the guiding cylinder 100 and the driving rod 500 can guide the movement and rotation of the feeding spoon 200, preventing the feeding spoon 200 from deviating in position during movement and rotation, and indirectly improving the feeding effect of the feeding spoon 200; by providing the sliding seat 600 and the connecting mechanism 700, when the axial driving mechanism 300 drives the sliding seat 600 to move on the guiding seat, the sliding seat 600 can drive the driving rod 500 to move within the guiding cylinder 100 through the connecting mechanism 700, so that the driving rod 500 drives the feeding spoon 200 to move into or out of the feed pipe 900. When the rotational driving mechanism 400 drives the sliding seat 600 to rotate on the guiding cylinder 100, the sliding seat 600 can drive the driving rod 500 to rotate within the guiding cylinder 100 through the connecting mechanism 700, so that the driving rod 500 drives the feeding spoon 200 to rotate, enabling the axial driving mechanism 300 and the rotational driving mechanism 400 to drive the sliding seat 600 to move and rotate outside the guiding cylinder 100, thereby indirectly driving the feeding spoon 200 to move and rotate, reducing the space occupied by the guiding cylinder 100, and facilitating the maintenance and replacement of the axial driving mechanism 300 and the rotational driving mechanism 400.

[0056] Combined with Figures 4 to 6 , the connecting mechanism 700 includes a magnetic member 710 and an attracting member 720. The magnetic member 710 and the attracting member 720 are respectively provided on the sliding seat 600 and the driving rod 500. The magnetic member 710 is configured to magnetically adsorb with the attracting member 720 to drive the driving rod 500 to move and rotate synchronously with the sliding seat 600.

[0057] In this embodiment, the magnetic attracting member 710 is disposed on the sliding seat 600, and the magnetic attracting accessory 720 is disposed on the driving rod 500; the sliding seat 600 includes a seat body 610 and a cover body 620. Accommodating grooves 611 are disposed on both sides inside the seat body 610. One side of the accommodating groove 611 away from the cover body 620 is closed, and one side of the accommodating groove 611 close to the cover body 620 is through. The cover body 620 is detachably connected to the seat body 610 by bolts to close the accommodating groove 611; the magnetic attracting member 710 includes a strong magnet 711, and strong magnets 711 are disposed in both accommodating grooves 611. The magnetic attracting accessory 720 includes an adsorption block 721. The adsorption block 721 can be set as a magnet that adsorbs with the strong magnet 711, or can be set as a metal block that adsorbs with the strong magnet 711. The adsorption block 721 is detachably connected to the driving rod 500 by bolts, and the adsorption block 721 has two adsorption portions 722 corresponding to the strong magnets 711 on both sides; when the sliding seat 600 moves and rotates, the sliding seat 600 can drive the adsorption block 721 to move and rotate through the magnetic adsorption force between the strong magnet 711 and the adsorption block 721, so that the adsorption block 721 drives the driving rod 500 to move and rotate.

[0058] By adopting the above technical solution, through the arrangement of the magnetic attracting member 710 and the magnetic attracting accessory 720, there is no need for a direct connection between the sliding seat 600 and the driving rod 500, there is no need to open a strip-shaped hole on the guiding cylinder 100, and there is no need to use a connecting member to connect between the sliding seat 600 and the driving rod 500 to realize the synchronous movement and rotation of the sliding seat 600 and the driving rod 500. When the sliding seat 600 moves and rotates on the guiding cylinder 100, the sliding seat 600 drives the driving rod 500 to move and rotate through the magnetic adsorption force between the magnetic attracting member 710 and the magnetic attracting accessory 720, improving the driving effect on the movement and rotation of the driving rod 500.

[0059] Combined with Figures 2 to 6 , the material replenishing device further includes a guiding rod 630, a first guiding groove 110 and a second guiding groove 120. The guiding rod 630 passes through and is fixedly connected to the sliding seat 600. The first guiding groove 110 is arranged along the axial direction of the guiding cylinder 100. One end of the second guiding groove 120 is communicated with one end of the first guiding groove 110. The second guiding groove 120 is arranged along the circumferential direction of the guiding cylinder 100. The guiding rod 630 is used for reciprocating sliding between the first guiding groove 110 and the second guiding groove 120.

[0060] In this embodiment, the cross-section of the guide rod 630 is circular, and the guide rod 630 is perpendicular to the axis of the guide cylinder 100; the cross-sections of the first guide groove 110 and the second guide groove 120 are both set to be "U" - shaped. The sides of the "U" - shaped first guide groove 110 and second guide groove 120 close to the inside of the guide cylinder 100 are closed, and the sides of the "U" - shaped first guide groove 110 and second guide groove 120 away from the inside of the guide cylinder 100 are through - set; the length of the second guide groove 120 is half of the circumference of the guide cylinder 100; when the guide rod 630 moves to the end of the second guide groove 120, the driving rod 500 can drive the feeding spoon 200 to rotate 180°, so that the feeding spoon 200 discharges materials completely.

[0061] By adopting the above - mentioned technical solution, when the sliding seat 600 moves on the guide cylinder 100, the sliding seat 600 can drive the guide rod 630 to move in the first guide groove 110, so that the guide rod 630 and the first guide groove 110 guide the movement of the sliding seat 600 along the axial direction of the guide cylinder 100. When the sliding seat 600 moves to the end of the first guide groove 110 close to the feed pipe 900, by driving the sliding seat 600 to rotate on the guide cylinder 100, at this time, the sliding seat 600 can drive the guide rod 630 to move from the first guide groove 110 into the second guide groove 120. When the sliding seat 600 rotates, it can drive the guide rod 630 to move in the second guide groove 120, so that the guide rod 630 and the second guide groove 120 guide the rotation of the sliding seat 600, thereby further preventing the driving rod 500 from driving the feeding spoon 200 to move and rotate offset, and further improving the feeding effect of the feeding spoon 200.

[0062] Combined with Figures 2 to 6 , the other end of the first guide groove 110 communicates with a fixed groove 130. The fixed groove 130 is arranged on the outer wall of the guide cylinder 100 along the circumferential direction of the guide cylinder 100. The fixed groove 130 is configured to allow the guide rod 630 to move in, so as to prevent the driving rod 500 from moving along the axial direction of the guide cylinder 100.

[0063] In this embodiment, the cross - section of the fixed groove 130 is set to be "U" - shaped. The side of the "U" - shaped fixed groove 130 close to the inside of the guide cylinder 100 is closed, and the side of the "U" - shaped fixed groove 130 away from the inside of the guide cylinder 100 is through - set; the length of the fixed groove 130 is less than the length of the second guide groove 120; the extending direction of the fixed groove 130 is opposite to the extending direction of the second guide groove 120.

[0064] By adopting the above technical solution, through the setting of the fixed groove 130, when the feeding spoon 200 is not needed, by driving the sliding seat 600 to rotate on the guiding cylinder 100, the sliding seat 600 drives the guiding rod 630 to move from the first guiding groove 110 into the fixed groove 130. At this time, the guiding rod 630 and the fixed groove 130 can prevent the driving rod 500 from moving axially along the guiding cylinder 100, thereby preventing the feeding spoon 200 from moving into the feeding pipe 900 when the feeding spoon 200 is not needed, and preventing the feeding spoon 200 from affecting the feeding of the single crystal silicon production furnace.

[0065] Combined with Figures 4 to 6 , the feeding spoon 200 is detachably connected to the end of the driving rod 500.

[0066] In this embodiment, the feeding spoon 200 and the driving rod 500 are detachably connected by a nut.

[0067] By adopting the above technical solution, by detachably connecting the feeding spoon 200 to the driving rod 500, it is convenient to replace feeding spoons 200 of different specifications, so that different feeding spoons 200 can add dopants of different weights; and when the feeding spoon 200 is damaged, it is convenient to remove the feeding spoon 200 for maintenance and replacement.

[0068] Combined with Figures 4 to 6 , a stopper 140 is detachably connected inside the guiding cylinder 100. The driving rod 500 passes through and is slidably connected to the stopper 140. The circumference of the stopper 140 abuts against the inner wall of the guiding cylinder 100. The stopper 140 is used to be arranged at a position of the guiding cylinder 100 close to the feeding pipe 900.

[0069] In this embodiment, a clamping groove 150 is arranged along the circumference of the guiding cylinder 100 on the inner wall of the guiding cylinder 100. One side of the clamping groove 150 close to the feeding pipe 900 penetrates through the guiding cylinder 100, and the side of the clamping groove 150 away from the feeding pipe 900 is closed. The end of the guiding cylinder 100 close to the feeding pipe 900 is detachably connected with a retaining ring 160 by bolts. The inner diameter of the retaining ring 160 is larger than the inner diameter of the clamping groove 150, so that the retaining ring 160 can block the stopper 140 in the clamping groove 150, and the stopper 140 is detachably connected inside the guiding cylinder 100 through the clamping groove 150 and the retaining ring 160.

[0070] By adopting the above technical solution, since the guide cylinder 100 is communicated with the feed pipe 900, and by arranging the stop block 140, the stop block 140 can seal the guide cylinder 100, preventing the chemical substances generated by the reaction in the single crystal silicon production furnace from entering the guide cylinder 100 along the feed pipe 900, thereby preventing the chemical substances from damaging the guide cylinder 100 and preventing the chemical substances from volatilizing along the guide cylinder 100; by passing the driving rod 500 through and slidingly connecting it to the stop block 140, the stop block 140 can further guide the movement of the driving rod 500 in the guide cylinder 100; by detachably connecting the stop block 140 in the guide cylinder 100, it is convenient to remove the stop block 140, the driving rod 500 and the feeding spoon 200 from the guide cylinder 100, facilitating the maintenance and replacement of the stop block 140, the driving rod 500 and the feeding spoon 200, and facilitating the cleaning of the inner wall of the guide cylinder 100.

[0071] Combined Figures 4 to 6 , the material replenishing device further includes an installation cylinder 800, a connecting plate 810 and a sealing mechanism 820. The installation cylinder 800 is used to be arranged on the feed pipe 900 and is used to communicate with the feed pipe 900. The connecting plate 810 is arranged on the outer wall of the guide cylinder 100 and is detachably connected to the installation cylinder 800. The sealing mechanism 820 is used to seal the installation cylinder 800 and the connecting plate 810. The feeding spoon 200 is used to move into or out of the feed pipe 900 to move into or out of the installation cylinder 800.

[0072] In this embodiment, the diameter of the installation cylinder 800 is larger than the diameter of the guide cylinder 100, and the installation cylinder 800 is integrally provided with the feed pipe 900; an installation plate 830 is circumferentially arranged at the edge of the installation cylinder 800 away from the feed pipe 900, and the installation plate 830 is perpendicular to the axis of the installation cylinder 800. The installation cylinder 800 and the guide cylinder 100 are coaxially arranged, and the connecting plate 810 is perpendicular to the axis of the guide cylinder 100; the sealing mechanism 820 includes a sealing block 821 and a sealing groove 822. The sealing block 821 is arranged on the surface of the installation plate 830 facing the connecting plate 810, and the sealing groove 822 is arranged on the installation plate 830. One side of the sealing groove 822 close to the axis of the installation cylinder 800 penetrates through the installation cylinder 800, and the side of the sealing groove 822 away from the axis of the installation cylinder 800 is closed. The sealing block 821 is used to be inserted into the sealing groove 822 to achieve the sealing between the installation plate 830 and the connecting plate 810; the sealing mechanism 820 further includes a sealing ring 823, and the sealing ring 823 is circumferentially embedded on the inner wall of the sealing groove 822. The sealing ring 823 is used to abut against the sealing block 821 to achieve the sealing between the sealing block 821 and the sealing groove 822; the installation plate 830 is detachably connected to the connecting plate 810 by bolts.

[0073] By adopting the above technical solution, through the provision of the mounting cylinder 800, when the feeding spoon 200 is not needed, the feeding spoon 200 is driven to move into the mounting cylinder 800, thereby preventing the feeding spoon 200 from being located in the feeding pipe 900 and affecting the feeding of the single-crystal silicon production furnace; by detachably connecting the connecting plate 810 to the mounting cylinder 800, when the connecting plate 810 is removed from the mounting cylinder 800, the connecting plate 810 can drive the guiding cylinder 100 to be removed from the feeding pipe 900, thereby facilitating the installation and disassembly of the guiding cylinder 100, and thus facilitating the maintenance and replacement of the guiding cylinder 100; by adopting the provision of the sealing mechanism 820, the sealing mechanism 820 can seal the gap between the mounting cylinder 800 and the connecting plate 810, preventing the chemical substances generated by the reaction in the single-crystal silicon production furnace from leaking along the gap between the mounting cylinder 800 and the connecting plate 810.

[0074] Combined with Figures 1 to 3 , the axial driving mechanism 300 includes a plate body 310 and an axial driving member 320. The plate body 310 is arranged on the guiding cylinder 100, the axial driving member 320 is arranged on the plate body 310, the sliding seat 600 is connected to the driving end of the axial driving member 320, and the axial driving member 320 is configured to drive the sliding seat 600 to approach or move away from the plate body 310.

[0075] In this embodiment, the plate body 310 is annularly arranged. The axial driving member 320 includes a cylinder. The cylinder body of the cylinder is arranged on the surface of the plate body 310 facing the sliding seat 600, and the driving end of the cylinder is arranged on the sliding seat 600; the cylinder drives the sliding seat 600 to approach or move away from the plate body 310, so that the sliding seat 600 drives the feeding spoon 200 on the driving rod 500 to move into or out of the feeding pipe 900; in other embodiments, the axial driving member 320 can be arranged in two. By respectively arranging the two axial driving members 320 on both sides of the plate body 310, the two axial driving members 320 can also drive the sliding seat 600 along the axis of the guiding cylinder 100; the cylinder can also be replaced with an electric cylinder and a hydraulic cylinder.

[0076] By adopting the above technical solution, through the provision of the cylinder, the cylinder can drive the sliding seat 600 to move along the axis of the guiding cylinder 100, so that the sliding seat 600 drives the driving rod 500 to move along the axis of the guiding cylinder 100, thereby driving the feeding spoon 200 to move into or out of the feeding pipe 900, thus improving the driving effect on the sliding seat 600; by adopting the provision of the cylinder, the structure is simple, easy to maintain and repair; the response speed of the cylinder is fast, suitable for occasions requiring rapid action; by adjusting the air pressure and flow rate, it is easy to control the speed and force of the cylinder, thus facilitating the adjustment of the feeding speed; the cylinder can adapt to different working environments, such as high temperature, low temperature, humidity and dust, etc.; the cylinder can easily achieve reciprocating motion, thus facilitating the reset of the feeding spoon 200.

[0077] Combined with Figures 1 to 3 , the plate body 310 is sleeved and rotatably connected to the guiding cylinder 100. The rotation driving mechanism 400 includes a connecting rod 410 and a rotation driving member 420. One end of the connecting rod 410 is connected to the plate body 310, and the other end is connected to the driving end of the rotation driving member 420. The rotation driving member 420 is configured to drive the connecting rod 410 to move circumferentially, so that the connecting rod 410 drives the plate body 310 to rotate.

[0078] In this embodiment, a sliding groove 330 is circumferentially arranged on the outer wall of the guiding cylinder 100. A part of the plate body 310 is arranged in the sliding groove 330, and the plate body 310 is rotatably connected to the guiding cylinder 100 through the sliding groove 330; the rotation driving member 420 includes a motor, the motor is a servo motor, the motor is fixedly arranged at the end of the guiding cylinder 100 away from the feed pipe 900, the connecting rod 410 is arranged in an "L" shape, one end of the "L"-shaped connecting rod 410 is connected to the driving end of the motor, and the other end is connected to the plate body 310; when the driving end of the motor rotates, it can drive the "L"-shaped connecting rod 410 to move circumferentially, so that the connecting rod 410 drives the plate body 310 to rotate; in other embodiments, two connecting rods 410 can also be arranged, by connecting one ends of the two connecting rods 410 to the driving end of the motor at the same time, and the other ends are respectively connected to both sides of the plate body 310, so as to improve the driving effect on the plate body 310.

[0079] By adopting the above technical solution, by sleeving and rotatably connecting the plate body 310 to the guiding cylinder 100, and driving the connecting rod 410 to move circumferentially along the circumference of the guiding cylinder 100 by the motor, the connecting rod 410 drives the plate body 310 to rotate on the guiding cylinder 100. Since the axial driving member 320 is arranged on the plate body 310, the plate body 310 drives the axial driving member 320 to rotate, so that the axial driving member 320 drives the sliding seat 600 to rotate on the guiding cylinder 100, and the sliding seat 600 drives the feeding spoon 200 to rotate through the driving rod 500. The setting of the motor improves the driving effect of driving the sliding seat 600 to rotate on the guiding cylinder 100; the motor can precisely control the position, speed and acceleration, so as to facilitate the control of the rotation angle of the feeding spoon 200; the motor can be designed to adapt to different environmental conditions, such as temperature, humidity and vibration.

[0080] For the material replenishment device provided by the embodiments of the present application, when a dopant needs to be replenished, the dopant is placed in the feeding spoon 200. The axial driving member 320 drives the sliding seat 600 to move away from the plate body 310. The sliding seat 600 can drive the driving rod 500 to move axially in the guiding cylinder 100 through the magnetic attracting member 710 and the attracting accessory 720. At this time, the guiding rod 630 can move in the first guiding groove 110, so that the driving rod 500 drives the feeding spoon 200 to move out of the installation cylinder 800. At this time, the feeding spoon 200 can move into the feeding pipe 900. At this time, the rotating driving member 420 drives the connecting rod 410 to move circumferentially along the circumference of the guiding cylinder 100. The connecting rod 410 can drive the plate body 310 to rotate on the guiding cylinder 100, so that the plate body 310 drives the axial driving member 320 to move circumferentially along the circumference of the guiding cylinder 100, so that the axial driving member 320 drives the sliding seat 600 to rotate on the guiding cylinder 100. The sliding seat 600 can drive the driving rod 500 to rotate in the guiding cylinder 100 through the magnetic attracting member 710 and the attracting accessory 720, so that the driving rod 500 drives the feeding spoon 200 to rotate, thereby pouring out the dopant in the feeding spoon 200. There is no need for manual operation to drive the sliding seat 600 to move and rotate, thus saving manpower, facilitating the addition of the dopant into the single crystal silicon production furnace, preventing the gas volatilized in the feeding pipe 900 from affecting the manual addition of the dopant, and driving the feeding spoon 200 to move through the axial driving member 320, improving the stability of the feeding spoon 200 during movement, thereby preventing the dopant in the feeding spoon 200 from spilling when the feeding spoon 200 moves.

[0081] After considering the specification and practicing the disclosed utility model herein, those skilled in the art will readily conceive of other embodiments of the present application. The present application is intended to cover any variations, uses, or adaptations of the present application, which follow the general principles of the present application and include the common general knowledge or conventional technical means in the technical field not disclosed in the present application. The specification and embodiments are only regarded as exemplary, and the true scope and spirit of the present application are pointed out by the following claims.

[0082] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present application is only limited by the appended claims.

Claims

1. A material replenishment device, characterized in that, Comprising: A guiding cylinder (100) configured to be arranged on a feed pipe (900) of a material production device and to communicate with the feed pipe (900). A feeding spoon (200), an axial driving mechanism (300) and a rotational driving mechanism (400). The axial driving mechanism (300) and the rotational driving mechanism (400) are both arranged on the guiding cylinder (100). The axial driving mechanism (300) is configured to drive the feeding spoon (200) to move axially along the guiding cylinder (100) so that the feeding spoon (200) moves into or out of the feed pipe (900), and the rotational driving mechanism (400) is configured to drive the feeding spoon (200) to rotate when the feeding spoon (200) moves into the feed pipe (900).

2. The material replenishment device according to claim 1, characterized in that Further comprising: A driving rod (500) inserted into the guiding cylinder (100), with the feeding spoon (200) arranged at one end of the driving rod (500). A sliding seat (600) sleeved on the guiding cylinder (100). The axial driving mechanism (300) is used to drive the sliding seat (600) to move on the guiding cylinder (100), and the rotational driving mechanism (400) is used to drive the sliding seat (600) to rotate on the guiding cylinder (100). A connecting mechanism (700) configured to drive the driving rod (500) to move and rotate synchronously in the guiding cylinder (100) when the sliding seat (600) moves and rotates on the guiding cylinder (100).

3. The material replenishment device according to claim 2, characterized in that, The connecting mechanism (700) includes a magnetic attracting member (710) and a magnetic attracted member (720). The magnetic attracting member (710) and the magnetic attracted member (720) are respectively arranged on one of the sliding seat (600) and the driving rod (500). The magnetic attracting member (710) is configured to magnetically attract the magnetic attracted member (720) to drive the driving rod (500) to move and rotate synchronously with the sliding seat (600).

4. The material replenishment device according to claim 2, wherein Further comprising a guiding rod (630), a first guiding groove (110) and a second guiding groove (120). The guiding rod (630) passes through and is fixedly connected to the sliding seat (600). The first guiding groove (110) is arranged axially along the guiding cylinder (100), one end of the second guiding groove (120) communicates with one end of the first guiding groove (110), the second guiding groove (120) is arranged circumferentially along the guiding cylinder (100), and the guiding rod (630) is configured to reciprocally slide between the first guiding groove (110) and the second guiding groove (120).

5. The material replenishing device according to claim 4, characterized in that, The other end of the first guiding groove (110) communicates with a fixing groove (130). The fixing groove (130) is arranged on the outer wall of the guiding cylinder (100) along the circumferential direction of the guiding cylinder (100). The fixing groove (130) is configured to allow the guiding rod (630) to move in, so as to prevent the driving rod (500) from moving axially along the guiding cylinder (100).

6. The material replenishing device according to claim 2, wherein, The feeding spoon (200) is detachably connected to the end of the driving rod (500).

7. The material replenishment device according to any one of claims 2-6, characterized in that, A blocking block (140) is detachably connected inside the guiding cylinder (100). The driving rod (500) passes through and is slidably connected to the blocking block (140). The circumference of the blocking block (140) abuts against the inner wall of the guiding cylinder (100). The blocking block (140) is used to be arranged at a position of the guiding cylinder (100) close to the feed pipe (900).

8. The material replenishment device according to any one of claims 2-6, characterized in that It further includes an installation cylinder (800), a connecting plate (810) and a sealing mechanism (820). The installation cylinder (800) is used to be arranged on the feed pipe (900) and communicate with the feed pipe (900). The connecting plate (810) is arranged on the outer wall of the guiding cylinder (100). The connecting plate (810) is detachably connected to the installation cylinder (800). The sealing mechanism (820) is used to seal the installation cylinder (800) and the connecting plate (810). The feeding spoon (200) is used to move into or out of the feed pipe (900) so as to move into or out of the installation cylinder (800).

9. The material replenishment device according to any one of claims 2-6, characterized in that The axial driving mechanism (300) includes a plate body (310) and an axial driving member (320). The plate body (310) is arranged on the guiding cylinder (100). The axial driving member (320) is arranged on the plate body (310). The sliding seat (600) is connected to the driving end of the axial driving member (320). The axial driving member (320) is configured to drive the sliding seat (600) to approach or move away from the plate body (310).

10. The material replenishment device according to claim 9, wherein, The plate body (310) is sleeved and rotatably connected to the guiding cylinder (100). The rotation driving mechanism (400) includes a connecting rod (410) and a rotation driving member (420). One end of the connecting rod (410) is connected to the plate body (310), and the other end is connected to the driving end of the rotation driving member (420). The rotation driving member (420) is configured to drive the connecting rod (410) to move circumferentially, so that the connecting rod (410) drives the plate body (310) to rotate.

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