Liquid storage barrel for liquid supply of grinding liquid equipment cabinet

Abstract

The utility model relates to a liquid storage barrel for liquid supply of a grinding liquid equipment cabinet, which comprises a barrel body, a liquid supply port arranged at the bottom of the barrel body, a filling port arranged at the upper end of the barrel body, a pressure release valve and supporting legs arranged at the bottom of the barrel body and used for supporting the barrel body. A liquid level meter is integrally arranged on the side wall of the barrel body and arranged in the height direction of the barrel body, the liquid level meter comprises a transparent shell, a liquid level measuring area is formed between the upper end and the lower end of the transparent shell, at least the upper end and the lower end of the transparent shell are communicated with the interior of the barrel body, and liquid level scale marks are arranged on the transparent shell corresponding to the liquid level measuring area. The liquid level meter communicated with the interior of the barrel body is installed on the side face of the liquid storage barrel, so that the liquid level condition in the barrel can be visually seen, a person can conveniently supply liquid into the barrel according to needs, and liquid supply to the liquid storage barrel can be conveniently stopped according to liquid level indication of the liquid level meter; and the occupied external space of the barrel body is reduced, and meanwhile, the cost is relatively low.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor processing, and particularly relates to a liquid storage barrel for liquid supply of a polishing liquid equipment cabinet. Background Art

[0002] In the field of semiconductor processing, chemical mechanical polishing (CMP) is applied in both the wafer preparation stage and the overall planarization of the wafer surface. A polishing liquid equipment cabinet usually includes a stock solution barrel, a mixing system, and an electric control module arranged inside. An existing polishing liquid mixing cabinet such as the one disclosed in CN219922617U stores concentrated polishing stock solution in the stock solution barrel and supplies the stock solution to a mixing barrel through pipelines.

[0003] The stock solution barrel is arranged inside the cabinet, so its capacity is limited by the cabinet space. Therefore, in order to meet the production needs, a liquid storage barrel is also arranged outside the cabinet to supply the stock solution to the stock solution barrel. Common materials for existing liquid storage barrels, such as PP (polypropylene) material, cannot directly show the liquid level height inside the liquid storage barrel. Therefore, a liquid level gauge needs to be configured. The components of the polishing liquid generally include abrasive particles, oxidants, complexing agents, surfactants, pH regulators, corrosion inhibitors, etc. Since the polishing liquid contains abrasive particle components, conventional sensor-based liquid level gauges are not suitable for use inside the liquid storage barrel. Summary of the Utility Model

[0004] In order to solve the problem that the liquid level inside the existing liquid storage barrel is not convenient to observe, the utility model provides a liquid storage barrel for liquid supply of a polishing liquid equipment cabinet. A liquid level gauge with an integrated structure is configured on the side wall of the liquid storage barrel, which can directly observe the liquid level condition and can also prevent the liquid level gauge from being damaged.

[0005] The technical purpose of the utility model is achieved through the following technical solutions:

[0006] A liquid storage barrel for liquid supply of a polishing liquid equipment cabinet includes a barrel body, a liquid supply port arranged at the bottom of the barrel body, a filling port and a pressure relief valve arranged at the upper end of the barrel body, and support legs for supporting the barrel body are also arranged at the bottom of the barrel body; a liquid level gauge is integrally arranged on the side wall of the barrel body. The liquid level gauge is arranged along the height direction of the barrel body. The liquid level gauge includes a transparent housing. A liquid level measurement area is formed between the upper and lower ends of the transparent housing. At least the upper and lower ends of the transparent housing communicate with the inside of the barrel body. The transparent housing is provided with liquid level scale marks corresponding to the liquid level measurement area.

[0007] Further, the bottom of the barrel body is recessed to form a bottom surface. The liquid supply port is fixedly connected to the bottom surface and communicates with the inside of the barrel body; the upper end of the barrel body protrudes upward to form an air dome inside the barrel body; the liquid level measurement area is located above the bottom surface and below the air dome.

[0008] Further, the liquid supply port includes at least one. A pipe connector is provided at the liquid supply port. The pipe connector is connected to a liquid supply pipe, and the liquid supply pipe is connected to a liquid supply pump.

[0009] Further, a regulating valve for controlling liquid supply is also connected between the pipe connector and the liquid supply pipe.

[0010] Further, the filling port is arranged at the highest point of the gas dome. A maintenance cover is detachably installed at the filling port, and a filling pipe is connected to the maintenance cover.

[0011] Further, a handle is also provided on the maintenance cover.

[0012] Further, a number of equipment interfaces are also provided at the gas dome at the upper end of the barrel body. A sealing plate is detachably installed at the equipment interfaces.

[0013] Further, the upper end of the support leg supports the lower end of the barrel body, and a support plate for increasing the support area is provided at the lower end of the support leg.

[0014] Further, a lifting ring is also provided on the side of the support leg.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows. By installing a liquid level gauge connected to the inside of the barrel body on the side of the liquid storage barrel, the liquid level inside the barrel can be seen more intuitively, which is convenient for personnel to replenish the liquid in the barrel as needed and also convenient to stop replenishing the liquid into the liquid storage barrel according to the liquid level indication of the liquid level gauge. In addition, the liquid level gauge is integrally arranged on the side wall of the barrel body, which can reduce the occupation of the external space of the barrel body and has a relatively low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic structural diagram of the liquid storage barrel for liquid supply of the polishing liquid equipment cabinet of the present utility model.

[0017] In the figure: 1, barrel body; 2, liquid supply port; 3, filling port; 4, pressure relief valve; 5, support leg; 6, liquid level gauge; 7, liquid supply pipe; 8, regulating valve; 9, maintenance cover; 10, filling pipe; 11, handle; 12, equipment interface; 13, lifting ring; 14, bottom surface; 15, gas dome; 16, support plate. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] The technical solutions of the present utility model will be further described below in conjunction with the specific embodiments:

[0019] A liquid storage barrel for liquid supply of a polishing liquid equipment cabinet, as Figure 1As shown in the figure, it includes a barrel body 1. The material of the barrel body 1 is, for example, PP material. There is a liquid supply port 2 provided at the bottom of the barrel body, a filling port 3 provided at the upper end of the barrel body, a pressure relief valve 4, and support legs 5 provided at the bottom of the barrel body 1 for supporting the barrel body; a liquid level gauge 6 is integrally provided on the side wall of the barrel body. The liquid level gauge 6 is arranged along the height direction of the barrel body 1. The liquid level gauge 6 includes a transparent housing. The material of the transparent housing can be selected, for example, as PE (polyethylene) material. The transparent housing is adhesively fixed to the side of the barrel body. A liquid level measurement area is formed between the upper and lower ends of the transparent housing. At least the upper and lower ends of the transparent housing communicate with the inside of the barrel body. It is also possible that the transparent housing communicates with the inside of the barrel body along the height direction of the liquid level gauge. The transparent housing is provided with liquid level scale marks corresponding to the liquid level measurement area.

[0020] More specifically, the bottom of the barrel body 1 is recessed to form a bottom surface 14. The liquid supply port 2 is fixedly connected to the bottom surface and communicates with the inside of the barrel body. The recessed bottom surface 14 can facilitate the discharge of liquid; the upper end of the barrel body protrudes upward to form a gas dome 15 inside the barrel body, which is beneficial to the gathering of gas at the top inside the liquid storage barrel. During the process of pumping out the liquid, due to the decrease in liquid level in the liquid storage barrel, the pressure decreases. It is necessary to avoid excessive internal negative pressure by means of replenishing liquid or air. During the process of replenishing air or liquid, the gas dome 15 can facilitate the gathering of gas at the top inside the liquid storage barrel, and it is convenient for the gas to be discharged from the pressure relief valve 4 to avoid excessive air pressure inside the liquid storage barrel. The pressure relief valve adopts a gas pressure relief valve; the area between the bottom surface and the gas dome of the barrel body presents a relatively regular cylindrical structure. The liquid level measurement area is located above the bottom surface and below the gas dome. The change in the liquid level inside the liquid storage barrel is mainly concentrated in the cylindrical structure area of the liquid storage barrel.

[0021] The liquid supply port 2 includes at least one. The liquid supply port 2 is made of the same material as the barrel body 1. The liquid supply port 2 is provided with a pipe joint, such as a flange joint. The pipe joint is connected to a liquid supply pipe 7. The liquid supply pipe 7 is connected to a liquid supply pump, and the liquid supply pump extracts the grinding liquid from the liquid storage barrel and supplies it to the stock solution barrel. As a preference, a control valve 8 for controlling the liquid supply is also connected between the pipe joint and the liquid supply pipe 7. The control valve 8 can be a common gate valve, ball valve, etc. It can be a manual valve or an electromagnetic valve.

[0022] The filling port 3 is provided at the highest point of the gas dome 15. A maintenance cover 9 is detachably installed at the filling port 3. The filling port 3 is provided with a flange plate, and the maintenance cover 9 is installed on the flange plate by bolts. A filling pipe 10 is connected to the maintenance cover 9. Through the filling pipe 10, the grinding liquid can be filled into the liquid storage barrel. When maintenance and repair are needed, the maintenance cover is removed and the inside of the liquid storage barrel is maintained and repaired. For the convenience of taking, a handle 11 is also provided on the maintenance cover.

[0023] Preferably, a plurality of equipment interfaces 12 are provided at the gas dome at the upper end of the barrel body 1. A sealing plate is detachably installed at the equipment interface 12. When not in use, the equipment interface 12 can be blocked by the sealing plate. If it is necessary to use, for example, to fill gas into the liquid storage barrel to balance the air pressure, the sealing plate can be removed to connect the gas pipeline; for example, the sealing plate can also be removed to install a pressure gauge at the equipment interface.

[0024] Preferably, the upper end of the support leg 5 supports the lower end of the barrel body 1. The lower end of the support leg 5 is provided with a support plate 16 for increasing the support area. The support leg 5 and the support plate 16 are integrally welded by a steel structure. In this embodiment, the upper ends of the four support legs 5 are connected to an annular support seat, and the barrel body 1 is placed on the support seat. The support seat is made of a steel structure, and the support leg and the support seat are fixedly connected by welding.

[0025] A lifting ring 13 is further provided on the side surface of the support leg 5, which is convenient for hoisting the liquid storage barrel and tying and fixing during transportation.

[0026] This embodiment is only a further explanation of the present invention, not a limitation to the present invention. Those skilled in the art can make non-creative modifications to this embodiment according to needs after reading this specification, but as long as it is within the scope of the claims of the present invention, it is protected by the patent law.

Claims

1. A liquid storage barrel for liquid supply of a polishing liquid equipment cabinet, characterized in that, It includes a barrel body, a liquid supply port provided at the bottom of the barrel body, a filling port provided at the upper end of the barrel body, a pressure relief valve, and support legs provided at the bottom of the barrel body for supporting the barrel body; a liquid level gauge is integrally provided on the side wall of the barrel body, the liquid level gauge is arranged along the height direction of the barrel body, the liquid level gauge includes a transparent housing, a liquid level measurement area is formed between the upper and lower ends of the transparent housing, at least the upper and lower ends of the transparent housing communicate with the inside of the barrel body, and the transparent housing is provided with liquid level scale marks corresponding to the liquid level measurement area.

2. The liquid storage barrel for liquid supply of a polishing liquid equipment cabinet according to claim 1, characterized in that, The bottom of the barrel body is recessed to form a bottom surface, the liquid supply port is fixedly connected to the bottom surface and communicates with the inside of the barrel body; the upper end of the barrel body protrudes upward to form a gas dome inside the barrel body; the liquid level measurement area is located above the bottom surface and below the gas dome.

3. A liquid storage barrel for liquid supply of a grinding fluid equipment cabinet according to claim 1 or 2, characterized in that, There is at least one liquid supply port, the liquid supply port is provided with a pipe joint, the pipe joint is connected with a liquid supply pipe, and the liquid supply pipe is connected with a liquid supply pump.

4. A liquid storage barrel for liquid supply of a grinding fluid equipment cabinet according to claim 3, characterized in that, A regulating valve for controlling liquid supply is also connected between the pipe joint and the liquid supply pipe.

5. A liquid storage barrel for liquid supply of a grinding fluid equipment cabinet according to claim 2, wherein, The filling port is provided at the highest point of the gas dome, a maintenance cover is detachably installed at the filling port, and a filling pipe is connected to the maintenance cover.

6. The liquid storage barrel for liquid supply of a grinding fluid equipment cabinet according to claim 5, characterized in that, A handle is also provided on the maintenance cover.

7. A liquid storage barrel for liquid supply of a polishing liquid equipment cabinet according to claim 1, characterized in that, A number of equipment interfaces are also provided at the gas dome at the upper end of the barrel body, and a sealing plate is detachably installed at the equipment interfaces.

8. A liquid storage barrel for liquid supply of a grinding fluid equipment cabinet according to claim 1, characterized in that, The upper ends of the support legs support the lower end of the barrel body, and the lower ends of the support legs are provided with support plates for increasing the support area.

9. A liquid storage barrel for liquid supply of a grinding fluid equipment cabinet according to claim 1, characterized in that, A lifting ring is also provided on the side of the support leg.

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