Mechanical finger assembly, manipulator and vacuum coating equipment

Abstract

The utility model discloses a mechanical finger assembly, manipulator and vacuum coating equipment, the mechanical finger assembly comprises a finger body, a plurality of suckers and a plurality of non-slip mats, the finger body is provided with a plurality of mounting structures, the finger body is provided with an air flow channel, the air flow channel extends to the plurality of mounting structures, the air flow channel is used for connecting a vacuum generator, and the vacuum generator is connected with the sucker and the non-slip mats. The multiple suction cups can be installed on the multiple installation structures respectively and can be detached from the installation structures, the multiple non-slip mats can be installed on the multiple installation structures respectively and can be detached from the installation structures, and when the suction cups are installed on the multiple installation structures, the suction cups communicate with the airflow channel so as to adsorb the substrate; and when the non-slip mats are mounted on the multiple mounting structures, the multiple non-slip mats are used for being matched with the bearing substrate. According to the mechanical finger assembly, the manipulator and the vacuum coating equipment disclosed by the utility model, not only can the substrate be conveyed in the atmospheric environment, but also the substrate can be conveyed in the vacuum environment, the functions are more diversified, and the practicability is better.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a mechanical finger assembly, a manipulator and a vacuum coating device. Background Art

[0002] A vacuum coating device is a device for vacuum coating materials through technologies such as magnetron sputtering, ion etching, and electron beam evaporation, and is widely used in the semiconductor and photovoltaic industries. When performing vacuum coating processing on semiconductors and photovoltaics, a manipulator is often used to transfer substrates. In an atmospheric environment, the manipulator generally adsorbs the substrate through a suction cup. However, in a vacuum environment, the adsorption effect of the suction cup drops significantly, making it inconvenient to transfer the substrate by adsorbing with the suction cup, resulting in a relatively single function of the manipulator and poor practicability. Summary of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a mechanical finger assembly, which can not only transfer substrates in an atmospheric environment, but also transfer substrates in a vacuum environment, with more diverse functions and better practicability.

[0004] The utility model also provides a manipulator with the above mechanical finger assembly.

[0005] The utility model also provides a vacuum coating device with the above manipulator.

[0006] The mechanical finger assembly according to the first aspect embodiment of the utility model includes a finger body, a plurality of suction cups and a plurality of anti-slip pads. The finger body is provided with a plurality of mounting structures, and the finger body is provided with an air flow channel that extends to the plurality of mounting structures. The air flow channel is used to connect to a vacuum generator. The plurality of suction cups can be respectively mounted on the plurality of mounting structures and can be disassembled from the mounting structures. The plurality of anti-slip pads can be respectively mounted on the plurality of mounting structures and can be disassembled from the mounting structures. Among them, when the suction cups are mounted on all the mounting structures, the suction cups communicate with the air flow channel to adsorb the substrate; when the anti-slip pads are mounted on all the mounting structures, the plurality of anti-slip pads are used to cooperate to support the substrate.

[0007] The mechanical finger assembly according to the embodiment of the utility model has at least the following beneficial effects:

[0008] The mechanical finger assembly is installed on the manipulator of the vacuum coating equipment. When it is necessary to transport the substrate in the atmospheric environment, multiple suction cups can be respectively installed on multiple installation structures. The suction cups are communicated with the air flow channels. After the substrate is attached to the multiple suction cups, the vacuum generator is started, and the vacuum generator can evacuate the air flow channels. The suction cups can then adsorb the substrate, thus facilitating the manipulator to transport the substrate. When it is necessary to transport the substrate in the vacuum environment, the suction cups can be removed, and multiple anti-slip pads can be respectively installed on multiple installation structures. Then the substrate is placed on the upper surfaces of the multiple anti-slip pads, and the multiple anti-slip surfaces cooperate to support the substrate. Due to the vacuum environment and the friction between the anti-slip pads and the substrate, the substrate can be prevented from sliding randomly, thus facilitating the manipulator to transport the substrate. According to the mechanical finger assembly of the embodiment of the present invention, by switching the installation of the suction cups and the anti-slip pads, not only can the substrate be transported in the atmospheric environment, but also the substrate can be transported in the vacuum environment, with more diverse functions and better practicability.

[0009] According to some embodiments of the present invention, the finger body includes at least two finger joints and a connecting portion. The at least two finger joints are arranged side by side. The air flow channel includes at least two and is respectively arranged in at least two of the finger joints. The air flow channel extends along the length direction of the finger joint. The installation structure includes at least two groups and is respectively arranged in at least two of the finger joints. The installation structures in the same group are arranged along the length direction of the finger joint. The connecting portion is connected between two adjacent finger joints.

[0010] According to some embodiments of the present invention, first limiting portions are respectively arranged on the opposite sides of the two outermost finger joints, and the first limiting portions are used to limit the substrate from sliding along the arrangement direction of the finger joints.

[0011] According to some embodiments of the present invention, the finger joint is provided with two second limiting portions arranged along the length direction of the finger joint, and the second limiting portions are used to limit the substrate from sliding along the length direction of the finger joint.

[0012] According to some embodiments of the present invention, the first limiting portion extends along the length direction of the finger joint, and the second limiting portion extends along the arrangement direction of the finger joints.

[0013] According to some embodiments of the present invention, the finger body forms an installation surface. The installation structure includes an installation groove arranged on the installation surface. A communication hole is arranged between the installation groove and the air flow channel. The suction cup is connected with a first installation plate, and the anti-slip pad is connected with a second installation plate. The first installation plate and the second installation plate are respectively used for being embedded in the installation groove and being connected with the finger body through fasteners.

[0014] According to some embodiments of the present utility model, the mounting structure further includes a clearance groove provided on the mounting surface, and the clearance groove is located on one side of the mounting groove and communicates with the mounting groove.

[0015] According to some embodiments of the present utility model, the mounting surface is provided with a receiving groove, and the mechanical finger assembly further includes a sensor, and the sensor is installed in the receiving groove, and the sensor is used to detect whether the substrate is in place.

[0016] The manipulator according to the second aspect embodiment of the present utility model includes the mechanical finger assembly described in the first aspect embodiment above.

[0017] The manipulator according to the embodiment of the present utility model has at least the following beneficial effects:

[0018] The manipulator adopts the mechanical finger assembly of the first aspect embodiment of the present utility model. By switching the installation of the suction cup and the anti-slip pad, it can not only transfer the substrate in the atmospheric environment, but also transfer the substrate in the vacuum environment, with more diverse functions and better practicability.

[0019] The vacuum coating equipment according to the third aspect embodiment of the present utility model includes the manipulator described in the second aspect embodiment above.

[0020] The vacuum coating equipment according to the embodiment of the present utility model has at least the following beneficial effects:

[0021] The vacuum coating equipment adopts the manipulator described in the second aspect embodiment of the present utility model. The mechanical finger assembly of the manipulator can not only transfer the substrate in the atmospheric environment, but also transfer the substrate in the vacuum environment by switching the installation of the suction cup and the anti-slip pad, with more diverse functions and better practicability.

[0022] The additional aspects and advantages of the present utility model will be partially given in the following description, and some advantages will become obvious from the following description, or will be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0024] Figure 1 is a schematic structural diagram of the mechanical finger assembly according to the embodiment of the present utility model;

[0025] Figure 2 is a working schematic diagram of the mechanical finger assembly;

[0026] Figure 3 is Figure 1 an enlarged view of part A in

[0027] Figure 4 isFigure 1 Enlarged view at position B in [the figure];

[0028] Figure 5 is Figure 2 Enlarged view at position C in [the figure];

[0029] Figure 6 Schematic diagram of the layout of the air flow channel;

[0030] Figure 7 Schematic diagram when the suction cup is installed on the mounting structure;

[0031] Figure 8 Schematic diagram when the anti-slip pad is installed on the mounting structure.

[0032] Reference numerals in the attached drawings:

[0033] Finger body 100; Mounting structure 101; Air flow channel 102; Finger joint 103; Connecting portion 104; First limiting portion 105; Second limiting portion 106; Mounting surface 107; Mounting groove 108; Communication hole 109; Clearance groove 110; Accommodating groove 111; Wiring groove 112; Mounting portion 113;

[0034] Suction cup 200; First mounting plate 201;

[0035] Anti-slip pad 300; Second mounting plate 301;

[0036] Sensor 400;

[0037] Substrate 500; Frame 501; Substrate body 502. Detailed implementation manners

[0038] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0039] In the description of the present utility model, it should be understood that for the orientation description, such as up, down, etc., the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.

[0040] In the description of the present utility model, "a plurality of" refers to two or more. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features, and cannot be construed as indicating or implying relative importance or implicitly specifying the number of the indicated technical features or implicitly specifying the sequence relationship of the indicated technical features.

[0041] In the description of the present utility model, unless otherwise clearly defined, terms such as "arrangement", "installation", and "connection" should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present utility model in combination with the specific content of the technical solution.

[0042] A vacuum coating equipment is a device for vacuum coating materials through technologies such as magnetron sputtering, ion etching, and electron beam evaporation, and is widely used in the semiconductor and photovoltaic industries. When semiconductor and photovoltaic are subjected to vacuum coating processing, a manipulator is often required for substrate transfer. In related technologies, a suction cup is arranged on the manipulator, and the suction cup is connected to a vacuum generator. When it is necessary to transport the substrate, the substrate is attached to the suction cup, and then the vacuum generator is started. The vacuum generator can evacuate the suction cup, and the suction cup can thus adsorb the substrate.

[0043] However, the suction cup is generally suitable for the atmospheric environment. In a vacuum environment, it is difficult for the vacuum generator to make the negative pressure inside the suction cup lower than the negative pressure of the external environment, which in turn causes the suction cup to be difficult to adsorb the substrate. Therefore, it is inconvenient to transfer the substrate by suction adsorption of the suction cup, resulting in a relatively single function of the manipulator and poor practicability.

[0044] Therefore, the present utility model provides a mechanical finger assembly, a manipulator, and a vacuum coating equipment, which can effectively improve the above problems.

[0045] Next, refer to Figures 1 to 8 Describe the mechanical finger assembly, the manipulator, and the vacuum coating equipment according to the embodiments of the present utility model.

[0046] The mechanical finger assembly according to the first aspect embodiment of the present utility model, as Figures 1 to 8 shown, includes a finger body 100, a plurality of suction cups 200, and a plurality of anti-slip pads 300.

[0047] The finger body 100 is provided with a plurality of mounting structures 101. The finger body 100 is provided with an air flow channel 102, and the air flow channel 102 extends to the vicinity of the plurality of mounting structures 101. The air flow channel 102 is used to connect to a vacuum generator, and the vacuum generator is used to evacuate the air flow channel 102. The vacuum generator can be a vacuum pump or other common devices capable of evacuating air, and its structure and working principle will not be elaborated here.

[0048] A plurality of suction cups 200 can be respectively installed on a plurality of mounting structures 101 and can be detached from the mounting structures 101. A plurality of anti-slip pads 300 can be respectively installed on the plurality of mounting structures 101 and can be detached from the mounting structures 101. Among them, when the suction cups 200 are installed on all the mounting structures 101, the suction cups 200 are communicated with the air flow channel 102 to adsorb the substrate 500. When the anti-slip pads 300 are installed on all the mounting structures 101, the plurality of anti-slip pads 300 are used to cooperate to support the substrate 500. That is to say, both the suction cups 200 and the anti-slip pads 300 can be detachably installed on the mounting structures 101. When installing the suction cups 200, the anti-slip pads 300 are removed. When installing the anti-slip pads 300, the suction cups 200 are removed.

[0049] The mechanical finger assembly is installed on the robot arm of the vacuum coating equipment. When it is necessary to transport the substrate 500 in the atmospheric environment, a plurality of suction cups 200 can be respectively installed on a plurality of mounting structures 101. The suction cups 200 are communicated with the air flow channel 102. After the substrate 500 is attached to the plurality of suction cups 200, the vacuum generator is started, and the vacuum generator can evacuate the air flow channel 102. The suction cups 200 can then adsorb the substrate 500, thus facilitating the robot arm to transport the substrate 500. When it is necessary to transport the substrate 500 in the vacuum environment, the suction cups 200 can be removed, and a plurality of anti-slip pads 300 can be respectively installed on the plurality of mounting structures 101. Then the substrate 500 is placed on the upper surfaces of the plurality of anti-slip pads 300, and the plurality of anti-slip surfaces cooperate to support the substrate 500. Due to the vacuum environment and the friction force between the anti-slip pads 300 and the substrate 500, the substrate 500 will not slide randomly, thus facilitating the robot arm to transport the substrate 500. According to the mechanical finger assembly of the embodiment of the present invention, by switching the installation of the suction cups 200 and the anti-slip pads 300, it is not only possible to transport the substrate 500 in the atmospheric environment, but also possible to transport the substrate 500 in the vacuum environment, with more diverse functions and better practicability.

[0050] It should be noted that when transporting the substrate 500 in the vacuum environment, only need to horizontally place the substrate 500 on the upper surfaces of all the anti-slip pads 300, and the anti-slip pads 300 support the substrate 500. When the robot arm drives the substrate 500 to move horizontally, due to the friction force between the substrate 500 and the anti-slip pads 300, it is possible to prevent the substrate 500 from sliding relative to the anti-slip pads 300 and falling under the action of inertia.

[0051] It can be understood that the substrate 500 generally includes a frame 501 and a substrate body 502 embedded in the frame 501. Therefore, the installation positions of the suction cups 200 and the anti-slip pads 300 can be determined according to the shape and size of the substrate 500. When transporting the substrate 500, the suction cups 200 and the anti-slip pads 300 only act on the frame 501 and do not contact the substrate body 502 to avoid damaging the substrate body 502.

[0052] Reference Figure 1 、 Figure 2 and Figure 6 As shown in Figure 1 , Figure 2 and Figure 6 , in some embodiments of the present utility model, the finger body 100 includes at least two phalanges 103 and a connecting portion 104. The at least two phalanges 103 are arranged side by side. The air flow channel 102 includes at least two and is respectively arranged on the at least two phalanges 103. The air flow channel 102 extends along the length direction of the phalanx 103. The mounting structure 101 includes at least two groups and is respectively arranged on the at least two phalanges 103. The mounting structures 101 in the same group are arranged along the length direction of the phalanx 103. The connecting portion 104 is connected between two adjacent phalanges 103. Specifically, there may be two phalanges 103, and correspondingly, there are two air flow channels 102. The two air flow channels 102 are respectively arranged on the two phalanges 103. The mounting structure 101 includes two groups. The two groups of mounting structures 101 are respectively arranged on the two phalanges 103. The number of the mounting structures 101 in the same group may be two, three, four or other suitable numbers. For example, it may be three, and the three mounting structures 101 are arranged along the length direction of the phalanx 103.

[0053] In this embodiment, the finger body 100 is arranged in this way, which not only makes the overall structure of the mechanical finger assembly lighter, but also saves more materials. In addition, it is more convenient to arrange the air flow channel 102 and the mounting structure 101, and at the same time, the mounting structure 101 can just correspond to the frame 501 part of the substrate 500, and the practicability is better.

[0054] It should be noted that the phalanx 103 may also be three or more, correspondingly, the air flow channel 102 may also be three or more, and the mounting structure 101 may also be three groups or more. In some other embodiments of the present utility model, the finger body 100 may also be other structures, which will not be elaborated here.

[0055] Reference Figure 1 、 Figure 2 and Figure 6As shown, in some embodiments of the present utility model, on the sides of the two outermost phalanges 103 facing away from each other, first limiting portions 105 are respectively provided. The first limiting portions 105 are used to limit the sliding of the substrate 500 along the arrangement direction of the phalanges 103. For example, when there are two phalanges 103, on the sides of the two phalanges 103 facing away from each other, mounting portions 113 are provided. One first limiting portion 105 can be provided on the mounting portion 113. The two first limiting portions 105 can be arranged along the arrangement direction of the two phalanges 103. The distance between the two first limiting portions 105 can be slightly greater than the dimension of the substrate 500 along the arrangement direction of the two phalanges 103. In this case, the two first limiting portions 105 can limit the sliding stroke of the substrate 500, so that the substrate 500 can only slide a small distance along the arrangement direction of the two phalanges 103. Of course, the distance between the two first limiting portions 105 can also be equal to the dimension of the substrate 500 along the arrangement direction of the two phalanges 103. In this case, the two first limiting portions 105 completely limit the sliding of the substrate 500 along the arrangement direction of the two phalanges 103.

[0056] In this embodiment, by providing the first limiting portions 105, during the process of conveying the substrate 500, through the limiting effect of the first limiting portions 105, the random sliding of the substrate 500 along the arrangement direction of the phalanges 103 can be limited, thereby making the conveying more convenient, and the risk of the substrate 500 falling due to sliding can be avoided, with better safety. Furthermore, the conveying speed can be increased and the conveying rate can be higher.

[0057] It should be noted that the number of the first limiting portions 105 on the sides of the two outermost phalanges 103 facing away from each other can also be two or more than two, which will not be elaborated here.

[0058] Reference Figure 1 、 Figure 2 、 Figures 4 to 6As shown, in some embodiments of the present utility model, the knuckle 103 is provided with two second limiting portions 106 arranged along the length direction of the knuckle 103, and the second limiting portions 106 are used to limit the sliding of the substrate 500 along the length direction of the knuckle 103. For example, among the two second limiting portions 106 on the same knuckle 103, one second limiting portion 106 can be near the first limiting portion 105, and the other second limiting portion 106 can be at the end of the knuckle 103. The second limiting portion 106 at the end of the knuckle 103 can be arranged along the arrangement direction of the knuckle 103, and the second limiting portion 106 of the knuckle 103 near the first limiting portion 105 can be arranged along the arrangement direction of the knuckle 103. The distance between the two second limiting portions 106 on the same knuckle 103 can be slightly larger than the size of the substrate 500 along the length direction of the knuckle 103. In this case, the two second limiting portions 106 on the same knuckle 103 can limit the sliding stroke of the substrate 500, so that the substrate 500 can only slide a tiny distance along the length direction of the knuckle 103. Of course, the distance between the two second limiting portions 106 on the same knuckle 103 can also be equal to the size of the substrate 500 along the length direction of the knuckle 103. In this case, the two second limiting portions 106 on the same knuckle 103 completely limit the sliding of the substrate 500 along the length direction of the knuckle 103.

[0059] In this embodiment, each knuckle 103 is provided with two second limiting portions 106. During the process of conveying the substrate 500, through the limiting effect of all the second limiting portions 106, the random sliding of the substrate 500 along the length direction of the knuckle 103 can be restricted, thereby making the conveying more convenient, and the risk of the substrate 500 falling due to sliding can be avoided, with better safety. Furthermore, the conveying speed can be increased and the conveying rate can be higher.

[0060] Refer to Figure 1 、 Figure 2 and Figure 6 As shown, in some embodiments of the present utility model, the first limiting portion 105 extends along the length direction of the knuckle 103, and the second limiting portion 106 extends along the arrangement direction of the two knuckles 103. Generally, the substrate 500 is roughly square. When the substrate 500 is adsorbed on the suction cup 200 or placed on the anti-slip pad 300, the length direction of the substrate 500 can be parallel to one of the arrangement direction of the knuckles 103 and the length direction of the knuckles 103, and the width direction of the substrate 500 can be parallel to the other of the arrangement direction of the knuckles 103 and the length direction of the knuckles 103. In this way, it is just the long side walls of the first limiting portion 105 and the second limiting portion 106 that are close to the substrate 500, which not only makes the limiting effect better, but also when the substrate 500 abuts against the first limiting portion 105 or the second limiting portion 106, the force on the substrate 500 is more uniform, and thus it is less likely to cause damage to the substrate 500.

[0061] Reference Figure 3 , Figure 4 , Figure 7 and Figure 8 As shown in Figure 3 , Figure 4 , Figure 7 and Figure 8 , in some embodiments of the present utility model, the finger body 100 is formed with a mounting surface 107. The mounting structure 101 includes a mounting groove 108 provided on the mounting surface 107. A communication hole 109 is provided between the mounting groove 108 and the air flow channel 102. The suction cup 200 is connected with a first mounting plate 201, and the anti-slip pad 300 is connected with a second mounting plate 301. The first mounting plate 201 and the second mounting plate 301 are respectively used for being embedded into the mounting groove 108 and connected with the finger body 100 through fasteners. For example, the first mounting plate 201 may be provided with a connection hole and an air guide hole. The bottom surface of the mounting groove 108 may be provided with a mounting hole. After the first mounting plate 201 is embedded into the mounting groove 108, the connection hole of the first mounting plate 201 is aligned with the mounting hole and the fastener is installed. The end surface of the first mounting plate 201 facing away from the bottom surface of the mounting groove 108 may be substantially flush with the mounting surface 107. The suction cup 200 may protrude from the mounting surface 107. The suction cup 200 is communicated with the communication hole 109 through the air guide hole, and thus is indirectly communicated with the air flow channel 102. Similarly, the second mounting plate 301 may be provided with a connection hole. After the second mounting plate 301 is embedded into the mounting groove 108, the connection hole of the second mounting plate 301 is aligned with the mounting hole and the fastener is installed. The end surface of the second mounting plate 301 facing away from the bottom surface of the mounting groove 108 may be substantially flush with the mounting surface 107. The anti-slip pad 300 may protrude from the mounting surface 107.

[0062] In this embodiment, the suction cup 200 and the anti-slip pad 300 are installed in this way, which is not only more convenient and stable for installation, but also enables the suction cup 200 and the anti-slip pad 300 to protrude from the mounting surface 107. Thus, the substrate 500 only contacts the suction cup 200 or the anti-slip pad 300, and will not contact the finger body 100 to cause damage, and the practicability is better.

[0063] It should be noted that the mounting structure 101 may also be provided as a mounting protrusion instead of being provided as the mounting groove 108, which will not be elaborated here.

[0064] Reference Figure 3 As shown in Figure 3 , in some embodiments of the present utility model, the mounting structure 101 further includes a clearance groove 110 provided on the mounting surface 107. The clearance groove 110 is located on one side of the mounting groove 108 and communicates with the mounting groove 108. After the first mounting plate 201 on the suction cup 200 is installed in the mounting groove 108 and the second mounting plate 301 on the anti-slip pad 300 is installed in the mounting groove 108, the end surface of the first mounting plate 201 facing away from the bottom surface of the mounting groove 108 is substantially flush with the mounting surface 107, and the end surface of the second mounting plate 301 facing away from the bottom surface of the mounting groove 108 is substantially flush with the mounting surface 107. Thus, when it is necessary to disassemble, it is not very convenient to take out the first mounting plate 201 and the second mounting plate 301.

[0065] In this embodiment, an avoidance groove 110 is provided. When it is necessary to take out the first mounting plate 201 and the second mounting plate 301, tools such as a screwdriver can be passed through the avoidance groove 110, so that the first mounting plate 201 and the second mounting plate 301 can be easily pried out, and the disassembly is more convenient, time-saving and labor-saving.

[0066] Reference Figure 1 and Figure 4 As shown in the figure, in some embodiments of the present utility model, the mounting surface 107 is provided with a receiving groove 111. The mechanical finger assembly further includes a sensor 400, and the sensor 400 is installed in the receiving groove 111. The sensor 400 is used to detect whether the substrate 500 is in place. For example, the mounting surface 107 may further be provided with a wiring groove 112, and the sensor 400 is connected with a wire, and the wire is passed through the wiring groove 112.

[0067] In this embodiment, when the substrate 500 is adsorbed on the suction cup 200 or carried on the anti-slip pad 300, the sensor 400 senses and sends a signal to the controller, and the controller controls the alarm to alarm, so that the staff can know in time and it is not easy to have the problem of missing delivery, and the practicability is better. In addition, the sensor 400 is located in the receiving groove 111, so that the sensor 400 can be prevented from touching the substrate 500 and causing damage to the substrate 500.

[0068] It should be noted that the sensor 400 can be an infrared sensor, an ultrasonic sensor, a vision sensor or other suitable sensors 400, as long as it can detect whether the substrate 500 is in place.

[0069] The manipulator according to the second aspect embodiment of the present utility model includes the mechanical finger assembly of the first aspect embodiment.

[0070] The manipulator adopts the mechanical finger assembly of the first aspect embodiment of the present utility model. By switching the installation of the suction cup 200 and the anti-slip pad 300, it can not only transfer the substrate 500 in the atmospheric environment, but also transfer the substrate 500 in the vacuum environment, with more diverse functions and better practicability.

[0071] It should be noted that since the manipulator can adopt all the technical solutions of the mechanical finger assembly of the first aspect embodiment, it at least has all the beneficial effects brought by the technical solutions of the first aspect embodiment. These additional beneficial effects will not be elaborated here.

[0072] It can be understood that other components and operations of the manipulator according to the embodiments of the present utility model are known to those of ordinary skill in the art, and will not be described in detail here.

[0073] The vacuum coating equipment according to the third aspect embodiment of the present utility model includes the manipulator of the second aspect embodiment.

[0074] The vacuum coating equipment adopts the manipulator of the second aspect embodiment of the present invention. The manipulator adopts the mechanical finger assembly of the first aspect embodiment of the present invention. By switching the installation of the suction cup 200 and the anti-slip pad 300, it can not only transfer the substrate 500 in the atmospheric environment, but also transfer the substrate 500 in the vacuum environment, with more diverse functions and better practicability.

[0075] It should be noted that since the vacuum coating equipment can adopt all the technical solutions of the mechanical finger assembly of the first aspect embodiment, it at least has all the beneficial effects brought by the technical solutions of the first aspect embodiment. These additional beneficial effects will not be elaborated here.

[0076] It can be understood that the other constitutions and operations of the vacuum coating equipment according to the embodiments of the present invention are known to those of ordinary skill in the art, and will not be described in detail here.

[0077] The above has described the embodiments of the present invention in detail with reference to the drawings. However, the present invention is not limited to the above embodiments, and various changes can be made without departing from the gist of the present invention within the scope of knowledge possessed by those of ordinary skill in the art.

Claims

1. A mechanical finger assembly, characterized in that, Comprising: A finger body, provided with a plurality of mounting structures. The finger body is provided with an air flow channel which extends to the plurality of mounting structures, and the air flow channel is used for connecting a vacuum generator. A plurality of suction cups, which can be respectively mounted on the plurality of mounting structures and can be detached from the mounting structures. A plurality of anti-slip pads, which can be respectively mounted on the plurality of mounting structures and can be detached from the mounting structures. Wherein, when the suction cups are mounted on all the plurality of mounting structures, the suction cups are communicated with the air flow channel to adsorb a substrate; when the anti-slip pads are mounted on all the plurality of mounting structures, the plurality of anti-slip pads are used to cooperate to support the substrate.

2. The mechanical finger assembly according to claim 1, wherein The finger body comprises: At least two phalanges, arranged side by side. The air flow channel comprises at least two and is respectively arranged in at least two of the phalanges. The air flow channel extends along the length direction of the phalanges. The mounting structures comprise at least two groups and are respectively arranged in at least two of the phalanges. The mounting structures of the same group are arranged along the length direction of the phalanges. A connecting part, connected between two adjacent phalanges.

3. The mechanical finger assembly according to claim 2, characterized in that, On the opposite sides of the two outermost phalanges away from each other, first limiting parts are respectively provided, and the first limiting parts are used for limiting the sliding of the substrate along the arrangement direction of the phalanges.

4. The mechanical finger assembly according to claim 3, wherein, The phalange is provided with two second limiting parts arranged along the length direction of the phalange, and the second limiting parts are used for limiting the sliding of the substrate along the length direction of the phalange.

5. The mechanical finger assembly according to claim 4, wherein, The first limiting part extends along the length direction of the phalange, and the second limiting part extends along the arrangement direction of the phalanges.

6. The mechanical finger assembly according to any one of claims 1 to 5, characterized in that, The finger body forms a mounting surface. The mounting structure comprises a mounting groove arranged on the mounting surface. A communication hole is arranged between the mounting groove and the air flow channel. The suction cup is connected with a first mounting plate, and the anti-slip pad is connected with a second mounting plate. The first mounting plate and the second mounting plate are respectively used for being embedded into the mounting groove and being connected with the finger body through fasteners.

7. The mechanical finger assembly according to claim 6, wherein The mounting structure further comprises an avoidance groove arranged on the mounting surface. The avoidance groove is located on one side of the mounting groove and communicates with the mounting groove.

8. The mechanical finger assembly according to claim 6, characterized in that, The mounting surface is provided with a receiving groove. The mechanical finger assembly further comprises: A sensor, mounted in the receiving groove, and the sensor is used for detecting whether the substrate is in place.

9. A manipulator, characterized in that, Comprising the mechanical finger assembly according to any one of claims 1 to 8.

10. A vacuum coating device, characterized in that, Comprising the robot arm according to claim 9.

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