Pole piece evaporation equipment

Abstract

The utility model relates to the technical field of battery processing, in particular to pole piece evaporation equipment which comprises a box body and an evaporation assembly, a vacuum chamber is formed in the box body, the evaporation assembly is arranged in the vacuum chamber, the evaporation assembly comprises an evaporation disc, a film thickness detection device and an adjusting mechanism, an evaporant is arranged in the evaporation disc, and the film thickness detection device is arranged on the evaporation disc. The evaporation disc is used for evaporating evaporant on the pole piece; the plurality of film thickness detection devices are respectively used for detecting the coating thicknesses of different positions of the pole piece; the adjusting mechanism is arranged on the inner wall of the box body, connected with the evaporation disc and used for adjusting the relative position of the evaporation disc and the pole piece. According to the application, the relative position of the evaporation disc and the pole piece can be adjusted based on the detection result of the film thickness detection device, so that the evaporation disc inclines towards the position with a thin coating film, the coating film thickness on the surface of the pole piece can be kept uniform and consistent, and the quality of the pole piece is improved; and vacuum evaporation operation can be sequentially and continuously carried out on the front face and the back face of the pole piece.

Description

Technical Field

[0001] This application relates to the technical field of battery processing, and particularly to a pole piece evaporation coating device. Background Art

[0002] Vacuum evaporation coating, abbreviated as evaporation coating, refers to a process method in which, under vacuum conditions, a coating material (or film material) is evaporated by a certain heating evaporation method and vaporized, and the particles fly to the surface of the substrate and condense into a film. Evaporation coating is a gas-phase deposition technology that has been used earlier and has a wide range of applications. It has the advantages of simple film-forming method, high purity and density of the thin film, and unique film structure and properties.

[0003] Evaporation coating technology is widely used in solar energy technology. Its application in lithium batteries is relatively rare. The main reason is that the batch production equipment for pole piece evaporation coating is not mature, and there are problems such as uneven evaporation coating and inaccurate thickness control during the evaporation coating process. Summary of the Utility Model

[0004] This application provides a pole piece evaporation coating device to solve the problem of uneven coating thickness in pole piece evaporation coating in the prior art.

[0005] This application provides a pole piece evaporation coating device, including:

[0006] A box body, in which a vacuum chamber is formed;

[0007] An evaporation coating assembly, arranged in the vacuum chamber. The evaporation coating assembly includes:

[0008] An evaporation pan, in which an evaporation material is arranged. The evaporation pan is used to evaporate the evaporation material onto the pole piece;

[0009] A plurality of film thickness detection devices, respectively used to detect the coating thickness at different positions of the pole piece;

[0010] An adjustment mechanism, arranged on the inner wall of the box body and connected to the evaporation pan, used to adjust the relative position between the evaporation pan and the pole piece.

[0011] In a possible design, the adjustment mechanism includes:

[0012] A ball seat, arranged on the inner wall of the box body;

[0013] A ball head, arranged on the evaporation pan, and the ball head is hinged to the ball seat.

[0014] In a possible design, the adjustment mechanism further includes:

[0015] A plurality of drivers, respectively connected to the positions near the edge of the evaporation pan, used to cause relative sliding between the outer wall of the ball head and the inner wall of the ball seat.

[0016] In a possible design, the film thickness detection device is a film thickness tester.

[0017] In a possible design, a plurality of evaporating dishes are arranged at intervals on the evaporation tray. The evaporating dishes are detachably connected to the evaporation tray, and the evaporating dishes are used to hold the evaporation material.

[0018] In a possible design, the evaporation coating assembly further includes a baffle plate, which is arranged between the pole piece and the evaporation tray and is used to shield the areas of the pole piece near both side edges.

[0019] In a possible design, the evaporation coating assembly further includes a displacement sensor, which is arranged on the baffle plate and is used to detect the distance between the edge of the pole piece and the edge of the baffle plate.

[0020] In a possible design, the evaporation coating assembly includes two groups. One group of the evaporation coating assembly is used to coat one side of the pole piece, and the other group of the evaporation coating assembly is used to coat the other side of the pole piece.

[0021] In a possible design, the pole piece evaporation coating device further includes:

[0022] A unwinding roller, which is arranged in the vacuum chamber and is used to unwind the pole piece;

[0023] A winding roller, which is arranged in the vacuum chamber and is used to wind the pole piece;

[0024] A guiding roller, which is arranged in the vacuum chamber and is located between the unwinding roller and the winding roller and is used to change the transmission direction of the pole piece;

[0025] One group of the evaporation coating assembly is arranged between the unwinding roller and the guiding roller, and the other group of the evaporation coating assembly is arranged between the guiding roller and the winding roller.

[0026] In a possible design, the pole piece evaporation coating device further includes a cooling roller, which is arranged on the downstream side of the evaporation coating assembly.

[0027] The beneficial effects of the present application are as follows:

[0028] For the pole piece evaporation coating device of the present application, by arranging a plurality of film thickness detection devices, the plurality of film thickness detection devices are respectively used to detect the coating thickness at different positions of the pole piece. The adjusting mechanism adjusts the relative position between the evaporation tray and the pole piece according to the detection results of the film thickness detection devices, so that the evaporation tray tilts towards the position with a thinner coating, thereby increasing the film thickness at the position with a thinner coating and simultaneously reducing the film thickness at the position with a thicker coating. This is beneficial to keeping the coating thickness on the surface of the pole piece uniform, improving the quality of the pole piece, and can also realize the vacuum evaporation coating operations on the front and back sides of the pole piece in sequence and continuously. Description of the Drawings

[0029] To more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0030] Figure 1 Schematic structural diagram of the pole piece evaporation coating equipment provided by the embodiment of the present application;

[0031] Figure 2 Schematic structural diagram of the evaporation pan of the pole piece evaporation coating equipment provided by the embodiment of the present application;

[0032] Figure 3 is Figure 1 Enlarged view of the structure at A in

[0033] Reference numerals:

[0034] 100, box body; 110, vacuum chamber; 200, evaporation coating assembly; 210, evaporation pan; 211, evaporation dish; 220, film thickness detection device; 230, adjustment mechanism; 231, ball seat; 232, ball head; 233, driver; 240, baffle; 250, displacement sensor; 300, unwinding roller; 400, winding roller; 500, guiding roller; 600, cooling roller. Specific embodiments

[0035] The following will clearly and completely describe the technical solutions of the present application in combination with the embodiments. Obviously, the described embodiments are some embodiments of the present application, rather than all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0036] The following combines Figures 1 - 3 , and describes the pole piece evaporation coating equipment provided in the embodiment of the present application.

[0037] Referring to Figure 1 as shown, the pole piece evaporation coating equipment provided by the embodiment of the present application includes a box body 100 and an evaporation coating assembly 200. A vacuum chamber 110 is formed in the box body 100, and the vacuum chamber 110 can provide 10 -3 -10 -5Under a vacuum degree of Pa, the evaporation assembly 200 is arranged in the vacuum chamber 110. Among them, the evaporation assembly 200 includes an evaporation pan 210, a film thickness detection device 220, and an adjustment mechanism 230. An evaporation material is arranged in the evaporation pan 210, and the evaporation pan 210 is used to evaporate the evaporation material onto the electrode plate. The evaporation material is an evaporation raw material such as a metal or an oxide; there are multiple film thickness detection devices 220, and the multiple film thickness detection devices 220 are respectively used to detect the coating thickness at different positions of the electrode plate; the adjustment mechanism 230 is arranged on the inner wall of the box body 100 and is connected to the evaporation pan 210 for adjusting the relative position between the evaporation pan 210 and the electrode plate. Specifically, the evaporation pan 210 is arranged below the electrode plate, and the evaporation pan 210 vaporizes the evaporation material (coating material) by heating. The particles of the evaporation material fly to the surface of the electrode plate and condense into a film, thereby completing the coating of the surface of the electrode plate. In some specific embodiments, the film thickness detection device 220 is a film thickness tester. The film thickness tester monitors the film thickness by detecting parameters that change with thickness (such as mass, resistance, capacitance, eddy current, reflectivity, transmittance, etc.). Generally, the thickness range of the coating on the surface of the electrode plate is 3 - 1000 nm. In some specific embodiments, the film thickness tester monitors the film layer thickness by the quartz crystal oscillation method. Utilizing the piezoelectric effect of the quartz crystal, applying an electric field to the quartz crystal can cause the crystal to oscillate. When the mass added to the quartz crystal increases, the oscillation frequency of the quartz crystal decreases. The thickness of the coating is indirectly measured by measuring the change in the oscillation frequency of the quartz crystal. Under the same coating conditions, the thicker the film, the greater the film deposition rate at this place. The adjustment structure adjusts the relative position between the evaporation pan 210 and the electrode plate according to the measurement results of the film thickness testers at different positions. For example, by adjusting the angle between the evaporation pan 210 and the electrode plate, the evaporation pan 210 is inclined towards the position with a thinner coating. In some specific embodiments, the multiple film thickness detection devices 220 are respectively arranged at intervals above the evaporation pan 210 to detect the film thickness at different positions of the electrode plate. For example, there are four film thickness detection devices 220, and the four film thickness detection devices 220 are respectively located at the four corners of the evaporation pan 210 corresponding to the periphery of the electrode plate. In this way, the normal coating of the electrode plate will not be affected when detecting the film thickness. In some specific embodiments, the adjustment mechanism 230 can be a precision displacement slide mechanism, and the position of the evaporation pan 210 is finely adjusted through the precision displacement slide mechanism.

[0038] Using the technical solution of the above embodiment, by setting multiple film thickness detection devices 220, the multiple film thickness detection devices 220 are respectively used to detect the coating thickness at different positions of the electrode plate. The adjustment mechanism 230 adjusts the relative position between the evaporation pan 210 and the electrode plate according to the detection results of the film thickness detection device 220, making the evaporation pan 210 inclined towards the position with a thinner coating. In this way, the film thickness at the position with a thinner coating is increased, and at the same time, the film thickness at the position with a thicker coating is reduced, which is beneficial to keeping the coating thickness on the surface of the electrode plate uniform and improving the quality of the electrode plate.

[0039] Refer toFigure 1 , Figure 3 As shown in Figure 3 , in some embodiments provided by the present application, the adjusting mechanism 230 includes a ball seat 231 and a ball head 232. The ball seat 231 is disposed on the inner wall of the box body 100; the ball head 232 is disposed on the evaporation disk 210, and the ball head 232 is hinged to the ball seat 231. By providing the mutually hinged ball seat 231 and ball head 232, the evaporation disk 210 can rotate within the ball seat 231, thereby adjusting the inclination angle of the evaporation disk 210, causing the evaporation disk 210 to tilt towards the position with a thinner coating, which is beneficial for more particles of the evaporation material (coating material) to fly to the position with a thinner coating, so as to keep the film thickness on the surface of the electrode sheet uniform. In some specific embodiments, the adjusting mechanism 230 further includes a driver 233. The driver 233 can be a cylinder or a hydraulic cylinder, etc. There are multiple drivers 233, and the multiple drivers 233 are respectively connected to the positions near the edge of the evaporation disk 210, for causing relative sliding between the outer wall of the ball head 232 and the inner wall of the ball seat 231. For example, there are four drivers 233, and the output ends of the four drivers 233 are connected to the four corners of the evaporation disk 210. By controlling the telescoping of the four drivers 233, the inclination angle of the evaporation disk 210 is adjusted, causing the evaporation disk 210 to tilt towards the position with a thinner coating, so as to keep the film thickness on the surface of the electrode sheet uniform.

[0040] Referring to Figure 2 As shown in Figure 2 , in some embodiments of the present application, a plurality of evaporation dishes 211 are arranged at intervals on the evaporation disk 210. The evaporation dishes 211 are detachably connected to the evaporation disk 210, and the evaporation dishes 211 are used to contain the evaporation material. Specifically, the evaporation dishes 211 are made of materials with high hardness and high melting point, such as metals like molybdenum, tungsten, tantalum, etc. In some specific embodiments, the evaporation disk 210 is provided with grooves, and the evaporation dishes 211 are clamped in the grooves. In this way, the evaporation dishes 211 are detachably connected to the evaporation disk 210, and the evaporation amount can be controlled by adding or removing the evaporation dishes 211.

[0041] Referring to Figure 1 As shown in Figure 1 , in some embodiments of the present application, the evaporation coating assembly 200 further includes a baffle 240. The baffle 240 is disposed between the electrode sheet and the evaporation disk 210, for shielding the areas near the two side edges of the electrode sheet. Specifically, the baffle 240 is composed of two symmetrically arranged parts, namely a left baffle 240 and a right baffle 240. The left baffle 240 is used to shield the area near the left side of the electrode sheet, and the right baffle 240 is used to shield the area near the right side of the electrode sheet. In this way, it can be avoided that the tab positions on the left and right sides of the electrode sheet are coated, and the tab positions on the electrode sheet are prevented from being contaminated by the evaporation coating material.

[0042] Referring to Figure 1As shown, in some embodiments of the present application, the evaporation coating assembly 200 further includes a displacement sensor 250 disposed on the baffle 240. The displacement sensor 250 is used to detect the distance between the edge of the electrode sheet and the edge of the baffle 240. Specifically, at least one displacement sensor 250 is respectively disposed on the left baffle 240 and the right baffle 240. The displacement sensor 250 on the left baffle 240 is used to measure the distance between the left edge of the electrode sheet and the outer edge of the left baffle 240, and the displacement sensor 250 on the right baffle 240 is used to measure the distance between the right edge of the electrode sheet and the outer edge of the right baffle 240. When the two are not equal, it indicates that the electrode sheet is offset, and the roller shaft of the electrode sheet conveying roller can be adjusted to ensure that the electrode sheet is always centered during conveying.

[0043] Referring to Figure 1 As shown, in some embodiments of the present application, there are two sets of evaporation coating assemblies 200. One set of evaporation coating assemblies 200 is used to coat one side of the electrode sheet, and the other set of evaporation coating assemblies 200 is used to coat the other side of the electrode sheet. In this way, double-sided coating of the electrode sheet can be achieved.

[0044] Referring to Figure 1As shown, in some embodiments of the present application, the pole piece evaporation coating device further includes an unwinding roller 300, a winding roller 400, and a guiding roller 500. The unwinding roller 300 is arranged in the vacuum chamber 110 for unwinding the pole piece; the winding roller 400 is arranged in the vacuum chamber 110 for winding the pole piece; the guiding roller 500 is arranged in the vacuum chamber 110 between the unwinding roller 300 and the winding roller 400 for changing the transmission direction of the pole piece; one set of evaporation coating components 200 is arranged between the unwinding roller 300 and the guiding roller 500, and the other set of evaporation coating components 200 is arranged between the guiding roller 500 and the winding roller 400. By adjusting the rotational speeds of the unwinding roller 300, the winding roller 400, and the guiding roller 500, the contact time between the pole piece and the evaporation coating material vapor can be controlled, thereby adjusting the coating thickness. In some specific embodiments, the vacuum chamber 110 is divided into upper and lower chambers. One set of evaporation coating components 200 is arranged in the upper chamber, and the other set of evaporation coating components 200 is arranged in the lower chamber. The pole piece wound around the unwinding shaft first passes through the upper chamber, and at this time, the front side of the pole piece can be coated. Then, the pole piece with one side coated bypasses the guiding roller 500, and the transmission direction of the pole piece makes a 180-degree turn and enters the lower chamber. At this time, the back side of the pole piece can be coated. The pole piece with both sides coated then winds back to the winding shaft. In this way, the vacuum evaporation coating operation can be carried out on the front and back sides of the pole piece successively and continuously. In some of these specific embodiments, the pole piece evaporation coating device further includes a cooling roller 600, and the cooling roller 600 is arranged on the downstream side of the evaporation coating component 200. Since the temperature of the pole piece after coating is relatively high, the cooling roller 600 is used to cool the coated pole piece. Specifically, two cooling rollers 600 are respectively arranged on the downstream side of each set of evaporation coating components 200. The pole piece winds around the surface of the previous cooling roller 600 and then winds reversely around the surface of the next cooling roller 600, so that both sides of the pole piece can be cooled. In some of these specific embodiments, the number of guiding rollers 500 can be one, two, three, etc. When only one-sided coating of the pole piece is required, one of the guiding rollers 500 can be used as the winding roller 400.

[0045] Working process of the pole piece evaporation coating device of the present application:

[0046] The pole piece on the pole roll is unwound into the vacuum chamber 110 through the unwinding shaft. The pole piece unwound from the unwinding shaft first passes through the upper chamber to coat the front side of the pole piece. After the pole piece with the front side coated successively bypasses the cooling roller 600 and the guiding roller 500, the transmission direction of the pole piece makes a 180-degree turn and enters the lower chamber, where the back side of the pole piece is coated. The pole piece with the front and back sides coated finally winds back to the winding shaft;

[0047] During the process of coating the front and back sides of the electrode plate respectively, the film thickness detection device 220 detects the film thickness at different positions on the electrode plate. According to the detection result, the driver 233 expands and contracts to make the evaporation dish 210 rotate within the ball seat 231, thereby adjusting the tilt angle of the evaporation dish 210, making the evaporation dish 210 tilt towards the position with a thinner coating, so as to keep the film thickness on the surface of the electrode plate uniform.

[0048] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0049] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0050] In the present application, unless otherwise clearly specified and limited, the terms "mounted", "connected", "coupled", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection, or communicable with each other; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0051] In this application, the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0052] Although the embodiments of this application have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting this application. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of this application.

Claims

1. A pole piece evaporation coating device, characterized in that, Comprising: A box body, within which a vacuum chamber is formed; An evaporation coating assembly, disposed within the vacuum chamber, the evaporation coating assembly comprising: An evaporation pan, within which evaporation materials are disposed, the evaporation pan being used for evaporating the evaporation materials onto the electrode sheet; A plurality of film thickness detection devices, respectively used for detecting the coating thickness at different positions of the electrode sheet; An adjustment mechanism, disposed on the inner wall of the box body, connected to the evaporation pan, and used for adjusting the relative position between the evaporation pan and the electrode sheet; the adjustment mechanism comprises: A ball seat, disposed on the inner wall of the box body; A ball head, disposed on the evaporation pan, the ball head being hinged to the ball seat.

2. The pole piece evaporation coating equipment according to claim 1, characterized in that, The adjustment mechanism further comprises: A plurality of drivers, respectively connected to positions near the edge of the evaporation pan, and used for causing relative sliding between the outer wall of the ball head and the inner wall of the ball seat.

3. The pole piece evaporation coating equipment according to claim 1 or 2, characterized in that: The film thickness detection device is a film thickness tester.

4. The pole piece evaporation coating equipment according to claim 1 or 2, characterized in that: A plurality of evaporation dishes are spaced apart on the evaporation pan, the evaporation dishes being detachably connected to the evaporation pan, and the evaporation dishes being used for containing the evaporation materials.

5. The pole piece evaporation coating equipment according to claim 1 or 2, characterized in that: The evaporation coating assembly further comprises a baffle, the baffle being disposed between the electrode sheet and the evaporation pan, and used for shielding the areas near the two side edges of the electrode sheet.

6. The electrode evaporation coating device according to claim 5, wherein: The evaporation coating assembly further comprises a displacement sensor, the displacement sensor being disposed on the baffle, and the displacement sensor being used for detecting the distance between the edge of the electrode sheet and the edge of the baffle.

7. The pole piece evaporation coating equipment according to claim 1 or 2, characterized in that: The evaporation coating assembly comprises two groups, wherein one group of the evaporation coating assembly is used for coating one side of the electrode sheet, and the other group of the evaporation coating assembly is used for coating the other side of the electrode sheet.

8. The pole piece evaporation coating equipment according to claim 7, characterized in that, Further comprising: An unwinding roller, disposed within the vacuum chamber, and used for unwinding the electrode sheet; A winding roller, disposed within the vacuum chamber, and used for winding the electrode sheet; A guiding roller, disposed within the vacuum chamber, located between the unwinding roller and the winding roller, and used for changing the transmission direction of the electrode sheet; One group of the evaporation coating assembly is disposed between the unwinding roller and the guiding roller, and the other group of the evaporation coating assembly is disposed between the guiding roller and the winding roller.

9. The polar plate evaporation coating equipment according to claim 8, characterized in that: Further comprising a cooling roller, the cooling roller being disposed on the downstream side of the evaporation coating assembly.

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