Magnetic steering device mounting mechanism for magnetic control vacuum coating equipment

Abstract

The utility model discloses a magnetic steering device mounting mechanism for magnetic control vacuum coating equipment, which comprises a base, a top cover arranged at the top of the base, a mounting groove formed in the top of the base, first auxiliary grooves formed in two sides of the base, and second auxiliary grooves formed in two sides of the top cover, a first threaded groove is formed in the surface of the second auxiliary groove; a connecting block is arranged outside the top cover, a first connecting bolt is arranged on the surface of the connecting block, a second connecting bolt is fixedly connected to the top of the connecting block, and a third connecting bolt is fixedly connected to the bottom of the connecting block; the base, the top cover, the connecting block, the first connecting bolt, the second connecting bolt and the third connecting bolt are matched for use, so that the device can be fixedly mounted in different directions and then flexibly changed, multi-direction mounting work is carried out, the purchase quantity of mounting mechanisms in other directions can be reduced, and the mounting efficiency is improved. And the flexibility and the practicability of the device are improved on the whole.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetic guide installation, in particular to an installation mechanism of a magnetic guide device for a magnetron vacuum coating equipment. Background Technique

[0002] Vacuum coating equipment mainly refers to a type of coating that needs to be carried out under a relatively high vacuum degree, including many specific types, such as vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD pulsed laser deposition, etc. The main idea is divided into two types: evaporation and sputtering. Magnetron vacuum coating equipment needs to be used in combination with magnetic guides, and when the magnetic guides are installed inward, an installation structure is required to assist in connecting them to the magnetron vacuum coating equipment.

[0003] Most of the current installation mechanisms can only be fixedly installed in a fixed direction during installation. When installing in many different directions, different installation mechanisms need to be equipped, which will increase the purchase demand and thus increase the economic pressure. Therefore, some current equipment still has certain deficiencies that need to be further improved. Content of the Utility Model

[0004] The purpose of the utility model is to provide an installation mechanism of a magnetic guide device for a magnetron vacuum coating equipment, so as to solve the problem of relatively single installation direction and thus causing economic pressure for purchase mentioned in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: an installation mechanism of a magnetic guide device for a magnetron vacuum coating equipment, including a base, a top cover is arranged on the top of the base, an installation groove is opened on the top of the base, first auxiliary grooves are opened on both sides of the base, second auxiliary grooves are opened on both sides of the top cover, and first threaded grooves are opened on the surface of the second auxiliary grooves;

[0006] A connecting block, a connecting block is arranged outside the top cover, a first connecting bolt is opened on the surface of the connecting block, a second connecting bolt is fixedly connected to the top of the connecting block, and a third connecting bolt is fixedly connected to the bottom of the connecting block.

[0007] As an optional technical solution, a first connecting groove is opened on the top of the base, and a second connecting groove is opened on the bottom of the top cover.

[0008] As an optional technical solution, a first bolt is threadedly connected inside the second connecting groove, and the first bolt can penetrate into the inside of the first connecting groove.

[0009] As an optional technical solution, two support columns are fixedly connected to the bottom of the top cover, and the support columns are both located inside the installation groove.

[0010] As an alternative technical solution, a plurality of uniformly distributed limiting springs are fixedly connected to the bottom of the support column, and a spring plate is fixedly connected to the bottom of the limiting spring.

[0011] As an alternative technical solution, a first protective layer is fixedly connected to the inside of the installation groove, and the first protective layer is made of rubber.

[0012] As an alternative technical solution, a second protective layer is fixedly connected to the bottom of the top cover, and the second protective layer is located between the support columns.

[0013] As an alternative technical solution, a third protective layer is fixedly connected to the surface of the support column, and the third protective layers are installed facing each other.

[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0015] 1. The combination use of the base, top cover, first auxiliary groove, second auxiliary groove, first threaded groove, connecting block, first connecting bolt, second connecting bolt and third connecting bolt provided by the present utility model enables the device to be fixedly installed in different directions. The device can be flexibly changed according to the requirements of the installation position, so as to carry out installation work in multiple directions, thereby reducing the purchase quantity of installation mechanisms in other directions, reducing economic pressure, and overall increasing the flexibility and practicability of the device.

[0016] 2. The combination use of the base, top cover, installation groove, support column, limiting spring and spring plate provided by the present utility model enables the device to flexibly face magnetic guiding devices of different sizes. Springs can be used to squeeze magnetic guidings of different sizes, so as to achieve the purpose of limiting and fixing magnetic guiding devices of different sizes, thereby increasing the flexibility of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall top connection structure of the present utility model;

[0018] Figure 2 It is a schematic diagram of the top cover structure of the present utility model;

[0019] Figure 3 It is a schematic diagram of the installation groove structure of the present utility model;

[0020] Figure 4 It is a schematic diagram of the connecting block structure of the present utility model;

[0021] Figure 5 It is a schematic diagram of the overall side connection structure of the present utility model.

[0022] In the figure: 1, base; 2, top cover; 3, installation groove; 4, first auxiliary groove; 5, second auxiliary groove; 6, first threaded groove; 7, connecting block; 8, first connecting bolt; 9, second connecting bolt; 10, third connecting bolt; 11, first connecting groove; 12, second connecting groove; 13, first bolt; 14, support column; 15, limiting spring; 16, spring plate; 17, first protective layer; 18, second protective layer; 19, third protective layer. Detailed implementation method

[0023] Example 1:

[0024] Please refer to Figure 1 、 Figure 4 and Figure 5 For a magnetic guiding device installation mechanism used in a magnetron sputtering coating equipment, it includes a base 1. The base 1 is used to support the device to work. A top cover 2 is arranged on the top of the base 1. The top cover 2 is used in combination with the base 1. An installation groove 3 is opened on the top of the base 1. The installation groove 3 facilitates the installation work inside. First auxiliary grooves 4 are opened on both sides of the base 1. The first auxiliary grooves 4 facilitate the installation and use of the connecting block 7. Second auxiliary grooves 5 are opened on both sides of the top cover 2. The second auxiliary grooves 5 are used in combination with the first threaded groove 6 and also facilitate the installation and use of the connecting block 7. A first threaded groove 6 is opened on the surface of the second auxiliary groove 5. The first threaded groove 6 facilitates the threaded connection of the first connecting bolt 8, the second connecting bolt 9, and the third connecting bolt 10 inside, so as to connect the connecting block 7 with the base 1 and the top cover 2.

[0025] Connecting block 7, a connecting block 7 is arranged outside the top cover 2. The connecting block 7 facilitates the connection of the installation structure with the required installation position. A first connecting bolt 8 is opened on the surface of the connecting block 7. A second connecting bolt 9 is fixedly connected to the top of the connecting block 7. A third connecting bolt 10 is fixedly connected to the bottom of the connecting block 7. The first connecting bolt 8, the second connecting bolt 9, and the third connecting bolt 10 have the same structure and can be threadedly connected with the first threaded groove 6, and can be installed in different orientations according to different threaded connection objects.

[0026] As an optional technical solution, a first connecting groove 11 is opened on the top of the base 1. The first connecting groove 11 facilitates the installation of the first bolt 13. A second connecting groove 12 is opened on the bottom of the top cover 2. The second connecting groove 12 is the same as the first connecting groove 11, so as to enable the first bolt 13 to connect the base 1 and the top cover 2.

[0027] As an optional technical solution, a first bolt 13 is threadedly connected inside the second connecting groove 12, and the first bolt 13 can penetrate into the inside of the first connecting groove 11. The first bolt 13 is used to connect the base 1 and the top cover 2.

[0028] As an alternative technical solution, two support columns 14 are fixedly connected to the bottom of the top cover 2, and the support columns 14 are both located inside the installation groove 3. The support columns 14 are convenient to be used in combination with the installation groove 3, so that the magnetic guide can be installed inside.

[0029] As an alternative technical solution, a number of uniformly distributed limiting springs 15 are fixedly connected to the bottom of the support column 14. As an existing technology, the limiting springs 15 can squeeze and fix magnetic guides of different sizes. A spring plate 16 is fixedly connected to the bottom of the limiting spring 15, and the spring plate 16 can assist the limiting spring 15 in the limiting and squeezing work.

[0030] Embodiment 2:

[0031] Please refer to Figure 1 、 Figure 2 and Figure 3 , a first protective layer 17 is fixedly connected inside the installation groove 3, and the first protective layer 17 is made of rubber. The first protective layer 17 can protect the surface of the magnetic guide device during internal installation and reduce wear.

[0032] As an alternative technical solution, a second protective layer 18 is fixedly connected to the bottom of the top cover 2, and the second protective layer 18 is located between the support columns 14. The second protective layer 18 has the same function as the first protective layer 17.

[0033] As an alternative technical solution, a third protective layer 19 is fixedly connected to the surface of the support column 14, and the third protective layers 19 are installed facing each other. The third protective layer 19 has the same function as the second protective layer 18 and the first protective layer 17, and is used to protect the surface of the magnetic guide.

[0034] Working principle: When installing the magnetic guiding device for a magnetron sputtering vacuum coating equipment using this device, the staff adjusts the connecting block 7 according to the required installation position. When it needs to be fixed to the top, keep the connecting block 7 in an upright state, then thread the first connecting bolt 8 into the inner part of the first threaded groove 6, and then rely on the second connecting bolt 9 for top connection installation. When side wall installation is required, keep the connecting block 7 in a horizontal manner, then connect the third connecting bolt 10 to the inner part of the first threaded groove 6, and then rely on the first connecting bolt 8 to install and fix the side, so as to achieve installation work in multiple directions. At the same time, before installing the connecting block 7, the staff needs to place the magnetic guiding device into the installation groove 3, and then attach the top cover 2, so that the installation groove 3 can be paired with the support column 14 to place the magnetic guiding device. Then, according to the size of the magnetic guiding, tighten the first bolt 13, so that the first bolt 13 can drive the top cover 2, the support column 14, the limiting spring 15 and the spring plate 16 to squeeze downward, thereby limiting and fixing magnetic guidings of different sizes. At the same time, the first protective layer 17, the second protective layer 18 and the third protective layer 19 can perform a certain protection work on the surface of the magnetic guiding device.

[0035] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present utility model. Any reference signs in the claims should not be regarded as limiting the claimed rights.

Claims

1. A magnetic guiding device installation mechanism for a magnetron sputtering coating equipment, comprising a base (1), characterized in that: A top cover (2) is provided on the top of the base (1). An installation groove (3) is opened on the top of the base (1). First auxiliary grooves (4) are opened on both sides of the base (1). Second auxiliary grooves (5) are opened on both sides of the top cover (2). First threaded grooves (6) are opened on the surfaces of the second auxiliary grooves (5). A connecting block (7), the connecting block (7) is provided on the outside of the top cover (2). A first connecting bolt (8) is opened on the surface of the connecting block (7). A second connecting bolt (9) is fixedly connected to the top of the connecting block (7). A third connecting bolt (10) is fixedly connected to the bottom of the connecting block (7).

2. The magnetic guide device mounting mechanism for a magnetron sputtering coating equipment according to claim 1, wherein: A first connecting groove (11) is opened on the top of the base (1). A second connecting groove (12) is opened on the bottom of the top cover (2).

3. The magnetic guiding device mounting mechanism for a magnetron vacuum coating equipment according to claim 2, characterized in that: A first bolt (13) is threadedly connected inside the second connecting groove (12), and the first bolt (13) can penetrate into the inside of the first connecting groove (11).

4. The magnetic guide device mounting mechanism for a magnetron vacuum coating equipment according to claim 1, characterized in that: Two support columns (14) are fixedly connected to the bottom of the top cover (2), and the support columns (14) are both located inside the installation groove (3).

5. The mounting mechanism of a magnetic guiding device for a magnetron vacuum coating equipment according to claim 4, characterized in that: A number of uniformly distributed limiting springs (15) are fixedly connected to the bottom of the support column (14), and the bottom of the limiting spring (15) is fixedly connected to a spring plate (16).

6. The magnetic guiding device mounting mechanism for a magnetron vacuum coating equipment according to claim 1, characterized in that: A first protective layer (17) is fixedly connected inside the installation groove (3), and the first protective layer (17) is made of rubber material.

7. The magnetic guide device mounting mechanism for a magnetron vacuum coating equipment according to claim 1, characterized in that: A second protective layer (18) is fixedly connected to the bottom of the top cover (2), and the second protective layer (18) is located between the support columns (14).

8. The mounting mechanism of the magnetic guiding device for a magnetron vacuum coating equipment according to claim 4, characterized in that: A third protective layer (19) is fixedly connected to the surface of the support column (14), and the third protective layer (19) is installed facing each other.

Images