Double-groove graphite boat for germanium dioxide reduction and ingot casting
By designing a double-trough graphite boat and integrating two trough bodies on one graphite boat body, the problems of small capacity and high cost of single-trough graphite boat are solved, the production efficiency is improved and the thermal balance is maintained, ensuring the smooth progress of the reduction and smelting process and product quality.
Patent Information
- Application Number
- CN202422385664.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-29
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-29
AI Technical Summary
The existing single-trough graphite boat has small capacity, low efficiency and high cost, which cannot meet the needs of existing semiconductor production.
A double-trough graphite boat is designed. By setting up a partition structure inside the graphite boat body, the two groove bodies are integrated on one boat body, achieving a compact double-trough design, increasing the loading volume and maintaining thermal balance.
Improve production efficiency, reduce usage costs, and ensure the smooth progress of the reduction and smelting process and product quality through thermal balance design.
Smart Images
Figure CN223134636U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and particularly to a double-groove graphite boat for reducing germanium dioxide and ingot casting. Background Art
[0002] In semiconductor manufacturing, high-purity germanium single crystal material is a key material for manufacturing high-quality devices, and the reduction of germanium dioxide is an important step in the production and preparation of germanium single crystal materials. Currently, the container used to hold germanium dioxide during the reduction process is mainly a single-groove graphite boat. This graphite boat is heat-resistant and has a stable structure during the production process. However, in terms of structural design, the graphite boat has a small volume and a small loading capacity, resulting in low efficiency and high costs, and it can no longer well adapt to the existing production level. Therefore, a new solution is continuously proposed to solve the above problems. Summary of the Utility Model
[0003] In view of this, the purpose of this application is to provide a double-groove graphite boat for reducing germanium dioxide and ingot casting, so as to solve the technical problems of small capacity, low efficiency, and high cost of the existing single-groove graphite boat.
[0004] To achieve the above technical purpose, this application provides a double-groove graphite boat for reducing germanium dioxide and ingot casting, including a graphite boat body;
[0005] An accommodation cavity is provided inside the graphite boat body;
[0006] An opening communicating with the accommodation cavity is provided at the top of the graphite boat body;
[0007] A partition structure is arranged at the bottom of the accommodation cavity along the length direction of the graphite boat body for partitioning two groove bodies in the width direction of the graphite boat body;
[0008] The height of the partition structure is less than the height of the accommodation cavity.
[0009] Further, the top of the partition structure extends to the central position in the height direction of the graphite boat body.
[0010] Further, the cross-section in the width direction of the groove body is trapezoidal in reverse.
[0011] Further, the cross-section in the length direction of the groove body is trapezoidal in reverse.
[0012] Further, chamfered corners are provided at the corner positions in the groove body.
[0013] Further, inclined surface diversion steps corresponding to the groove bodies are respectively provided at the positions above the groove bodies on both side walls of the accommodation cavity.
[0014] Further, rounded corners are provided at the corner positions of the diversion steps.
[0015] Further, the top of the partition structure is a conical top structure.
[0016] Further, the internal dimensions of the two troughs are the same and they are symmetrically arranged with respect to the partition structure.
[0017] Further, the graphite boat body is made of high-purity graphite material.
[0018] As can be seen from the above technical solutions, the double-trough graphite boat designed in this application for reducing germanium dioxide and ingot casting has the following beneficial effects:
[0019] 1. Integrating the two troughs for reduction and ingot casting on a graphite boat body, realizing a double-trough integrated design, with a compact structure, effectively improving the loading capacity of the graphite boat body, thereby improving production efficiency and reducing usage costs.
[0020] 2. Creating a certain distance between the top of the partition structure and the top of the graphite boat body, and this distance space helps to maintain the thermal balance between the two ingot casting troughs during the reduction and melting processes. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0022] Figure 1 It is a cross-sectional view in the width direction of a double-trough graphite boat for reducing germanium dioxide and ingot casting provided in the present application;
[0023] Figure 2 It is a cross-sectional view in the length direction of a double-trough graphite boat for reducing germanium dioxide and ingot casting provided in the present application;
[0024] In the figure: 1. Graphite boat body; 11. Cavity; 12. Inclined diversion step; 2. Partition structure; 3. Trough. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0025] The technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the embodiments of the present application.
[0026] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.
[0027] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.
[0028] The embodiments of the present application disclose a double-groove graphite boat for germanium dioxide reduction and ingot casting.
[0029] Please refer to Figure 1 , an embodiment of a double-groove graphite boat for germanium dioxide reduction and ingot casting provided in the embodiments of the present application includes:
[0030] The graphite boat body 1 has a cavity 11 inside, and an opening communicating with the cavity 11 is provided at the top of the graphite boat body 1. Its specific structure is the existing graphite boat structure. For example, the two side surfaces in the length direction are vertical surfaces, and the two side surfaces in the width direction are vertical surfaces + arc surfaces connecting to the bottom surface. The whole is similar to a small boat, and no specific description is made here.
[0031] At the bottom of the cavity 11, a partition structure 2 is arranged along the length direction of the graphite boat body 1, which is used to separate two troughs 3 in the width direction of the graphite boat body 1. The two troughs 3 for reducing ingots are ingeniously integrated on one graphite boat body 1, realizing a double-trough integrated design. This design makes the structure of the whole device more compact and reduces the space occupation. Compared with the traditional method of separately arranging two independent troughs 3, the integrated design is not only more concise and beautiful in appearance, but also more convenient in actual use. In terms of function, the loading capacity of the graphite boat body 1 is effectively improved. Since the two troughs 3 are integrated on one graphite boat, more materials can be accommodated for reducing ingots compared with the single-trough design, thus greatly improving the production efficiency, without the need for frequent loading and unloading operations, saving time and labor costs. Moreover, the improvement of production efficiency is not only reflected in the increase of the loading capacity, but also makes the production process more smooth and efficient. The connection between each process is closer, reducing the transfer time and loss of materials.
[0032] The height of the partition structure 2 is less than the height of the cavity 11, so that there is a certain distance between the top of the partition structure 2 and the top of the graphite boat body 1. During the reduction and melting processes, the distribution and balance of heat play a decisive role in the smooth progress of the whole process and the quality of the final product. By setting this distance design, a buffer zone can be effectively created between the two ingot troughs, enabling the heat to be more evenly distributed between the two ingot troughs, which helps to achieve thermal balance.
[0033] The above is the first embodiment of a double-trough graphite boat for germanium dioxide reduction and ingot casting provided by the embodiment of the present application. The following is the second embodiment of a double-trough graphite boat for germanium dioxide reduction and ingot casting provided by the embodiment of the present application. For details, please refer to Figures 1 to 2 。
[0034] Based on the solution of the above first embodiment:
[0035] Furthermore, the top of the partition structure 2 extends to the central position in the height direction of the graphite boat body 1, that is, the distance between the top of the partition structure 2 and the top of the graphite boat body 1 is preferably designed to be half of the height of the graphite boat body 1. Under this design, a better thermal balance effect can be achieved.
[0036] Furthermore, the cross-section of the trough 3 in the width direction is trapezoidal (specifically, an isosceles trapezoid), which can also be understood as the angle between the bottom surface of the trough 3 and the two side surfaces in the width direction of the trough 3 is greater than 90°. This design realizes that the trough 3 gradually expands from bottom to top, which is beneficial to demoulding after ingot casting.
[0037] To facilitate demolding better, the cross-section of the groove body 3 in the length direction is also trapezoidal in reverse (specifically, an isosceles trapezoid in reverse), that is, the angle between the bottom surface of the groove body 3 and the two side surfaces in the length direction of the groove body 3 is greater than 90°. Further, rounded corners are provided at the corner positions in the groove body 3, and this design can also improve the demolding efficiency.
[0038] Further, on the positions above the groove body 3 on both side walls of the cavity 11, inclined surface diversion steps 12 corresponding to the groove body 3 one by one are respectively provided. So as to provide a convenient guiding and positioning function when germanium melts during the ingot casting process, enabling the germanium metal liquid to enter the two groove bodies 3 evenly, completely and accurately.
[0039] Further, rounded corners are also provided at the corner positions of the diversion steps, enabling the germanium metal liquid to enter the two groove bodies 3 more smoothly.
[0040] Further, the top of the partition structure 2 is a conical top structure, and the conical top structure design can prevent the metal liquid from accumulating at the top of the partition structure 2.
[0041] Further, the internal dimensions of the two groove bodies 3 are the same and are symmetrically arranged with respect to the partition structure 2, so as to facilitate the uniform loading of germanium dioxide raw materials. At the same time, when designing, the dimensions and shapes of the two groove bodies 3 match the internal dimensions of the zone melting graphite boat used in the next process, so as to achieve good connection between processes and improve production efficiency.
[0042] Further, the graphite boat body 1 is made of high-purity graphite material, that is, graphite material with a purity reaching more than 99.9998% and an ash content < 20 ppb, so as to ensure that no impurities are introduced into the germanium dioxide reduction process.
[0043] The size of the graphite boat body 1 of the present application is adjusted and designed according to actual production needs. Taking the design with a length of 550 mm, a width of 180 mm, and a height of 100 mm as an example, the graphite boat body 1 under this design size can load germanium dioxide raw materials with a weight of 2 kg to 11 kg.
[0044] The above has introduced in detail a double-groove graphite boat for germanium dioxide reduction and ingot casting provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.
Claims
1. A double-groove graphite boat for reducing and ingot-casting germanium dioxide, characterized in that, It includes a graphite boat body (1); An accommodation cavity (11) is provided inside the graphite boat body (1); An opening communicating with the accommodation cavity (11) is provided at the top of the graphite boat body (1); A partition structure (2) is arranged at the bottom of the accommodation cavity (11) along the length direction of the graphite boat body (1) for partitioning two trough bodies (3) in the width direction of the graphite boat body (1); The height of the partition structure (2) is less than the height of the accommodation cavity (11).
2. The double-groove graphite boat for reducing and ingot-casting germanium dioxide according to claim 1, wherein The top of the partition structure (2) extends to the central position in the height direction of the graphite boat body (1).
3. The double-groove graphite boat for reducing and ingot-casting germanium dioxide according to claim 1, wherein, The cross-section of the trough body (3) in the width direction is trapezoidal in shape with the top wider than the bottom.
4. A double-groove graphite boat for reducing and ingot-casting germanium dioxide according to claim 3, characterized in that The cross-section of the trough body (3) in the length direction is trapezoidal in shape with the top wider than the bottom.
5. A double-groove graphite boat for reducing and ingot-casting germanium dioxide according to claim 1, characterized in that, Round corners are provided at the corner positions of the trough body (3).
6. The double-groove graphite boat for reducing and ingot casting germanium dioxide according to claim 1, wherein, On both side walls of the accommodation cavity (11) above the trough body (3), inclined surface flow guiding steps (12) corresponding to the trough body (3) one by one are provided respectively.
7. A double-groove graphite boat for reducing and ingot-casting germanium dioxide according to claim 6, characterized in that, Round corners are provided at the corner positions of the flow guiding steps.
8. A double-groove graphite boat for reducing and ingot-casting germanium dioxide according to claim 1, characterized in that, The top of the partition structure (2) is a conical top structure.
9. A double-groove graphite boat for reducing and ingot casting germanium dioxide according to claim 1, characterized in that, The internal dimensions of the two trough bodies (3) are the same and they are symmetrically arranged with respect to the partition structure (2).
10. A double-groove graphite boat for reducing and ingot-casting germanium dioxide according to claim 1, characterized in that, The graphite boat body (1) is made of high-purity graphite material.