Speed reducer case mechanism of double-sided polishing equipment

Abstract

The utility model discloses a speed reducer case mechanism of double-sided polishing equipment. The speed reducer case mechanism comprises a case shell, three first output shafts, a second output shaft, three first input shafts and a second input shaft. The three first output shafts are rotationally connected to the first installation position and can rotate independently, and the three first output shafts and the three first input shafts form three sets of transmission through worm gears and worms. And the second output shaft and the second input shaft form a group of transmission through a worm gear and a worm. The utility model has the advantages that: 1, the worm gears and worms are integrated, and each group of worm gears and worms is additionally provided with observation holes, so that the use conditions of the worm gears and worms are conveniently judged; and 2, a water cooling mechanism is additionally arranged on the speed reducer box, and the temperature in the speed reducer is adjusted through cold water circulation, so that the speed reducer is kept at the optimal temperature in the operation process.

Description

Technical Field

[0001] The utility model relates to a speed reducer, in particular to a speed reducer box mechanism of a double-sided polishing device. Background Technique

[0002] The flatness of the wafer surface has a great influence on the process yield. The double-sided polishing device is used to polish both sides of the wafer. A speed reducer is required in the double-sided polishing device. Existing double-sided polishing devices generally use standard speed reducers. During long-term continuous use of the device, problems such as overheating and wear of the worm and worm gear may occur, resulting in unstable transmission of the speed reducer and a significant reduction in service life, affecting the performance of the double-sided polishing device. Content of the Utility Model

[0003] This application provides a speed reducer box mechanism of a double-sided polishing device, which can solve the problems raised in the background technique.

[0004] In this application, a speed reducer box mechanism of a double-sided polishing device is provided, including:

[0005] A chassis shell with a mounting plate on the top surface; a first mounting position is provided corresponding to the center of the mounting plate, and a second mounting position is also provided around the first mounting position;

[0006] Three first output shafts are sleeved in sequence and have coincident axes, and are respectively rotatably connected to the first mounting position; parts inside the chassis shell are respectively fixedly connected with a first worm gear, a second worm gear and a third worm gear;

[0007] A second output shaft is rotatably connected to the second mounting position; a part inside the chassis shell is fixedly connected with a fourth worm gear;

[0008] Three first input shafts are rotatably connected to the chassis shell and are respectively fixedly connected with a first worm, a second worm and a third worm; the first worm, the second worm and the third worm are sequentially meshed with the first worm gear, the second worm gear and the third worm gear;

[0009] A second input shaft is rotatably connected to the chassis shell and is fixedly connected with a fourth worm, and the fourth worm is meshed with the fourth worm gear; the chassis shell is also provided with a plurality of observation holes, and these observation holes cover the meshing positions of each group of worm and worm gear inside the chassis shell.

[0010] In some embodiments, a cooling mechanism is further included; the cooling mechanism includes: a mounting part for mounting with the chassis shell, and a pipe part connected to the mounting part and inside the chassis shell; the inlet and outlet of the pipe part are both in the mounting part.

[0011] In some embodiments, the two first input shafts corresponding to the first worm gear and the third worm gear are on the same side, and the first input shaft corresponding to the second worm gear is on the opposite side.

[0012] In some embodiments, the inner cavity of the chassis housing includes: a first chamber that is deeper downward and a second chamber that is shallower downward and communicates with the first chamber; the first worm gear and the first worm, the second worm gear and the second worm, and the third worm gear and the third worm are in the first chamber; the fourth worm gear and the fourth worm are in the second chamber.

[0013] In some embodiments, there are two mounting parts, and the inlet and outlet of the pipeline part are in the same mounting part.

[0014] In some embodiments, the chassis housing is integrally formed.

[0015] In summary, in the present application, a speed reduction gearbox mechanism for a double-sided polishing device includes a chassis housing, three first output shafts, a second output shaft, three first input shafts, and a second input shaft. The three first output shafts are rotatably connected to the first mounting positions and can rotate independently, and the three first input shafts form three sets of transmissions through worm gears. The second output shaft and the second input shaft form a set of transmissions through worm gears. The beneficial effects are as follows: 1. The worm gears are integrated together, and an observation hole is added to each set of worm gears to facilitate judging the usage condition of the worm gears. 2. In addition, a water cooling mechanism is added to the speed reduction gearbox to adjust the internal temperature of the reducer through cold water circulation, so that the reducer maintains the optimal temperature during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings required for use in the embodiments of the present application or the background art will be described below.

[0017] Figure 1 is the front view of the present application;

[0018] Figure 2 is the rear view of the present application;

[0019] Figure 3 is the top view of the present application;

[0020] Figure 4 is Figure 3 the sectional view along A-A in

[0021] Figure 5 is the schematic diagram of the arrangement of the three first output shafts;

[0022] Figure 6 is the schematic diagram of the water cooling mechanism being disassembled from the chassis housing;

[0023] Figure 7It is a schematic diagram of a water cooling mechanism.

[0024] In the figure,

[0025] 1. Chassis shell; 1a. Mounting plate; 1b. First mounting position; 1c. Second mounting position; 1d. Observation hole; 1e. First chamber; 1f. Second chamber;

[0026] 2. First output shaft; 2a. First worm gear; 2b. Second worm gear; 2c. Third worm gear;

[0027] 3. Second output shaft; 3a. Fourth worm gear;

[0028] 4. First input shaft; 4a. First worm; 4b. Second worm; 4c. Third worm;

[0029] 5. Second input shaft; 5a. Fourth worm;

[0030] 6. Water cooling mechanism; 6a. Mounting part; 6b. Pipe part; 6b1. Inlet; 6b2. Outlet. Detailed implementation mode

[0031] The following is a further description with reference to the accompanying drawings. The accompanying drawings are only examples and are not drawn strictly to scale. Unless otherwise defined, the technical terms or scientific terms used in this disclosure should have the ordinary meaning understood by those of ordinary skill in the field to which this disclosure belongs. The "first", "second" and similar terms used in this disclosure do not denote any order, quantity or importance, but are only used to distinguish different components. Words such as "including" or "comprising" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. Words such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Upper", "lower", "left", "right", etc. are only used to represent relative position relationships, and when the absolute position of the object being described changes, the relative position relationship may also change accordingly. Without conflict, the embodiments in this application can be combined with each other.

[0032] Please refer to Figure 1 , Figure 2 and Figure 3 , a reduction gearbox mechanism for a double-sided polishing device, including a chassis shell 1, three first output shafts 2, a second output shaft 3, three first input shafts 4 and a second input shaft 5.

[0033] The top surface of the chassis housing 1 has a mounting plate 1a. The chassis housing 1 is provided with a first mounting position 1b corresponding to the center position of the mounting plate 1a, and a second mounting position 1c is also provided around the first mounting position 1b. More specifically, both the first mounting position 1b and the second mounting position 1c can be in two places, one is arranged on the top surface of the chassis housing 1, and the other is arranged on the bottom surface of the chassis housing 1.

[0034] Please refer to Figure 4 and Figure 5 , the three first output shafts 2 are sleeved in sequence, and the axes of the three sleeved first output shafts 2 coincide, that is, the three first output shafts 2 rotate around the same axis. More specifically, the first first output shaft 2 is stepped and has a section of shaft body; the second first output shaft 2 is cylindrical and is completely sleeved into this section of shaft body, and the relative rotation between the two is realized through a bearing; the third first output shaft 2 is also cylindrical and is completely sleeved into the second first output shaft 2, and the relative rotation between the two is realized through a bearing.

[0035] The three first output shafts 2 are rotatably connected to the first mounting position 1b and can rotate independently. More specifically, the above-mentioned first first output shaft 2 and the third first output shaft 2 are respectively rotatably connected to the two first mounting positions 1b through bearings.

[0036] The parts of the three first output shafts 2 inside the chassis housing 1 are respectively fixedly connected with a first worm gear 2a, a second worm gear 2b and a third worm gear 2c. In order to facilitate the distinction of the three first output shafts 2, the first worm gear 2a, the second worm gear 2b and the third worm gear 2c are sequentially connected to the above-mentioned first first output shaft 2, the second first output shaft 2 and the third first output shaft 2.

[0037] The second output shaft 3 is rotatably connected to the second mounting position 1c, and the part inside the chassis housing 1 is also fixedly connected with a fourth worm gear 3a.

[0038] In some embodiments, the inner cavity of the chassis housing 1 includes a first chamber 1e that is deeper downward and a second chamber 1f that is shallower downward and communicates with the first chamber 1e. The first worm gear 2a and the first worm 4a, the second worm gear 2b and the second worm 4b, the third worm gear 2c and the third worm 4c are in the first chamber 1e, and the fourth worm gear 3a and the fourth worm 5a are in the second chamber 1f. Correspondingly, the back surface of the chassis housing 1 is also stepped, and one first mounting position 1b and one second mounting position 1c are respectively arranged on two staggered surfaces.

[0039] Three first input shafts 4 are rotatably connected to the chassis housing 1. More specifically, both ends of each first input shaft 4 are rotatably connected to the chassis housing 1 through bearings. A first worm 4a, a second worm 4b, and a third worm 4c are respectively and fixedly connected to the three first input shafts 4. The first worm 4a, the second worm 4b, and the third worm 4c are sequentially meshed with a first worm gear 2a, a second worm gear 2b, and a third worm gear 2c.

[0040] In some embodiments, the two first input shafts 4 corresponding to the first worm gear 2a and the third worm gear 2c are on the same side, and the first input shaft 4 corresponding to the second worm gear 2b is on the opposite side.

[0041] Separate the three first input shafts 4, make rational use of space, and reduce the installation dimensions required for the three first input shafts 4 in the up and down directions.

[0042] A second input shaft 5 is rotatably connected to the chassis housing 1, and the connection method can refer to the first input shaft 4. A fourth worm 5a is fixedly connected to the second input shaft 5, and the fourth worm 5a is meshed with a fourth worm gear 3a.

[0043] Please refer to Figure 1 and Figure 2 , the chassis housing 1 is further provided with a plurality of observation holes 1d, and these observation holes 1d cover the meshing positions of each group of worm gears and worms in the chassis housing 1. More specifically, the chassis housing 1 is provided with a circle of threaded holes around each observation hole 1d to form a flange for installing a transparent baffle, which can observe the inside of the chassis housing 1 while preventing the oil in the chassis housing 1 from splashing out.

[0044] In some embodiments, the chassis housing 1 is integrally formed. More specifically, for the three first output shafts 2, the second output shaft 3, the three first input shafts 4, and the second input shaft 5 on the chassis housing 1, the chassis housing 1 is detachably connected with bearing seats, and the bearings are installed in the bearing seats. After removing the bearing seats, the output shafts with worm gears and the input shafts with worms can penetrate into the chassis housing 1 from the corresponding holes. In addition, based on the above embodiment of "the inner cavity of the chassis housing 1 includes a first chamber 1e that is deeper downward and a second chamber 1f that is shallower downward and communicates with the first chamber 1e", the second output shaft 3 is relatively short. For the second installation position 1c on the back of the chassis housing 1, a bearing seat may not be provided, and the bearing can be directly embedded in the inner wall of the chassis housing 1.

[0045] Please refer to Figure 6 and Figure 7 , in some embodiments, the speed reduction chassis mechanism of the double-sided polishing device further includes a water cooling mechanism 6. The water cooling mechanism 6 includes an installation part 6a for installing with the chassis housing 1 and a pipe part 6b connected to the installation part 6a and inside the chassis housing 1. The inlet 6b1 and the outlet 6b2 of the pipe part 6b are both in the installation part 6a.

[0046] Water enters the pipe section 6b from the inlet 6b1, flows along the pipe section 6b, stays in the chassis housing 1 for a period of time to absorb the heat inside the chassis housing 1, and finally flows out from the outlet 6b2 to dissipate heat and cool down the inside of the chassis housing 1.

[0047] In some embodiments, there are two mounting portions 6a, and the inlet 6b1 and the outlet 6b2 of the pipe section 6b are in the same mounting portion 6a.

[0048] The two mounting portions 6a make the cooling mechanism more stably mounted on the chassis housing 1. The inlet 6b1 and the outlet 6b2 of the pipe section 6b are designed in the same mounting portion 6a, making the installation and disassembly of the cooling mechanism on the chassis housing 1 more convenient.

Claims

1. A reduction gearbox mechanism of a double-sided polishing device, characterized in that, Comprising: A chassis housing (1) with an installation plate (1a) on the top surface; a first installation position (1b) is provided at the center position corresponding to the installation plate (1a), and a second installation position (1c) is also provided around the first installation position (1b); Three first output shafts (2), sleeved in sequence and with coincident axes, are respectively rotatably connected to the first installation position (1b); in the part inside the chassis housing (1), a first worm gear (2a), a second worm gear (2b), and a third worm gear (2c) are respectively fixedly connected; A second output shaft (3), rotatably connected to the second installation position (1c); in the part inside the chassis housing (1), a fourth worm gear (3a) is fixedly connected; Three first input shafts (4), rotatably connected to the chassis housing (1), are respectively fixedly connected with a first worm (4a), a second worm (4b), and a third worm (4c); the first worm (4a), the second worm (4b), and the third worm (4c) are respectively meshed with the first worm gear (2a), the second worm gear (2b), and the third worm gear (2c); A second input shaft (5), rotatably connected to the chassis housing (1), is fixedly connected with a fourth worm (5a), and the fourth worm (5a) is meshed with the fourth worm gear (3a); the chassis housing (1) is also provided with a plurality of observation holes (1d), and these observation holes (1d) cover the meshing positions of each group of worm gears and worms inside the chassis housing (1).

2. The reduction gearbox mechanism of a double-sided polishing device according to claim 1, characterized in that, It further includes a cooling mechanism; the cooling mechanism includes: an installation part (6a) for installing with the chassis housing (1), and a pipeline part (6b) connected to the installation part (6a) and inside the chassis housing (1); the inlet (6b1) and the outlet (6b2) of the pipeline part (6b) are both in the installation part (6a).

3. A reduction gearbox mechanism of a double-sided polishing device according to claim 1, characterized in that, The two first input shafts (4) corresponding to the first worm gear (2a) and the third worm gear (2c) are on the same side, and the first input shaft (4) corresponding to the second worm gear (2b) is on the opposite side.

4. A reduction gearbox mechanism of a double-sided polishing device according to claim 1, characterized in that, The inner cavity of the chassis housing (1) includes: a first chamber (1e) that is deeper downward and a second chamber (1f) that is shallower downward and communicates with the first chamber (1e); the first worm gear (2a) and the first worm (4a), the second worm gear (2b) and the second worm (4b), the third worm gear (2c) and the third worm (4c) are in the first chamber (1e); the fourth worm gear (3a) and the fourth worm (5a) are in the second chamber (1f).

5. The reduction gearbox mechanism of a double-sided polishing device according to claim 2, characterized in that There are two installation parts (6a), and the inlet (6b1) and the outlet (6b2) of the pipeline part (6b) are in the same installation part (6a).

6. The reduction gearbox mechanism of a double-sided polishing device according to claim 1, characterized in that, The chassis housing (1) is integral.

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