Blowing device of material box cleaning machine

Abstract

The utility model provides a blowing device of a magazine cleaning machine, which relates to the technical field of semiconductor packaging equipment, and is characterized by comprising a fixed support, air knives are symmetrically and fixedly arranged on two sides of the fixed support, each air knife comprises an air knife body, a through inner hole is arranged at the end part of each air knife body, and the through inner holes are communicated with the air knife bodies. An air inlet hole is formed in the upper side of the air knife body, an air blowing gap extending into the penetrating inner hole is formed in the lower side of the air knife body, side holes are evenly and symmetrically formed in the two sides of the air knife body, and air guide slopes are arranged on the two sides of the upper portion of the air knife body. And residual moisture after the material box is cleaned is effectively treated, so that the device is beneficial to maintaining the cleanliness level of a dust-free workshop, and the risk of pollution to the field environment is reduced. The method is of great significance in guaranteeing the product quality and improving the production efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging equipment, and specifically relates to a blowing device for a cassette cleaning machine. Background Technique

[0002] The requirements for cleanliness in the packaging clean room are extremely strict. In the packaging process, the front-end clean room usually maintains a cleanliness level of 10,000, while the back-end is upgraded to 100,000. This standard is mainly formulated based on the possible impact of particles on product performance. Although traditional packaging has certain requirements for particle control, in contrast, MEMS (Micro-Electro-Mechanical System) sensing products are extremely sensitive to particles due to their characteristics of relying on membrane vibration changes for electrical signal transmission. Generally speaking, particles with a diameter greater than 20 micrometers can pose a serious threat to the sensitivity of the product. It should be noted that the diameter of human hair is about 100 micrometers, which means that particles with a diameter less than one-fourth of the hair diameter need to be strictly controlled. This control task runs through the entire production process from laser cutting of wafers to the completion of testing, and the difficulty is extremely high.

[0003] Through the comprehensive analysis of 5M1E (man, machine, material, method, environment, measurement), it is identified that the "material" link is the key. Specifically, during the multiple recycling uses of the cassette (the fixture for placing the PCB), due to the friction between the PCB and the inner wall of the cassette, debris will be generated, and a large number of particles will also be adsorbed on the inner and outer walls of the cassette, which poses a major risk to the on-site environment.

[0004] In order to effectively solve the foreign object risk generated during the multiple transfers of the PCB by the cassette, there is a fully automatic cassette cleaning machine in the prior art. This machine integrates a loading section, a water washing section, a drying section, and a unloading section. Each part is connected and communicated in sequence and is electrically connected to the controller to ensure the automation and intelligence of the entire cleaning process. Through this design, the efficient cleaning of the cassette is achieved, and the impact of debris and other foreign objects caused by long-term use on product quality is significantly reduced. At the same time, this solution also effectively replaces the manual wiping method, which not only reduces the work burden but also brings economic benefits.

[0005] However, during the process of promoting the cleaning of MEMS cassettes, it is found that the existing devices are still difficult to meet the cleaning requirements for foreign matters in the cassettes in some aspects. Especially for the cases of foreign matter complaints in MEMS products, through EDX component analysis, it is found that there is Ga element in the products, and this element has not been identified in other production links. After in-depth investigation, it is confirmed that these foreign matter risks mainly originate from the incomplete cleaning of the cassette cleaning link. Although the current cleaning mode includes 5 minutes of shower cleaning and subsequent natural drying and baking steps, there is still a problem of residual moisture on the inner and outer walls of the cassette after cleaning. These residual moisture may carry debris into the new product processing flow when put back into use, ultimately affecting the performance of the sensor and resulting in product scrapping. Utility Model Content

[0006] In view of the deficiencies of the prior art, the present utility model provides a blowing device for a cassette cleaning machine, which solves the problem that residual moisture may carry debris into the new product processing flow when put back into use, ultimately affecting the performance of the sensor and resulting in product scrapping.

[0007] To achieve the above objectives, the present utility model is realized through the following technical solutions: A blowing device for a cassette cleaning machine, characterized in that: it includes a fixed bracket, and air knives are symmetrically and fixedly arranged on both sides of the fixed bracket. The air knife includes an air knife body. A through hole is provided at the end of the air knife body. An air inlet hole is provided on the upper side of the air knife body. A blowing gap extending into the interior of the through hole is provided on the lower side of the air knife body. Side holes are evenly and symmetrically arranged on both sides of the air knife body. Guide wind slopes are provided on both sides of the upper part of the air knife body.

[0008] In a preferred technical solution, the air knives on both sides of the fixed bracket are arranged in a V shape.

[0009] In a preferred technical solution, the diameter of the through hole is 6mm, and the diameter of the air inlet hole is 10mm.

[0010] In a preferred technical solution, the width of the air knife body is 26mm, and the height is 60mm.

[0011] In a preferred technical solution, the width of the blowing gap is 0.05mm.

[0012] In a preferred technical solution, 3 groups of air inlet holes are provided.

[0013] The present utility model provides a blowing device for a cassette cleaning machine. It has the following beneficial effects:

[0014] Significantly improve the cleaning efficiency and effect: By adding a blowing device at the end of the cleaning section of the cartridge cleaning machine and using two groups of air knives arranged in a figure-eight shape, the rapid sliding or air drying of water droplets on the surface of the cartridge is achieved. This design effectively reduces the residual moisture before the drying section and shortens the overall drying time, thereby improving the cleaning efficiency and cleaning effect.

[0015] Enhance product quality assurance: Since MEMS sensing products are extremely sensitive to particles, any tiny foreign object may seriously affect their performance. The blowing device ensures a high cleanliness level of the cartridge after cleaning through precisely controlled airflows, reducing product quality problems caused by particle residues and improving the overall quality of the product.

[0016] Reduce production risks and costs: Traditional cleaning methods may cause foreign object residues due to incomplete cleaning, which may lead to product scrapping and customer complaints. The application of this blowing device significantly reduces such risks and the economic losses caused by product scrapping.

[0017] Enhance environmental control capabilities: By effectively treating the residual moisture on the cartridge after cleaning, this device helps maintain the cleanliness level of the dust-free workshop and reduces the risk of pollution to the on-site environment. This is of great significance for ensuring product quality and improving production efficiency. Description of the Drawings

[0018] Figure 1 is a schematic structural diagram of the present utility model;

[0019] Figure 2 is a schematic structural diagram of the air knife of the present utility model;

[0020] Figure 3 is the present utility model Figure 2 is a sectional structural diagram taken along the B-B direction of the present utility model;

[0021] Figure 4 is the present utility model Figure 3 is a sectional structural diagram taken along the A-A direction of the present utility model.

[0022] In the figure: 1 - fixed bracket, 2 - air knife, 21 - air knife body, 22 - through inner hole, 23 - air inlet hole, 24 - blowing gap, 25 - side hole, 26 - air guiding inclined surface. Detailed Implementation Manner

[0023] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0024] Please refer to Figures 1-4 ,

[0025] A blowing device for a cartridge cleaning machine, comprising a fixed bracket 1, air knives 2 symmetrically and fixedly arranged on both sides of the fixed bracket 1. The air knife 2 includes an air knife body 21, a through hole 22 is arranged at the end of the air knife body 21, an air inlet hole 23 is arranged on the upper side of the air knife body 21, a blowing gap 24 extending into the interior of the through hole 22 is arranged on the lower side of the air knife body 21, side holes 25 are evenly and symmetrically arranged on both sides of the air knife body 21, and air guiding inclined surfaces 26 are arranged on both upper sides of the air knife body 21.

[0026] The air knives 2 on both sides of the fixed bracket 1 are arranged in a V shape. The diameter of the through hole 22 is 6 mm, and the diameter of the air inlet hole 23 is 10 mm. The width of the air knife body 21 is 26 mm, and the height is 60 mm. The width of the blowing gap 24 is 0.05 mm. Three groups of air inlet holes 23 are arranged.

[0027] The present utility model designs the structure of the cartridge cleaning machine while maintaining the existing UPH of the cartridge cleaning, which is 20 per hour. Mainly through two groups of air knives 2, after the cleaning section ends, air pressure passes through the air knives, so that the water droplets on the surface of the cartridge quickly slide off or are air-dried, thereby ensuring that the cartridge is thoroughly dried in the drying section for the washed products, and ensuring high-quality reuse.

[0028] The present utility model is arranged at the end of the cleaning section of the cartridge cleaning machine, and the two groups of air knives 2 blow air in a V shape, mainly considering the drying effect and the maximization guarantee of the blowing air pressure. After evaluation, it can effectively meet the requirement of water droplet detachment for the washed cartridges. The present utility model utilizes the Kirkendall effect (appendage effect), compressed air enters through the air inlet; enters the high-pressure cavity of the air knife 2, and the air flow passes through a narrow and thin (0.05 mm) slit; an evenly distributed air flow thin sheet is formed in the length direction of the air knife 2. Due to the air amplification ratio of about 40:1 on both sides of the blowing gap, the air flow velocity loss is minimized and the pressure is the largest, so a strong impact and minimum shear force air flow thin sheet is generated.

[0029] It should be noted that:

[0030] 1. When the air knife 2 blows air, the air volume requirement needs to be 2.5 cubic meters / min to ensure that the air pressure meets the requirement of quickly blowing off the residual water droplets on the inner and outer walls of the cartridge;

[0031] 2. The moving speed of the water washing section should not be too slow, and it is necessary to ensure that the cartridge is blown repeatedly during the dehydration process. The moving speed can be adjusted by PLC.

[0032] 3. In terms of the air knife effect, the air knife can greatly accelerate the sliding of water droplets, but it cannot be determined to be 100%. This is mainly because the effect of air knife 2 is largely related to air pressure and compressed air flow. For the remaining small amount of residual water droplets, after entering the drying section and being dried at a temperature of 120° for 30 minutes, this problem can be effectively solved.

[0033] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A blowing device for a cartridge cleaning machine, characterized in that: It includes a fixed bracket (1), and air knives (2) are symmetrically and fixedly arranged on both sides of the fixed bracket (1). The air knife (2) includes an air knife body (21). A through hole (22) is arranged at the end of the air knife body (21). An air inlet hole (23) is arranged on the upper side of the air knife body (21). A blowing gap (24) extending to the inside of the through hole (22) is arranged on the lower side of the air knife body (21). Side holes (25) are evenly and symmetrically arranged on both sides of the air knife body (21). Air guiding inclined surfaces (26) are arranged on both sides of the upper part of the air knife body (21).

2. The blowing device of a cartridge cleaning machine according to claim 1, characterized in that: The air knives (2) on both sides of the fixed bracket (1) are arranged in a V-shaped pattern.

3. The air blowing device of a cartridge cleaning machine according to claim 1, characterized in that: The diameter of the through hole (22) is 6 mm, and the diameter of the air inlet hole (23) is 10 mm.

4. The blowing device of a cartridge cleaning machine according to claim 3, characterized in that: The width of the air knife body (21) is 26 mm, and the height is 60 mm.

5. The air blowing device of a cartridge cleaning machine according to claim 3 or 4, characterized in that: The width of the blowing gap (24) is 0.05 mm.

6. The air blowing device of a cartridge cleaning machine according to claim 3, characterized in that: There are 3 groups of air inlet holes (23) arranged.

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