Waste discharge device, drying furnace and waste discharge system

Abstract

The utility model belongs to the technical field of silicon wafer drying, and particularly relates to a waste discharge device, a drying furnace and a waste discharge system. The waste discharge mechanism is provided with an air chamber, and a plurality of air inlet pipes are vertically arranged at the bottom of the air chamber; wherein the air inlet pipes extend into the temperature zone of the drying furnace to form a plurality of air ducts, and are communicated with the waste discharge pipe through the air ducts, and waste gas generated by drying the silicon wafers is extracted by the fan. The plurality of air inlet pipes are arranged to extend into different drying temperature zones to form the plurality of air ducts, the plurality of air inlet pipes can fully extract air and exhaust waste gas, the temperature and airflow uniformity of different zones in the drying furnace can be realized, the waste gas can be extracted from each temperature zone more effectively, so that the overall waste discharge efficiency is improved, and the drying uniformity of silicon wafers is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of drying, in particular to a waste discharging device, a drying furnace and a waste discharging system. Background Technique

[0002] In the technical field of solar cell silicon wafer production, the main purpose of using a silicon wafer drying device is to remove moisture and solvents on the surface of the silicon wafer to ensure the performance and quality of the silicon wafer in the subsequent production process. During the drying process, organic waste gas will be generated and discharged from the drying device. Existing drying furnaces mostly use a single pipeline to connect different temperature zones. In the case of multiple temperature zones or a large amount of waste gas generated, a single exhaust pipe cannot provide enough flow rate to discharge all waste gas in time, resulting in uneven distribution of the waste gas that cannot be discharged in the drying furnace, leading to inconsistent drying effects of the silicon wafers.

[0003] Therefore, in order to solve the problem that a single waste discharging point cannot effectively control the gas flow in different temperature zones, resulting in ineffective discharge of waste gas and thus affecting the drying effect of silicon wafers, a waste discharging device, a drying furnace and a waste discharging system are needed. Summary of the Utility Model

[0004] In order to solve the technical problems mentioned in the background technique, the utility model provides a waste discharging device, a drying furnace and a waste discharging system.

[0005] In the first aspect, the utility model provides a waste discharging device, including:

[0006] A waste discharging pipe; and

[0007] A waste discharging mechanism, on which an air chamber is provided, and a plurality of air inlet pipes are vertically arranged at the bottom of the air chamber; wherein

[0008] Each of the air inlet pipes extends into the temperature zone of the drying furnace to form a plurality of air ducts, which are communicated with the waste discharging pipe through each air duct, and the waste gas generated by drying the material is extracted by a fan.

[0009] Further, the air chamber includes: a top plate and a base;

[0010] At least two air holes are opened on the top plate, each of the air holes is communicated with the waste discharging pipe, and a plurality of air inlet holes on the base are respectively connected with the corresponding air inlet pipes.

[0011] Further, an air chamber cover is detachably connected to the top of the air chamber, which includes an upper plate portion and an outer peripheral portion, wherein

[0012] A channel is provided on the upper plate portion to communicate with the waste discharging pipe, and the air chamber cover covers the top plate through the outer peripheral portion and encloses each of the air holes.

[0013] Further, a locking fastener is provided at the external joint of the top plate and the base, and the top plate and the base are connected and fastened through the locking fastener.

[0014] Further, a heat insulation layer is attached to the inner side wall of the air chamber, and the heat insulation layer is made of heat preservation cotton.

[0015] Further, an opening is provided on the waste discharge mechanism, and the opening is arranged on the side of the air chamber.

[0016] Further, a filter is connected to the blower.

[0017] Further, a support rod is connected to the bottom of the waste discharge pipe.

[0018] In a second aspect, the present utility model provides a drying furnace, including: a heating device;

[0019] The furnace lining in the heating device is connected to the intake pipe in the waste discharge device as described above.

[0020] In a third aspect, the present utility model provides a drying waste discharge system, including

[0021] A plurality of waste discharge devices as described above, each of the waste discharge devices is connected in series with at least one waste discharge mechanism to form a waste discharge tower, and at least one blower is used to extract the waste gas generated by drying the material.

[0022] The beneficial effect of the present utility model is that the waste discharge pipe of the present utility model is connected to a waste discharge mechanism, and a plurality of intake pipes are arranged on the waste discharge mechanism. By arranging a plurality of intake pipes to extend into the drying temperature zone to form a plurality of air ducts, each air duct communicates with the waste discharge pipe, which helps to achieve the temperature and air flow uniformity in different areas of the drying furnace, and can more effectively extract the waste gas from each temperature zone. Since a plurality of intake pipes are provided, the waste gas can be fully exhausted by suction, thereby improving the overall waste discharge efficiency and ensuring the uniformity of material drying.

[0023] Other features and advantages of the present utility model will be described in the following specification, and in part, will be obvious from the specification, or will be understood by implementing the present utility model. The objectives and other advantages of the present utility model are achieved and obtained by the structures specifically pointed out in the specification and the drawings.

[0024] To make the above objectives, features, and advantages of the present utility model more obvious and understandable, the following specific preferred embodiments are given, and in conjunction with the accompanying drawings, the detailed description is as follows. Description of the Drawings

[0025] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0026] Figure 1 The structural schematic diagram of the waste discharge device involved in some embodiments is shown;

[0027] Figure 2 The cross-sectional view of the waste discharge device involved in some embodiments is shown;

[0028] Figure 3 The schematic diagram of the waste discharge device involved in some embodiments is shown;

[0029] Figure 4 The structural schematic diagram of the drying furnace involved in some embodiments is shown;

[0030] Figure 5 The structural schematic diagram of the drying waste discharge system involved in some embodiments is shown;

[0031] In the figure:

[0032] 100 waste discharge pipe, 102 air chamber cover, 122 outer peripheral part, 110 support rod, 112 upper plate part;

[0033] 200 waste discharge mechanism, 210 air chamber, 220 intake pipe, 211 top plate, 212 base, 213 air hole, 230 locking part, 240 opening;

[0034] 300 blower, 310 filter

[0035] 500 heating device. Specific embodiments

[0036] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions of the present invention with reference to the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

[0037] Such as Figure 1 And Figure 2As shown, at least one embodiment provides a waste discharging device, including: a waste discharging pipe 100; and a waste discharging mechanism 200, on which an air chamber 210 is provided, and a plurality of air inlet pipes 220 are vertically arranged at the bottom of the air chamber 210; wherein each of the air inlet pipes 220 can extend into the same or different temperature zones of the drying furnace to form a plurality of air ducts, and the air ducts communicate with the waste discharging pipe 100, and the waste gas generated by drying the material is extracted by a fan 300.

[0038] In some embodiments, the present waste discharging device can be used in the technical field of solar cell silicon wafer production. Specifically, during the drying process of the silicon wafer, the silicon wafer is placed on a carrier or tray in the drying furnace, and the hot air uniformly heats the silicon wafer through the inside of the drying furnace. Among them, the moisture and solvent vapor in the furnace are discharged by the fan of the waste discharging system and discharged outside the equipment through the pipeline. Generally, a square drying device is mostly used in the production line, and a single exhaust pipe cannot provide enough flow rate to quickly discharge all the waste gas generated during the drying process. Therefore, the waste discharging pipe 100 of the present waste discharging device is connected with a waste discharging mechanism 200, and a plurality of air inlet pipes 220 are arranged on the waste discharging mechanism 200. By arranging a plurality of air inlet pipes to extend into different or the same drying temperature zones to form a plurality of air ducts, the air ducts communicating with the waste discharging pipe 100 contribute to realizing the temperature and air flow uniformity in different areas of the drying furnace, and can more effectively extract the waste gas from each temperature zone, thereby improving the overall waste discharging efficiency and ensuring the uniformity of silicon wafer drying.

[0039] The following describes an implementation manner of the present waste discharging device using a silicon wafer as a material, but the application scenario of the present waste discharging device is not limited to the technical field of solar cell silicon wafer production.

[0040] In some embodiments, the waste gas is shunted and processed through the air chamber 210 and then communicated to the waste discharging pipe 100 for discharge. The air chamber 210 is provided with a top plate 211 and a base 212; at least two air holes 213 are opened on the top plate 211, and each of the air holes 213 communicates with the waste discharging pipe 100, and a plurality of air inlet holes 213 on the base 212 are respectively connected with the corresponding air inlet pipes 220. Through the layout of the air holes and the air inlet pipes 220, the hot air is promoted to be evenly distributed in the air chamber, and the uniformity of silicon wafer drying is improved.

[0041] In some embodiments, when the exhaust gas passes through a number of air holes 213 and is connected to the exhaust pipe 100 via the fan 300, in order to prevent the entry of external air and pollutants, a cavity cover 102 is detachably connected to the top of the air cavity 210. The cavity cover 102 includes an upper plate portion 112 and an outer peripheral portion 122. A channel is provided in the upper plate portion 112 and is in communication with the exhaust pipe 100. The cavity cover 102 covers the top plate 211 through the outer peripheral portion 122 and encloses each of the air holes 213. The cavity cover 102 encloses each of the air holes 213 to form a gas flow channel, maintaining the structural integrity of the air cavity. Moreover, the detachable design of the cavity cover 102 facilitates maintenance and cleaning.

[0042] As Figure 3 shown, in order to ensure the firm connection between the top plate and the base and prevent displacement or separation during use, a locking member 230 is provided at the external joint of the top plate 211 and the base 212. The top plate 211 and the base 212 are connected and fastened through the locking member 230. When maintenance or cleaning of the air cavity 210 is required, the locking member 230 not only facilitates disassembly and reassembly but also helps to form a sealed environment, preventing gas or liquid leakage and the entry of external pollutants.

[0043] In some embodiments, the exhaust gas continuously extracted by the fan is likely to condensate on the cold wall surface of the air cavity 210. To protect the inner wall of the air cavity 210 from the influence of high-temperature exhaust gas and extend the service life of the equipment, a heat insulation layer is attached to the inner side wall of the air cavity 210, and the heat insulation layer is made of heat-insulating cotton. The heat insulation layer helps to evenly distribute the temperature inside the air cavity, avoiding local overheating or overcooling to protect the structural integrity of the air cavity.

[0044] In some embodiments, the waste discharge mechanisms 200 can be interconnected, and an opening 240 is provided thereon. The opening 240 is provided on the side of the air cavity 210. Each of the waste discharge mechanisms 200 is interconnected through the opening 240 to share a common fan and exhaust pipe.

[0045] During production, the exhaust gas may contain solid particles, dust, and other pollutants. To reduce the wear of equipment such as the fan 300 and the exhaust pipe 100, a filter 310 is connected to the fan 300. By filtering the discharged gas, the pollution of the external environment is reduced, especially when harmful gases may be generated during the drying process.

[0046] In some embodiments, additional support needs to be provided to the exhaust pipe 110 to ensure its structural stability and prevent it from shaking or sagging easily. A support rod 110 is connected to the bottom of the exhaust pipe 100.

[0047] As Figure 4As shown, at least one embodiment provides a drying furnace, comprising: a heating device 500; the furnace chamber in the heating device 500 is connected to the intake pipe 220 in the waste discharging device as described above.

[0048] In some embodiments, the drying furnace of the present invention can be used for drying silicon wafers.

[0049] As Figure 5 As shown, at least one embodiment provides a drying and waste discharging system, comprising a plurality of waste discharging devices as described above. Each of the waste discharging devices is connected in series with at least one waste discharging mechanism to form a waste discharging tower, and at least one fan is used to extract materials, such as the waste gas generated by silicon wafer drying. In an actual production line, the heating device of the drying furnace is divided into several heating zones, and corresponding numbers of waste discharging structures are arranged in different heating zones to perform waste discharging treatment on the drying furnace.

[0050] In summary, the utility model is connected with a waste discharging mechanism through a waste discharging pipe. A plurality of intake pipes are arranged on the waste discharging mechanism. By setting a plurality of drying temperature zones into which the intake pipes extend, a plurality of air ducts are formed. Each air duct communicates with the waste discharging pipe, which helps to achieve the temperature and air flow uniformity in different areas of the drying furnace. The plurality of intake pipes can fully extract and discharge waste gas, and can more effectively extract waste gas from each temperature zone, thereby improving the overall waste discharging efficiency and ensuring the uniformity of material drying, such as silicon wafer drying.

[0051] In the description of the embodiments of the present invention, unless otherwise clearly defined and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0052] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0053] In several embodiments provided by the present application, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. The device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division, and there can be other division methods in actual implementation. For another example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Based on the ideal embodiments of the present utility model as inspiration, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of the present utility model. The technical scope of the present utility model is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A waste discharging device, characterized in that, Comprising: A waste discharge pipe (100); And A waste discharge mechanism (200) provided with an air chamber (210) at the bottom of which a plurality of air inlet pipes (220) are vertically arranged; wherein Each of the air inlet pipes (220) extends into the temperature zone of the drying furnace to form a plurality of air ducts, which communicate with the waste discharge pipe (100) through the air ducts, and the waste gas generated by drying the material is extracted by a fan (300).

2. The waste discharge device according to claim 1, wherein The air chamber (210) comprises: a top plate (211) and a base (212); At least two air holes (213) are formed in the top plate (211), each of the air holes (213) communicates with the waste discharge pipe (100), and a plurality of air inlet holes (213) on the base (212) are respectively connected to the corresponding air inlet pipes (220).

3. The waste discharge device according to claim 2, wherein An air chamber cover (102) is detachably connected to the top of the air chamber (210), which comprises an upper plate portion (112) and an outer peripheral portion (122), wherein A channel is provided in the upper plate portion (112) to communicate with the waste discharge pipe (100), and the air chamber cover (102) covers the top plate (211) through the outer peripheral portion (122) and encloses each of the air holes (213).

4. The waste discharge device according to claim 2, wherein A locking member (230) is provided at the external joint of the top plate (211) and the base (212), and the top plate (211) and the base (212) are connected and fastened by the locking member (230).

5. The waste discharge device according to claim 1, wherein A heat insulation layer is attached to the inner side wall of the air chamber (210), and the heat insulation layer is made of heat insulating cotton.

6. The waste discharge device according to claim 1, wherein An opening (240) is formed in the waste discharge mechanism (200), and the opening (240) is arranged on the side of the air chamber (210).

7. The waste discharge device according to claim 1, wherein A filter (310) is connected to the fan (300).

8. The waste discharge device according to claim 1, wherein A support rod (110) is connected to the bottom of the waste discharge pipe (100).

9. A drying furnace, characterized in that, Comprising: A heating device; The furnace liner in the heating device is connected to the air inlet pipe in the waste discharge device according to any one of claims 1 to 8.

10. A drying and waste discharging system, characterized in that, Including A plurality of waste discharge devices according to any one of claims 1 to 7, each of the waste discharge devices is connected in series with at least one waste discharge mechanism to form a waste discharge tower, and at least one fan is used to extract the waste gas generated by drying the material.

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