Filtering device
By setting the casing, filtering parts and driving parts in the filter device, it is possible to suppress the aggregation and crystallization of particles in the abrasive liquid, extend the available time of the medium, and solve the problem of particle aggregation in the abrasive liquid after filtration by the CMP machine.
Patent Information
- Application Number
- CN202422299992.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-09-20
AI Technical Summary
In the prior art, when the filter device of the CMP machine stops working, the abrasive particles in the filtered abrasive liquid tend to accumulate and crystallize, resulting in an increase in size and affecting the availability time of the medium.
A filter device is designed, including a housing, a filter member and a driving member. By setting the movement of the medium in the gap, the particles are suppressed and crystallized and the available time of the medium is extended.
The medium is moved in the gap by the driving member, which inhibits the aggregation and crystallization of the fine particles, and extends the available time of the filtered medium.
Smart Images
Figure CN223144245U_ABST
Abstract
Description
Technical Field
[0001] Embodiments of the present disclosure relate to the field of semiconductor technology, and in particular, to a filtering device. Background Art
[0002] A Chemical Mechanical Polishing (CMP) machine polishes and planarizes a wafer through a polishing liquid, and the polishing liquid includes various components such as polishing particles, etchant, surfactant, etc. If the size of the polishing particles is too large, more defects will be left on the surface of the wafer, affecting the surface quality of the wafer. Therefore, how to provide a technical solution to reduce the size of the polishing particles in the polishing liquid has become an urgent technical problem to be solved. Summary of the Utility Model
[0003] In view of this, embodiments of the present disclosure provide a filtering device that can reduce the size of polishing particles in a polishing liquid.
[0004] Embodiments of the present disclosure provide a filtering device, including:
[0005] A housing;
[0006] A filtering element, the filtering element is located inside the housing and has a gap with the housing;
[0007] A driving member for moving the medium in the gap.
[0008] Optionally, the driving member includes:
[0009] A rotating member, the rotating member is located in the gap;
[0010] A driving motor, the driving motor is connected to the rotating member.
[0011] Optionally, the rotating member includes:
[0012] A rotating shaft, the rotating shaft is coaxially arranged with the filtering element, and the rotating shaft penetrates through the housing and is connected to the driving motor;
[0013] A rotating blade, the rotating blade is fixedly connected to the rotating shaft.
[0014] Optionally, the driving member has an input end and an output end;
[0015] The housing further has:
[0016] A first driving channel, the first driving channel communicates the gap with the input end of the driving member;
[0017] A second driving channel, the second driving channel communicates the output end of the driving member with the gap.
[0018] Optionally, the driving member includes:
[0019] A driving pump;
[0020] A driving pipe, the driving pipe passes through the driving pump, an input end of the driving pipe is communicated with the first driving channel, and an output end of the driving pipe is communicated with the second driving channel.
[0021] Optionally, the number of the first driving channels is multiple, the input end of the driving member has a plurality of first bifurcation units spaced apart, and one first bifurcation unit is communicated with one first driving channel;
[0022] And / or, the number of the second driving channels is multiple, the output end of the driving member has a plurality of second bifurcation units spaced apart, and one second bifurcation unit is communicated with one second driving channel.
[0023] Optionally, the filtering device further includes:
[0024] An end cover, the end cover has a liquid supply channel and a liquid outlet channel; wherein, the liquid supply channel is communicated with a liquid supply device and the filtering member, and the liquid outlet channel is communicated with the gap and a liquid using device.
[0025] Optionally, the end cover further has a receiving cavity, and the receiving cavity is communicated with the liquid supply channel and the filtering member.
[0026] Optionally, the end cover further has an exhaust channel, and the exhaust channel is communicated with the liquid supply channel.
[0027] Optionally, the housing further has a liquid discharge channel, and the liquid discharge channel is communicated with the gap.
[0028] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:
[0029] The filtering device provided by the embodiment of the present invention can reduce the size of the particles in the medium entering the gap between the filtering member and the housing by arranging the filtering member; by driving the medium in the gap by the driving member, the aggregation and crystallization of the particles in the medium can be inhibited, so that the available time of the filtered medium can be prolonged. Description of the Drawings
[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for describing the embodiments of the present invention or the prior art. Obviously, the following described drawings are only some embodiments of this specification. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to these drawings.
[0031] Figure 1 Shows a schematic cross-sectional structure of the first embodiment of the filtration device in the present disclosure;
[0032] Figure 2 Shows a schematic cross-sectional structure of the second embodiment of the filtration device in the present disclosure;
[0033] Figure 3 Shows Figure 2 the schematic cross-sectional structure at A-A in
[0034] Figure 4 Shows a schematic structure of the drive tube of the second embodiment of the filtration device in the present disclosure. Detailed implementation manners
[0035] A Chemical Mechanical Polishing (CMP) machine polishes and planarizes a wafer through a polishing liquid. The polishing liquid includes various components such as abrasive particles, etchant, surfactant, etc. Among them, if the size of the abrasive particles is too large, more defects will be left on the wafer surface. For example, more polishing marks will be left, and the removal of the wafer material will be uneven, etc., thus affecting the surface quality of the wafer.
[0036] Therefore, a technical solution is needed to reduce the size of the abrasive particles in the polishing liquid.
[0037] In the prior art, a filtration device is usually set at the liquid inlet of the CMP machine. The filtration device can set the filtration accuracy according to requirements, so as to filter out the abrasive particles with a size larger than the filtration accuracy, so that the size of the abrasive particles in the polishing liquid entering the CMP machine meets the usage requirements.
[0038] The inventor found during the work process that there is filtered polishing liquid retained in the filtration device, and the CMP machine works intermittently. If the CMP machine stops working for a long time, the abrasive particles in the filtered polishing liquid are likely to agglomerate and crystallize, resulting in an increase in size and becoming unusable.
[0039] Therefore, an improved filtration device is needed to extend the available time of the filtered medium.
[0040] To solve the above technical problems, an embodiment of the present disclosure provides a filtration device, including: a housing; a filter element located inside the housing and having a gap with the housing; a driving member for moving the medium in the gap.
[0041] In the filtration device provided by the embodiment of the present disclosure, by setting the filter element, the size of the particles in the medium entering the gap between the filter element and the housing can be reduced; by the driving member moving the medium in the gap, the agglomeration and crystallization of the particles in the medium can be inhibited, so as to extend the available time of the filtered medium.
[0042] In order to make the above-mentioned objects, features, and advantages of the embodiments of the present disclosure more obvious and understandable, the following will describe in detail the specific embodiments of the present disclosure with reference to the accompanying drawings.
[0043] Reference Figure 1 , Figure 1 shows a schematic cross-sectional structure diagram of the first embodiment of the filtering device in the present disclosure.
[0044] In this embodiment, the filtering device may include: a housing 10, a filter element 20, and a driving member 30; wherein, the housing 10 has a cavity structure, so that the filter element 20 can be located inside the housing 10; there is a gap a between the filter element 20 and the housing 10, so that the medium filtered by the filter element will remain in the gap a; the driving member 30 can inhibit the aggregation and crystallization of particles in the medium by moving the medium in the gap a, and thus can extend the available time of the filtered medium.
[0045] In some examples, the filter element 20 and the housing 10 are coaxially arranged or have parallel extending directions.
[0046] In some examples, the gap a may include a first gap a1 and / or a second gap a2; wherein, the first gap a1 is a gap along the axial direction of the filter element 20, located between the end of the filter element 20 and the housing 10; the second gap a2 is an annular gap extending along the circumferential direction of the filter element 20.
[0047] It should be noted that when the gap a has both the first gap a1 and the second gap a2 at the same time, the first gap a1 and the second gap a2 are connected. In the following examples, the case where the gap a has both the first gap a1 and the second gap a2 at the same time is taken as an example for description.
[0048] In some examples, the driving member 30 may include: a rotating member 31 and a driving motor 32, the rotating member 31 is connected to the driving motor 32, and the rotating member 31 is located in the gap a, so that the rotating member 31 can directly drive the medium in the gap a to move under the control of the driving motor 32.
[0049] In some examples, the rotating member 31 may include: a rotating shaft 311 and a rotating blade 312, wherein, the rotating blade 312 is fixedly connected to the rotating shaft 311, for example, integrally formed, screwed, etc.; one end of the rotating shaft 311 passing through the housing 10 is connected to the driving motor 32, and the rotating shaft 311 is rotatably connected to the housing 10 and is in sealing cooperation.
[0050] As a specific application example, the rotating shaft 311 is coaxially arranged with the filter element 20. In this way, the rotating blade 312 is located in the first gap a1. By rotating the rotating shaft 311, the rotating blade 312 will directly drive the medium in the first gap a1 to flow circumferentially along the inner wall of the housing 10, and the medium in the second gap a2 will move circumferentially along the inner wall of the housing 10 under the action of the medium in the first gap a1.
[0051] It can be understood that the above embodiments are only for illustrative purposes to exemplify the possible installation positions of the driving member 30 in the gap a, and should not be construed as a limitation on the actual installation position of the driving member 30 in the gap a in the present disclosure. For example, in other examples, the driving member 30 can also be arranged at any position in the gap a other than the first gap a1.
[0052] In some examples, the number of the rotating blades 312 can be multiple, and the multiple rotating blades 312 are evenly distributed circumferentially along the rotating shaft 311, which can reduce the vibration of the housing 10 caused by driving the medium and increase the stability of the filtering device.
[0053] In some examples, the housing 10 has a liquid discharge channel b, and the liquid discharge channel b is adapted to communicate with the gap a and the recovery device, so that the medium in the gap a can enter the recovery device, realizing the emptying and recovery of the medium in different scenarios. For example, when replacing the filter element, the medium in the gap a needs to be emptied and recovered.
[0054] In some examples, the filtering device can further include a liquid discharge valve (not shown in the figure), and the liquid discharge valve is adapted to shut off and conduct the liquid discharge channel b.
[0055] In some examples, the filtering device can include a liquid discharge pipe (not shown in the figure), the liquid discharge pipe is adapted to communicate the liquid discharge channel b and the recovery device, and the liquid discharge valve is arranged on the liquid discharge pipe and is adapted to shut off and conduct the liquid discharge pipe to shut off and conduct the liquid discharge channel b.
[0056] In some examples, the liquid discharge channel b is arranged at the bottom of the housing 10, so that the medium in the gap a can be better discharged from the filtering device.
[0057] In this embodiment, the filtering device can further include an end cap 40, and the end cap 40 is arranged at the port of the housing 10 to block the port of the housing 10.
[0058] In some examples, the end cap 40 is detachably connected to the housing 10, for example, by threaded connection or plug-in connection, so as to facilitate the replacement of the filter element 20.
[0059] In some examples, the end cap 40 is detachably connected to the filter element 20, for example, by screw connection or plug connection, so as to facilitate the replacement of the filter element 20.
[0060] In some examples, the filter element 20 can be a filter cartridge. Among them, the filter cartridge can refer to existing filter cartridges, for example, a five-layer filter cartridge, which will not be elaborated here.
[0061] In some examples, the end cap 40 can have a liquid supply channel c, and the liquid supply channel c is adapted to connect a liquid supply device and the filter element 20, so that the medium provided by the liquid supply device can enter the filter element 20 for filtration.
[0062] In some examples, the filtering device can further include a liquid supply valve (not shown in the figure), and the liquid supply valve is adapted to shut off and conduct the liquid supply channel c.
[0063] In some examples, the filtering device can include a liquid supply pipe (not shown in the figure), the liquid supply pipe is adapted to connect the liquid supply channel c and the liquid supply device, and the liquid supply valve is arranged on the liquid supply pipe and is adapted to shut off and conduct the liquid supply pipe to shut off and conduct the liquid supply channel c.
[0064] In some examples, the end cap 40 can have a liquid outlet channel d, and the liquid outlet channel d is adapted to connect the gap a and the liquid using device, so that the medium filtered by the filtering device can enter the liquid using device and be used by the liquid using device.
[0065] In some examples, the filtering device can further include a liquid outlet valve (not shown in the figure), and the liquid outlet valve is adapted to shut off and conduct the liquid outlet channel d.
[0066] In some examples, the filtering device can include a liquid outlet pipe (not shown in the figure), the liquid outlet pipe is adapted to connect the liquid outlet channel d and the liquid outlet device, and the liquid outlet valve is arranged on the liquid outlet pipe and is adapted to shut off and conduct the liquid outlet pipe to shut off and conduct the liquid outlet channel d.
[0067] In some examples, the end cap 40 can have an exhaust channel e, and the exhaust channel e is adapted to connect an exhaust gas treatment device and the filter element 20, so that the exhaust gas generated during the process of the filter element 20 filtering the medium can enter the exhaust gas treatment device for exhaust gas treatment.
[0068] In some examples, the filtering device can further include an exhaust valve (not shown in the figure), and the exhaust valve is adapted to shut off and conduct the exhaust channel e.
[0069] In some examples, the filtering device may include an exhaust pipe (not shown in the figure), the exhaust pipe being adapted to communicate with the exhaust passage e and the waste gas treatment device, and the exhaust valve being disposed on the exhaust pipe and adapted to shut off and conduct the exhaust pipe, thereby shutting off and conducting the exhaust passage e.
[0070] In some examples, the end cap 40 may further have a receiving cavity f. Wherein, the receiving cavity f communicates with the liquid supply passage c, the receiving cavity f communicates with the filter element 20, and the size of the receiving cavity f is larger than that of the liquid supply passage c, so as to provide a buffer space for the medium within the end cap 40.
[0071] In some examples, the receiving cavity f may further communicate with the exhaust passage e, and the exhaust passage e is located at the top of the receiving cavity f, so as to better collect the waste gas generated in the end cap 40 and the filter element 20.
[0072] As a specific application example, when the liquid supply valve is opened, the medium can sequentially enter the filter element 20 through the liquid supply pipe, the liquid supply passage c, and the receiving cavity f for filtering, and the filtered medium enters the gap a; when the exhaust valve is opened, the waste gas generated by the medium in the liquid supply passage c, the receiving cavity f, and the filter element 20 can be discharged from the filtering device through the exhaust passage e; when the liquid outlet valve is opened, the medium in the gap a can sequentially leave the filtering device through the liquid outlet passage d and the liquid outlet pipe; when the liquid-using device stops working, by driving the driving member 30 to rotate with the driving motor, the medium in the gap a flows circumferentially along the inner wall of the housing 10 under the drive of the driving member 30; when it is necessary to replace the filter element 20, the drain valve is opened, and the medium in the gap a is discharged from the filtering device through the drain passage b and the drain pipe in sequence.
[0073] With reference to Figures 2 to 4 wherein, Figure 2 shows a schematic cross-sectional structure of a second embodiment of the filtering device in the present disclosure, Figure 3 shows Figure 2 the schematic cross-sectional structure at A-A in Figure 4 shows a schematic structure of the drive pipe of the second embodiment of the filtering device in the present disclosure.
[0074] The similarities between the filtering device in the present disclosure and the first embodiment will not be elaborated herein. The differences between the filtering device in the present disclosure and the first embodiment are as follows:
[0075] The housing 10 further has a first driving channel g1 and a second driving channel g2; the driving member 30 has an input end and an output end. Among them, the first driving channel g1 communicates the gap a with the input end of the driving member 30, and the second driving channel g2 communicates the gap a with the output end of the driving member 30. The driving member 30 is adapted to drive the medium in the first driving channel g1 to move into the second driving channel g2.
[0076] At this time, the medium in the gap a will supplement the medium in the first driving channel g1, and the original medium in the second driving channel g2 will enter the gap a, which means that, under the drive of the driving member 30, the medium in the gap a can move through the first driving channel g1 to the second driving channel g2 and finally return to the gap a, so as to realize the movement of the medium in the gap a.
[0077] In some examples, the driving member 30 may include a driving pump 33 and a driving tube 34. The input end of the driving tube 34 communicates with the first driving channel g1, and the output end of the driving tube 34 communicates with the second driving channel g2. The driving tube 34 passes through the driving pump 33, and the driving pump 33 is adapted to drive the medium in the driving tube 34 from the input end to the output end.
[0078] In some examples, the driving pump 33 may be a peristaltic pump.
[0079] It can be understood that the above embodiments are only for illustrative purposes to illustrate possible implementation manners of the driving member, and should not be construed as a limitation on the driving member in the present disclosure. Any possible driving member recognized by those skilled in the art for driving the medium in the first driving channel to move into the second driving channel can be equivalently substituted for the driving member in the present disclosure. For example, in other examples, the driving member may also be a vacuum pump and two driving tubes, where one driving tube is used to connect the input end of the vacuum pump and the first driving channel, and the other driving tube is used to connect the output end of the vacuum pump and the second driving channel.
[0080] In some examples, the number of the first driving channels g1 may be multiple, and the input end of the driving tube 34 may have a plurality of first bifurcation units 341 spaced apart, and one first bifurcation unit 341 communicates with one first driving channel g1, which can reduce the movement dead zone of the medium in the gap a.
[0081] In some examples, multiple first driving channels g1 may be distributed along the extending direction of the housing 10, and / or multiple first driving channels g1 may be distributed along the circumferential direction of the housing 10, which can further reduce the movement dead zone of the medium in the gap a.
[0082] In some examples, the number of the second driving channels g2 can be multiple, and the output end of the driving tube 34 can have a plurality of second bifurcation units 342 spaced apart therefrom. One second bifurcation unit 342 communicates with one second driving channel g2, which can reduce the dead zone of the movement of the medium in the gap a.
[0083] In some examples, the multiple second driving channels g2 can be distributed along the extending direction of the housing 10, and / or the multiple second driving channels g2 can be distributed along the circumferential direction of the housing 10, which can further reduce the dead zone of the movement of the medium in the gap a.
[0084] In some examples, the included angle between the axis of the second driving channel g2 and the extending direction of the housing 10 is a first included angle, and there is at least one first included angle of the second driving channel g2 that is different from the first included angles of other second driving channels g2, which can further reduce the dead zone of the movement of the medium in the gap a.
[0085] In some examples, the included angle between the axis of the second driving channel g2 and the tangent line at its position is a second included angle, and there is at least one second included angle of the second driving channel g2 that is different from the second included angles of other second driving channels g2, which can further reduce the dead zone of the movement of the medium in the gap a.
[0086] It can be understood that the above embodiments provide multiple implementation schemes, and each implementation scheme can be combined and cross-referenced with each other without conflict, so as to extend multiple possible implementation schemes, all of which can be regarded as the implementation schemes disclosed and made public in the embodiments of the present application.
[0087] It should be noted that the "examples" or "embodiments" referred to in this specification refer to specific features, structures or characteristics that can be included in at least one implementation manner of the embodiments of the present disclosure.
[0088] Although the embodiments of the present disclosure are disclosed as above, the present disclosure is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the protection scope of this specification should be subject to the scope defined by the claims.
Claims
1. A filtering device, characterized in that, Comprising: A housing; A filter element, which is located inside the housing and has a gap with the housing; A driving member for moving the medium in the gap.
2. The filtering device according to claim 1, characterized in that, The driving member includes: A rotating member, which is located in the gap; A driving motor, which is connected to the rotating member.
3. The filtering device according to claim 2, characterized in that, The rotating member includes: A rotating shaft, which is coaxially arranged with the filter element, and one end of the rotating shaft passing through the housing is connected to the driving motor; A rotating blade, which is fixedly connected to the rotating shaft.
4. The filtering device according to claim 1, characterized in that, The driving member has an input end and an output end; The housing further has: A first driving channel, which communicates the gap with the input end of the driving member; A second driving channel, which communicates the output end of the driving member with the gap.
5. The filtering device according to claim 4, characterized in that, The driving member includes: A driving pump; A driving pipe, which passes through the driving pump, the input end of the driving pipe is communicated with the first driving channel, and the output end of the driving pipe is communicated with the second driving channel.
6. The filtering device according to claim 4, characterized in that, The number of the first driving channels is multiple, and the input end of the driving member has multiple first bifurcation units spaced apart, and one first bifurcation unit is communicated with one first driving channel; And / or, the number of the second driving channels is multiple, and the output end of the driving member has multiple second bifurcation units spaced apart, and one second bifurcation unit is communicated with one second driving channel.
7. The filtering device according to claim 5, characterized in that, It further includes: An end cap, which has a liquid supply channel and a liquid discharge channel; wherein, the liquid supply channel communicates a liquid supply device and the filter element, and the liquid discharge channel communicates the gap and a liquid using device.
8. The filtering device according to claim 7, wherein The end cap further has a receiving cavity, which communicates the liquid supply channel and the filter element.
9. The filtering device according to claim 7, characterized in that, The end cap further has an exhaust channel, which is communicated with the liquid supply channel.
10. The filtering device according to claim 1, characterized in that, The housing further has a liquid discharge channel, which is communicated with the gap.