Planetary pot and coating device

Abstract

The utility model relates to a planetary pot and a coating device, the planetary pot comprises a pot body, a cover plate, a base and a crimping piece, the pot body is arranged around the cover plate, the base is located on the pot body, and the base is provided with a rotating shaft. The crimping part comprises a fixing part and a crimping part, the fixing part sleeves the outer side of the rotating shaft, and the crimping part rotates around the axial direction of the rotating shaft so as to leave from or abut against the cover plate. Due to the fact that the base is provided with the rotating shaft, the fixing part is arranged around the rotating shaft, and the pressing connection part rotates in the axial direction of the rotating shaft to leave or abut against the cover plate, the planet pot can fix the cover plate through rotation of the pressing connection part, and the convenience of cover plate buckling operation can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and particularly to a planetary pot and a coating device. Background Art

[0002] A planetary pot is an efficient device for evaporation coating on an electron beam evaporation platform. The wafers inside the pot can revolve around the central axis and also rotate on their own. This compound motion mode enables the wafers to be heated and processed extremely uniformly inside the pot. During the evaporation coating process, heat is provided by a heating system to evaporate the coating material, which then moves in a vacuum environment to the surface of the wafers to form a thin film.

[0003] When using the planetary pot, after placing the wafers into the wafer slots of the planetary pot and covering the planetary pot cover, it is necessary to fix the cover with a cover buckle.

[0004] One end of the current cover buckle is fixed to the planetary pot through a spring, and the other end directly abuts against the cover. When using the cover buckle, it is necessary to lift the other end. Since the overall size of the cover buckle is small, it is inconvenient to lift this cover buckle during use. Utility Model Content

[0005] An embodiment of this application provides a planetary pot, aiming to improve the convenience of operating the cover buckle.

[0006] An embodiment of this application provides a planetary pot, including:

[0007] A pot body and a cover, the pot body is arranged around the cover;

[0008] A base, located on the pot body, the base has a rotating shaft;

[0009] A pressing member, including a fixing portion and a pressing portion, the fixing portion is sleeved outside the rotating shaft, and the pressing portion rotates around the axial direction of the rotating shaft to move away from or abut against the cover.

[0010] In some embodiments, the fixing portion includes a first end portion and a second end portion, the second end portion is connected between the first end portion and the pressing portion, and the second end portion is sleeved outside the rotating shaft.

[0011] In some embodiments, the pressing portion has a third end portion away from the first end portion, and the dimension of the third end portion to the rotating shaft along a first direction is greater than the dimension of the first end portion to the rotating shaft along the first direction, the first direction is perpendicular to the axial direction of the rotating shaft.

[0012] In some embodiments, the pressing member further includes an abutting portion, the abutting portion is connected to the third end portion of the pressing portion.

[0013] In some embodiments, the base includes a first surface connected to the pot body, the third end portion includes an end surface parallel to the first surface, and the crimping portion is located on the end surface.

[0014] In some embodiments, the base includes a base, a first side plate and a second side plate connected to the base, and the first side plate and the second side plate are oppositely arranged along the axial direction of the rotation axis;

[0015] A receiving groove for receiving part of the crimping member is formed among the first side plate, the second side plate and the base, and both ends of the rotation axis are connected between the first side plate and the second side plate.

[0016] In some embodiments, the crimping member is bent towards the base.

[0017] In some embodiments, the base includes an opposite first surface and a second surface, the first surface is connected to the pot body, and the second surface protrudes away from the first surface.

[0018] In some embodiments, the first end portion has an opposite third surface and a fourth surface, the fourth surface is located on the side of the third surface away from the pot body, and a groove recessed relative to the fourth surface is formed inside the first end portion.

[0019] The embodiment of the present application further provides a coating device, including the planetary pot in any of the above embodiments.

[0020] The embodiment of the present application provides a planetary pot and a coating device. Since the base has a rotation axis, the fixing portion is arranged around the rotation axis, and the crimping portion rotates around the axial direction of the rotation axis to leave or abut against the cover plate, the planetary pot can fix the cover plate by the rotation of the crimping portion, so the convenience of the cover plate buckling operation can be improved. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can be obtained according to these drawings.

[0022] In order to more completely understand the present application and its beneficial effects, the following description will be made in conjunction with the drawings, in which the same reference numerals represent the same parts in the following description.

[0023] Figure 1 It is a schematic perspective view of a planetary pot provided by some embodiments of the present application;

[0024] Figure 2 provided by some embodiments of the present application Figure 1 The enlarged structural schematic diagram of the planetary pot at A;

[0025] Figure 3 provided by some embodiments of the present application Figure 1 The three-dimensional structural schematic diagram of the base and the crimping part;

[0026] Figure 4 provided by some embodiments of the present application Figure 3 The top-view structural schematic diagram of the base and the crimping part;

[0027] Figure 5 provided by some embodiments of the present application Figure 3 The side-view structural schematic diagram of the base and the crimping part;

[0028] Figure 6 provided by some embodiments of the present application Figure 3 The three-dimensional structural schematic diagram of the base;

[0029] Figure 7 provided by some embodiments of the present application Figure 3 The front view of the sectional structure of the base and the crimping part.

[0030] Reference numeral description: 100, planetary pot; 10, pot body; 20, cover plate; 30, base; 301, first surface; 31, rotating shaft; 32, base; 321, first surface; 322, second surface; 33, first side plate; 34, second side plate; receiving groove 35; 40, crimping part; 41, fixing part; 411, first end; 4110, groove; 4111, third surface; 4112, fourth surface; 412, second end; 42, crimping part; 421, third end; 4211, end face; 43, abutting part; 401, first side; 402, second side; 403, third side; 404, fourth side. Detailed implementation manners

[0031] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present application.

[0032] In the description of the present application, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of the present application, "a plurality of" means two or more unless otherwise specifically defined.

[0033] In an embodiment of a planetary pot, one end of the cover plate buckle is fixed to the planetary pot by a spring, and the other end directly abuts against the cover plate. When using the cover plate buckle, it is necessary to lift the other end. This way of using the elasticity of the spring to lift the cover plate buckle to leave or abut against the cover plate is not easy to operate due to its small structure.

[0034] The embodiment of the present application provides a planetary pot to solve the problem that the cover plate buckle is not convenient to operate.

[0035] The planetary pot provided by the embodiment of the present application includes: a pot body and a cover plate, the pot body is disposed around the cover plate; a base located on the pot body, the base having a rotating shaft; a pressing member including a fixing portion and a pressing portion, the fixing portion is sleeved outside the rotating shaft, and the pressing portion rotates around the axial direction of the rotating shaft to leave or abut against the cover plate.

[0036] Since the base has a rotating shaft, the fixing portion is arranged around the rotating shaft, and the pressing portion rotates around the axial direction of the rotating shaft to leave or abut against the cover plate, the planetary pot can fix the cover plate by the rotation of the pressing portion, so the convenience of operating the cover plate buckle can be improved.

[0037] In addition, compared with the way of lifting the cover plate buckle in an embodiment (it is easy to damage the cover plate due to poor control of the force), the operation method of rotating the pressing portion 42 by the rotating shaft 31 in the embodiment of the present application is less likely to damage the cover plate 20.

[0038] The following describes the structure of the planetary pot in some embodiments of the present application with reference to the drawings.

[0039] Please refer to Figures 1 to 3 , Figure 1 is a schematic three-dimensional structure diagram of the planetary pot provided by some embodiments of the present application, Figure 2 is provided by some embodiments of the present application Figure 1 The enlarged structure diagram of the planetary pot at A in Figure 3 is provided by some embodiments of the present application Figure 1 The schematic three-dimensional structure diagram of the base and the pressing member in

[0040] The planetary pot 100 includes a pot body 10, a cover plate 20, a base 30 and a crimping member 40. The pot body 10 is disposed around the cover plate 20. The base 30 is located on the pot body 10, and the base 30 has a rotating shaft 31. The crimping member 40 includes a fixing portion 41 and a crimping portion 42. The fixing portion 41 is sleeved outside the rotating shaft 31, and the crimping portion 42 rotates around the axial direction of the rotating shaft 31 to move away from or abut against the cover plate 20.

[0041] Among them, Figure 3 The boundary line between the fixing portion 41 and the crimping portion 42 is shown by a dotted line, that is, the rotating shaft 31 is located inside the fixing portion 41.

[0042] The pot body 10 is provided with a plurality of wafer grooves. After the wafers are placed in the wafer grooves, the wafers can be covered by the cover plate 20, so as to protect one side of the wafers close to the cover plate 20 during the evaporation process. Therefore, the cover plate 20 corresponds to the wafer grooves one by one, that is, a plurality of cover plates 20 are provided on one pot body 10.

[0043] When it is necessary to open the cover plate 20, the crimping portion 42 can be lifted by rotation to move away from the cover plate 20; when it is necessary to cover the cover plate 20, the crimping portion 42 can be pressed on the cover plate 20 by rotation, so as to realize the fixation of the cover plate 20. It should be noted that Figure 2 The embodiment shows the structure of the cover plate 20 in a fixed state (i.e., the covered state).

[0044] The base 30 can be fixedly installed on the pot body 10, and the crimping member 40 is installed on the rotating shaft 31 of the base 30, so as to realize the fixation and disassembly of the cover plate 20 during the rotation of the crimping member 40. Specifically, when the crimping portion 42 is lifted, it moves away from the cover plate 20, and at this time, the cover plate 20 can be taken away, and the cover plate 20 is fixed when the crimping portion 42 abuts against the cover plate 20.

[0045] In some embodiments, one cover plate 20 can be fixed by a plurality of crimping members 40, and the number of crimping members in this application is not limited.

[0046] For example, as Figure 1 shown, four bases 30 are provided on the pot body 10 around one cover plate 20, and one crimping member 40 is provided on each base 30. The four bases 30 can be evenly arranged around one cover plate 20, so as to improve the stability of the cover plate 20.

[0047] In some embodiments, the fixing part 41 includes a first end 411 and a second end 412. The second end 412 is connected between the first end 411 and the crimping part 42, and the second end 412 is sleeved outside the rotating shaft 31. Therefore, pressing the first end 411 can lift the crimping part 42, and releasing the first end 411 can lower the crimping part 42. This operation method is highly convenient.

[0048] Specifically, for example Figure 2 As shown, the second end 412 has a through hole, and the rotating shaft 31 is inserted into the through hole.

[0049] It should be noted that the "end" in this text refers to a partial structure at the end of a component. For example, the second end 412 of the fixing part 41 refers to a partial structure at one end of the fixing part 41, and the first end 411 refers to a partial structure at the other end of the fixing part 41.

[0050] Please refer to Figure 4 , Figure 4 which is a top view structural schematic diagram of the base and the crimping part provided by some embodiments of the present application. Figure 3

[0051] The crimping part 42 has a third end 421 away from the first end 411, and the dimension of the third end 421 to the rotating shaft 31 along the first direction X is greater than the dimension of the first end 411 to the rotating shaft 31 along the first direction X. The first direction X is perpendicular to the axial direction of the rotating shaft 31. Since the dimension of the third end 421 to the rotating shaft 31 is larger, the gravity of this part can be utilized to fix the cover plate 20.

[0052] Please refer to Figure 5 , Figure 5 which is a side view structural schematic diagram of the base and the crimping part provided by some embodiments of the present application. Figure 3

[0053] In some embodiments, the crimping part 40 further includes an abutting part 43, and the abutting part 43 is connected to the third end 421 of the crimping part 42. The abutting part 43 can directly abut and fix the cover plate 20, and a softer material for the abutting part 43 can be selected to protect the cover plate 20. Since the abutting part 43 is closer to the cover plate 20, only a smaller rotation angle is required to realize the picking, placing and fixing of the cover plate 20.

[0054] ​​In some embodiments, the base 30 includes a first surface 301 connected to the pot body 10. The third end 421 includes an end face 4211 parallel to the first surface 301, and the crimping portion 42 is located on the end face 4211. The parallelism between the end face 4211 and the first surface 301 is more conducive to the arrangement of the abutting portion 43. Specifically, the abutting portion 43 may extend in a direction perpendicular to the cover plate 20, and the abutting portion 43 may be a cylinder.

[0055] It should be noted that since the surface of the pot body 10 is a curved surface, the first surface 301 may also be a curved surface. However, due to the small area of the first surface 301, it can be regarded as a plane.

[0056] Please refer to Figure 6 , Figure 6 which is a schematic three-dimensional structure diagram of the base provided in some embodiments of the present application. Figure 3 in the base.

[0057] The base 30 includes a base 32, a first side plate 33 and a second side plate 34 connected to the base 32. The first side plate 33 and the second side plate 34 are oppositely arranged along the axial direction of the rotation shaft 31. An accommodation groove 35 for accommodating part of the crimping member 40 is formed between the first side plate 33, the second side plate 34 and the base 32, and both ends of the rotation shaft 31 are connected between the first side plate 33 and the second side plate 34.

[0058] Among them, the accommodation groove 35 is used to fix the rotation shaft 31 and the second end 412, and provide a rotation space for the crimping member 40.

[0059] Please refer to Figure 7 , Figure 7 which is a front view of the cross-sectional structure of the base and the crimping member provided in some embodiments of the present application. Figure 3 in the base and the crimping member.

[0060] The base 32 includes opposite first and second surfaces 321 and 322. The first surface 321 is connected to the pot body 10, and the second surface 322 protrudes in a direction away from the first surface 321 (upward in the figure).

[0061] In some embodiments, the crimping member 40 is bent toward the base 32.

[0062] Combined with Figure 3, the crimping member 40 includes opposite first and second side surfaces 401 and 402, and opposite third and fourth side surfaces 403 and 404. The first side surface 401 and the second side surface 402 are respectively located on both sides of the rotation axis 31, and the rotation axis 31 vertically passes through the third side surface 403 and the fourth side surface 404. Among them, both the first side surface 401 and the second side surface 402 bulge away from the base 32, that is, bend towards the base 32.

[0063] Since the second side surface 402 of the crimping member 40 bulges away from the base 32, the second side surface 402 of the crimping member 40 can be adapted to the second surface 322 of the base 32. The second side surface 402 of the crimping member 40 can contact the second surface 322 of the base 32, so the base 32 can provide a certain support for the crimping member 40.

[0064] In some embodiments, the first end portion 411 has opposite third and fourth surfaces 4111 and 4112. The fourth surface 4112 is located on the side of the third surface 4111 away from the pot body 10 (or the second surface 322), and a groove 4110 recessed relative to the fourth surface 4112 is formed inside the first end portion 411. This design of the groove 4110 is beneficial for pressing operations.

[0065] In some embodiments, the fourth surface 4112 of the first end portion 411 is higher than the first side surface 401 of the crimping member 40, that is, a step is formed at the junction of the fourth surface 4112 and the first side surface 401 of the crimping member 40, which is beneficial for adjusting the depth of the groove 4110.

[0066] In the planetary pot 100 provided by the embodiment of the present application, since the base 30 has a rotation axis 31, the fixing portion 41 is arranged around the rotation axis 31, and the crimping portion 42 rotates axially around the rotation axis 31 to leave or abut against the cover plate 20. Therefore, the planetary pot 100 can fix the cover plate 20 by the rotation of the crimping portion 42, which can improve the convenience of the cover plate buckling operation and reduce the scratching damage to the cover plate 20.

[0067] The embodiment of the present application also provides a coating device, which includes the planetary pot 100 in any of the above embodiments. The coating device has all the beneficial effects of the above planetary pot 100, which will not be elaborated here.

[0068] The coating device may further include an evaporation chamber, an evaporation source, and a driving assembly. The evaporation source is arranged at the bottom of the evaporation chamber and is used to convert the evaporation material into gas molecule evaporation material. The gas molecule evaporation material moves in the evaporation chamber to form an evaporation area. The plurality of planetary pots are correspondingly arranged in the evaporation area, and the driving assembly can drive each planetary pot to rotate.

[0069] In the above embodiments, the descriptions of the respective embodiments have their own focuses. For parts not described in detail in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0070] Among the embodiments, implementation manners and related technical features of the present application, they can be combined and replaced with each other without conflict.

[0071] The above are only the preferred embodiments of the present application, and do not impose any formal limitations on the present application. However, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application still fall within the scope of the technical solution of the present application.

Claims

1. A planetary pot, characterized in that, Comprising: A pot body and a cover plate, the pot body surrounding the cover plate; A base located on the pot body, the base having a rotating shaft; A crimping member including a fixing portion and a crimping portion, the fixing portion sleeved outside the rotating shaft, and the crimping portion rotating about the axial direction of the rotating shaft to move away from or abut against the cover plate.

2. The planetary pot according to claim 1, characterized in that, The fixing portion includes a first end portion and a second end portion, the second end portion being connected between the first end portion and the crimping portion, and the second end portion being sleeved outside the rotating shaft.

3. The planetary pot according to claim 2, wherein The crimping portion has a third end portion away from the first end portion, and the dimension of the third end portion along a first direction to the rotating shaft is greater than the dimension of the first end portion along the first direction to the rotating shaft, the first direction being perpendicular to the axial direction of the rotating shaft.

4. The planetary pot according to claim 3, characterized in that, The crimping member further includes an abutting portion, the abutting portion being connected to the third end portion of the crimping portion.

5. The planetary pot according to claim 4, characterized in that, The base includes a first surface connected to the pot body, the third end portion includes an end surface parallel to the first surface, and the crimping portion is located on the end surface.

6. The planetary pot according to claim 1, wherein, The base includes a base, and a first side plate and a second side plate connected to the base, the first side plate and the second side plate being oppositely arranged along the axial direction of the rotating shaft; An accommodating groove for accommodating part of the crimping member is formed between the first side plate, the second side plate and the base, and both ends of the rotating shaft are connected between the first side plate and the second side plate.

7. The planetary pot according to claim 6, characterized in that, The crimping member is bent towards the base.

8. The planetary pot according to claim 6, characterized in that, The base includes an opposite first surface and a second surface, the first surface being connected to the pot body, and the second surface protruding away from the first surface.

9. The planetary pot according to claim 2, characterized in that, The first end portion has an opposite third surface and a fourth surface, the fourth surface being located on a side of the third surface away from the pot body, and a groove recessed relative to the fourth surface is formed inside the first end portion.

10. A coating device, characterized in that, Including the planetary pot according to any one of claims 1 to 9.

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