Quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor material
By introducing a combined structure of screws, rectangular blocks and U-shaped plates into quartz products, the problem of insufficient gap between quartz boats and quartz columns is solved, the stable passage of phosphorus vapor and the stability of thermal field are achieved, and the synthesis quality and efficiency of indium phosphide polycrystals are improved.
Patent Information
- Application Number
- CN202521230601.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-17
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2035-06-17
AI Technical Summary
During the polycrystalline synthesis of indium phosphide, insufficient gap between the quartz boat, quartz column and quartz tube causes the phosphorus vapor to pass smoothly, and the internal heat field is unstable, affecting the material quality and synthesis efficiency.
A large-size high-purity indium phosphide polycrystalline semiconductor material synthesis quartz product is designed. Through the combined structure of screw rods, rectangular blocks, first and second special-shaped grooves, and U-shaped plates, the gap between the quartz phosphate boat, quartz column and quartz indium boat is ensured to achieve a stable thermal field environment.
It ensures the smooth passage of phosphorus vapor, improves the quality and stability of polycrystalline synthesis of indium phosphide, and improves the synthesis efficiency.
Smart Images
Figure CN223150695U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor materials, in particular to a quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials. Background Technique
[0002] As an important III-V group compound semiconductor material, indium phosphide (InP) has excellent properties such as high electron mobility and direct bandgap, and plays an irreplaceable role in fields such as 5G communication chips, optical communication devices, high-frequency microwave devices, and quantum computing. With the rapid development of the semiconductor industry, the demand for large-size and high-purity indium phosphide polycrystalline materials has increased sharply. As a key container for synthesizing indium phosphide polycrystals, the performance of the quartz crucible directly affects the quality and synthesis efficiency of the materials.
[0003] The preparation of indium phosphide polycrystals is the front end of the industrial chain. Efficient preparation of indium phosphide polycrystals is one of the important prerequisites for the steady development of the industrial chain. The synthesis of indium phosphide polycrystals is to place phosphorus and indium of a certain purity in a quartz product of a certain purity, and place the sealed vacuum material tube in the reaction synthesis equipment. The equipment will complete the synthesis growth of the crystal by controlling the pressure and growth temperature. When preparing large-size high-purity indium phosphide polycrystals, the gaps between the quartz boat, quartz column, and quartz tube cannot ensure sufficient distance, so that when reacting, the phosphorus vapor cannot pass smoothly, and thus the internal thermal field is unstable. Therefore, a quartz crucible for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials is designed. Summary of the Utility Model
[0004] The purpose of the utility model is to solve the deficiencies existing in the prior art and propose a quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials.
[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:
[0006] A quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials includes a quartz tube. A convex groove is provided at the top of the quartz tube, and a quartz cap is provided at one end of the quartz tube and the convex groove. Fixed blocks are fixedly connected to both ends of the convex groove. The same guiding rod is fixedly connected between the two fixed blocks. A rectangular block is slidably sleeved on the guiding rod. A circular hole adapted to the guiding rod is opened on the rectangular block. First special-shaped grooves are opened on both sides of the end of the rectangular block away from the quartz cap, and second special-shaped grooves are opened on both sides of the other end of the rectangular block. A quartz phosphorus boat is provided at one end of the inner wall of the quartz tube away from the quartz cap, and a quartz indium boat is provided at one end of the inner wall of the quartz tube close to the quartz cap.
[0007] Preferably, two first blocking rods are fixedly connected to both sides of the inner wall of the convex groove located at the first special-shaped groove. The same first U-shaped plate is slidably arranged among the four first blocking rods. One side close to each other at both ends of the top of the first U-shaped plate is fixedly connected with a first convex rod. Each first convex rod is slidably connected to the adjacent first special-shaped groove. Through the cooperation of the first special-shaped groove and the first convex rod, when the rectangular block moves initially, the first U-shaped plate can extend out.
[0008] Preferably, two second blocking rods are fixedly connected to both sides of the inner wall of the convex groove located at the second special-shaped groove. The same second U-shaped plate is slidably sleeved among the four second blocking rods. One side close to each other at both ends of the top of the second U-shaped plate is fixedly connected with a second convex rod. And each second convex rod is slidably connected to the adjacent second special-shaped groove. The cooperation of the second convex rod and the second special-shaped groove enables the second U-shaped plate not to extend out when the rectangular block moves initially, and the second U-shaped plate can extend out when the rectangular block moves again. Through the first U-shaped plate and the second U-shaped plate, the quartz phosphorous boat, the quartz column and the quartz indium boat are separated.
[0009] Preferably, four quartz columns are arranged at the middle part of the inner wall of the quartz tube. Grooves are formed at both ends of each quartz column.
[0010] Preferably, the first special-shaped groove includes a first horizontal groove and a first inclined groove, and one end of the first horizontal groove is communicated with the bottom of the first inclined groove. The second special-shaped groove includes a second horizontal groove and a second inclined groove, and one end of the second horizontal groove is communicated with the top of the second inclined groove.
[0011] Preferably, a lead screw is rotatably connected between the two fixed blocks, and the lead screw threadedly penetrates through the rectangular block. A lead screw nut adapted to the lead screw is fixedly sleeved in the middle of the rectangular block. One end of the lead screw close to the quartz cap penetrates through the fixed block and is fixedly connected with an internal hexagonal nut.
[0012] The beneficial effects of the present utility model are as follows:
[0013] Due to technical means such as the lead screw, the rectangular block, the first special-shaped groove, the second special-shaped groove, the first U-shaped plate and the second U-shaped plate, when the quartz phosphorous boat is placed at the innermost end of the quartz tube, through the movement of the rectangular block, the first U-shaped plate extends out. Then, four quartz columns are placed. The rectangular block is moved again to make the second U-shaped plate descend. Then, the quartz indium boat is placed, so that the gaps among the quartz phosphorous boat, the quartz column and the quartz indium boat are sufficient, effectively solving the problem of insufficient gaps in the background technology, and further realizing sufficient gaps among the quartz phosphorous boat, the quartz column and the quartz indium boat, which can not only ensure the smooth passage of phosphorus vapor, but also make the internal thermal field of the quartz tube more stable, and improve the quality of indium phosphide polycrystal synthesis. Description of the Drawings
[0014] Figure 1Schematic diagram of the overall structure of a quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials proposed by the present utility model;
[0015] Figure 2 Schematic cross-sectional structure diagram of a quartz tube of a quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials proposed by the present utility model;
[0016] Figure 3 Schematic diagram of the internal structure of a groove of a quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials proposed by the present utility model;
[0017] Figure 4 Schematic enlarged structure diagram of a first U-shaped plate of a quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials proposed by the present utility model;
[0018] Figure 5 Schematic enlarged structure diagram of a second U-shaped plate of a quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials proposed by the present utility model.
[0019] In the figure: 1. Quartz tube; 2. Convex groove; 3. Quartz cap; 4. Quartz phosphorus boat; 5. Quartz indium boat; 6. Quartz column; 601. Groove; 7. Fixed block; 8. Guide rod; 9. Screw rod; 10. Hexagon socket nut; 11. Rectangular block; 1101. First special-shaped groove; 1102. Second special-shaped groove; 12. First stop rod; 13. First U-shaped plate; 1301. First convex rod; 14. Second stop rod; 15. Second U-shaped plate; 1501. Second convex rod. Detailed implementation manners
[0020] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments.
[0021] Refer to Figures 1 - 5, A quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials, including a quartz tube 1. There is a convex groove 2 at the top of the quartz tube 1, and a quartz cap 3 is provided at one end of the quartz tube 1 and the convex groove 2. Fixed blocks 7 are fixedly connected to both ends of the convex groove 2. The same guide rod 8 is fixedly connected between the two fixed blocks 7. A rectangular block 11 is slidably sleeved on the guide rod 8. A round hole adapted to the guide rod 8 is opened on the rectangular block 11. First special-shaped grooves 1101 are opened on both sides of the end of the rectangular block 11 away from the quartz cap 3. Second special-shaped grooves 1102 are opened on both sides of the other end of the rectangular block 11. A quartz phosphorus boat 4 is provided at one end of the inner wall of the quartz tube 1 away from the quartz cap 3, and a quartz indium boat 5 is provided at one end of the inner wall of the quartz tube 1 close to the quartz cap 3. The purity requirements of all quartz products are above 99.99%. The contents of elements such as Al, K, Na, Li, Ca, Mg, Ti, Fe, and B are strictly controlled. The length of the quartz tube 1 is 1600 mm - 1700 mm, the inner diameter is 160 - 170 mm, the wall thickness is 6 mm ± 1 mm, and there are no defects such as air bubbles and air lines. The quartz phosphorus boat 4 and the quartz indium boat 5 are containers for loading red phosphorus and indium, with a length of 500 - 700 mm, an inner diameter of 150 - 160 mm, and a wall thickness of 4.5 mm ± 0.5 mm. The inner and outer surfaces of the boat are frosted surfaces.
[0022] In the present utility model, two first stop rods 12 are fixedly connected to both sides of the inner wall of the convex groove 2 located at the first special-shaped groove 1101. The same first U-shaped plate 13 is slidably arranged among the four first stop rods 12. First convex rods 1301 are fixedly connected to the sides of the two ends of the top of the first U-shaped plate 13 close to each other. Each first convex rod 1301 is slidably connected to the adjacent first special-shaped groove 1101.
[0023] In the present utility model, two second stop rods 14 are fixedly connected to both sides of the inner wall of the convex groove 2 located at the second special-shaped groove 1102. The same second U-shaped plate 15 is slidably sleeved among the four second stop rods 14. Second convex rods 1501 are fixedly connected to the sides of the two ends of the top of the second U-shaped plate 15 close to each other, and each second convex rod 1501 is slidably connected to the adjacent second special-shaped groove 1102.
[0024] In the present utility model, four quartz columns 6 are arranged at the middle of the inner wall of the quartz tube 1. Grooves 601 are opened at both ends of each quartz column 6. The grooves 601 are about 2 mm deep, which can prevent the columns from sticking and also provide space for the passage of phosphorus vapor. The length of the quartz column 6 is 100 - 150 mm, and the diameter is 155 - 165 mm.
[0025] In the present utility model, the first special-shaped groove 1101 includes a first horizontal groove and a first inclined groove, and one end of the first horizontal groove is communicated with the bottom of the first inclined groove. The second special-shaped groove 1102 includes a second horizontal groove and a second inclined groove, and one end of the second horizontal groove is communicated with the top of the second inclined groove. Through the settings of the first special-shaped groove 1101 and the second special-shaped groove 1102, the first U-shaped plate 13 and the second U-shaped plate 15 can move in sequence, facilitating the sequential placement of the quartz phosphorous boat 4, the quartz indium boat 5, and the quartz column 6.
[0026] In the present utility model, a lead screw 9 is also rotatably connected between two fixing blocks 7, and the lead screw 9 threadedly penetrates through the rectangular block 11. A lead screw nut adapted to the lead screw 9 is fixedly sleeved in the middle of the rectangular block 11. One end of the lead screw 9 close to the quartz cap 3 penetrates through the fixing block 7 and is fixedly connected with an internal hexagonal nut 10. By rotating the internal hexagonal nut 10, the lead screw 9 can be made to drive the rectangular block 11 to rotate.
[0027] Working principle: When in use, first place the quartz phosphorous boat 4 filled with phosphorus into the quartz tube 1, such that the quartz phosphorous boat 4 is located at the very end of the quartz tube 1. Then use a tool to rotate the internal hexagonal nut 10, causing the lead screw 9 to rotate, and further causing the rectangular block 11 to move. When the rectangular block 11 moves, the first convex rod 1301 of the first U-shaped plate 13 is in the first inclined groove of the first special-shaped groove 1101, causing the first U-shaped plate 13 to descend and block the quartz phosphorous boat 4. At the same time, the second convex rod 1501 slides in the second horizontal groove of the second special-shaped groove 1102 and does not extend out. Then place four quartz columns 6. Then rotate the internal hexagonal nut 10 again, causing the rectangular block 11 to move. At this time, the first convex rod 1301 slides in the first horizontal groove of the first special-shaped groove 1101, and the first U-shaped plate 13 does not move, while the second convex rod 1501 slides in the second inclined groove of the second special-shaped groove 1102, causing the second U-shaped plate 15 to extend, such that the four quartz columns 6 are between the first U-shaped plate 13 and the second U-shaped plate 15. Then place the quartz indium boat 5 filled with indium into the quartz tube 1. Finally, seal the quartz tube 1 with the quartz cap 3. Through the settings of the first U-shaped plate 13 and the second U-shaped plate 15, the distance between the quartz phosphorous boat 4, the quartz column 6, and the quartz indium boat 5 is between 4 - 6 mm, which can not only ensure the smooth passage of phosphorus vapor but also make the internal thermal field more stable. Finally, place the quartz tube 1 in a reaction chamber for reaction. All the metal components inside this device are made of high-temperature-resistant tungsten alloy.
[0028] The above is only the preferred specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution of the present utility model and its inventive concept, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present utility model.
Claims
1. A quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials, including a quartz tube (1), characterized in that, A convex groove (2) is provided at the top of the quartz tube (1), and a quartz cap (3) is provided at one end of the quartz tube (1) and the convex groove (2). Fixed blocks (7) are fixedly connected to both ends of the convex groove (2), and the same guide rod (8) is fixedly connected between the two fixed blocks (7). A rectangular block (11) is slidably sleeved on the guide rod (8). A round hole adapted to the guide rod (8) is formed in the rectangular block (11). First special-shaped grooves (1101) are formed on both sides of one end of the rectangular block (11) away from the quartz cap (3), and second special-shaped grooves (1102) are formed on both sides of the other end of the rectangular block (11). A quartz phosphorus boat (4) is provided at one end of the inner wall of the quartz tube (1) away from the quartz cap (3), and a quartz indium boat (5) is provided at one end of the inner wall of the quartz tube (1) close to the quartz cap (3).
2. The quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials according to claim 1, wherein Two first stop rods (12) are fixedly connected to both sides of the inner wall of the convex groove (2) where the first special-shaped groove (1101) is located. The same first U-shaped plate (13) is slidably arranged among the four first stop rods (12). First convex rods (1301) are fixedly connected to the sides close to each other at both ends of the top of the first U-shaped plate (13), and each first convex rod (1301) is slidably connected to the adjacent first special-shaped groove (1101).
3. The quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials according to claim 1, characterized in that, Two second stop rods (14) are fixedly connected to both sides of the inner wall of the convex groove (2) where the second special-shaped groove (1102) is located. The same second U-shaped plate (15) is slidably sleeved among the four second stop rods (14). Second convex rods (1501) are fixedly connected to the sides close to each other at both ends of the top of the second U-shaped plate (15), and each second convex rod (1501) is slidably connected to the adjacent second special-shaped groove (1102).
4. The quartz article for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor materials according to claim 1, characterized in that, Four quartz columns (6) are provided at the middle of the inner wall of the quartz tube (1), and grooves (601) are formed at both ends of each quartz column (6).
5. The quartz article for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor material according to claim 1, characterized in that, The first special-shaped groove (1101) includes a first horizontal groove and a first inclined groove, and one end of the first horizontal groove is communicated with the bottom of the first inclined groove. The second special-shaped groove (1102) includes a second horizontal groove and a second inclined groove, and one end of the second horizontal groove is communicated with the top of the second inclined groove.
6. The quartz product for synthesizing large-size high-purity indium phosphide polycrystalline semiconductor material according to claim 1, wherein A lead screw (9) is also rotatably connected between the two fixed blocks (7), and the lead screw (9) threadedly penetrates through the rectangular block (11). A lead screw nut adapted to the lead screw (9) is fixedly sleeved in the middle of the rectangular block (11). One end of the lead screw (9) close to the quartz cap (3) penetrates through the fixed block (7) and is fixedly connected with an internal hexagonal nut (10).