Liquid medicine tank assembly and wet etching machine table

Abstract

The utility model discloses a liquid medicine tank assembly and a wet etching machine table, and relates to the technical field of semiconductor cleaning and etching, and the liquid medicine tank assembly comprises a liquid medicine tank body, a circulating filtration assembly and a cache assembly; the liquid medicine tank body is provided with a liquid medicine cavity; the circulating filtering assembly comprises a filter, a circulating pump, a circulating switch valve, a first circulating pipe and a second circulating pipe; the first circulating pipe is connected to the liquid medicine cavity and the liquid inlet end of the circulating pump; the second circulating pipe is connected to the liquid outlet end of the circulating pump and the liquid medicine cavity; the filter is arranged on the first circulating pipe or the second circulating pipe; the circulation switch valve is arranged on the first circulation pipe; a buffer storage groove of the buffer storage assembly is provided with a sealed buffer storage cavity; one end of a first cache pipe and one end of a second cache pipe of the cache assembly are connected to the first circulating pipe; and the other ends of the first buffer tube and the second buffer tube are communicated with the buffer cavity. The designed liquid medicine tank assembly can temporarily store the liquid medicine in a sealed buffer storage cavity when the liquid medicine is not used, volatilization is prevented, and the chemical stability and the cleaning and etching effect of the liquid medicine are guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor cleaning and etching, and particularly relates to a liquid medicine tank assembly and a wet etching machine tool. Background Art

[0002] In the process of semiconductor manufacturing, cleaning is a crucial step to remove impurities and particles on the surface of the wafer, while wet etching is a technology that removes materials in specific areas on the surface of the wafer through chemical reactions. In order to improve the efficiency and quality of cleaning and etching, the design of the liquid medicine tank in the semiconductor cleaning machine tool is of vital importance. The liquid medicine tank needs to ensure that the liquid medicine can fully and evenly contact the surface of the workpiece to achieve the best cleaning and etching effects.

[0003] Traditional liquid medicine tank designs usually include a static liquid medicine storage space, where the liquid medicine remains stationary during use. However, this design has obvious limitations, that is, the contact efficiency between the liquid medicine and the workpiece is relatively low, resulting in unsatisfactory cleaning and etching effects. To solve this problem, some advanced semiconductor cleaning machine tools have begun to adopt a circulating filtration module to improve the contact efficiency between the liquid medicine and the workpiece through the circulating flow of the liquid medicine. For example, the patent application No. CN118053795A discloses a scientific research type wet etching fully automated system and machine tool. By adding a circulating device, the circulating flow of the liquid medicine is realized, so that the liquid medicine in the liquid medicine chamber is in a dynamic state, contacting the workpiece more fully, and significantly improving the cleaning and etching effects.

[0004] However, the existing liquid medicine pipeline system still has deficiencies. When the liquid medicine is not in use, the liquid medicine can only stay in the liquid medicine chamber. Long-term static placement will cause the liquid medicine to volatilize, which not only causes waste of the liquid medicine, but also may pollute the environment. In addition, the volatilization of the liquid medicine may also affect the chemical stability of the liquid medicine, thereby affecting the cleaning and etching effects.

[0005] Therefore, there is an urgent need for a new technical solution to solve the above technical problems. Summary of the Utility Model

[0006] In view of this, the purpose of the present application is to provide a liquid medicine tank assembly and a wet etching machine tool, which can effectively store the liquid medicine temporarily when the liquid medicine is not in use, prevent the liquid medicine from volatilizing, and at the same time ensure that the liquid medicine can quickly return to the circulating flow state when needed to maintain the chemical stability of the liquid medicine and the cleaning and etching effects.

[0007] To achieve the above technical purpose, the present application provides a liquid medicine tank assembly, including a liquid medicine tank body, a circulating filtration component, and a caching component;

[0008] The liquid medicine tank body is provided with a liquid medicine chamber;

[0009] The circulating filtration component includes a filter, a circulating pump, a circulating switch valve, a first circulating pipe, and a second circulating pipe;

[0010] One end of the first circulating pipe is connected and communicated with the liquid medicine chamber, and the other end is communicated with the liquid inlet end of the circulating pump;

[0011] One end of the second circulating pipe is connected and communicated with the liquid outlet end of the circulating pump, and the other end is communicated with the liquid medicine chamber;

[0012] The filter is arranged in the first circulating pipe or the second circulating pipe;

[0013] The circulating switch valve is arranged in the first circulating pipe;

[0014] The buffer component includes a buffer tank, a first buffer pipe, a second buffer pipe, a first buffer switch valve, and a second buffer switch valve;

[0015] The buffer tank is provided with a sealed buffer chamber;

[0016] One end of the first buffer pipe is connected to the first circulating pipe and is located between the circulating switch valve and the liquid medicine tank body;

[0017] The other end of the first buffer pipe communicates with the buffer chamber;

[0018] One end of the second buffer pipe is connected to the first circulating pipe and is located between the circulating switch valve and the circulating pump;

[0019] The other end of the second buffer pipe communicates with the buffer chamber;

[0020] The first buffer switch valve is arranged in the first buffer pipe;

[0021] The second buffer switch valve is arranged in the second buffer pipe.

[0022] Further, the buffer component further includes a third buffer pipe and a third buffer switch valve;

[0023] One end of the third buffer pipe communicates with the buffer chamber;

[0024] The third buffer switch valve is arranged in the third buffer pipe.

[0025] Further, a liquid discharge component is further included;

[0026] The liquid discharge component includes a flushing discharge pipe, a waste liquid discharge pipe, a flushing switch valve, and a waste liquid switch valve;

[0027] One end of the flushing discharge pipe and one end of the waste liquid discharge pipe are respectively connected to the second buffer pipe and are located on the liquid outlet side of the second buffer switch valve;

[0028] The flushing switch valve is arranged on the flushing drain pipe;

[0029] The waste liquid switch valve is arranged on the waste liquid drain pipe.

[0030] Furthermore, the circulating and filtering assembly further includes a spray pipe;

[0031] The other end of the second circulating pipe is connected and communicated with the spray pipe;

[0032] A plurality of spray holes are arranged in an array on the spray pipe;

[0033] The spray pipe is arranged at the top position of the liquid medicine cavity, and the spray holes are arranged downward; or, the spray pipe is arranged at the bottom position of the liquid medicine cavity, and the spray holes are arranged upward; or, the spray pipe is arranged at the side position of the liquid medicine cavity, and the spray holes are arranged towards the central area of the liquid medicine cavity.

[0034] Furthermore, the circulating pump is a diaphragm pump.

[0035] Furthermore, the filter is a capsule filter.

[0036] Furthermore, the filter is arranged on the second circulating pipe.

[0037] Furthermore, the liquid medicine tank body includes a liquid medicine tank body and a water bath tank body;

[0038] The liquid medicine cavity is arranged in the liquid medicine tank body, and an opening communicating with the liquid medicine cavity is arranged at the top;

[0039] The liquid medicine tank body is installed in the water bath tank body.

[0040] Furthermore, the liquid medicine tank body further includes a tank cover;

[0041] The tank cover is installed on the opening in an openable and closable manner.

[0042] This application also discloses a wet etching machine tool, including a machine tool body and the liquid medicine tank assembly described above;

[0043] The liquid medicine tank assembly is installed on the machine tool body.

[0044] It can be seen from the above technical solutions that the liquid medicine tank assembly designed in this application has the following beneficial effects:

[0045] 1. Effectively store the liquid medicine temporarily and prevent volatilization: Through the provided buffer assembly, the liquid medicine can be temporarily stored in the sealed buffer cavity when the liquid medicine is not in use, effectively avoiding the volatilization of the liquid medicine, ensuring the full utilization of the liquid medicine, and reducing waste.

[0046] 2. Ensure the chemical stability of the liquid medicine and the cleaning and etching effect: The liquid medicine temporarily stored in the buffer chamber is in a sealed state, avoiding direct contact with air, thereby reducing the chemical property changes of the liquid medicine caused by oxidation and other reasons, and ensuring the chemical stability of the liquid medicine. At the same time, when in need of use, the liquid medicine can quickly resume the circulating flow state through the circulating filtration component, ensuring the cleaning and etching effect of the liquid medicine.

[0047] 3. Flexibly control the flow of the liquid medicine: By setting the circulation switch valve, the first buffer switch valve, and the second buffer switch valve, the flow path and state of the liquid medicine can be flexibly controlled, achieving precise control of the liquid medicine flow, and improving the reliability and stability of the equipment. Description of the Drawings

[0048] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0049] Figure 1 It is a schematic structural diagram of a liquid medicine tank assembly provided in the present application;

[0050] In the figure: 1. Liquid medicine tank body; 10. Liquid medicine chamber; 11. Tank cover; 12. Liquid medicine tank body; 13. Water bath tank body; 21. First circulation pipe; 22. Second circulation pipe; 23. Circulation switch valve; 24. Circulation pump; 25. Filter; 26. Spray pipe; 30. Buffer chamber; 31. First buffer pipe; 32. Second buffer pipe; 33. Buffer tank; 34. First buffer switch valve; 35. Second buffer switch valve; 36. Third buffer pipe; 37. Third buffer switch valve; 41. Flushing drain pipe; 42. Flushing switch valve; 43. Waste liquid drain pipe; 44. Waste liquid switch valve. Detailed Embodiments

[0051] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings. Obviously, the described embodiments are some, rather than all, of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the embodiments of the present application.

[0052] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0053] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0054] The embodiments of the present application disclose a liquid medicine tank assembly.

[0055] Please refer to Figure 1 , an embodiment of a liquid medicine tank assembly provided in the specific implementation manner of the present application includes:

[0056] A liquid medicine tank body 1, a circulating filtration component, and a buffer component.

[0057] The liquid medicine tank body 1 is provided with a liquid medicine cavity 10.

[0058] The circulating filtration component includes a filter 25, a circulating pump 24, a circulating switch valve 23, a first circulating pipe 21, and a second circulating pipe 22.

[0059] One end of the first circulating pipe 21 is connected and communicated with the liquid medicine cavity 10, and the other end is communicated with the liquid inlet end of the circulating pump 24 (in order to better realize the circulation and outflow of the liquid medicine, one end of the first circulating pipe 21 can be connected to the bottom or the bottom of the side wall of the liquid medicine cavity 10); one end of the second circulating pipe 22 is connected and communicated with the liquid outlet end of the circulating pump 24, and the other end is communicated with the liquid medicine cavity 10; the filter 25 is disposed in the first circulating pipe 21 or the second circulating pipe 22 (the other end of the second circulating pipe 22 can be connected to the side wall or the bottom of the liquid medicine cavity 10 without limitation);

[0060] The buffer component includes a buffer tank 33, a first buffer pipe 31, a second buffer pipe 32, a first buffer switch valve 34, and a second buffer switch valve 35.

[0061] The buffer slot 33 is provided with a sealed buffer cavity 30; one end of the first buffer pipe 31 is connected to the first circulation pipe 21 and is located between the circulation switch valve 23 and the liquid medicine tank body 1; the other end of the first buffer pipe 31 communicates with the buffer cavity 30; one end of the second buffer pipe 32 is connected to the first circulation pipe 21 and is located between the circulation switch valve 23 and the circulation pump 24. The installation height of the buffer slot 33 is preferably set lower than that of the liquid medicine tank body 1, so that the liquid medicine can automatically flow into the buffer cavity 30 by the gravity of the solution, thus eliminating the need to add a power pump for buffering and saving costs.

[0062] The other end of the second buffer pipe 32 communicates with the buffer cavity 30; the first buffer switch valve 34 is arranged on the first buffer pipe 31; the second buffer switch valve 35 is arranged on the second buffer pipe 32.

[0063] When the circulation filtration function is realized, the first buffer switch valve 34 and the second buffer switch valve 35 are closed, while the circulation switch valve 23 is opened, and the liquid medicine circulates in the circulation pipeline formed by the liquid medicine cavity 10, the first circulation pipe 21, the circulation pump 24, the filter 25, and the second circulation pipe 22.

[0064] When the liquid medicine is not in use, the second buffer switch valve 35 is closed, the circulation switch valve 23 is closed, and the circulation pump 24 is closed, while the first buffer switch valve 34 is opened. At this time, the liquid medicine in the liquid medicine cavity 10 flows into the buffer cavity 30 through the first buffer pipe 31.

[0065] When the liquid medicine is used again, the first buffer switch valve 34 is closed, the circulation switch valve 23 is closed, while the second buffer switch valve 35 is opened and the circulation pump 24 is opened. At this time, under the action of the circulation pump 24, the liquid medicine in the buffer cavity 30 flows back into the liquid medicine cavity 10 again. Then, the second buffer switch valve 35 is closed and the circulation switch valve 23 is opened, and the circulation filtration function can be realized again.

[0066] Liquid level sensors can be respectively designed in the liquid medicine cavity 10 and the buffer cavity 30 to monitor the liquid levels of the liquid medicine in the liquid medicine cavity 10 and the buffer cavity 30 in real time, ensuring the normal use and circulation filtration of the liquid medicine. When the liquid level of the liquid medicine in the liquid medicine cavity 10 is lower than the preset value, the system can automatically trigger an alarm to remind the operator to supplement the liquid medicine in time.

[0067] The liquid medicine tank assembly designed in this application has the following beneficial effects:

[0068] 1. Effectively store the liquid medicine temporarily and prevent volatilization: Through the provided buffer assembly, the liquid medicine can be temporarily stored in the sealed buffer cavity 30 when the liquid medicine is not in use, effectively avoiding the volatilization of the liquid medicine, ensuring the full utilization of the liquid medicine, and reducing waste.

[0069] 2. Ensure the chemical stability of the liquid medicine and the cleaning and etching effect: The liquid medicine temporarily stored in the buffer chamber 30 is in a sealed state, avoiding direct contact with air, thereby reducing the chemical property changes of the liquid medicine caused by oxidation and other reasons, and ensuring the chemical stability of the liquid medicine. At the same time, when in use, the liquid medicine can quickly resume the circulating flow state through the circulating filtration component, ensuring the cleaning and etching effect of the liquid medicine.

[0070] 3. Flexibly control the flow of the liquid medicine: By setting the circulation switch valve 23, the first buffer switch valve 34, and the second buffer switch valve 35, the flow path and state of the liquid medicine can be flexibly controlled, achieving precise control of the liquid medicine flow, and improving the reliability and stability of the equipment.

[0071] The above is the first embodiment of a liquid medicine tank assembly provided by this application. The following is the second embodiment of a liquid medicine tank assembly provided by this application. For details, please refer to Figure 1 。

[0072] Based on the solution of the above first embodiment:

[0073] Furthermore, the buffer assembly further includes a third buffer pipe 36 and a third buffer switch valve 37; one end of the third buffer pipe 36 is connected to the buffer chamber 30; the third buffer switch valve 37 is arranged on the third buffer pipe 36. One end of the third buffer pipe 36 is connected to the buffer chamber 30. The third buffer pipe 36 can be used to introduce a cleaning solution to clean the buffer chamber 30, avoiding the residual liquid medicine in the buffer chamber 30 from contaminating the liquid medicine of other batches.

[0074] Specifically, the other end of the third buffer pipe 36 can be connected to an external cleaning solution source. By controlling the opening and closing of the third buffer switch valve 37, the introduction and stop of the cleaning solution can be achieved. During the cleaning process, the first buffer switch valve 34 and the second buffer switch valve 35 can be closed to prevent the cleaning solution from entering the liquid medicine chamber 10 or the circulating filtration component. After the cleaning is completed, the cleaning solution in the third buffer pipe 36 can be discharged, and the liquid medicine can be reconnected to carry out the cleaning and etching work of the next batch.

[0075] In addition, the third buffer pipe 36 can also be used as a spare pipeline. When the liquid medicine tank assembly fails or needs maintenance, the liquid medicine in the buffer chamber 30 can be transferred to other storage containers to facilitate the repair or replacement of the liquid medicine tank assembly. In this way, it can be ensured that during the repair or replacement of the liquid medicine tank assembly, there will be no waste or loss of the liquid medicine, ensuring the continuity and stability of the production line.

[0076] Further, it also includes a liquid drainage assembly; the liquid drainage assembly includes a flushing drain pipe 41, a waste liquid drain pipe 43, a flushing switch valve 42, and a waste liquid switch valve 44; one end of the flushing drain pipe 41 and one end of the waste liquid drain pipe 43 are respectively connected to the second buffer pipe 32 and are located on the liquid outlet side of the second buffer switch valve 35; the flushing switch valve 42 is disposed on the flushing drain pipe 41; the waste liquid switch valve 44 is disposed on the waste liquid drain pipe 43. The available liquid medicine can be recovered through the flushing drain pipe 41, while the unusable liquid medicine is directly drained through the waste liquid drain pipe 43 to the waste liquid treatment center.

[0077] During the liquid drainage process, the flushing switch valve 42 can be opened to discharge the recoverable liquid medicine in the second buffer pipe 32 through the flushing drain pipe 41 for recycling. When it is necessary to discharge the waste liquid, the flushing switch valve 42 can be closed and the waste liquid switch valve 44 can be opened to drain the waste liquid in the second buffer pipe 32 through the waste liquid drain pipe 43 to the waste liquid treatment center. Such a design not only realizes the recycling of the liquid medicine but also avoids the random discharge of the waste liquid, meeting the environmental protection requirements. At the same time, the setting of the liquid drainage assembly also facilitates the operation and maintenance of the operator, improving the practicability and convenience of the equipment.

[0078] Further, the circulating filtration assembly further includes a spray pipe 26; the other end of the second circulation pipe 22 is connected and communicated with the spray pipe 26; a plurality of spray holes are arranged in an array on the spray pipe 26. The spray pipe 26 is arranged at the top position of the liquid medicine chamber 10, and the spray holes are arranged downward; or, the spray pipe 26 is arranged at the bottom position of the liquid medicine chamber 10, and the spray holes are arranged upward; or, the spray pipe 26 is arranged at the side position of the liquid medicine chamber 10, and the spray holes are arranged towards the central area of the liquid medicine chamber 10. The shape of the liquid medicine chamber 10 designed in the present application can be cylindrical, multi-prismatic, etc., and is not specifically limited.

[0079] Such a design of the spray pipe 26 enables the liquid medicine to be more evenly distributed in the liquid medicine chamber 10, improving the effect of circulating filtration. When the spray pipe 26 is arranged at the top position of the liquid medicine chamber 10 and the spray holes are arranged downward, the liquid medicine can be evenly sprinkled in the liquid medicine chamber 10 like fine rain, realizing the agitation of the solution in the liquid medicine chamber 10. When the spray pipe 26 is arranged at the bottom position of the liquid medicine chamber 10 and the spray holes are arranged upward, the liquid medicine can be sprayed from bottom to top, forming the agitation of the solution in the liquid medicine chamber 10. In addition, when the spray pipe 26 is arranged at the side position of the liquid medicine chamber 10 and the spray holes are arranged towards the central area of the liquid medicine chamber 10, the liquid medicine can form a spray towards the central area of the liquid medicine chamber 10, enhancing the agitation of the solution in the liquid medicine chamber 10. The above distribution methods can all improve the agitation effect on the liquid medicine, thereby increasing the contact effect between the liquid medicine and the workpiece and improving the utilization rate of the liquid medicine.

[0080] Furthermore, the circulation pump 24 is a diaphragm pump. The diaphragm pump has the advantages of simple structure, reliable operation, and easy maintenance. At the same time, the diaphragm pump can self-prime and has a relatively small shearing force on the liquid medicine, avoiding changes in the properties of the liquid medicine caused by excessive shearing force during the circulation process. In addition, the diaphragm pump also has good corrosion resistance, can adapt to different types of liquid medicine, and improves the applicable range and durability of the liquid medicine tank assembly.

[0081] Furthermore, the filter 25 is a capsule filter. The capsule filter has the advantages of large filtration area, high filtration efficiency, and long service life. At the same time, the capsule filter is easy to replace and clean, facilitating the operation and maintenance of the operator. In addition, the capsule filter can also adapt to liquid medicine with different viscosities and particle sizes, improving the filtration effect and applicable range of the liquid medicine tank assembly.

[0082] More importantly, the capsule filter is small in volume, facilitating the miniaturization of the machine, thus saving machine space and improving the integration and flexibility of the equipment.

[0083] Furthermore, the filter 25 is arranged in the second circulation pipe 22. Arranging the filter 25 on the second circulation pipe 22 can ensure that when the liquid medicine pressurized by the circulation pump 24 flows through the filter 25, impurities and particles can be effectively filtered out, ensuring the purity and cleanliness of the liquid medicine. At the same time, since the second circulation pipe 22 is connected to the liquid outlet end of the circulation pump 24, arranging the filter 25 on the second circulation pipe 22 can also avoid excessive resistance of the filter 25 to the circulation pump 24, ensuring the normal operation and service life of the circulation pump 24. In addition, arranging the filter 25 on the second circulation pipe 22 is also convenient for the operator to replace and maintain, improving the practicability and convenience of the equipment.

[0084] Furthermore, the liquid medicine tank body 1 includes a liquid medicine tank body 12 and a water bath tank body 13; a liquid medicine cavity 10 is provided in the liquid medicine tank body 12, and an opening communicating with the liquid medicine cavity 10 is provided at the top; the liquid medicine tank body 12 is installed in the water bath tank body 13. The liquid medicine tank body 1 further includes a tank cover 11; the tank cover 11 is installed on the opening in a manner that can be opened and closed.

[0085] Such a design of the liquid medicine tank body 1 not only ensures that the liquid medicine is circulated and filtered at an appropriate temperature, but also, through the setting of the tank cover 11, avoids the direct contact of the liquid medicine with the external environment during the circulation and filtration process, further improving the chemical stability and cleanliness of the liquid medicine. At the same time, the design of the tank cover 11 that can be opened and closed also facilitates the operator's operations such as taking and placing workpieces and adding liquid medicine, improving the practicability and convenience of the equipment. In addition, the setting of the water bath tank body 13 can also heat or keep warm the liquid medicine tank body 12 to meet the requirements of different processes for the temperature of the liquid medicine, improving the applicable range and flexibility of the equipment.

[0086] Each switching valve in this application is preferably designed as an electrically controlled valve and can be remotely controlled and automatically operated through a control system (such as a PLC controller). The control system can automatically adjust the switching states of each switching valve according to the preset process parameters and the actual working status of the liquid medicine tank assembly, so as to realize the automatic operation of functions such as circulating filtration, buffering, and draining of the liquid medicine. Such a design not only improves the automation degree and production efficiency of the equipment, but also reduces the labor intensity of the operators and the risk of human operation errors. At the same time, the electrically controlled valve has a fast response speed and high control precision, which can ensure the stable operation of the liquid medicine tank assembly and the precise control of the liquid medicine.

[0087] This application also discloses a wet etching machine tool, which includes a machine tool body and a liquid medicine tank assembly, and the liquid medicine tank assembly is installed in the machine tool body.

[0088] The above has introduced in detail a liquid medicine tank assembly and a wet etching machine tool provided by this application. For those of ordinary skill in the art, according to the idea of the embodiments of this application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to this application.

Claims

1. A liquid medicine tank assembly, characterized in that, It includes a liquid medicine tank body (1), a circulation filtration component, and a buffer component; The liquid medicine tank body (1) is provided with a liquid medicine cavity (10); The circulation filtration component includes a filter (25), a circulation pump (24), a circulation switch valve (23), a first circulation pipe (21), and a second circulation pipe (22); One end of the first circulation pipe (21) is connected and communicated with the liquid medicine cavity (10), and the other end is communicated with the liquid inlet end of the circulation pump (24); One end of the second circulation pipe (22) is connected and communicated with the liquid outlet end of the circulation pump (24), and the other end is communicated with the liquid medicine cavity (10); The filter (25) is arranged in the first circulation pipe (21) or the second circulation pipe (22); The circulation switch valve (23) is arranged in the first circulation pipe (21); The buffer component includes a buffer tank (33), a first buffer pipe (31), a second buffer pipe (32), a first buffer switch valve (34), and a second buffer switch valve (35); The buffer tank (33) is provided with a sealed buffer cavity (30); One end of the first buffer pipe (31) is connected to the first circulation pipe (21) and is located between the circulation switch valve (23) and the liquid medicine tank body (1); The other end of the first buffer pipe (31) communicates with the buffer cavity (30); One end of the second buffer pipe (32) is connected to the first circulation pipe (21) and is located between the circulation switch valve (23) and the circulation pump (24); The other end of the second buffer pipe (32) communicates with the buffer cavity (30); The first buffer switch valve (34) is arranged in the first buffer pipe (31); The second buffer switch valve (35) is arranged in the second buffer pipe (32).

2. The liquid medicine tank assembly according to claim 1, characterized in that, The buffer component further includes a third buffer pipe (36) and a third buffer switch valve (37); One end of the third buffer pipe (36) communicates with the buffer cavity (30); The third buffer switch valve (37) is arranged in the third buffer pipe (36).

3. The liquid medicine tank assembly according to claim 1, wherein It further includes a liquid discharge component; The liquid discharge component includes a flushing discharge pipe (41), a waste liquid discharge pipe (43), a flushing switch valve (42), and a waste liquid switch valve (44); One end of the flushing discharge pipe (41) and one end of the waste liquid discharge pipe (43) are respectively connected to the second buffer pipe (32) and are located on the liquid outlet side of the second buffer switch valve (35); The flushing switch valve (42) is arranged in the flushing discharge pipe (41); The waste liquid switch valve (44) is arranged in the waste liquid discharge pipe (43).

4. The liquid medicine tank assembly according to claim 1, characterized in that The circulation filtration component further includes a spray pipe (26); The other end of the second circulation pipe (22) is connected and communicated with the spray pipe (26); A plurality of spray holes are arranged in an array on the spray pipe (26); The spray pipe (26) is arranged at the top position of the liquid medicine chamber (10), and the spray holes are arranged downward; or, the spray pipe (26) is arranged at the bottom position of the liquid medicine chamber (10), and the spray holes are arranged upward; or, the spray pipe (26) is arranged at the side position of the liquid medicine chamber (10), and the spray holes are arranged towards the central area of the liquid medicine chamber (10).

5. The liquid medicine tank assembly according to claim 1, wherein The circulation pump (24) is a diaphragm pump.

6. The liquid medicine tank assembly according to claim 1, wherein, The filter (25) is a capsule filter.

7. The liquid medicine tank assembly according to claim 1, characterized in that, The filter (25) is configured in the second circulation pipe (22).

8. The liquid medicine tank assembly according to claim 1, wherein The liquid medicine tank body (1) includes a liquid medicine tank body (12) and a water bath tank body (13); The liquid medicine chamber (10) is arranged in the liquid medicine tank body (12), and an opening communicating with the liquid medicine chamber (10) is arranged at the top; The liquid medicine tank body (12) is installed in the water bath tank body (13).

9. The liquid medicine tank assembly according to claim 8, wherein, The liquid medicine tank body (1) further includes a tank cover (11); The tank cover (11) is installed at the opening in an openable and closable manner.

10. Wet etching machine tool, characterized in that, It includes a machine platform body and the liquid medicine tank assembly according to any one of claims 1 to 9; The liquid medicine tank assembly is installed on the machine platform body.

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