Rail machine protective cover plate capable of improving installation stability

Abstract

The utility model discloses a protective cover plate for a rail machine capable of improving installation stability, which belongs to the technical field of protective cover plates and comprises a machine body of the rail machine and a main body of the protective cover plate, the main body is fixedly provided with a supporting strip, the machine body is fixedly provided with a supporting plate, the supporting strip abuts against the supporting plate, the supporting plate is connected with a clamping plate, and the clamping plate is fixedly connected with the machine body. The clamping plate is arranged between the supporting plate and the supporting strip, a fixing hole is formed in the clamping plate, a threaded rod is inserted into the fixing hole, the machine body is provided with a baffle, one end of the threaded rod is in threaded connection with the baffle, the other end of the threaded rod abuts against the clamping plate, the supporting plate is arranged between the clamping plate and the baffle, and the supporting strip is arranged between the clamping plate and the baffle. Fixing grooves are formed in the supporting strips, the clamping plates are clamped in the fixing grooves, and the rail machine protection cover plate has the advantage that the installation stability of the rail machine protection cover plate is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of protective covers, in particular to a protective cover for an orbiting machine with improved installation stability. Background Technique

[0002] The glue coating and developing machine is an important device that cooperates with the lithography machine in the lithography process. The glue coating and developing machine is composed of two modules, BLOCK1 and BLOCK2. The BLOCK1 module is a wafer picking unit module, which uses the arm and the main arm to jointly take out the wafer in the carrier into the machine platform and send it back to the carrier after the operation is completed; the BLOCK2 unit is a functional module such as a hot and cold plate and a glue coating and developing chamber. Among them, the BLOCK1 module is provided with an installation cavity, which is called an orbiting machine. The installation cavity is the transfer position of the arm and the main arm.

[0003] For the above technical conditions, there is also a situation where when maintaining, cleaning the hygiene of the block1 unit or repairing the block1 module of the orbiting machine, it is necessary to remove the protective cover. After the maintenance or repair is completed, it is necessary to install the protective cover back to the machine platform. However, the installation stability of the protective cover is not good enough. The protective cover only presses against the orbiting machine by the edge of the protective cover, and the contact area between the protective cover and the orbiting machine is small, which makes it easy for the protective cover to have poor contact during installation, resulting in the defect that the protective cover falls off and breaks the arm below.

[0004] Based on this, the utility model designs a protective cover for an orbiting machine with improved installation stability to solve the above problems. Content of the Utility Model

[0005] The purpose of the utility model is to provide a protective cover for an orbiting machine with improved installation stability to solve the above technical problems.

[0006] To achieve the above purpose, the utility model provides the following technical solution: A protective cover for an orbiting machine with improved installation stability, including the body of the orbiting machine and the main body of the protective cover. The main body is fixedly provided with a support bar, the body is fixedly provided with a support plate, the support bar abuts against the support plate, the support plate is connected with a clamping plate, the clamping plate is between the support plate and the support bar, the clamping plate is provided with a fixing hole, a threaded rod is inserted into the fixing hole, the body is provided with a baffle, one end of the threaded rod is threadedly connected to the baffle, the other end of the threaded rod abuts against the clamping plate, the support plate is between the clamping plate and the baffle, and a fixing groove is opened on the support bar, and the clamping plate is clamped in the fixing groove.

[0007] Preferably, the cross-sectional area of the support bar is in an "L" shape.

[0008] Preferably, a cushion block is inserted into the threaded rod, and the cushion block is between the baffle plate and the clamping plate.

[0009] Preferably, the height of the cushion block is the same as the height of the support plate.

[0010] In summary, the present application has the following beneficial technical effects: When installing the protective cover plate, first install the clamping plate and the baffle plate so that the support plate is between the clamping plate and the baffle plate, and then use the cushion block and the threaded rod to fix the clamping plate and the baffle plate. At this time, the baffle plate and the clamping plate are stably installed on the support plate. Finally, install the main body, press the support bar on the main body against the support plate, and the clamping plate is clamped in the fixing groove. Due to the "L"-shaped setting of the support bar, the contact area between the support bar and the support plate is increased. At the same time, due to the setting of the baffle plate, the main body is not easily dropped below the machine body during the installation process, achieving the effect of improving the installation stability of the protective cover plate of the rail machine. Description of the Drawings

[0011] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0012] Figure 1 It is a front structure schematic diagram of the rail machine of this embodiment;

[0013] Figure 2 It is a sectional structure schematic diagram of the rail machine of this embodiment;

[0014] Figure 3 It is an installation structure schematic diagram of the rail machine of this embodiment.

[0015] In the drawings, the list of components represented by each reference numeral is as follows:

[0016] 1, main body; 2, support bar; 3, clamping plate; 4, baffle plate; 5, machine body; 6, cushion block; 7, support plate; 8, threaded rod; 9, fixing groove; 10, fixing hole. Detailed Embodiments

[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0018] The following is combined with the attached Figures 1-3The present application will be further described in detail.

[0019] A protective cover plate for a rail machine that improves installation stability, including the body 5 of the rail machine and the main body 1 of the protective cover plate. The main body 1 is arranged on the body 5. A support plate 7 is fixedly arranged on the body 5. A support strip 2 is fixedly arranged on the side of the main body 1 close to the body 5. The support strip 2 abuts against the support plate 7. The cross-section of the support strip 2 is in an "L" shape, increasing the contact area between the support strip 2 and the support plate 7.

[0020] A clamping plate 3 is arranged on the support plate 7, and the clamping plate 3 is between the support plate 7 and the support strip 2. A fixing hole 10 is opened on the clamping plate 3, and a threaded rod 8 is inserted into the fixing hole 10. The fixing hole 10 is in a "1" shape, which is convenient for adjusting the position of the threaded rod 8 in the fixing hole 10 as needed.

[0021] A baffle 4 is arranged on the support plate 7, and the support plate 7 is between the baffle 4 and the clamping plate 3. One end of the threaded rod 8 is threadedly connected to the baffle 4, and the other end of the threaded rod 8 abuts against the side of the clamping plate 3 away from the support plate 7. The baffle 4 prevents the main body 1 from easily falling off below the body 5, and the clamping plate 3 facilitates the disassembly of the baffle 4 from the body 5.

[0022] A fixing groove 9 is opened on the support strip 2, and the clamping plate 3 abuts in the fixing groove 9. The fixing groove 9 further increases the stability of the support strip 2. A cushion block 6 is inserted on the threaded rod 8, and the cushion block 6 is between the baffle 4 and the clamping plate 3. The height of the cushion block 6 is the same as the height of the support plate 7, preventing the other end of the clamping plate 3 from warping when the threaded rod 8 is tightened, which affects the installation stability of the main body 1.

[0023] The implementation principle of this embodiment is as follows: When installing the protective cover plate, first install the clamping plate 3 and the baffle 4 so that the support plate 7 is between the clamping plate 3 and the baffle 4. Then use the cushion block 6 and the threaded rod 8 to fix the clamping plate 3 and the baffle 4. At this time, the baffle 4 and the clamping plate 3 are stably installed on the support plate 7. Finally, install the main body 1, abut the support strip 2 on the main body 1 against the support plate 7, and the clamping plate 3 is clamped in the fixing groove 9. Due to the "L" shape setting of the support strip 2, the contact area between the support strip 2 and the support plate 7 is increased. At the same time, due to the setting of the baffle 4, the main body 1 is not easily dropped below the body 5 during the installation process, achieving the effect of improving the installation stability of the protective cover plate of the rail machine.

[0024] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "center", "both ends", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0025] In the present utility model, unless otherwise clearly specified and defined, the terms "installed", "set", "connected", "fixed", "swiveling connection", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements or the interaction relationship between two elements. Unless otherwise clearly defined, for those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0026] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A protective cover plate for a rail machine to improve installation stability, comprising a body (5) of the rail machine and a main body (1) of the protective cover plate, characterized in that: The main body (1) is fixedly provided with a support bar (2), the machine body (5) is fixedly provided with a support plate (7), the support bar (2) abuts against the support plate (7), the support plate (7) is connected with a clamping plate (3), the clamping plate (3) is between the support plate (7) and the support bar (2), the clamping plate (3) is provided with a fixing hole (10), a threaded rod (8) is inserted into the fixing hole (10), the machine body (5) is provided with a baffle (4), one end of the threaded rod (8) is threadedly connected to the baffle (4), the other end of the threaded rod (8) abuts tightly against the clamping plate (3), the support plate (7) is between the clamping plate (3) and the baffle (4), a fixing groove (9) is formed in the support bar (2), and the clamping plate (3) is clamped in the fixing groove (9).

2. The protective cover plate for a rail machine for improving installation stability according to claim 1, characterized in that: The cross-sectional area of the support bar (2) is in an "L" shape.

3. The protective cover plate for a rail machine for improving installation stability according to claim 1, characterized in that: A cushion block (6) is inserted into the threaded rod (8), and the cushion block (6) is between the baffle (4) and the clamping plate (3).

4. The protective cover plate for a rail machine for improving installation stability according to claim 3, wherein: The height of the cushion block (6) is the same as the height of the support plate (7).

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