Vacuum window baffle and coating equipment

Abstract

The utility model provides a vacuum window baffle and coating equipment, and belongs to the technical field of coating equipment, the vacuum window baffle comprises a shutter assembly, the shutter assembly is arranged on the inner side of a window of the coating equipment, and the shutter assembly is rotationally provided with a plurality of baffles; the adjusting assembly is used for adjusting the multiple baffles to be switched between the first state and the second state. According to the film coating equipment, the multiple baffles are used for shielding, and the space needed when the single baffle is switched between the first state and the second state is small, so that miniaturization of the film coating equipment is facilitated, and the defects of a traditional structure are overcome.

Description

Technical Field

[0001] This application belongs to the technical field of coating equipment, and particularly relates to a vacuum window baffle for coating equipment and a coating equipment applying the vacuum window baffle. Background Art

[0002] Magnetron sputtering coating is an advanced physical vapor deposition (PVD) technology, and its core lies in using the sputtering effect to transfer target atoms to the surface of the substrate to form a thin film. The sputtering effect refers to the phenomenon that when high-energy ions strike the solid surface, the atoms on the surface of the target are ejected and scattered.

[0003] During sputtering production, a window is required to observe the internal situation during sputtering coating. The window is made of lead glass. After observation, a baffle is needed to block the window to prevent coating on the window during sputtering, which affects observation.

[0004] In the related art, the baffle is large in volume, and sufficient space needs to be reserved to meet the rotation radius requirement of the baffle, which limits the miniaturization of the volume of the coating equipment. Summary of the Utility Model

[0005] This application aims to at least solve the above technical problems existing in the prior art. For this purpose, in a first aspect, this application provides a vacuum window baffle, which can solve the problem that the baffle restricts the miniaturization of the coating equipment.

[0006] In a second aspect, this application proposes a coating equipment applying the above vacuum window baffle.

[0007] The vacuum window baffle according to the embodiment of the first aspect of this application is applied to coating equipment and includes:

[0008] A louver assembly, the louver assembly is arranged inside the window of the coating equipment, and a plurality of baffles are rotatably arranged on the louver assembly. The plurality of baffles have a first state and a second state. When the plurality of baffles are in the first state, the plurality of baffles block the window. When the plurality of baffles are in the second state, two adjacent ones of the plurality of baffles are unfolded to form a visible area;

[0009] An adjusting assembly, the adjusting assembly is arranged outside the coating equipment, and the adjusting assembly passes through the housing of the coating equipment and is connected to the louver assembly for adjusting the switching of the plurality of baffles between the first state and the second state.

[0010] The vacuum window baffle according to the embodiment of the present application has at least the following beneficial effects: The vacuum window baffle of this embodiment controls the occlusion of the window by setting a plurality of baffles. When observing, it is only necessary to control the plurality of baffles to be adjusted to the second state through the adjustment component, and then observation can be carried out. When coating, it is only necessary to control the plurality of baffles to be adjusted to the first state through the adjustment component to block the window, so as to avoid the window being coated and affecting observation. By using the form of a plurality of baffles for occlusion, the space required for a single baffle to switch between the first state and the second state is small. Therefore, it is beneficial to miniaturize the coating equipment and solve the deficiencies of the traditional structure.

[0011] According to some embodiments of the present application, the louver assembly is further provided with:

[0012] A first mounting portion, the first mounting portion is located on the side of the plurality of baffles close to the window, the first mounting portion extends along the arrangement direction of the plurality of baffles, and is rotatably connected to the plurality of baffles;

[0013] A second mounting portion, the second mounting portion is located on the side of the plurality of baffles away from the window, the second mounting portion extends along the arrangement direction of the plurality of baffles, and is rotatably connected to the plurality of baffles;

[0014] When the baffle rotates to be perpendicular to the window or close to perpendicular to the window, the plurality of baffles are in the second state. When the baffle rotates to be parallel to the window or close to parallel to the window, the plurality of baffles are in the first state.

[0015] According to some embodiments of the present application, the first mounting portion is fixedly arranged relative to the window.

[0016] According to some embodiments of the present application, the louver assembly is further provided with a pressing plate, the pressing plate is fixed to the inner side of the window, and the first mounting portion is fixedly connected to the pressing plate.

[0017] According to some embodiments of the present application, the adjustment component is connected to any one of the plurality of baffles or connected to the second mounting portion.

[0018] According to some embodiments of the present application, the adjustment component includes:

[0019] A rotating shaft mechanism, the rotating shaft mechanism rotatably penetrates through the housing;

[0020] A clamping portion, the clamping portion is connected between the baffle and the rotating shaft mechanism;

[0021] The rotating shaft mechanism can be controlled to rotate by an external force, and drive the baffle to rotate through the clamping portion.

[0022] According to some embodiments of the present application, the rotating shaft mechanism includes:

[0023] A first rotating shaft, one end of the first rotating shaft is fixedly connected to the clamping portion, and the other end of the first rotating shaft extends to the outside of the housing;

[0024] A second rotating shaft, the second rotating shaft is rotatably arranged outside the housing, and the second rotating shaft is parallel to the first rotating shaft;

[0025] A coupling, the coupling is connected between the first rotating shaft and the second rotating shaft.

[0026] According to some embodiments of the present application, an adjusting portion is eccentrically arranged at one end of the second rotating shaft away from the coupling.

[0027] According to some embodiments of the present application, both ends of any one of the plurality of baffles are close to the edge positions of the viewing window.

[0028] The coating device according to the second aspect embodiment of the present application is applied with the vacuum viewing window baffle of any one of the above embodiments.

[0029] The coating device according to the embodiment of the present application has at least the following beneficial effects: The coating device of this embodiment only needs to control the plurality of baffles to be adjusted to the second state through the adjusting assembly during observation, and then observation can be carried out. During coating, only need to control the plurality of baffles to be adjusted to the first state through the adjusting assembly to block the viewing window, thus avoiding the viewing window from being coated and affecting observation. Using the form of multiple baffles for shielding, the space required for a single baffle to switch between the first state and the second state is small, so it is beneficial to miniaturize the coating device and solve the deficiencies of the traditional structure.

[0030] Some additional aspects and advantages of the present application will be given in the following description, some additional aspects and advantages will become apparent from the following description, or be understood through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The following further describes the present application in conjunction with the drawings and embodiments, where:

[0032] Figure 1 It is a schematic structural diagram of the viewing window when the plurality of baffles are in the second state;

[0033] Figure 2 It is a schematic structural diagram of the baffle when the plurality of baffles are in the second state;

[0034] Figure 3 It is a schematic structural diagram of the louver assembly;

[0035] Figure 4 A schematic structural diagram of the window when multiple baffles are in the first state;

[0036] Figure 5 A schematic structural diagram of the baffle when multiple baffles are in the first state;

[0037] Figure 6 An axonometric structural diagram when multiple baffles are in the second state. Detailed implementation manners

[0038] The embodiments of the present application will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application.

[0039] In the description of the present application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0040] In the description of the present application, the meaning of several is more than one, and the meaning of multiple is more than two. Understandings such as greater than, less than, exceeding, etc. do not include the present number, and understandings such as above, below, within, etc. include the present number. If the first and second are described only for the purpose of distinguishing technical features, they should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or the sequence relationship of the indicated technical features.

[0041] In the description of the present application, unless otherwise clearly defined, terms such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present application in combination with the specific content of the technical solution.

[0042] In the description of the present application, the descriptions with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0043] Refer toFigures 1 to 6 , some embodiments of the present application provide a vacuum window baffle, which is applied to a coating device and includes:

[0044] A shutter assembly 200 is disposed inside a window 100 of the coating device. The shutter assembly 200 is rotatably provided with a plurality of baffles 201. The plurality of baffles 201 have a first state and a second state. When the plurality of baffles 201 are in the first state, the plurality of baffles 201 block the window 100. When the plurality of baffles 201 are in the second state, two adjacent baffles 201 among the plurality of baffles 201 are unfolded from each other to form a visible area;

[0045] An adjustment assembly 300 is disposed outside the coating device. The adjustment assembly 300 passes through the housing of the coating device and is connected to the shutter assembly 200 for adjusting the switching of the plurality of baffles 201 between the first state and the second state.

[0046] It can be understood that since the shutter assembly 200 is located inside the window 100, it can effectively block the window 100 to avoid being coated and affecting observation. And the adjustment assembly 300 is located outside the coating device, which is convenient for the staff to operate and adjust the shutter assembly 200. The vacuum window baffle of this embodiment controls the blocking of the window 100 by setting a plurality of baffles 201. When observing, only need to control the plurality of baffles 201 to be adjusted to the second state through the adjustment assembly 300, then observation can be carried out. And when coating, only need to control the plurality of baffles 201 to be adjusted to the first state through the adjustment assembly 300 to block the window 100, then it can be avoided that the window 100 is coated and affects observation. Using the form of blocking with a plurality of baffles 201, the space required for a single baffle 201 to switch between the first state and the second state is small, so it is beneficial to realize the miniaturization of the coating device and solve the deficiencies of the traditional structure.

[0047] In the above embodiment, the plurality of baffles 201 may be arranged at intervals along the distribution direction, or may be closely arranged adjacent to each other in sequence along the distribution direction.

[0048] Refer to Figure 1 and Figure 3 , in some embodiments of the present application, the shutter assembly 200 is further provided with:

[0049] A first mounting portion 202 is located on a side of the plurality of baffles 201 close to the window 100. The first mounting portion 202 extends along the arrangement direction of the plurality of baffles 201 and is rotatably connected to the plurality of baffles 201;

[0050] The second installation part 203 is located on the side of the multiple baffle plates 201 away from the viewing window 100. The second installation part 203 extends along the arrangement direction of the multiple baffle plates 201 and is rotatably connected to the multiple baffle plates 201.

[0051] When the baffle plates 201 rotate to be perpendicular to the viewing window 100 or close to perpendicular to the viewing window 100, the multiple baffle plates 201 are in the second state. When the baffle plates 201 rotate to be parallel to the viewing window 100 or close to parallel to the viewing window 100, the multiple baffle plates 201 are in the first state.

[0052] Reference Figures 1 to 5 , for the convenience of description and understanding, in this embodiment, in the direction perpendicular to the viewing window 100, the outside of the viewing window 100 is defined as the front end, and the inside of the viewing window 100 is defined as the rear end. Similarly, located inside the viewing window 100, the direction close to the viewing window 100 is the front end, and the direction away from the viewing window 100 is the rear end. Since the front end of the baffle plate 201 is rotatably connected to the first installation part 202 and the rear end of the baffle plate 201 is rotatably connected to the second installation part 203, when any baffle plate 201 rotates from the angle state parallel to the viewing window 100 to the angle state perpendicular to the viewing window 100, the first installation part 202 and the second installation part 203 can drive the other baffle plates 201 to rotate together, achieving the effect of synchronous switching between the first state and the second state.

[0053] It can be understood that controlling the first installation part 202 or the second installation part 203, or simultaneously controlling the first installation part 202 and the second installation part 203 can also achieve the purpose of rotating and adjusting the baffle plate 201. Therefore, the adjustment assembly 300 can be set to be connected to any one or more of the first installation part 202, the baffle plate 201, and the second installation part 203 as needed, so as to achieve the purpose of rotating the baffle plate 201 to realize the switching between the first state and the second state.

[0054] In some embodiments of the present application, the first installation part 202 is fixedly arranged relative to the viewing window 100, that is, the first installation part 202 is fixedly arranged in the housing of the coating equipment.

[0055] Reference Figure 2 And Figure 3 , between two adjacent baffle plates 201, the baffle plate 201, the first installation part 202, and the second installation part 203 form a parallelogram that is hinged to each other. When the side formed by the first installation part 202 is fixed, among the other three sides of the parallelogram, any side swinging will drive the other two sides to swing synchronously. At the same time, based on the fact that the second installation part 203 is rotatably connected to other baffle plates 201, therefore, with the structural setting of this embodiment, the adjustment assembly 300 only needs to control any one of the baffle plate 201 and the second installation part 203 to rotate and / or move, and the rotation switching of the multiple baffle plates 201 can be realized.

[0056] Specifically, when the adjusting assembly 300 is connected to the baffle 201, the adjusting assembly 300 controls the baffle 201 to rotate relative to the first mounting portion 202, and drives the remaining baffles 201 to rotate simultaneously by means of the second mounting portion 203. When the adjusting assembly 300 is connected to the second mounting portion 203, the adjusting assembly 300 controls the second mounting portion 203 to rotate and translate with the connection point between the baffle 201 and the first mounting portion 202 as the center of rotation and the baffle 201 as the radius of rotation, so as to drive all the baffles 201 to rotate.

[0057] Reference Figure 1 In some embodiments of the present application, the shutter assembly 200 is further provided with a pressing plate 204. The pressing plate 204 is fixed to the inner side of the window 100, and the first mounting portion 202 is fixedly connected to the pressing plate 204. With the structural arrangement of this embodiment, the pressing plate 204 is used to fix the first mounting portion 202, so as to realize the fixed installation of the first mounting portion 202 inside the window 100, and the adjustment setting of the above embodiment can be realized.

[0058] It can be understood that the adjusting assembly 300 can be connected to any one of the multiple baffles 201, and all the baffles 201 can be driven to rotate and adjust. The baffle 201 specifically connected to the adjusting assembly 300 can be flexibly designed according to needs.

[0059] Reference Figure 3 In some embodiments of the present application, both the first mounting portion 202 and the second mounting portion 203 are provided as rectangular frame structures, and the baffle 201 is rotatably connected to two vertical rods of each rectangular frame structure. The pressing plate 204 includes a first pressing plate and a second pressing plate. The first pressing plate and the second pressing plate are locked by screws, and the bottom of the first mounting portion 202 is clamped between the first pressing plate and the second pressing plate, so as to achieve fixation.

[0060] Reference Figure 1 and Figure 3 In some embodiments of the present application, the multiple baffles 201 are distributed in the vertical direction, and the adjusting assembly 300 is connected to the uppermost baffle 201 among the multiple baffles 201.

[0061] Specifically, in some embodiments of the present application, the adjusting assembly 300 includes:

[0062] A rotating shaft mechanism, the rotating shaft mechanism rotatably penetrates through the housing, one end is located inside the housing, and the other end is located outside the housing;

[0063] A clamping portion 305, the clamping portion 305 is connected between the baffle 201 and the rotating shaft mechanism;

[0064] The rotating shaft mechanism can be controlled to rotate by an external force, and drives the baffle 201 to rotate through the clamping portion 305.

[0065] Reference Figure 4 , specifically, the clamping portion 305 extends in the vertical direction, so as to clamp and fix the baffle 201 in the width direction of the baffle 201. The clamping portion 305 is fixedly connected to the baffle 201 by welding or screw connection. One end of the rotating shaft mechanism extending into the shell is fixedly connected to the clamping portion 305, so as to drive the baffle 201 to rotate together when rotating.

[0066] Reference Figure 1 , for the convenience of control, in some embodiments of the present application, the rotating shaft mechanism includes:

[0067] A first rotating shaft 301, one end of the first rotating shaft 301 is fixedly connected to the clamping portion 305, and the other end of the first rotating shaft 301 extends to the outside of the shell;

[0068] A second rotating shaft 302, the second rotating shaft 302 is rotatably arranged outside the shell, and the second rotating shaft 302 is parallel to the first rotating shaft 301;

[0069] A coupling 303, the coupling 303 is connected between the first rotating shaft 301 and the second rotating shaft 302.

[0070] When the second rotating shaft 302 rotates under the action of an external force, the first rotating shaft 301 is driven to rotate through the coupling 303, and then the clamping portion 305 is controlled to drive the baffle 201 to rotate. The first rotating shaft 301 and the clamping portion 305 can be integrally arranged, or can be fixed by welding or other means. The coupling 303 can be set as a speed-reducing coupling 303 for speed-reducing adjustment, that is, the rotation speed of the second rotating shaft 302 is greater than the rotation speed of the first rotating shaft 301. The coupling 303 can also be set as a self-locking structure, that is, only the second rotating shaft 302 can drive the first rotating shaft 301 to rotate, and the first rotating shaft 301 cannot drive the second rotating shaft 302 to rotate in the reverse direction, and those skilled in the art can flexibly set according to needs.

[0071] Reference Figure 1 , in some embodiments of the present application, an adjusting portion 304 is eccentrically arranged at one end of the second rotating shaft 302 away from the coupling 303. The adjusting portion 304 can be used for a worker to apply force for rotating and adjusting the second rotating shaft 302.

[0072] In addition, anti-slip patterns can also be provided on the outer peripheral surface of the second rotating shaft 302 to facilitate the operation of the worker.

[0073] Reference Figures 1 to 6 , in some embodiments of the present application, both ends of any one of the plurality of baffles 201 are close to the edge positions of the viewing window 100 to ensure the shielding effect on the viewing window 100, and further prevent the viewing window 100 from being affected by the coating and affecting the observation.

[0074] Some embodiments of the present application also propose a coating device, which is applied with the vacuum window baffle of any of the above embodiments.

[0075] It can be understood that for the coating device of this embodiment, by applying the above-mentioned vacuum window baffle, when observing, it only needs to control multiple baffles 201 to be adjusted to the second state through the adjusting component 300 to conduct the observation. And when coating, it only needs to control multiple baffles 201 to be adjusted to the first state through the adjusting component 300 to block the window 100, so as to avoid the window 100 being coated and affecting the observation. Using the form of multiple baffles 201 for blocking, the space required for a single baffle 201 to switch between the first state and the second state is small. Therefore, it is beneficial to miniaturize the coating device and solve the deficiencies of the traditional structure.

[0076] The above has described the embodiments of the present application in detail with reference to the drawings. However, the present application is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art, various changes can be made without departing from the purpose of the present application. In addition, without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

Claims

1. A vacuum window baffle, characterized in that, Applied to a coating device, including: A shutter assembly, which is arranged inside the window of the coating device. The shutter assembly is rotatably provided with a plurality of baffles. The plurality of baffles have a first state and a second state. When the plurality of baffles are in the first state, the plurality of baffles block the window. When the plurality of baffles are in the second state, two adjacent ones of the plurality of baffles are unfolded to form a visible area; An adjustment assembly, which is arranged outside the coating device. The adjustment assembly passes through the housing of the coating device and is connected to the shutter assembly for adjusting the switching of the plurality of baffles between the first state and the second state.

2. The vacuum window baffle according to claim 1, wherein, The shutter assembly is further provided with: A first mounting portion, which is located on the side of the plurality of baffles close to the window. The first mounting portion extends along the arrangement direction of the plurality of baffles and is rotatably connected to the plurality of baffles; A second mounting portion, which is located on the side of the plurality of baffles away from the window. The second mounting portion extends along the arrangement direction of the plurality of baffles and is rotatably connected to the plurality of baffles; When the baffles rotate to be perpendicular to the window or close to perpendicular to the window, the plurality of baffles are in the second state. When the baffles rotate to be parallel to the window or close to parallel to the window, the plurality of baffles are in the first state.

3. The vacuum viewing window baffle according to claim 2, wherein, The first mounting portion is fixedly arranged relative to the window.

4. The vacuum window baffle according to claim 3, characterized in that The shutter assembly is further provided with a pressing plate, which is fixed to the inside of the window. The first mounting portion is fixedly connected to the pressing plate.

5. The vacuum viewing window baffle according to claim 3, wherein, The adjustment assembly is connected to any one of the plurality of baffles or connected to the second mounting portion.

6. The vacuum window baffle according to claim 2, characterized in that, The adjustment assembly includes: A rotating shaft mechanism, which rotatably penetrates through the housing; A clamping portion, which is connected between the baffle and the rotating shaft mechanism; The rotating shaft mechanism can be controlled to rotate by an external force and drive the baffle to rotate through the clamping portion.

7. The vacuum window baffle according to claim 6, characterized in that, The rotating shaft mechanism includes: A first rotating shaft, one end of which is fixedly connected to the clamping portion, and the other end of which extends to the outside of the housing; A second rotating shaft, which is rotatably arranged outside the housing and is parallel to the first rotating shaft; A coupling, which is connected between the first rotating shaft and the second rotating shaft.

8. The vacuum window baffle according to claim 7, wherein, An adjusting portion is eccentrically arranged at the end of the second rotating shaft away from the coupling.

9. The vacuum viewing window baffle according to claim 1, characterized in that, Both ends of any one of the plurality of baffles are close to the edge positions of the window.

10. A coating device, characterized in that, Applied with the vacuum window baffle according to any one of claims 1 to 9.

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