Gas filling device for ultra-pure gas bottle

Abstract

The utility model discloses a gas filling device for an ultra-pure gas bottle, which comprises a gas bottle group formed by connecting a gas inlet pipe with a filter, then dividing the gas inlet pipe into two gas inlet branch pipes, respectively connecting the two gas inlet branch pipes with a solenoid valve I and then connecting a plurality of gas bottles connected in series, and the two gas inlet branch pipes extend out of an exhaust branch pipe, are connected with a solenoid valve II and then are combined into an exhaust pipe for gas recovery. The two air inlet branch pipes extend out of the backflow branch pipe, are connected with a safety valve and then are combined to be connected to an exhaust pipe, and the two air inlet branch pipes extend out of the emptying branch pipe, are connected with a third electromagnetic valve and then are combined into an emptying pipe to be emptied; the two gas inlet branch pipes extend out of nitrogen gas inlet branch pipes between the exhaust branch pipe and the emptying branch pipe and are connected with a fourth electromagnetic valve and then are combined into a nitrogen gas inlet pipe for feeding nitrogen; and the gas inlet branch pipes extend out of vacuum branch pipes and are connected with a fifth electromagnetic valve and then are combined into a vacuum pipe which is connected with a vacuum pump set. The gas filling device for the ultra-pure gas bottle can solve the problems that an existing gas filling device for the ultra-pure gas bottle is large in filling consumption, large in replacement frequency and poor in replacement effect.

Description

Technical Field

[0001] The utility model relates to the technical field of gas production equipment, in particular to a device for filling ultra-pure gas cylinders with gas. Background Art

[0002] With the rapid development of China's economy, the domestic demand for ultra-pure gas shows an increasing trend year by year. Especially in industries such as metallurgy, chemical engineering, and chips, the demand for various high-purity and even ultra-pure gases is increasing year by year, and extremely strict requirements are imposed on the gas purity.

[0003] Taking one of our existing gas cylinder treatment methods as an example, after the gas cylinder is treated, the medium filled in the gas cylinder can only reach high purity. Taking the test data after filling krypton and xenon gas cylinders as an example, the purity of krypton can only reach 99.999% after filling, and the purity of xenon can only reach 99.9995% after filling. However, the products produced by the device are all of 6N grade, and the medium in the gas cylinder after filling fails to meet the 6N requirement, that is, an ultra-high purity of more than 99.9999%, generally called ultra-pure.

[0004] An existing gas cylinder filling device includes an inlet pipe connected to a filter and then divided into two inlet branch pipes, each of which is connected to a solenoid valve I and then connected to a gas cylinder group in series with multiple gas cylinders. Two exhaust branch pipes extend between the solenoid valve I and the gas cylinder group for each of the two inlet branch pipes. After each of the two exhaust branch pipes is connected to a solenoid valve II, they are merged into an exhaust pipe and connected to a gas recovery airbag. Each of the two inlet branch pipes extends a reflux branch pipe at the place where the exhaust branch pipe extends. After each of the two reflux branch pipes is connected to a safety valve, they are merged and connected to the exhaust pipe. Each of the two inlet branch pipes extends a vent branch pipe between the exhaust branch pipe and the gas cylinder group. After each of the two vent branch pipes is connected to a solenoid valve III, they are merged into a vent pipe for venting. The main treatment method of this device is to send gas into the gas cylinder and let it stand for several minutes and then vent and recover. After multiple filling and venting operations, the purpose of replacing the gas cylinder is achieved. This method consumes too much product gas, resulting in too low extraction rate of the product device, unstable replacement effect, unstable gas volume during each intake, and obvious disadvantages. Although the replacement times are too many, the effect is not good. Moreover, during the gas release process, the pressure inside the gas cylinder cannot be effectively detected, and only the residual pressure inside the gas cylinder can be judged by the sound of the gas flow. If not grasped well, it may cause the possibility of air entering the gas cylinder, resulting in treatment failure. Therefore, the treatment operation and process are redesigned and improved to invent an ultra-pure gas cylinder replacement method and operation. Content of the Utility Model

[0005] The problem to be solved by the utility model is to provide a gas filling device for ultra-pure gas cylinders, so as to solve the problems of large filling consumption, many replacement times, and poor replacement effect of the existing gas filling device for ultra-pure gas cylinders.

[0006] To solve the above problems, the technical solution of the present utility model is as follows: The ultra-pure gas cylinder gas filling device includes an inlet pipe connected to a filter and then divided into two inlet branch pipes, each of which is connected to a first solenoid valve and then connected to a gas cylinder group in which multiple gas cylinders are connected in series. Between the first solenoid valve and the gas cylinder group of the two inlet branch pipes, exhaust branch pipes extend out. After each of the two exhaust branch pipes is connected to a second solenoid valve, they are combined into an exhaust pipe and connected to a gas recovery airbag. At the place where the two inlet branch pipes extend out the exhaust branch pipes, return branch pipes extend out. After each of the two return branch pipes is connected to a safety valve, they are combined and connected to the exhaust pipe. Between the exhaust branch pipes and the gas cylinder group of the two inlet branch pipes, vent branch pipes extend out. After each of the two vent branch pipes is connected to a third solenoid valve, they are combined into a vent pipe for venting; between the exhaust branch pipes and the vent branch pipes of the two inlet branch pipes, nitrogen inlet branch pipes extend out. After each of the two nitrogen inlet branch pipes is connected to a fourth solenoid valve, they are combined into a nitrogen inlet pipe for introducing nitrogen. Between the third solenoid valve and the gas cylinder group of each inlet branch pipe, vacuum branch pipes extend out. After each of the two vacuum branch pipes is connected to a fifth solenoid valve, they are combined into a vacuum pipe connected to a vacuum pump group.

[0007] In the above technical solution, a more specific solution may be: The vacuum pump group includes a sixth solenoid valve and at least two vacuum pumps connected in series in sequence.

[0008] Furthermore: A safety valve is provided between the branch of the vacuum pipe and the vacuum pump group.

[0009] Furthermore: A filter is provided on the nitrogen inlet pipe.

[0010] Furthermore: Between the third solenoid valve and the fourth solenoid valve of the two inlet branch pipes, a pressure transmitter and a pressure indicator are provided, and a pressure transmitter and a pressure indicator are connected in series with the vacuum pump group.

[0011] Furthermore: The first solenoid valve, the second solenoid valve, the third solenoid valve, the fourth solenoid valve, the fifth solenoid valve, the sixth solenoid valve, all the safety valves, all the pressure transmitters and pressure indicators, and the vacuum pump group are all connected to a pressure control unit.

[0012] Furthermore: The pressure control unit is a distributed control system.

[0013] Due to the adoption of the above technical solution, the present utility model has the following beneficial effects compared with the prior art:

[0014] The gas filling device for this ultra-pure gas cylinder uses a vacuum pump group to evacuate the gas cylinder, and optimizes the gas cylinder treatment process. Pressure measuring points, corresponding solenoid valves are respectively set on the pipelines connected to the bottle filling row, and a medium-pressure nitrogen pipeline is added to detect leaks at the gas cylinder interface. All pressure signals are transmitted to the existing DCS of the bottle filling device for remote monitoring. When in use, open the medium-pressure nitrogen valve (i.e., solenoid valve four) to detect leaks at the bottle nozzle. After confirming that there is no leakage at the bottle mouth and pipeline, open the pressure relief valve (i.e., solenoid valve three) and the bottle valve to relieve the pressure of the gas cylinder group until the pressure PI3003 is lower than 0.02 MPa. After completion, close the pressure relief valve. Open the vacuum solenoid valve (i.e., solenoid valve five) to start the vacuum pump group to evacuate the gas cylinder until the pressure is lower than 2×10-4 and the pressure is stable. After completion, close the vacuum solenoid valve and stop the vacuum pump group. Open the filling solenoid valve (i.e., solenoid valve one) to fill the gas cylinder.

[0015] Using this gas filling device for ultra-pure gas cylinders solves the problem of excessive gas cylinder replacement times and excessive product consumption. After using this operation method, the gas cylinder does not need to be replaced with product gas, and the product can reach the 6N level after filling. The efficiency of gas cylinder treatment has been greatly improved, and the gas cylinder treatment capacity has been increased from one bottle per time to eight bottles per time. It solves the probability that the gas cylinder needs to be processed twice due to the lack of effective detection means. This treatment device and method have the characteristics of simple installation, stable reliability, high efficiency and convenience. Brief Description of the Drawings

[0016] Figure 1 is a schematic structural diagram of an embodiment of the present invention;

[0017] Identifications in the figure: solenoid valve one 1, solenoid valve two 2, solenoid valve three 3, solenoid valve four 4, solenoid valve five 5, solenoid valve six 6, intake pipe 11, intake branch pipe 11-1, exhaust pipe 12, exhaust branch pipe 12-1, reflux branch pipe 13-1, vent pipe 14, vent branch pipe 14-1, nitrogen intake pipe 15, nitrogen intake branch pipe 15-1, vacuum pipe 16, vacuum branch pipe 16-1, gas cylinder group 20, medium-pressure nitrogen 30, filter 40, safety valve 50, pressure transmitter and pressure indicator 60, gas recovery airbag 70. Detailed Embodiment

[0018] The following further details the embodiments of the present invention in conjunction with the drawings:

[0019] As Figure 1The ultra-pure gas cylinder gas filling device shown includes an intake pipe 11 connected to a filter 40 and then divided into two intake branch pipes 11-1, each of which is connected to a first solenoid valve 1 and then connected to a gas cylinder group 20 with multiple gas cylinders connected in series. Both intake branch pipes 11-1 extend exhaust branch pipes 12-1 between the first solenoid valve and the gas cylinder group. Each of the two exhaust branch pipes 12-1 is connected to a second solenoid valve 2 and then merged into an exhaust pipe 12 and connected to a gas recovery airbag 70. Both intake branch pipes 11-1 extend return branch pipes 13-1 at the place where the exhaust branch pipes extend. Each of the two return branch pipes 13-1 is connected to a safety valve 50 and then merged and connected to the exhaust pipe 12. Both intake branch pipes 11-1 extend vent branch pipes 14-1 between the exhaust branch pipe 12-1 and the gas cylinder group 20. Each of the two vent branch pipes 14-1 is connected to a third solenoid valve 3 and then merged into a vent pipe 14 for venting.

[0020] Both intake branch pipes 11-1 extend nitrogen intake branch pipes 15-1 between the exhaust branch pipe 12-1 and the vent branch pipe 14-1. Each of the two nitrogen intake branch pipes 15-1 is connected to a fourth solenoid valve 4 and then merged into a nitrogen intake pipe 15 to introduce medium-pressure nitrogen 30. A filter 40 is provided on the nitrogen intake pipe 15.

[0021] Each intake branch pipe 11-1 extends a vacuum branch pipe 16-1 between its respective third solenoid valve 3 and the gas cylinder group 20. Each of the two vacuum branch pipes 18-1 is connected to a fifth solenoid valve 5 and then merged into a vacuum pipe 16 connected to a vacuum pump group. The vacuum pump group includes a sixth solenoid valve 6 and three vacuum pumps 20 connected in series in sequence. A safety valve 50 is provided between the branch of the vacuum pipe 16 and the vacuum pump group.

[0022] A pressure transmitter and a pressure indicator 60 are provided between the first solenoid valve 1 and the fourth solenoid valve 4 of both intake branch pipes 11-1. A pressure transmitter and a pressure indicator 60 are connected in series with the vacuum pump group. The first solenoid valve 1, the second solenoid valve 2, the third solenoid valve 3, the fourth solenoid valve 4, the fifth solenoid valve 5, the sixth solenoid valve 6, the safety valve 50, all pressure transmitters and pressure indicators 60, and the vacuum pump group are all connected to a pressure control unit. The pressure control unit is a distributed control system, that is, DCS.

[0023] The gas filling device for this ultra-pure gas cylinder uses a vacuum pump group to evacuate the gas cylinder, and optimizes the gas cylinder treatment process. Pressure measurement points, corresponding solenoid valves are respectively set on the pipelines connected to the filling row, and a medium-pressure nitrogen pipeline is added to detect leaks at the gas cylinder interface. All pressure signals are transmitted to the existing filling device DCS for remote monitoring. When in use, open the medium-pressure nitrogen valve (i.e., solenoid valve four) to detect leaks at the bottle mouth. After confirming that there is no leakage at the bottle mouth and pipeline, open the pressure relief valve (i.e., solenoid valve three) and the bottle valve (i.e., the bottle valve connecting each gas cylinder in the gas cylinder group 20) to relieve the pressure of the gas cylinder group until the pressure PI3003 is lower than 0.02 MPa. After completion, close the pressure relief valve. Open the vacuum pumping solenoid valve (i.e., solenoid valve five) to start the vacuum pump group to evacuate the gas cylinder until the pressure is lower than 2×10-4 and the pressure is stable. After completion, close the vacuum pumping solenoid valve and stop the vacuum pump group, and open the filling solenoid valve (i.e., solenoid valve one) to fill the gas cylinder.

[0024] Using this gas filling device for ultra-pure gas cylinders can solve the problem of excessive gas cylinder replacement times and excessive product consumption. After using this operation method, the gas cylinder does not need to be replaced with product gas, and the product can reach the 6N level after filling. The gas cylinder treatment efficiency has been greatly improved, and the gas cylinder treatment capacity has been increased from one bottle per time to eight bottles per time. It can solve the probability of the gas cylinder needing secondary treatment due to the lack of effective detection means. This treatment device and method have the characteristics of simple installation, stability and reliability, full recovery of the remaining gas during product filling, and high efficiency and convenience.

Claims

1. A gas filling device for an ultra-pure gas cylinder, which comprises an inlet pipe connected with a filter and then divided into two inlet branch pipes, each of which is connected with a first solenoid valve and then connected with a cylinder group in which multiple cylinders are connected in series. Both of the two inlet branch pipes extend out exhaust branch pipes between the first solenoid valve and the cylinder group. After each of the two exhaust branch pipes is connected with a second solenoid valve, they are combined into an exhaust pipe and connected with a gas recovery air bag. Both of the two inlet branch pipes extend out return branch pipes at the positions where the exhaust branch pipes extend out. After each of the two return branch pipes is connected with a safety valve, they are combined and connected to the exhaust pipe. Both of the two inlet branch pipes extend out vent branch pipes between the exhaust branch pipes and the cylinder group. After each of the two vent branch pipes is connected with a third solenoid valve, they are combined into a vent pipe for venting; and it is characterized in that: Two of the intake branch pipes extend nitrogen intake branch pipes between the exhaust branch pipe and the venting branch pipe. After each of the two nitrogen intake branch pipes is connected to a solenoid valve four, they are merged into a nitrogen inlet pipe to introduce nitrogen. Each of the intake branch pipes extends a vacuum branch pipe between its respective solenoid valve three and the gas cylinder group. After each of the two vacuum branch pipes is connected to a solenoid valve five, they are merged into a vacuum pipe to connect to a vacuum pump group.

2. The ultra-pure gas cylinder gas filling device according to claim 1, characterized in that: The vacuum pump group includes a solenoid valve six and at least two vacuum pumps connected in series in sequence.

3. The ultra-pure gas cylinder gas filling device according to claim 2, characterized in that: A safety valve is provided between the branch of the vacuum pipe and the vacuum pump group.

4. The ultra-pure gas cylinder gas filling device according to claim 3, characterized in that: A filter is provided on the nitrogen inlet pipe.

5. The ultra-pure gas cylinder gas filling device according to claim 4, characterized in that: Two pressure transmitters and pressure indicators are provided between the solenoid valve three and the solenoid valve four of the two intake branch pipes. The vacuum pump group is connected in series with a pressure transmitter and a pressure indicator.

6. The ultra-pure gas cylinder gas filling device according to claim 5, wherein: The solenoid valve one, the solenoid valve two, the solenoid valve three, the solenoid valve four, the solenoid valve five, the solenoid valve six, all the safety valves, all the pressure transmitters and pressure indicators, and the vacuum pump group are all connected to a pressure control unit.

7. The ultra-pure gas cylinder gas filling device according to claim 6, characterized in that: The pressure control unit is a distributed control system.

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