Dehumidifying and conveying device for semiconductor processing

Abstract

The utility model discloses a dehumidifying and conveying device for semiconductor processing, which relates to the technical field of semiconductor elements and comprises a shell, a conveying unit and a dehumidifying unit. The shell is of a box-shaped structure; the conveying unit comprises rotating shafts, a conveying belt, containing grooves, an air blower and a drying assembly, the front end and the rear end of the interior of the shell are rotationally connected with the front ends and the rear ends of the two left-right corresponding rotating shafts correspondingly, and the two rotating shafts are in transmission connection through the conveying belt; the outer end of each containing groove is fixedly connected with one air blower, and the drying assemblies are installed in the containing grooves. According to the semiconductor processing dehumidification conveying device, the semiconductor element can be prevented from being abnormal in the processing process through dehumidification, dust can be cleaned in time, and it is guaranteed that the semiconductor element can be normally processed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor components, in particular to a dehumidifying conveying device for semiconductor processing. Background Technique

[0002] Semiconductor components are electronic devices with conductivity between good conductors and insulators. They utilize the special electrical properties of semiconductor materials to perform specific functions, and can be used to generate, control, receive, transform, amplify signals, and perform energy conversion. The semiconductor materials of semiconductor components are silicon, germanium, or gallium arsenide, and can be used as rectifiers, oscillators, light emitters, amplifiers, photodetectors, and other devices. To distinguish them from integrated circuits, they are sometimes also called discrete devices. During the processing of semiconductor components, a conveying device is required to convey the semiconductor components.

[0003] During the conveying process of existing semiconductor components, there is a lack of dehumidification function. Semiconductor components cannot be applied during the wet process. Moreover, when semiconductor components are transported, a small amount of dust will adhere to the surface of the conveying device. If not cleaned in time, it will affect the semiconductor component processing process and cannot meet people's usage requirements. For this reason, we propose a dehumidifying conveying device for semiconductor processing. Content of the Utility Model

[0004] The technical problem to be solved by the utility model is to overcome the existing defects and provide a dehumidifying conveying device for semiconductor processing, which can avoid abnormalities in semiconductor components during processing through dehumidification, and can clean dust in time to ensure the normal processing of semiconductor components, and can effectively solve the problems in the background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A dehumidifying conveying device for semiconductor processing, including a housing, a transportation unit, and a dehumidification unit;

[0006] Housing: It has a box-shaped structure;

[0007] Transportation unit: It includes a rotating shaft, a conveyor belt, a receiving groove, a blower, and a drying component. The front and rear ends of two left-right corresponding rotating shafts are respectively rotatably connected to the front and rear ends inside the housing, and the two rotating shafts are connected by a conveyor belt. Two groups of front and rear corresponding receiving grooves are respectively opened at the left and right ends of the housing, a blower is fixedly connected to the outer end of each receiving groove, and the drying component is installed inside the receiving groove;

[0008] Dehumidification unit: It is installed on the upper end of the housing.

[0009] The housing is used to carry the main structure, the transportation unit is used to transport semiconductor components. During use, the conveyor belt can be driven by a rotating shaft. When semiconductor components are placed on the surface of the conveyor belt, the conveyor belt can drive the semiconductor components to move to achieve the transportation function. The dehumidification unit is used to dehumidify the interior of the housing.

[0010] Furthermore, the drying component includes a heating plate, an outer frame, and a filter screen. The inner ends of the accommodating grooves are respectively fixedly connected to a heating plate. An outer frame is arranged at the inner end of the heating plate, and the four sides of the filter screen are fixedly connected to the inside of the outer frame. During use, to ensure the dryness of semiconductor components, a blower can be used to blow air inside. The blown air is heated by the heating plate, and the hot air passes through the filter screen for dehumidification and drying to prevent the entry of external humid air.

[0011] Furthermore, it also includes legs and transportation ports. The upper ends of four legs are respectively fixedly connected to the four corners at the lower end of the housing. Two rectangular transportation ports are respectively opened at the left and right ends of the housing. The legs are used to support the main structure, and semiconductor components can be transported through the two transportation ports during use.

[0012] Furthermore, the dehumidification unit includes a dehumidifier, a moisture discharge port, and a cleaning component. The lower end of the dehumidifier is fixedly connected to the upper end of the housing, the rear end of the dehumidifier is fixedly connected to the moisture discharge port, and the cleaning component is installed at the lower end of the housing. During use, the interior of the housing can be dehumidified by the dehumidifier, and the moisture can be discharged through the moisture discharge port. The cleaning component can be used to clean the conveyor belt to prevent excessive dust accumulation from affecting the semiconductor component processing process.

[0013] Furthermore, the cleaning component includes a bottom plate, a servo motor, a cleaning plate, and cleaning brushes. The front and rear ends of the bottom plate are respectively fixedly connected to the front and rear surfaces at the lower end inside the housing. The lower end of the servo motor is fixedly connected to the upper end of the bottom plate. The output shaft of the servo motor is fixedly connected to the lower end of the cleaning plate, and cleaning brushes are fixedly connected to the upper end of the cleaning plate at equal distances. During cleaning, the servo motor can be started. The servo motor drives the cleaning plate to rotate, and the rotating cleaning plate drives the cleaning brushes to clean the lower end of the conveyor belt. A small amount of dust will be carried by the semiconductor components and adhered to the surface of the conveyor belt during transportation. When the conveyor belt transports to the lower half section, it can be cleaned by the cleaning brushes to prevent dust accumulation.

[0014] Furthermore, the dehumidification unit also includes an air chamber and ventilation ports. The upper end of the air chamber is fixedly connected to the upper end inside the housing, and ventilation ports are equidistantly opened at the lower end of the air chamber. During use, the air chamber and ventilation ports can assist the dehumidification process. The air chamber can help the internal air circulation during use, and the internal air can flow through the ventilation ports.

[0015] Compared with the prior art, the beneficial effects of the present utility model are: This semiconductor processing dehumidifying and conveying device has the following advantages:

[0016] 1. To ensure that the semiconductor components are dry during use, a blower can be used to blow air inside. The blown air is heated by the heating plate, and the hot air passes through the filter to dehumidify and dry to avoid bringing in external wet air.

[0017] 2. When cleaning, the servo motor can be started, and the servo motor drives the cleaning plate to rotate. The rotation of the cleaning plate drives the cleaning brush to clean the lower end of the conveyor belt. During the transportation process, semiconductor components will carry a small amount of dust attached to the surface of the conveyor belt. When the conveyor belt is transported to the lower half, it can be cleaned with a cleaning brush to avoid dust accumulation.

[0018] 3. This semiconductor processing dehumidification and conveying device can prevent semiconductor components from abnormalities during processing by dehumidification, and can clean dust in time to ensure that semiconductor components can be processed normally, which can meet people's usage needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the structure of the utility model when viewed from above;

[0021] Figure 3 This is a schematic diagram of the cross-sectional structure of the utility model.

[0022] In the figure: 1 shell, 2 legs, 3 transport port, 4 transport unit, 41 rotating shaft, 42 conveyor belt, 43 receiving tank, 44 blower, 45 heating plate, 46 outer frame, 47 filter, 5 dehumidification unit, 51 dehumidifier, 52 dehumidification port, 53 wind chamber, 54 ventilation port, 55 bottom plate, 56 servo motor, 57 cleaning plate, 58 cleaning brush. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] See also Figure 1-3 , this embodiment provides a technical solution: a semiconductor processing dehumidification and transportation device, including a housing 1, a transportation unit 4 and a dehumidification unit 5;

[0025] Shell 1: box-type structure;

[0026] Transport unit 4: includes a rotating shaft 41, a conveyor belt 42, a receiving groove 43, a blower 44 and a drying component. The front and rear ends of the inner shell 1 are respectively rotatably connected to the front and rear ends of two corresponding rotating shafts 41 on the left and right. The two rotating shafts 41 are connected through a conveyor belt 42. The left and right ends of the shell 1 are respectively provided with two groups of front and rear corresponding receiving grooves 43. The outer end of each receiving groove 43 is fixedly connected to a blower 44. The drying component includes a heating plate 45, an outer frame 46 and a filter 47. The inner ends of the receiving grooves 43 are respectively fixedly connected to a heating plate 45. The inner end of the heating plate 45 is provided with an outer frame 46. The inside of the outer frame 46 is fixedly connected to the four sides of the filter 47.

[0027] The shell 1 is used to support the main structure, and the transport unit 4 is used to transport semiconductor components. When in use, the conveyor belt 42 can be driven to move by the rotating shaft 41. The semiconductor components are placed on the surface of the conveyor belt 42, and the conveyor belt 42 can be used to drive the semiconductor components to move to realize the transportation function. The dehumidification unit 5 is used to dehumidify the inside of the shell 1. When in use, in order to ensure that the semiconductor components are dry, a blower 44 can be used to blow air inside. The blown air is heated by the heating plate 45, and the hot air is dehumidified and dried through the filter 47 to avoid bringing in external wet air.

[0028] The housing 1 also includes legs 2 and a transport opening 3. The four corners of the lower end of the housing 1 are fixedly connected to the upper ends of the four legs 2. Two rectangular transport openings 3 are respectively provided on the left and right ends of the housing 1. The legs 2 are used to support the main structure. When in use, semiconductor components can be transported through the two transport openings 3.

[0029] The dehumidification unit 5 includes a dehumidifier 51, a dehumidification port 52 and a cleaning component. The upper end of the outer shell 1 is fixedly connected to the lower end of the dehumidifier 51, and the rear end of the dehumidifier 51 is fixedly connected to the dehumidification port 52. The cleaning component includes a base plate 55, a servo motor 56, a cleaning plate 57 and a cleaning brush 58. The lower ends of the front and rear surfaces of the inner shell 1 are respectively fixedly connected to the front and rear ends of the base plate 55, the upper end of the base plate 55 is fixedly connected to the lower end of the servo motor 56, and the output shaft of the servo motor 56 is fixedly connected to the lower end of the cleaning plate 57. The upper end of the cleaning plate 57 is fixedly connected with a cleaning brush 58 at equal distances. The dehumidification unit 5 also includes an air chamber 53 and a vent 54. The upper end of the inner shell 1 is fixedly connected to the upper end of the air chamber 53, and the lower end of the air chamber 53 is provided with vents 54 at equal distances.

[0030] When in use, the dehumidifier 51 can be used to dehumidify the inside of the shell 1, and the moisture can be discharged through the dehumidification port 52. The cleaning component can be used to clean the conveyor belt 42 to prevent excessive dust accumulation from affecting the semiconductor component processing process. When cleaning, the servo motor 56 can be started, and the servo motor 56 drives the cleaning plate 57 to rotate. The rotation of the cleaning plate 57 drives the cleaning brush 58 to clean the lower end of the conveyor belt 42. During transportation, the semiconductor components will carry a small amount of dust attached to the surface of the conveyor belt 42. When the conveyor belt 42 is transported to the lower half, it can be cleaned by the cleaning brush 58 to avoid dust accumulation. When in use, the dehumidification process can be assisted by the wind chamber 53 and the vent 54. When in use, the wind chamber 53 can help internal wind circulation, and the vent 54 can allow internal air to circulate.

[0031] The working principle of the semiconductor processing dehumidification and conveying device provided by the utility model is as follows:

[0032] The shell 1 is used to carry the main structure, and the transport unit 4 is used to transport the semiconductor components. When in use, the conveyor belt 42 can be driven to move by the rotating shaft 41. The semiconductor components are placed on the surface of the conveyor belt 42, and the conveyor belt 42 can be used to drive the semiconductor components to move to realize the transportation function. The dehumidification unit 5 is used to dehumidify the inside of the shell 1. When in use, in order to ensure that the semiconductor components are dry, a blower 44 can be used to blow air inside. The blown air is heated by the heating plate 45, and the hot air is dehumidified and dried through the filter 47 to avoid bringing in external wet air. The support legs 2 are used to support the main structure. When in use, the semiconductor components can be transported through the two transport ports 3. When in use, the shell 1 can be dehumidified by the dehumidifier 51. The dehumidification work is performed on the conveyor belt 42, and the moisture can be discharged through the dehumidification port 52. The cleaning component can be used to clean the conveyor belt 42 to prevent excessive dust accumulation from affecting the semiconductor component processing process. The servo motor 56 can be started during cleaning, and the servo motor 56 drives the cleaning plate 57 to rotate. The cleaning plate 57 rotates and drives the cleaning brush 58 to clean the lower end of the conveyor belt 42. During transportation, the semiconductor components will carry a small amount of dust attached to the surface of the conveyor belt 42. When the conveyor belt 42 is transported to the lower half, it can be cleaned by the cleaning brush 58 to avoid dust accumulation. When in use, the dehumidification process can be assisted by the wind chamber 53 and the vent 54. When in use, the wind chamber 53 can help internal wind circulation, and the vent 54 can allow internal air to circulate.

[0033] It is worth noting that the input ends of the conveyor belt 42, blower 44, heating plate 45, dehumidifier 51 and servo motor 56 disclosed in the above embodiments are electrically connected to the output end of the external power supply through an external switch group, and the external switch group controls the operation of the conveyor belt 42, blower 44, heating plate 45, dehumidifier 51 and servo motor 56 using methods commonly used in the prior art.

[0034] The above are only embodiments of the present utility model, and thus do not limit the patent scope of the present utility model. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied in other related technical fields, shall similarly be included within the patent protection scope of the present utility model.

Claims

1. A semiconductor processing dehumidifying and conveying device, characterized in that: It includes a housing (1), a transportation unit (4) and a dehumidification unit (5); Housing (1): It is a box-shaped structure; Transportation unit (4): It includes a rotating shaft (41), a conveyor belt (42), a receiving groove (43), a blower (44) and a drying component. The front and rear ends of the left and right corresponding rotating shafts (41) are respectively rotatably connected to the front and rear ends of the inner part of the housing (1). The two rotating shafts (41) are connected by a conveyor belt (42). Two groups of front and rear corresponding receiving grooves (43) are respectively opened at the left and right ends of the housing (1). A blower (44) is fixedly connected to the outer end of each receiving groove (43). The drying component is installed inside the receiving groove (43); Dehumidification unit (5): It is installed at the upper end of the housing (1).

2. The dehumidifying and conveying device for semiconductor processing according to claim 1, wherein: The drying component includes a heating plate (45), an outer frame (46) and a filter screen (47). The inner ends of the receiving grooves (43) are respectively fixedly connected to a heating plate (45). The inner end of the heating plate (45) is provided with an outer frame (46). The periphery of the filter screen (47) is fixedly connected inside the outer frame (46).

3. A semiconductor processing dehumidifying and conveying device according to claim 1, characterized in that: It also includes legs (2) and a transportation port (3). The upper ends of four legs (2) are respectively fixedly connected to the four corners of the lower end of the housing (1). Two rectangular transportation ports (3) are respectively opened at the left and right ends of the housing (1).

4. A semiconductor processing dehumidifying and conveying device according to claim 1, characterized in that: The dehumidification unit (5) includes a dehumidifier (51), a moisture discharge port (52) and a cleaning component. The lower end of the dehumidifier (51) is fixedly connected to the upper end of the housing (1). The rear end of the dehumidifier (51) is fixedly connected to the moisture discharge port (52). The cleaning component is installed at the lower end of the housing (1).

5. A semiconductor processing dehumidifying and conveying device according to claim 4, characterized in that: The cleaning component includes a bottom plate (55), a servo motor (56), a cleaning plate (57) and a cleaning brush (58). The front and rear ends of the bottom plate (55) are respectively fixedly connected to the front and rear surfaces of the lower end of the inner part of the housing (1). The lower end of the servo motor (56) is fixedly connected to the upper end of the bottom plate (55). The output shaft of the servo motor (56) is fixedly connected to the lower end of the cleaning plate (57). The upper end of the cleaning plate (57) is fixedly connected with cleaning brushes (58) at equal intervals.

6. The semiconductor processing dehumidifying and conveying device according to claim 4, wherein: The dehumidification unit (5) also includes an air chamber (53) and a ventilation port (54). The upper end of the air chamber (53) is fixedly connected to the upper end of the inner part of the housing (1). The ventilation ports (54) are opened at equal intervals at the lower end of the air chamber (53).

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