Probe card efficient cleaning device
By designing a highly efficient cleaning device for probe cards and using electric drive cleaning boards for circumference cleaning, the problem of inefficiency of traditional cleaning methods is solved, and the efficient cleaning and service life of probe cards are achieved.
Patent Information
- Application Number
- CN202422302483.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-09-20
AI Technical Summary
Traditional probe card cleaning methods are inefficient, and debris and particles attached to the probe affect the quality of the test signal, resulting in inaccurate test results.
An efficient cleaning device for probe card is designed, including a cleaning base, a fixing block, a slider, an electric telescopic rod, a crank and a cleaning board. The cleaning board is driven to perform circular motions to remove contaminants and oxides from the probe needle wall.
Improves cleaning efficiency, extends the service life of the probe card, reduces the costs caused by frequent replacement of the probe card, ensures that the probe head remains in good condition and avoids premature failure.
Smart Images
Figure CN223171412U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a probe card cleaning device, in particular to an efficient probe card cleaning device, belonging to the technical field of probe card cleaning. Background Art
[0002] The probe card is an essential and important part in the wafer testing stage. It is responsible for applying the test signals generated by the tester to the chip under test and transmitting the feedback signals in the chip back to the tester to complete the entire test process. It can screen out chips with poor performance before packaging, ensuring that only qualified chips enter the subsequent packaging process. This step is of great significance for reducing the chip manufacturing cost and improving the product quality.
[0003] During the long-term use of the probe card, some debris and particles may adhere to the needle walls of the probes due to excessive detection, which will affect the quality of the test signals and even cause the test signals to be unable to be correctly transmitted, affecting the accuracy of the test results. The traditional cleaning method is manual cleaning, which is not only troublesome during cleaning but also inefficient. Summary of the Utility Model
[0004] Aiming at the deficiencies of the prior art, the utility model provides an efficient probe card cleaning device that is convenient for cleaning the probes.
[0005] The technical solution adopted by the utility model to solve the above technical problems is as follows:
[0006] An efficient probe card cleaning device, which includes a bottom plate. A vertical plate is installed on the bottom plate. A cleaning mechanism is installed on one side of the vertical plate. The cleaning mechanism includes a cleaning base. Two fixing blocks are symmetrically installed on the cleaning base. A first slider is slidably installed between the fixing blocks. A first electric telescopic rod is installed between the first slider and the vertical plate. A first round rod is installed on the top of the first slider. A crank is installed on one side of the first round rod. A second round rod is installed on the crank. A round plate is installed at the bottom of the second round rod. A circular chute is opened on the cleaning base. A plurality of second sliders are installed on the round plate. The second sliders are slidably connected with the circular chute. A cleaning plate is installed at the bottom of the round plate. Cleaning bristles are arranged at the bottom of the cleaning plate.
[0007] Furthermore, the crank is rotatably connected with the first round rod and the second round rod.
[0008] Further, an inner cavity is formed on the bottom plate. Rack bars are symmetrically and movably installed on both sides of the inner cavity. A first clamping plate and a second clamping plate are respectively installed on one side of the two rack bars. A gear meshing with the rack bars is installed between the two rack bars. A second electric telescopic rod is installed on one side of the inner cavity, and one end of the second electric telescopic rod is connected to the first clamping plate.
[0009] Further, one side at the top of the first clamping plate and the second clamping plate is semicircular.
[0010] Further, grooves are formed on both the first clamping plate and the second clamping plate and are adapted to the bottom plate.
[0011] Further, disassembly mechanisms are symmetrically installed on both sides of the cleaning plate. The disassembly mechanism includes a disassembly base. Fixing grooves are formed on both sides of the cleaning plate. A fixing frame is installed on the disassembly base. A spring is installed in the fixing frame. A disassembly block is installed at one end of the spring. The disassembly block is adapted to the fixing groove.
[0012] Further, a disassembly column is installed on the outer wall of the fixing frame. The disassembly column penetrates through the fixing frame and the spring and is connected to the disassembly block. A disassembly handle is installed on one side of the disassembly column.
[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0014] Through the cooperation of the first electric telescopic rod, the first slider, the crank, the circular plate and the cleaning plate on the cleaning mechanism, the present application can perform circumferential cleaning on the probe card. Regular cleaning can remove pollutants and oxides on the probe needle wall, reduce wear and deterioration caused by long-term use. An appropriate cleaning frequency of the needles can ensure that the probe heads maintain a good working state, avoid premature failure. At the same time, through regular cleaning, the service life of the probe card can be extended, thereby reducing the cost generated by frequent replacement of the probe card, and effectively improving the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 is the overall schematic diagram of the present utility model;
[0016] Figure 2 is the enlarged schematic diagram at A of the present utility model;
[0017] Figure 3 is the partial structural schematic diagram of the present utility model;
[0018] Figure 4 is the bottom view of the cleaning mechanism of the present utility model;
[0019] Figure 5 is the sectional view of the cleaning mechanism of the present utility model;
[0020] In the figure, 1 is the bottom plate; 2 is the vertical plate; 3 is the cleaning mechanism; 4 is the cleaning base; 5 is the fixing block; 6 is the first slider; 7 is the first electric telescopic rod; 8 is the first round rod; 9 is the crank; 10 is the second round rod; 11 is the round plate; 12 is the circular chute; 13 is the second slider; 14 is the cleaning plate; 15 is the cleaning brush; 16 is the gear; 17 is the inner cavity; 18 is the rack; 19 is the first clamping plate; 20 is the second electric telescopic rod; 21 is the groove; 22 is the fixing groove; 23 is the disassembly mechanism; 24 is the disassembly base; 25 is the fixing frame; 26 is the spring; 27 is the disassembly block; 28 is the disassembly column; 29 is the disassembly handle; 30 is the second clamping plate. Specific implementation manner
[0021] The technical solution of the present utility model will be further described in detail below in conjunction with the drawings and specific embodiments.
[0022] As Figures 1-5 shown, the probe card high-efficiency cleaning device provided in this embodiment includes a bottom plate 1. A vertical plate 2 is installed on the bottom plate 1. A cleaning mechanism 3 is installed on one side of the vertical plate 2. The cleaning mechanism 3 includes a cleaning base 4. Two fixing blocks 5 are symmetrically installed on the cleaning base 4. A first slider 6 is slidably installed between the fixing blocks 5. A first electric telescopic rod 7 is installed between the first slider 6 and the vertical plate 2. A first round rod 8 is installed on the top of the first slider 6. A crank 9 is installed on one side of the first round rod 8. A second round rod 10 is installed on the crank 9. A round plate 11 is installed at the bottom of the second round rod 10. A circular chute 12 is opened on the cleaning base 4. A plurality of second sliders 13 are installed on the round plate 11. The second sliders 13 are slidably connected with the circular chute 12. A cleaning plate 14 is installed at the bottom of the round plate 11. Cleaning brushes 15 are arranged at the bottom of the cleaning plate 14. The crank 9 is rotatably connected with the first round rod 8 and the second round rod 10. By using the first electric telescopic rod 7 to push the first slider 6, at the same time, the crank 9 drives the round plate 11 at the bottom of the second round rod 10 to perform a circular motion on the circular chute 12. The cleaning plate 14 at the bottom of the round plate 11 can clean the probe card. Regular cleaning can remove pollutants and oxides on the probe needle wall, and reduce wear and deterioration caused by long-term use.
[0023] Furthermore, as Figures 1-5As shown in the figure, an inner cavity 17 is formed on the bottom plate 1. Rack bars 18 are symmetrically and movably installed on both sides of the inner cavity 17. A first clamping plate 19 and a second clamping plate 30 are respectively installed on one side of the two rack bars 18. A gear 16 meshing with the two rack bars 18 is installed between the two rack bars 18. A second electric telescopic rod 20 is installed on one side of the inner cavity 17, and one end of the second electric telescopic rod 20 is connected to the first clamping plate 19; one side of the top of the first clamping plate 19 and the second clamping plate 31 is semicircular. Grooves 21 are provided on both the first clamping plate 19 and the second clamping plate 30 to match the bottom plate 1; the first clamping plate 19 is pushed inward by the second electric telescopic rod 20, and at the same time, the second clamping plate 30 on the other side of the gear 18 is pushed inward. The simultaneous pushing of the first clamping plate 19 and the second clamping plate 30 can fix the probe card in the middle area, ensuring the accurate position of the probe card during cleaning and reducing cleaning deviation caused by movement or offset.
[0024] Furthermore, as Figures 1-5 shown, disassembly mechanisms 23 are symmetrically installed on both sides of the cleaning plate 14. The disassembly mechanism 23 includes a disassembly base 24. Fixing grooves 22 are provided on both sides of the cleaning plate 14. A fixing frame 25 is installed on the disassembly base 24. A spring 26 is installed inside the fixing frame 25. One end of the spring 26 is installed with a disassembly block 27, and the disassembly block 27 is adapted to the fixing groove 22. A disassembly column 28 is installed on the outer wall of the fixing frame 25. The disassembly column 28 penetrates the fixing frame 25 and the spring 26 and is connected to the disassembly block 27. A disassembly handle 29 is installed on one side of the disassembly column 28; the mutual engagement of the disassembly block 27 and the fixing groove 22 can fix the cleaning plate 14 on the circular plate 11. By pulling the disassembly handle 29 to drive the disassembly column 28, the disassembly block 27 is separated from the fixing groove 22, and the replacement of the cleaning plate 14 can be completed, preventing the cleaning plate 14 from being worn out after long-term use and reducing the cleaning effect.
[0025] As Figures 1-5 shown, the principle of the probe card high-efficiency cleaning device provided in this embodiment is as follows: The first electric telescopic rod 7 is used to push the first slider 6. At the same time, the crank 9 drives the circular plate 11 at the bottom of the second round rod 10 to perform circular motion on the circular chute 12. The cleaning plate 14 under the circular plate 11 can rotate and clean the cleaning card under its drive. Regular cleaning can remove pollutants and oxides on the probe needle wall, reducing wear and deterioration caused by long-term use; an appropriate cleaning frequency of the probe can ensure that the probe head maintains a good working state and avoid premature failure. At the same time, through regular cleaning, the service life of the probe card can be extended, thereby reducing the cost caused by frequent replacement of the probe card.
[0026] The foregoing description illustrates and describes the preferred embodiments of the present utility model. It should be understood that the present utility model is not limited to the forms disclosed herein. Any modifications and variations made by those skilled in the art without departing from the spirit and scope of the present utility model shall fall within the protection scope of the appended claims of the present utility model.
Claims
1. An efficient cleaning device for a probe card, comprising a bottom plate (1), characterized in that: A vertical plate (2) is installed on the bottom plate (1). A cleaning mechanism (3) is installed on one side of the vertical plate (2). The cleaning mechanism (3) includes a cleaning base (4). Two fixing blocks (5) are symmetrically installed on the cleaning base (4). A first slider (6) is slidably installed between the fixing blocks (5). A first electric telescopic rod (7) is installed between the first slider (6) and the vertical plate (2). A first round rod (8) is installed on the top of the first slider (6). A crank (9) is installed on one side of the first round rod (8). A second round rod (10) is installed on the crank (9). A round plate (11) is installed at the bottom of the second round rod (10). A circular chute (12) is formed on the cleaning base (4). A plurality of second sliders (13) are installed on the round plate (11). The second sliders (13) are slidably connected with the circular chute (12). A cleaning plate (14) is installed at the bottom of the round plate (11). Cleaning bristles (15) are arranged at the bottom of the cleaning plate (14).
2. The highly efficient cleaning device for a probe card according to claim 1, wherein: The crank (9) is rotatably connected with the first round rod (8) and the second round rod (10).
3. The highly efficient cleaning device for a probe card according to claim 1, characterized in that: An inner cavity (17) is formed on the bottom plate (1). Two racks (18) are symmetrically and movably installed on both sides of the inner cavity (17). A first clamping plate (19) and a second clamping plate (30) are respectively installed on one side of the two racks (18). A gear (16) meshing with the two racks (18) is installed between the two racks (18). A second electric telescopic rod (20) is installed on one side of the inner cavity (17). One end of the second electric telescopic rod (20) is connected with the first clamping plate (19).
4. The probe card high-efficiency cleaning device according to claim 3, wherein: One side of the top of the first clamping plate (19) and the second clamping plate (30) is semicircular.
5. The probe card high-efficiency cleaning device according to claim 3, characterized in that: Grooves (21) adapted to the bottom plate (1) are formed on both the first clamping plate (19) and the second clamping plate (30).
6. The highly efficient cleaning device for a probe card according to claim 1, characterized in that: Disassembly mechanisms (23) are symmetrically installed on both sides of the cleaning plate (14). The disassembly mechanism (23) includes a disassembly base (24). Fixing grooves (22) are formed on both sides of the cleaning plate (14). A fixing frame (25) is installed on the disassembly base (24). A spring (26) is installed in the fixing frame (25). A disassembly block (27) is installed at one end of the spring (26). The disassembly block (27) is adapted to the fixing groove (22).
7. The highly efficient cleaning device for a probe card according to claim 6, characterized in that: A disassembly column (28) is installed on the outer wall of the fixing frame (25). The disassembly column (28) penetrates through the fixing frame (25) and the spring (26) and is connected with the disassembly block (27).
8. The highly efficient cleaning device for a probe card according to claim 7, wherein: A disassembly handle (29) is installed on one side of the disassembly column (28).