Automatic positioning device for assisting rotation of single auxiliary furnace chamber of crystal growth machine

Abstract

The utility model discloses an automatic positioning device for assisting rotation of a single auxiliary furnace chamber of a crystal growth machine. The automatic positioning device comprises an auxiliary cylinder mechanism, the auxiliary air cylinder mechanism comprises a moving air cylinder and an air cylinder sliding wheel located on the front side of the output end of the moving air cylinder. When the auxiliary furnace chamber rotates and descends, the moving air cylinder firstly acts to enable the air cylinder sliding wheel to be in contact with the auxiliary furnace chamber so as to position the auxiliary furnace chamber. According to the automatic positioning device, through the movement air cylinder and the auxiliary positioning pin which are arranged above the isolation valve positioning pin, it is guaranteed that the single auxiliary furnace chamber of the machine table is accurately positioned to the fixed position each time, the matching precision of the single auxiliary furnace chamber is guaranteed, and abrasion to the original isolation valve positioning pin is reduced. And the vacuum degree of the machine table and impurity pollution to the vacuum furnace body caused by abrasives due to interference of the isolating valve positioning pin are effectively improved. And meanwhile, manpower is saved, the cycle operation process is simplified, and good practical value and technological improvement significance are achieved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor production, and in particular relates to an automatic positioning device for assisting the rotation of a single auxiliary furnace chamber of a crystal growing machine. Background Art

[0002] The existing crystal growth machine is a device for producing silicon single crystals. It is equipped with a main furnace chamber, a furnace cover, an auxiliary furnace chamber, and an isolation valve. During normal continuous growth, the auxiliary furnace chamber is separated from the main furnace chamber and the furnace cover by an isolation valve. Under vacuum conditions, the auxiliary furnace chamber can be lifted and opened, allowing the crystal ingot or the re-feeder with silicon material to be removed and installed. Then, through the isolation method, the main furnace chamber, furnace cover, and auxiliary furnace chamber are connected again to continue growth. This method reduces the cost of a single crystal ingot (considering that the quartz crucible can only be heated once and cannot be recycled). At the same time, the isolation valve and the auxiliary furnace chamber are connected and fixed by a fixed ring and four isolation valve locating pins. The vacuum is maintained by gravity compression. When the fixed ring is loosened, the auxiliary furnace chamber is activated. When the fixed ring is fixed (the fixed ring can rotate around the auxiliary furnace chamber. When the fixed ring rotates a certain angle, the fixed ring is loosened and the auxiliary furnace chamber can be separated from the isolation valve. When it rotates a certain angle in the opposite direction, the fixed ring is fixed and the auxiliary furnace chamber is fixed to the isolation valve), the auxiliary furnace chamber, isolation valve, and furnace cover are activated together.

[0003] When a crystal growth machine is used to continuously grow semiconductor silicon single crystal rods, during the rotation of a single auxiliary furnace chamber, due to the gravity distribution problem in the auxiliary furnace chamber, the entire chamber will shift to the right side of the machine, resulting in the inability to properly fall in the center with the four isolation valve locating pins of the original isolation valve. At this time, two people are required to assist, one to operate the interface, and the other to intervene manually and visually determine the positioning of the auxiliary furnace chamber and the four isolation valve locating pins. During this process, on the one hand, there is a delay in the communication and coordination between the two people. At the same time, the personnel are unable to ensure the consistency of the matching between the auxiliary furnace chamber and the four isolation valve locating pins on the isolation valve, which in turn leads to interference wear between the auxiliary furnace chamber and the isolation valve locating pins. Considering that the isolation valve locating pins are close to the isolation valve sealing ring and the cavity, it is easy for the vacuum degree of the machine isolation valve and the wear caused by the interference of the isolation valve locating pins to cause impurity contamination of the vacuum furnace body. At the same time, manpower is wasted and the rotation operation process is cumbersome, requiring many confirmations. Utility Model Content

[0004] The purpose of the utility model is to provide a rotation-assisted automatic positioning device for a single auxiliary chamber of a crystal growing machine in order to solve the deficiencies of the prior art.

[0005] The purpose of this utility model is achieved by the following technical solutions:

[0006] An automatic positioning device for assisting the rotation of a single auxiliary furnace chamber of a crystal growing machine, comprising an auxiliary cylinder mechanism;

[0007] The auxiliary cylinder mechanism includes a moving cylinder and a cylinder sliding wheel located on the front side of the output end of the moving cylinder;

[0008] When the auxiliary furnace chamber rotates and descends, the moving cylinder acts first to make the cylinder sliding wheel contact the auxiliary furnace chamber to position the auxiliary furnace chamber.

[0009] Preferably, it further includes an auxiliary positioning pin;

[0010] The height of the auxiliary positioning pin is lower than that of the moving cylinder and greater than that of the isolation valve positioning pin, and the distance between the auxiliary positioning pin and the auxiliary furnace chamber is greater than the distance between the isolation valve positioning pin and the auxiliary furnace chamber.

[0011] Preferably, an anti-pollution sleeve is sleeved on the bottom of the auxiliary positioning pin.

[0012] Preferably, the anti-pollution sleeve is made of Teflon.

[0013] Preferably, the auxiliary positioning pin is fixed to the isolation valve through a fixed connection block located below the anti-pollution sleeve.

[0014] Preferably, the auxiliary cylinder mechanism is located on the side where the auxiliary furnace chamber is prone to deviation during rotation.

[0015] Preferably, the auxiliary cylinder mechanism further includes a cylinder fixed backplate bracket, and the moving cylinder is fixed on the cylinder fixed backplate bracket;

[0016] The cylinder fixed backplate bracket is fixed to the isolation valve.

[0017] Preferably, the cylinder fixed backplate bracket is integrally Z-shaped, including a vertical plate, and upper and lower horizontal plates extending in opposite directions at both ends of the vertical plate; the moving cylinder is located on the upper horizontal plate, and the lower horizontal plate is fixed to the side wall of the isolation valve.

[0018] Preferably, a triangular reinforcing plate is provided between the vertical plate and the upper horizontal plate.

[0019] Preferably, the cylinder sliding wheel is made of Teflon.

[0020] The automatic positioning device provided by the present application, through the moving cylinder and the auxiliary positioning pin arranged above the isolation valve positioning pin, ensures that the single auxiliary furnace chamber of the machine tool is accurately positioned to a fixed position each time, ensures its matching accuracy and reduces the wear with the original isolation valve positioning pin. It effectively improves the vacuum degree of the machine tool and the impurity pollution brought by the wear caused by the interference of the isolation valve positioning pin to the vacuum furnace body. At the same time, it saves manpower and simplifies the rotation operation process, and has good practical value and technical improvement significance. Description of the Drawings

[0021] Figure 1 It is a schematic structural diagram of the automatic positioning device provided by the present application;

[0022] Figure 2 is Figure 1 a schematic structural diagram of another perspective of the automatic positioning device shown;

[0023] Explanation of reference numerals:

[0024] 1 - auxiliary furnace chamber; 2 - isolation valve; 3 - fixed ring; 4 - isolation valve positioning pin; 5 - auxiliary positioning pin; 6 - anti - pollution sleeve; 7 - fixed connection block; 8 - moving cylinder; 9 - cylinder sliding wheel; 10 - cylinder fixed backplate bracket; 11 - triangular reinforcing plate. Specific embodiments

[0025] The present utility model provides an automatic positioning device for assisting the rotation of a single auxiliary furnace chamber of a crystal growth machine. The auxiliary furnace chamber 1 is fixed to or separated from the isolation valve 2 through a fixed ring 3 and 4 isolation valve positioning pins 4, as Figures 1-2 shown, and the automatic positioning device includes an auxiliary cylinder mechanism.

[0026] The auxiliary cylinder mechanism includes a moving cylinder 8 and a cylinder sliding wheel 9 located on the front side of the output end of the moving cylinder.

[0027] In the prior art, during the process of the rotation and descent of the auxiliary furnace chamber, the auxiliary furnace chamber is prone to deviation and does not fall centrally, so it is easy to collide and wear with the isolation valve positioning pin, bringing impurity pollution to the isolation valve and affecting the quality of the crystal bar. By setting the moving cylinder, the auxiliary furnace chamber can be supported in advance when it descends, so that the auxiliary furnace chamber falls centrally, preventing deviation and reducing the interference wear with the isolation valve positioning pin. Moreover, the cylinder sliding wheel 9 provided at the front end of the moving cylinder can be in rolling contact with the auxiliary furnace chamber, reducing the wear on the auxiliary furnace chamber.

[0028] Preferably, the automatic positioning device provided by the present application further includes an auxiliary positioning pin 5. The auxiliary positioning pin 5 is located on the isolation valve 2, with a height greater than that of the isolation valve positioning pin 4 and lower than that of the moving cylinder, and the distance from the auxiliary furnace chamber is greater than the distance between the isolation valve positioning pin 4 and the auxiliary furnace chamber 1.

[0029] Above the isolation valve locating pin of this application, an auxiliary locating pin 5 and a motion cylinder 8 are successively arranged. During the process of the secondary furnace chamber rotating and descending, the motion cylinder at the top acts first. The cylinder rod extends to make the cylinder sliding wheel 8 at the forefront contact the side wall of the secondary furnace chamber 1, fixing the secondary furnace chamber 1 at the central position of the isolation valve in advance to prevent the secondary furnace chamber from shifting beyond the position of the auxiliary locating pin. The secondary furnace chamber descends precisely under the rolling support of the cylinder sliding wheel. Since the cylinder sliding wheel is in rolling contact with the secondary furnace chamber, the secondary furnace chamber can be reduced or even avoided from being scratched and worn, reducing pollution. During the continuous descent of the secondary furnace chamber, the auxiliary locating pin 5 at the middle height locates the secondary furnace chamber in advance before the isolation valve locating pin 4, further preventing the secondary furnace chamber from shifting. Since the auxiliary locating pin is far from the secondary furnace chamber, even if the secondary furnace chamber collides with the auxiliary locating pin, the abrasives generated are also far from the isolation valve sealing ring, having little impact on the vacuum degree of the isolation valve. Finally, under the positioning action of the isolation valve locating pin 4, the secondary furnace chamber precisely falls into the center of the isolation valve. The secondary furnace chamber and the isolation valve can be connected and fixed by rotating the fixed ring, completing the cooperation between the isolation valve and the secondary furnace chamber. When the auxiliary locating pin and the isolation valve locating pin act, the motion cylinder can be retracted, and the positioning is carried out by the auxiliary locating pin and the isolation valve locating pin.

[0030] As can be understood by those skilled in the art, the auxiliary cylinder mechanism is located on the side where the secondary furnace chamber is prone to shift during rotation. For example, when the secondary furnace chamber rotates, it is prone to shift to the right, and the auxiliary cylinder mechanism is arranged on the right side of the secondary furnace chamber. Of course, multiple auxiliary cylinder mechanisms can also be set on different sides of the secondary furnace chamber.

[0031] Preferably, the motion cylinder is electrically controlled by an SMC SY3140-5LZD solenoid valve. Its opening and closing are controlled by a 24V safety voltage. By default, the normally closed air outlet CDA air pipe is connected in series with a pressure regulating valve and installed at the closed end of the cylinder, and the energized air outlet CDA air pipe is connected in series with a pressure regulating valve and installed at the extended end of the cylinder. Among them, a 0.5A fuse is added to the 24V circuit for protection. The cylinder control part can use the reserved position of the solenoid valve assembly of the machine tool, which does not involve the original CDA and Ar gas parts of the crystal growth machine and will not interfere with the normal crystal growth production. Further preferably, the intake pressure is adjusted to 1.5 kg / cm 2 and the outlet pressure is adjusted to 2.0 kg / cm 2 to meet the process of the cylinder's jogging and delayed closing. It makes the operation of personnel safer and more convenient. The entire rotation process of the secondary furnace chamber can be operated by one person.

[0032] Preferably, an anti-pollution sleeve 6 is sleeved at the bottom of the auxiliary locating pin 5, which can reduce the damage caused by interference with the secondary furnace chamber.

[0033] Preferably, the top of the auxiliary locating pin 5 is conical, which can reduce the interference wear with the secondary furnace chamber 1.

[0034] Preferably, the auxiliary positioning pin 5 is fixed to the isolation valve through a fixed connection block 7 located below the anti-pollution sleeve 6.

[0035] Further preferably, the anti-pollution sleeve 6 and the cylinder sliding wheel 9 are made of Teflon material, which can reduce scratches caused by the dynamic descent of the auxiliary furnace chamber. The entire movement cylinder 8 is made of aluminum alloy material, and the auxiliary positioning pin 5 and the fixed connection block 7 are made of stainless steel material.

[0036] Preferably, the auxiliary cylinder mechanism further includes a cylinder fixed backplate bracket 10 for fixing the movement cylinder; the cylinder fixed backplate bracket is fixed to the isolation valve 2.

[0037] Further preferably, the cylinder fixed backplate bracket 10 is integrally Z-shaped, including a vertical plate, and upper and lower horizontal plates extending in opposite directions at both ends of the vertical plate; the movement cylinder is located on the upper horizontal plate, and the lower horizontal plate is fixed to the side wall of the isolation valve 2.

[0038] In order to effectively support the movement cylinder, a triangular reinforcing plate 11 is provided between the vertical plate and the upper horizontal plate.

[0039] The present application provides a preferred embodiment, in which the height of the isolation valve positioning pin is 116.5 mm, the height of the auxiliary positioning pin is 174 mm, and the height of the upper horizontal plate is 274 mm.

[0040] The automatic positioning device provided by the present application, through the movement cylinder and the auxiliary positioning pin provided above the isolation valve positioning pin, ensures that the single auxiliary furnace chamber of the machine is accurately positioned to a fixed position each time, ensures its matching accuracy and reduces the wear with the original isolation valve positioning pin. It effectively improves the vacuum degree of the machine and the impurity pollution brought by the wear debris caused by the interference of the isolation valve positioning pin to the vacuum furnace body. At the same time, it saves manpower and simplifies the swivel operation process, and has good practical value and technical improvement significance.

[0041] Although the preferred embodiments of the present invention have been described, those skilled in the art can make additional changes and modifications once they know the basic creative concepts. Therefore, the appended claims are intended to be interpreted to include the preferred embodiments and all changes and modifications falling within the scope of the present invention. Obviously, those skilled in the art can make various changes and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention is also intended to include these modifications and variations.

Claims

1. An automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growth machine, wherein the secondary furnace chamber is fixed to or separated from the isolation valve by a fixed ring and an isolation valve positioning pin, and is characterized in that The automatic positioning device includes an auxiliary cylinder mechanism; The auxiliary cylinder mechanism includes a moving cylinder and a cylinder sliding wheel located on the front side of the output end of the moving cylinder; When the secondary furnace chamber rotates and descends, the moving cylinder acts first to make the cylinder sliding wheel contact the secondary furnace chamber to position the secondary furnace chamber.

2. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 1, characterized in that it further includes an auxiliary positioning pin; The height of the auxiliary positioning pin is lower than that of the moving cylinder and greater than that of the isolation valve positioning pin, and the distance between the auxiliary positioning pin and the secondary furnace chamber is greater than the distance between the isolation valve positioning pin and the secondary furnace chamber.

3. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 2, characterized in that a pollution prevention sleeve is sleeved on the bottom of the auxiliary positioning pin.

4. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 3, characterized in that the pollution prevention sleeve is made of Teflon.

5. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 3, characterized in that the auxiliary positioning pin is fixed to the isolation valve through a fixed connection block located below the pollution prevention sleeve.

6. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 1, characterized in that the auxiliary cylinder mechanism is located on the side where the secondary furnace chamber is prone to deviation during rotation.

7. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 1, characterized in that the auxiliary cylinder mechanism further includes a cylinder fixed backplate bracket, and the moving cylinder is fixed on the cylinder fixed backplate bracket; the cylinder fixed backplate bracket is fixed to the isolation valve.

8. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 7, characterized in that the cylinder fixed backplate bracket is integrally Z-shaped, including a vertical plate, and upper and lower horizontal plates extending in opposite directions at both ends of the vertical plate; the moving cylinder is located on the upper horizontal plate, and the lower horizontal plate is fixed to the side wall of the isolation valve.

9. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 8, characterized in that a triangular reinforcing plate is provided between the vertical plate and the upper horizontal plate.

10. The automatic positioning device for assisting the rotation of a single secondary furnace chamber of a crystal growing machine according to claim 1, characterized in that the cylinder sliding wheel is made of Teflon.

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