Air pressure sintering furnace for preparing high-performance silicon nitride ceramic substrate
By introducing a rotating shaft and a rotating mechanism into the pneumatic sintering furnace prepared by the silicon nitride ceramic substrate, automatic positioning of the mold is achieved, solving the problem of low efficiency caused by manual adjustment and improving working efficiency.
Patent Information
- Application Number
- CN202422464519.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-12
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-10-12
AI Technical Summary
During the preparation of existing silicon nitride ceramic substrates, the mold needs to be manually adjusted to the center of the heating zone when put into the pneumatic sintering furnace, resulting in low working efficiency.
A pneumatic sintering furnace prepared by high-performance silicon nitride ceramic substrate is designed, using a rotating shaft, a rotating mechanism and a pickup mechanism to realize the automatic positioning of the mold in the center of the heating zone to avoid manual adjustment.
The mold is placed and taken out in the pneumatic sintering furnace, reduced manual operation and improved working efficiency.
Smart Images
Figure CN223179309U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of gas pressure sintering furnaces, in particular to a gas pressure sintering furnace for preparing high-performance silicon nitride ceramic substrates. Background Art
[0002] Silicon nitride has high strength, fracture toughness, hardness, wear resistance and good chemical and thermal stability. Due to the excellent combination of properties, silicon nitride ceramic substrates are used in various structural applications, as well as electronic and industrial applications.
[0003] During the production process of silicon nitride ceramic substrates, the mold containing silicon nitride materials needs to be placed in a gas pressure sintering furnace for sintering. Usually, manpower or handling equipment is used to place the mold in the gas pressure sintering furnace for batch sintering. After the mold is placed in the gas pressure sintering furnace, it is also necessary to manually adjust the mold to make the silicon nitride materials in the mold located at the center of the heating zone, resulting in low work efficiency. Content of the Utility Model
[0004] The purpose of the utility model is to provide a gas pressure sintering furnace for preparing high-performance silicon nitride ceramic substrates, which can place the mold at the center of the heating zone of the gas pressure sintering furnace, avoid manual adjustment and improve work efficiency.
[0005] To achieve the above object, a pressure sintering furnace for preparing a high-performance silicon nitride ceramic substrate is provided, including a sintering furnace body. A placement plate is provided inside the sintering furnace body. A ceramic substrate mold is provided at the upper end of the placement plate. Rotating shafts are respectively fixedly connected to the middle parts of both side ends of the sintering furnace body, and the two rotating shafts are away from each other and are respectively located at both ends of the sintering furnace body. The rotating shafts are rotationally connected to a rotating mechanism, and the rotating shafts penetrate downward from the upper end of the rotating mechanism through the rotating mechanism. One end of the rotating mechanism is provided with a sliding rod, and the sliding rod penetrates through the rotating mechanism and is slidably connected to the rotating mechanism. One end of the sliding rod extends to the opening side of the sintering furnace body. A workpiece taking mechanism is fixedly connected to the side end of the sliding rod, and the workpiece taking mechanism is located at the opening side of the sintering furnace body. The end of the workpiece taking mechanism away from the sliding rod extends to the middle of the opening of the sintering furnace body, and the middle part of one end of the placement plate facing the workpiece taking mechanism extends into the workpiece taking mechanism. The lower end of the sintering furnace body is fixedly connected to a support frame; The workpiece taking mechanism is composed of a support rod, a handwheel, a fixing plate, a clamping plate and a screw rod. The support rod is fixedly connected to the sliding rod, and the end of the support rod away from the sliding rod extends to the middle of the opening side of the sintering furnace body. Two fixing plates are provided and are fixedly connected up and down to the side end of the support rod, and the fixing rod is located on the side of the support rod facing the sintering furnace body. The clamping plate is located between the two fixing plates, and the middle part of one end of the placement plate extends below the clamping plate. The lower end of the placement plate is located on the upper end of the fixing plate below the clamping plate. The screw rod is rotationally connected to the middle of the upper end of the fixing plate, and the upper end of the screw rod penetrates through the fixing plate and is threadedly connected to the fixing plate. The handwheel is fixedly connected to the upper end of the screw rod. It can place the mold at the center of the heating area of the pressure sintering furnace, avoid manual adjustment, and improve work efficiency.
[0006] According to the pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate, two limiting rods are symmetrically and fixedly connected to the lower end of the clamping plate, and the lower ends of the limiting rods sequentially penetrate downward through the clamping plate and the fixing plate, and the limiting rods are respectively slidably connected to the clamping plate and the fixing plate. It is used to limit the placement plate to prevent the placement plate from rotating due to inertia during the movement.
[0007] According to the pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate, the rotating mechanism is composed of a sliding sleeve, a rotating sleeve and a connecting plate. The rotating shaft penetrates through the middle of the rotating sleeve and is rotationally connected to the rotating sleeve. The connecting plate is fixedly connected to the middle of the side end of the rotating sleeve away from the sintering furnace body. The sliding sleeve is fixedly connected to one end of the connecting plate away from the rotating sleeve, and the center line of the sliding sleeve is perpendicular to the center line of the rotating sleeve. The sliding rod penetrates through the middle of the sliding sleeve and is slidably connected to the sliding sleeve. It is used to rotate the workpiece taking mechanism to facilitate the taking and placing of the mold.
[0008] According to the pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate, a limiting plate is fixedly connected to one end of the sliding rod, and the limiting plate is away from the support rod. It is used to limit the sliding rod to prevent the sliding rod from falling off.
[0009] The air pressure sintering furnace prepared according to the high-performance silicon nitride ceramic substrate, a reinforcing rib is fixedly connected to the outer end of the sliding sleeve, and the reinforcing rib penetrates through the middle of the connecting plate and is fixedly connected to the connecting plate. It is used to improve the connection strength between the sliding sleeve and the connecting plate.
[0010] The air pressure sintering furnace prepared according to the high-performance silicon nitride ceramic substrate, a handle is fixedly connected to one end of the workpiece taking mechanism away from the sintering furnace body, and the handle is fixedly connected to the side end of the support rod away from the sintering furnace body. It is convenient for the staff to operate and take out or put into the mold from the sintering furnace.
[0011] The air pressure sintering furnace prepared according to the high-performance silicon nitride ceramic substrate, closing doors are respectively installed at both ends of the sintering furnace body. It is used to close the sintering furnace.
[0012] Compared with the prior art, the beneficial effect of the present utility model is that: the placing plate is clamped by the workpiece taking mechanism and the placing plate and the ceramic substrate mold placed on its upper end are put into or taken out of the sintering furnace by using the sliding rod, and the mold placed in the sintering furnace is located at the center of the heating zone, improving the work efficiency.
[0013] Additional aspects and advantages of the present utility model will be given in part in the following description, become obvious in part from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The present utility model will be further described below in conjunction with the drawings and embodiments;
[0015] Figure 1 It is a perspective view of the air pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate of the present utility model;
[0016] Figure 2 It is a top view of the air pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate of the present utility model;
[0017] Figure 3 It is a matching diagram of the mold, the workpiece taking mechanism and the handle of the air pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate of the present utility model;
[0018] Figure 4 It is a perspective view of the clamping plate of the air pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate of the present utility model;
[0019] Figure 5 It is a perspective view of the rotating mechanism of the air pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate of the present utility model.
[0020] In the figure: 1. Main body of sintering furnace; 2. Placing plate; 3. Pick-up mechanism; 4. Support frame; 5. Rotating mechanism; 6. Sliding rod; 7. Limiting plate; 8. Rotating shaft; 9. Handle; 10. Support rod; 11. Handwheel; 12. Fixed plate; 13. Clamping plate; 14. Screw; 15. Limiting rod; 16. Sliding sleeve; 17. Reinforcing rib; 18. Rotating sleeve; 19. Connecting plate. Detailed implementation manners
[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.
[0022] Please refer to Figures 1-5, the present utility model provides a technical solution: a gas pressure sintering furnace for preparing a high-performance silicon nitride ceramic substrate, including a sintering furnace main body 1, with sealing doors installed at both ends of the sintering furnace main body 1 for sealing the sintering furnace. A placement plate 2 is provided inside the sintering furnace main body 1, and a ceramic substrate mold is arranged on the upper end of the placement plate 2. Rotating shafts 8 are respectively fixedly connected to the middle parts of both side ends of the sintering furnace main body 1, and the two rotating shafts 8 are away from each other and are respectively located at both ends of the sintering furnace main body 1. The rotating shafts 8 are rotationally connected to a rotating mechanism 5, and the rotating shafts 8 penetrate downward from the upper end of the rotating mechanism 5 through the rotating mechanism 5. One end of the rotating mechanism 5 is provided with a sliding rod 6, and the sliding rod 6 penetrates through the rotating mechanism 5 and is slidably connected to the rotating mechanism 5. One end of the sliding rod 6 is fixedly connected with a limiting plate 7, and the limiting plate 7 is away from the support rod 10 for limiting the sliding rod 6 to prevent the sliding rod 6 from falling off. The rotating mechanism 5 is composed of a sliding sleeve 16, a rotating sleeve 18 and a connecting plate 19. The rotating shaft 8 penetrates through the middle of the rotating sleeve 18 and is rotationally connected to the rotating sleeve 18. The connecting plate 19 is fixedly connected to the middle part of the side end of the rotating sleeve 18 away from the sintering furnace main body 1. The sliding sleeve 16 is fixedly connected to one end of the connecting plate 19 away from the rotating sleeve 18, and the center line of the sliding sleeve 16 is perpendicular to the center line of the rotating sleeve 18. The sliding rod 6 penetrates through the middle of the sliding sleeve 16 and is slidably connected to the sliding sleeve 16 for rotating the workpiece taking mechanism 3 to facilitate the taking and placing of the mold. A reinforcing rib 17 is fixedly connected to the outer side end of the sliding sleeve 16, and the reinforcing rib 17 penetrates through the middle of the connecting plate 19 and is fixedly connected to the connecting plate 19, and is connected by welding for improving the connection strength between the sliding sleeve 16 and the connecting plate 19. One end of the sliding rod 6 extends to the opening side of the sintering furnace main body 1. A workpiece taking mechanism 3 is fixedly connected to the side end of the sliding rod 6, and the workpiece taking mechanism 3 is located at the opening side of the sintering furnace main body 1. One end of the workpiece taking mechanism 3 away from the sliding rod 6 extends to the middle of the opening of the sintering furnace main body 1, and the middle part of one end of the placement plate 2 facing the workpiece taking mechanism 3 extends into the workpiece taking mechanism 3. A support frame 4 is fixedly connected to the lower end of the sintering furnace main body 1; the workpiece taking mechanism 3 is composed of a support rod 10, a handwheel 11, a fixing plate 12, a clamping plate 13 and a screw rod 14. The support rod 10 is fixedly connected to the sliding rod 6, and one end of the support rod 10 away from the sliding rod 6 extends to the middle of the opening side of the sintering furnace main body 1. Two fixing plates 12 are provided and are fixedly connected up and down to the side end of the support rod 10, and the fixing rod is located on the side of the support rod 10 facing the sintering furnace main body 1. The clamping plate 13 is located between the two fixing plates 12, and the middle part of one end of the placement plate 2 extends below the clamping plate 13. The lower end of the placement plate 2 is located on the upper end of the fixing plate 12 below the clamping plate 13. Two limiting rods 15 are symmetrically fixedly connected to the lower end of the clamping plate 13, and the lower ends of the limiting rods 15 sequentially penetrate downward through the clamping plate 13 and the fixing plate 12. The limiting rods 15 are respectively slidably connected to the clamping plate 13 and the fixing plate 12 for limiting the placement plate 2 to prevent the placement plate 2 from rotating due to inertia during movement.One end of the workpiece taking mechanism 3 away from the sintering furnace main body 1 is fixedly connected with a handle 9, and the handle 9 is fixedly connected to the side end of the support rod 10 away from the sintering furnace main body 1, which is convenient for the staff to operate and take out or put the mold into the sintering furnace. The screw rod 14 is rotatably connected to the middle of the upper end of the fixed plate 12, and the upper end of the screw rod 14 penetrates through the fixed plate 12 and is threadedly connected with the fixed plate 12. The hand wheel 11 is fixedly connected to the upper end of the screw rod 14.
[0023] Working principle: When putting the mold into the sintering furnace main body 1, pull the support rod 10 through the handle 9, the sliding rod 6 slides in the sliding sleeve 16, so that the workpiece taking mechanism 3 moves away from the sintering furnace main body 1 until the limit plate 7 contacts the sliding sleeve 16, and then control the rotating sleeve 18 to rotate on the rotating shaft 8 through the handle 9, so that the workpiece taking mechanism 3 rotates to one side of the sintering furnace main body 1. Then put one end of the placing plate 2 on the fixed plate 12 under the clamping plate 13, rotate the screw rod 14 through the hand wheel 11 to push the clamping plate 13 to clamp the placing plate 2. The limiting rod 15 passes through the placing plate 2 and the fixed plate 12 in turn. Then place the mold on the upper end of the placing plate 2. Finally, repeat the above operations in reverse to put the placing plate 2 with the mold into the sintering furnace main body 1. Rotate the screw rod 14 in reverse through the hand wheel 11 to make the clamping plate 13 and the limiting rod 15 leave the placing plate 2, so that the workpiece taking mechanism 3 can leave the placing plate 2 and make the mold located at the center of the heating area of the sintering furnace main body 1; When taking out the placing plate 2 and the mold in the sintering furnace main body 1, the limit plate 7 contacts the sliding sleeve 16. Through the handle 9 and the rotating mechanism 5, make the workpiece taking mechanism 3 located in the middle of the opening side of the sintering furnace main body 1, push the support plate to make the workpiece taking mechanism 3 approach the sintering furnace until one end of the placing plate 2 enters directly below the clamping plate 13, then the clamping plate 13 can be used to fix the placing plate 2 through the hand wheel 11. Reverse the operations of the support rod 10 and the rotating mechanism 5 to take out the mold from the sintering furnace main body 1 and move it to the side end of the sintering furnace main body 1.
[0024] The above has described the embodiments of the present invention in detail with reference to the drawings, but the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art, various changes can be made without departing from the purpose of the present invention.
Claims
1. A pressure sintering furnace for preparing a high-performance silicon nitride ceramic substrate, comprising a sintering furnace body (1), characterized in that, A placing plate (2) is arranged inside the sintering furnace main body (1). A ceramic substrate mold is arranged at the upper end of the placing plate (2). Rotating shafts (8) are respectively fixedly connected to the middle parts of the two side ends of the sintering furnace main body (1), and the two rotating shafts (8) are away from each other and are respectively located at the two ends of the sintering furnace main body (1). The rotating shaft (8) is rotationally connected with a rotating mechanism (5), and the rotating shaft (8) penetrates through the rotating mechanism (5) from the upper end of the rotating mechanism (5) downward. One end of the rotating mechanism (5) is provided with a sliding rod (6), and the sliding rod (6) penetrates through the rotating mechanism (5) and is slidably connected with the rotating mechanism (5). One end of the sliding rod (6) extends to the opening side of the sintering furnace main body (1). A workpiece taking mechanism (3) is fixedly connected to the side end of the sliding rod (6), and the workpiece taking mechanism (3) is located at the opening side of the sintering furnace main body (1). The end of the workpiece taking mechanism (3) away from the sliding rod (6) extends to the middle of the opening of the sintering furnace main body (1), and the middle part of one end of the placing plate (2) facing the workpiece taking mechanism (3) extends into the workpiece taking mechanism (3). A support frame (4) is fixedly connected to the lower end of the sintering furnace main body (1); The workpiece taking mechanism (3) is composed of a support rod (10), a hand wheel (11), a fixing plate (12), a clamping plate (13) and a screw rod (14). The support rod (10) is fixedly connected with the sliding rod (6), and the end of the support rod (10) away from the sliding rod (6) extends to the middle of the opening side of the sintering furnace main body (1). Two fixing plates (12) are arranged and are fixedly connected to the side end of the support rod (10) up and down, and the fixing rods are located on the side of the support rod (10) facing the sintering furnace main body (1). The clamping plate (13) is located between the two fixing plates (12), and the middle part of one end of the placing plate (2) extends below the clamping plate (13). The lower end of the placing plate (2) is located on the upper end of the fixing plate (12) below the clamping plate (13). The screw rod (14) is rotationally connected to the middle of the upper end of the fixing plate (12), and the upper end of the screw rod (14) penetrates through the fixing plate (12) and is threadedly connected with the fixing plate (12). The hand wheel (11) is fixedly connected to the upper end of the screw rod (14).
2. The pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate according to claim 1, characterized in that: Two limiting rods (15) are symmetrically and fixedly connected to the lower end of the clamping plate (13), and the lower ends of the limiting rods (15) sequentially penetrate through the clamping plate (13) and the fixing plate (12) downward. The limiting rods (15) are respectively slidably connected with the clamping plate (13) and the fixing plate (12).
3. The pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate according to claim 1, wherein: The rotating mechanism (5) is composed of a sliding sleeve (16), a rotating sleeve (18) and a connecting plate (19). The rotating shaft (8) penetrates through the middle of the rotating sleeve (18) and is rotationally connected with the rotating sleeve (18). The connecting plate (19) is fixedly connected to the middle part of the side end of the rotating sleeve (18) away from the sintering furnace main body (1). The sliding sleeve (16) is fixedly connected to one end of the connecting plate (19) away from the rotating sleeve (18), and the central line of the sliding sleeve (16) is perpendicular to the central line of the rotating sleeve (18). The sliding rod (6) penetrates through the middle of the sliding sleeve (16) and is slidably connected with the sliding sleeve (16).
4. The air pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate according to claim 3, characterized in that: One end of the sliding rod (6) is fixedly connected with a limiting plate (7), and the limiting plate (7) is far away from the support rod (10).
5. The pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate according to claim 3, characterized in that: The outer side end of the sliding sleeve (16) is fixedly connected with a reinforcing rib (17), and the reinforcing rib (17) penetrates through the middle of the connecting plate (19) and is fixedly connected with the connecting plate (19).
6. The air pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate according to claim 1, wherein: One end of the picking mechanism (3) far away from the sintering furnace main body (1) is fixedly connected with a handle (9), and the handle (9) is fixedly connected to the side end of the support rod (10) far away from the sintering furnace main body (1).
7. The pressure sintering furnace for preparing the high-performance silicon nitride ceramic substrate according to claim 1, characterized in that: Closing doors are respectively installed at both ends of the sintering furnace main body (1).