Infrared temperature measuring device

Abstract

The utility model provides an infrared temperature measuring device, comprising a chamber having a chamber wall and a cavity; an opening is formed in the cavity wall, and an isolation cover plate for infrared transmission is arranged at the opening; the cavity is in a vacuum state; the clamping assembly is located in the cavity and used for clamping a workpiece; the workpiece is heated by the heating assembly; the heating assembly is located in the cavity and used for emitting infrared radiation so as to heat the workpiece in a non-contact mode. And the infrared temperature measurement sensor is located on the side, away from the cavity, of the isolation cover plate and used for measuring the temperature of the workpiece. According to the infrared temperature measuring device provided by the utility model, high-accuracy temperature measurement of the workpiece can be realized on the basis of keeping high cleanliness of the workpiece, and a high-accuracy temperature measurement result is obtained.

Description

Technical Field

[0001] The utility model relates to the technical field of temperature measurement, in particular to an infrared temperature measurement device. Background Art

[0002] In the fields of high-tech manufacturing and precision engineering, the quality of products is often affected by various factors such as temperature and cleanliness in the production environment. For example, in the semiconductor manufacturing process, semiconductor wafers need to be baked at high temperature to remove moisture, metals, and organic pollutants. This process needs to be carried out in an environment with high temperature and high cleanliness to ensure product quality.

[0003] Therefore, in the industry, products are usually placed in a closed high-cleanliness environment, heated by a heating source, and the temperature of the products is measured by a sidewall thermocouple to determine whether the products reach the heat treatment conditions required for heating. However, the sidewall thermocouple is a contact-type temperature measurement tool, and it can accurately measure the surface temperature of the product only when it is in contact with the product. However, contacting the product not only pollutes the product surface but also causes uneven heating of the product surface. In the existing temperature measurement devices, the sidewall thermocouple is arranged around the product to achieve non-contact temperature measurement of the product. However, when the sidewall thermocouple is arranged around the product, it can only measure the temperature of the fluid in the environment, and there is a large error between the obtained temperature measurement result and the actual temperature of the product surface.

[0004] Based on this, there is an urgent need for a temperature measurement device that can accurately measure the temperature of products without contact. Summary of the Utility Model

[0005] In view of the above-mentioned disadvantages of the prior art, the purpose of the utility model is to provide an infrared temperature measurement device, which is used to solve the problem that the existing temperature measurement devices cannot accurately measure the temperature of products while maintaining high cleanliness of the products.

[0006] To achieve the above purpose and other related purposes, the utility model provides an infrared temperature measurement device, which includes:

[0007] A chamber, having a chamber wall and a cavity; an opening is provided on the chamber wall, and an isolation cover plate for infrared transmission is provided at the opening; the cavity is in a vacuum state;

[0008] A clamping assembly, located in the cavity, for clamping a workpiece; the workpiece is heated by a heating assembly;

[0009] An infrared temperature measurement sensor, located on the side of the isolation cover plate away from the cavity, for measuring the temperature of the workpiece.

[0010] In an embodiment of the utility model, the thickness of the isolation cover plate is less than or equal to 8 mm.

[0011] In an embodiment of the present utility model, the clamping assembly includes: a clamping member and a rotating member for driving the clamping member to rotate; a clamping end of the clamping member is used for clamping the workpiece, a fixed end of the clamping member is connected to one end of the rotating member, and the other end of the rotating member is connected to the cavity wall.

[0012] In an embodiment of the present utility model, the distance between the infrared temperature sensor and the workpiece is less than or equal to the effective detection distance of the infrared temperature sensor.

[0013] In an embodiment of the present utility model, the device further includes: a shielding assembly for receiving a shielding instruction and shielding the infrared radiation emitting surface of the heating assembly based on the shielding instruction.

[0014] In an embodiment of the present utility model, the shielding assembly includes: a fixed frame, a rotating member, and a driving motor; one end of the fixed frame is connected to the cavity wall, and the other end is rotatably connected to the shielding member through the rotating member; the driving motor is respectively connected to the rotating member and the control device, so that the driving motor receives the shielding instruction sent by the control device and drives the rotating member to rotate based on the shielding instruction.

[0015] In an embodiment of the present utility model, the driving component includes: a fixed frame, a rotating component, and a driving motor; one end of the fixed frame is connected to the cavity wall, and the other end is rotatably connected to the shielding member through the rotating member; the driving motor is respectively connected to the rotating member and the control device, so that the driving motor receives the shielding instruction sent by the control device and drives the rotating member to rotate based on the shielding instruction.

[0016] In an embodiment of the present utility model, the shielding area of the shielding member is greater than the radiation area to be shielded.

[0017] In an embodiment of the present utility model, the shielding member includes: a stainless steel plate.

[0018] In an embodiment of the present utility model, the device further includes: a control component; the control component is communicatively connected to the infrared temperature sensor and the shielding assembly, so that the control component controls the shielding assembly to shield the infrared radiation emitting surface of the heating assembly based on the shielding instruction; and so that the control component sends a control signal to the infrared temperature sensor to control the turning on and off of the infrared temperature sensor.

[0019] The infrared temperature measuring device provided by the present utility model has at least the following beneficial effects:

[0020] By providing an opening on the chamber wall of the chamber and sealing the opening with an isolation cover plate capable of projecting infrared radiation, a vacuum-sealed chamber with high cleanliness is formed with the chamber wall; and, by providing a clamping assembly located inside the chamber, using the clamping assembly to clamp the workpiece, and providing an infrared temperature sensor located outside the isolation cover plate, using the infrared temperature sensor to perform non-contact temperature measurement on the workpiece, high-accuracy temperature measurement of the workpiece is achieved while maintaining the high cleanliness of the workpiece, and a temperature measurement result with high accuracy can be obtained. Description of the Drawings

[0021] Figure 1 Shows a schematic structural diagram of an existing temperature measurement device.

[0022] Figure 2 Shows a schematic structural diagram of an infrared temperature measurement device provided by the present invention in the first embodiment.

[0023] Figure 3 Shows a schematic structural diagram of the infrared temperature measurement device provided by the present invention in the second embodiment.

[0024] Figure 4 Shows a schematic structural diagram of the infrared temperature measurement device provided by the present invention in the third embodiment.

[0025] Figure 5 Shows a schematic structural diagram of the infrared temperature measurement device provided by the present invention in the fourth embodiment.

[0026] Figure 6 Shows a schematic structural diagram of the infrared temperature measurement device provided by the present invention in the fifth embodiment.

[0027] Explanation of the Reference Numerals in the Drawings

[0028] A Existing temperature measurement device

[0029] A1 Sealed chamber

[0030] A2 Fixture

[0031] A3 Heating source

[0032] A4 Sidewall thermocouple

[0033] B Workpiece

[0034] 1 Chamber

[0035] 11 Chamber wall

[0036] 111 Isolation cover plate

[0037] 12 Cavity

[0038] 2 Clamping Assembly

[0039] 21 Clamping Component

[0040] 22 Rotating Component

[0041] 3 Infrared Temperature Sensor

[0042] 4 Heating Assembly

[0043] 5 Shielding Assembly

[0044] 51 Shielding Component

[0045] 52 Driving Component

[0046] 521 Fixed Bracket

[0047] 522 Rotating Component

[0048] 6 Control Assembly Detailed Implementation Manner

[0049] The following uses specific specific examples to illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model.

[0050] It should be noted that the structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in this technology to understand and read, and are not used to limit the limiting conditions under which the present utility model can be implemented. Therefore, they do not have technical essential meanings. Any modification of the structure, change of the proportional relationship, or adjustment of the size should still fall within the scope that can be covered by the technical content disclosed by the present utility model without affecting the effects that the present utility model can produce and the purposes that can be achieved. At the same time, the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear narration and are not used to limit the scope under which the present utility model can be implemented. The change or adjustment of their relative relationships should also be regarded as the scope under which the present utility model can be implemented without substantial change in the technical content.

[0051] The following will describe the embodiments of the present application in detail with reference to the drawings. Without conflict, the features in the following embodiments and implementation manners can be combined with each other.

[0052] Please refer to Figure 1 , which shows the structural schematic diagram of an existing temperature measuring device;

[0053] Such as Figure 1As shown, the existing temperature measuring device A includes: a sealed chamber A1, a fixture A2, a heating source A3, and a sidewall thermocouple A4; to prevent the sidewall thermocouple A4 from directly contacting the workpiece B and causing contamination to the surface of the workpiece B, the existing temperature measuring device A connects the sidewall thermocouple A4 to the sealed cavity A1, achieving non-contact temperature measurement of the workpiece B. However, since the sidewall thermocouple A4 measures the temperature of the fluid inside the sealed chamber A1, the temperature measurement result obtained by the existing temperature measuring device A has a large deviation from the actual temperature of the surface of the workpiece B, and an accurate product surface temperature cannot be obtained.

[0054] Based on the defects of the above-mentioned existing technology, the present application provides an infrared temperature measuring device. By providing an opening on the chamber wall of the chamber and using an isolation cover plate capable of projecting infrared radiation to seal the opening, a vacuum enclosed chamber with high cleanliness is formed with the chamber wall; and, by providing a clamping assembly located inside the chamber, using the clamping assembly to clamp the workpiece, and providing an infrared temperature sensor located outside the isolation cover plate, using the infrared temperature sensor to perform non-contact temperature measurement on the workpiece, high-accuracy temperature measurement of the workpiece is achieved while maintaining the high cleanliness of the workpiece, and a temperature measurement result with high accuracy can be obtained.

[0055] Please refer to Figure 2 , which shows a schematic structural diagram of an infrared temperature measuring device provided by the present invention in the first embodiment;

[0056] As Figure 2 shown, the infrared temperature measuring device provided by the present application includes: a chamber 1, a clamping assembly 2, and an infrared temperature sensor 3; wherein,

[0057] The chamber 1 has a chamber wall 11 and a cavity 12; an opening is provided on the chamber wall 11, and an isolation cover plate 111 for infrared transmission is provided at the opening; the isolation cover plate 111 seals the opening and forms a sealed vacuum cavity 12 with the chamber wall 11;

[0058] The clamping assembly 2 is located in the cavity 12 and is used for clamping the workpiece B; the workpiece B is heated by a heating assembly 4; the heating assembly 4 is located in the cavity 12 and is used for emitting infrared radiation to heat the workpiece B in a non-contact manner;

[0059] The infrared temperature sensor 3 is located on the side of the isolation cover plate 111 away from the cavity 12 and is used for measuring the temperature of the workpiece B.

[0060] Specifically, the clamping assembly 2 clamps the workpiece, and the heating assembly 4 emits infrared radiation to heat the workpiece B. When it is necessary to measure the temperature of the workpiece B, the infrared temperature sensor 3 is turned on so that the infrared temperature sensor 3 can receive the infrared radiation on the surface of the workpiece B to measure the temperature of the workpiece B and obtain the temperature measurement result.

[0061] Optionally, the isolation cover plate 111 includes: infrared transmissive isolation glass, etc.

[0062] Optionally, the material of the infrared transmissive isolation glass includes: germanium glass or zinc selenide glass.

[0063] In a specific embodiment, when the wavelength of the infrared radiation is 7μm - 14μm, the infrared transmittance of the isolation cover plate 111 is greater than 90%.

[0064] Preferably, the thickness of the isolation cover plate 111 does not exceed 8 mm; in this embodiment, considering the transmission efficiency and the limit that the laser can penetrate at the position of some infrared temperature sensors, the thickness of the isolation cover plate 111 does not exceed 8 mm.

[0065] Optionally, as Figure 3 shown, the clamping assembly 2 includes: a clamping member 21 installed in the chamber 1; the clamping end of the clamping member 21 is used to clamp the workpiece B, and the fixed end of the clamping member 21 is connected to the chamber wall 11 for installing the clamping assembly 2 in the chamber 1.

[0066] Optionally, the clamping assembly 2 further includes: a rotating member 22; one end of the rotating member 22 is connected to the fixed end of the clamping member 21 to drive the clamping member 21 to rotate, and the other end is connected to the chamber wall 11 for installing the clamping assembly 2 in the chamber 1; in this embodiment, by setting the rotating member 22 in the clamping assembly 2, during the heating process, the clamped workpiece can be rotated to be heated, and the heating degree is more uniform. During the temperature measurement process, the infrared temperature sensor 3 can measure the temperature of each area on the surface of the clamped workpiece to accurately obtain the surface temperature of the workpiece.

[0067] Optionally, the clamping member 21 includes: a pneumatic gripper and / or an electric gripper, etc.

[0068] Optionally, the rotating member 22 includes: a motor and / or a crank rocker, etc.

[0069] Optionally, the clamping assembly 2 and the heating assembly 4 are arranged opposite to each other so that the workpiece clamped by the clamping assembly 2 can receive the infrared radiation emitted by the heating assembly 4.

[0070] Optionally, the opening is provided at a relative position of the clamping assembly 2 and is not blocked by the heating assembly 4, so that the infrared temperature sensor 3 can receive the infrared radiation on the surface of the workpiece without obstruction through the isolation cover plate 111 at the opening, realizing the temperature measurement of the workpiece.

[0071] It should be noted that the positional relationship between the clamping assembly 2 and the heating assembly 4 only needs to satisfy that the workpiece clamped by the clamping assembly 2 can receive the infrared radiation emitted by the heating assembly 4, and no limitation is made here; and, the positional relationship between the opening and the heating assembly 4 only needs to satisfy that the opening is not blocked by the heating assembly 4, and the positional relationship between the opening and the clamping assembly 2 only needs to satisfy that the infrared temperature sensor 3 can receive the infrared radiation of the workpiece clamped by the clamping assembly 2 at the opening to measure the temperature of the workpiece B, and no limitation is made here.

[0072] Optionally, the distance between the infrared temperature sensor 3 and the workpiece is less than or equal to the effective temperature measurement distance of the infrared temperature sensor 3.

[0073] Exemplarily, the effective temperature measurement distance is 2000 mm.

[0074] Optionally, the heating assembly 4 includes: a heating component installed in the chamber 1; the heating end of the heating component is used for non-contact heating of the workpiece, and the fixed end of the heating component is connected to the chamber wall for installing the heating assembly 4 in the chamber 1.

[0075] Optionally, the heating assembly 4 further includes: a swinging component; the swinging end of the swinging component is connected to the fixed end of the heating component for driving the heating component to swing, and the fixed end of the swinging component is connected to the chamber wall for installing the heating assembly 4 in the chamber 1; in this embodiment, by providing the swinging component in the heating assembly 4, the angle of the infrared radiation emission surface of the heating assembly 4 can be adjusted to uniformly heat the workpiece B.

[0076] Optionally, the swinging component includes: a swinging cylinder, etc.

[0077] In a specific embodiment, the swinging component includes: a first rotating shaft and a second rotating shaft; one end of the first rotating shaft is connected to the heating component, and the other end is rotatably connected to one end of the second rotating shaft, and the other end of the second rotating shaft is connected to the chamber wall 11.

[0078] Optionally, the first rotating shaft and the second rotating shaft are rotatably connected through gears, insertion rods, and / or central connectors.

[0079] An infrared temperature measuring device provided by the above embodiment forms a closed chamber with high cleanliness by setting an opening on the chamber wall of the chamber and sealing the opening with an isolation cover plate capable of projecting infrared radiation, and forming a closed chamber with the chamber wall; and, by setting a clamping assembly located in the chamber, clamping the workpiece with the clamping assembly, and setting an infrared temperature measuring sensor located outside the isolation cover plate, non-contact temperature measurement of the workpiece is performed with the infrared temperature measuring sensor, realizing high-accuracy temperature measurement of the workpiece on the basis of maintaining high cleanliness of the workpiece, and a temperature measurement result with high accuracy can be obtained.

[0080] Based on the infrared temperature measuring device provided by the above embodiment, since the main advantage of the infrared temperature measuring sensor lies in non-contact, it will not cause any physical contact or damage to the surface of the workpiece during the temperature measurement process, which is beneficial to maintaining the high cleanliness of the workpiece. However, since the infrared temperature measuring sensor measures the temperature of the workpiece by collecting infrared radiation, and during the temperature measurement process, the workpiece is still receiving infrared radiation emitted by the heating component, it is easily interfered by the infrared radiation emitted by the heating component in the environment, affecting the accuracy of the temperature measurement result of the product. To solve the above problems, the present application also provides an infrared temperature measuring device capable of blocking the heating component in the second aspect to solve the problem that the infrared temperature measuring sensor is easily affected by other heat sources, resulting in a low accuracy rate of the measured temperature result.

[0081] Please refer to Figure 4 , which shows a schematic structural diagram of an infrared temperature measuring device provided by the present application in the third embodiment;

[0082] Optionally, as Figure 4 shown, the device further includes: a shielding assembly 5, located in the cavity, for receiving a shielding instruction, and based on the shielding instruction, shielding the infrared radiation emitting surface of the heating component 4.

[0083] The shielding assembly 5 is used to receive a shielding instruction and, based on the shielding instruction, shield the infrared radiation emitting surface of the heating component 4.

[0084] Specifically, after the shielding assembly 5 receives the shielding instruction, based on the shielding instruction, it shields the infrared radiation emitting surface of the heating component 4; after the infrared radiation emitting surface of the heating component 4 is shielded, the infrared temperature measuring sensor 3 is turned on, so that the infrared temperature measuring sensor 3 receives the infrared radiation on the surface of the workpiece B, measures the temperature of the workpiece B, and obtains a temperature measurement result.

[0085] Optionally, the shielding component 5 includes: a shielding member 51 and a driving member 52; the shielding member 51 and the driving member 52; the shielding member 51 is connected to the driving end of the driving member 52, the fixed end of the driving member 52 is connected to the cavity wall 11, the shielding member 51 is used to shield infrared radiation, and the driving member 52 is connected to a control device for receiving a shielding instruction sent by the control device and driving the shielding member to move based on the shielding instruction.

[0086] Optionally, the shielding member 51 includes: a stainless steel plate, etc.

[0087] Optionally, the thickness of the stainless steel plate is 2 mm or more.

[0088] Optionally, the shielding area of the shielding member 51 is larger than the radiation area to be shielded.

[0089] Optionally, the driving member 52 includes: a fixing bracket 521, a rotating member 522, and a driving motor (not shown); one end of the fixing bracket 521 is connected to the cavity wall 11, and the other end is rotatably connected to the shielding member 51 through the rotating member 522; the driving motor is respectively connected to the rotating member 522 and the control device for receiving a shielding instruction sent by the control device and driving the rotating member 522 to rotate based on the shielding instruction.

[0090] Optionally, the rotating member 522 includes: a rotating shaft or a gear, etc.

[0091] Optionally, as Figure 5 shown, the opening and the heating component 4 are both provided at relative positions of the clamping component, and the shielding component 5 is disposed between the opening and the heating component 4 so that after the shielding component 5 receives the shielding instruction, it shields the infrared radiation emitting surface of the heating component 4 based on the shielding instruction; in this embodiment, by disposing the shielding component 5 between the opening and the heating component 4, while not affecting the infrared temperature sensor 3 from measuring the temperature of the workpiece, a compact design of the device is achieved, and the overall volume of the device is reduced.

[0092] It should be noted that when the heating component is turned off to avoid the influence of the heating component on the temperature measurement of the infrared temperature sensor, since there will be a relatively long cooling time after the heating component stops heating, during the cooling time, the heating component will still generate a large amount of infrared radiation, resulting in the continuous reception of infrared radiation on the surface of the workpiece. Therefore, only by turning off the heating component will still affect the temperature measurement accuracy of the infrared temperature sensor; and after the heating component has cooled down, measuring the temperature of the workpiece will be unable to obtain the true heat treatment temperature of the workpiece due to the too long cooling time of the workpiece itself; in summary, the method of blocking the heating component can be adopted to avoid the influence of the heating component on the temperature measurement of the infrared temperature sensor, and / or the heating component can be turned off while blocking the heating component.

[0093] In this embodiment, the provided infrared temperature sensor is provided with a shielding component in the chamber. When temperature measurement is required, the shielding component is controlled to shield the infrared radiation emitting surface of the heating component, so as to avoid the influence of the heating component on the temperature measurement of the infrared temperature sensor during the temperature measurement process. After the heating component is shielded, the infrared temperature sensor is used to measure the temperature of the workpiece, further improving the temperature measurement accuracy of the workpiece.

[0094] Please refer to Figure 6 , which shows a schematic structural diagram of an infrared temperature measuring device provided by the present application in another embodiment;

[0095] Optionally, as Figure 6 shown, the device further includes: a control component 6; the control component 6 is respectively communicatively connected to the infrared temperature sensor 3 and the shielding component 5, and is used to control the operation of the infrared temperature sensor 3 and the shielding component 5.

[0096] Specifically, the control component 6 receives a control signal, and based on the control signal, sends a first shielding instruction to the shielding component 5. The shielding component 5 shields the infrared radiation emitting surface of the heating component 4 based on the shielding instruction, and sends a shielding completion signal to the control component 6. After receiving the shielding completion signal, the control component 6 sends a temperature measurement start signal to the infrared temperature sensor 3; the infrared temperature sensor 3 receives the infrared radiation on the surface of the workpiece, measures the temperature of the workpiece B, and obtains a temperature measurement result.

[0097] Optionally, the control component 6 is communicatively connected to the heating component 4 to obtain the heating duration of the heating component 4, detect whether the heating duration is greater than or equal to a preset heating duration, and if so, send the occlusion instruction to the occlusion component 5. Based on the occlusion instruction, the occlusion component 5 occludes the infrared radiation emission surface of the heating component 4 and sends an occlusion completion signal to the control component 6. After receiving the occlusion completion signal, the control component 6 sends a temperature measurement start signal to the infrared temperature sensor 3 for the infrared temperature sensor 3 to start receiving the infrared radiation on the surface of the workpiece, measure the temperature of the workpiece, and obtain a temperature measurement result.

[0098] Optionally, the control component 6 includes: an MCU or a controller, etc.

[0099] Optionally, after the infrared temperature sensor 3 obtains the temperature measurement result, it sends the temperature measurement result to the control component 6. Based on the temperature measurement result, the control component 6 determines whether the heating temperature of the workpiece B reaches a preset heating temperature. If not, it sends an end occlusion instruction to the occlusion component 5 and a temperature measurement end signal to the infrared temperature sensor 3. After receiving the temperature measurement end signal, the infrared temperature sensor 3 automatically shuts down the temperature measurement; the occlusion component 5 moves based on the end occlusion instruction to expose the infrared radiation emission surface of the heating component 4 for the heating component 4 to continue heating the workpiece.

[0100] Optionally, the control component 6 is communicatively connected to an external control device to receive a control signal from the external control device and control the operation of each component based on the control signal.

[0101] Optionally, the control component 6 has a built-in control program and controls the operation of each component based on the control program.

[0102] Optionally, the control component 6 is communicatively connected to the clamping component 2 to control the rotation of the clamping component 2.

[0103] It should be noted that the clamping component, the heating group, the infrared temperature sensor, and the occlusion component can also be communicatively connected to an external control device, and the external control device is used to control the operation of each component.

[0104] In this embodiment, the provided infrared temperature sensor realizes automatic temperature measurement of the workpiece by setting the control component to be communicatively connected to the infrared temperature sensor, the heating component, and the occlusion component respectively, so that the control component can obtain the heating duration of the heating component. When the heating duration reaches the preset heating duration, the control component controls the occlusion component to occlude the infrared radiation emission surface of the heating component and controls the infrared temperature sensor to measure the temperature of the workpiece, improving the intelligence of the device.

[0105] In summary, for the infrared temperature measuring device provided by the present utility model, an opening is provided on the chamber wall of the chamber, and the opening is sealed by an isolation cover plate capable of projecting infrared radiation to form a vacuum enclosed chamber with high cleanliness with the chamber wall; and, by providing a clamping assembly located inside the chamber, the workpiece is clamped by the clamping assembly, and an infrared temperature measuring sensor is provided outside the isolation cover plate, and the workpiece is non-contact temperature measured by the infrared temperature measuring sensor, so as to achieve high-accuracy temperature measurement of the workpiece on the basis of maintaining high cleanliness of the workpiece, and a temperature measurement result with high accuracy can be obtained; and, the device is provided with a shielding assembly, and when temperature measurement is required, the infrared radiation emitting surface of the heating assembly is shielded to avoid the influence of the heating assembly on the temperature measurement of the infrared temperature measuring sensor during the temperature measurement process, further improving the temperature measurement accuracy of the workpiece; and, by providing a control assembly respectively communicatively connected to the infrared temperature measuring sensor and the shielding assembly to coordinately control the operation of the infrared temperature measuring sensor and the shielding assembly, automatic temperature measurement of the workpiece is achieved. Therefore, the present utility model effectively overcomes various disadvantages in the prior art and has high industrial utilization value.

[0106] The above embodiments are only illustrative of the principles and effects of the present utility model, and are not intended to limit the present utility model. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present utility model. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present utility model should still be covered by the claims of the present utility model.

Claims

1. An infrared temperature measuring device, characterized in that, Comprising: A chamber having a chamber wall and a cavity; an opening is provided on the chamber wall, and an isolation cover plate for infrared transmission is provided at the opening; The cavity is in a vacuum state; A clamping assembly located in the cavity for clamping a workpiece; the workpiece is heated by a heating assembly; An infrared temperature sensor located on the side of the isolation cover plate away from the cavity for measuring the temperature of the workpiece.

2. The device according to claim 1, wherein The thickness of the isolation cover plate is less than or equal to 8 mm.

3. The device according to claim 1, characterized in that The clamping assembly includes: a clamping member and a rotating member for driving the clamping member to rotate; the clamping end of the clamping member is used for clamping the workpiece, the fixed end of the clamping member is connected to one end of the rotating member, and the other end of the rotating member is connected to the chamber wall.

4. The device according to claim 1, characterized in that The distance between the infrared temperature sensor and the workpiece is less than or equal to the effective detection distance of the infrared temperature sensor.

5. The device according to claim 1, characterized in that, The device further includes: a shielding assembly for receiving a shielding instruction and shielding the infrared radiation emitting surface of the heating assembly based on the shielding instruction.

6. The device according to claim 5, characterized in that, The shielding assembly includes: a shielding member and a driving member; the shielding member is connected to the driving end of the driving member, the fixed end of the driving member is connected to the chamber wall, the shielding member is used for shielding infrared radiation, and the driving member is connected to a control device for receiving the shielding instruction sent by the control device and driving the shielding member to move based on the shielding instruction.

7. The device according to claim 6, characterized in that, The driving member includes: a fixed frame, a rotating member and a driving motor; one end of the fixed frame is connected to the chamber wall, and the other end is rotatably connected to the shielding member through the rotating member; the driving motor is respectively connected to the rotating member and the control device for the driving motor to receive the shielding instruction sent by the control device and drive the rotating member to rotate based on the shielding instruction.

8. The device according to claim 6, characterized in that, The shielding area of the shielding member is greater than the radiation area to be shielded.

9. The device according to claim 6, characterized in that, The shielding member includes: a stainless steel plate.

10. The device according to claim 5, characterized in that The device further includes: a control component; the control component is communicatively connected to the infrared temperature sensor and the shielding assembly for the control component to control the shielding assembly to shield the infrared radiation emitting surface of the heating assembly based on a shielding instruction; and for the control component to send a control signal to the infrared temperature sensor to control the on and off of the infrared temperature sensor.

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